Exhaust device for a cleaning apparatus and cleaning apparatus

Abstract

The utility model discloses a kind of exhaust device and cleaning equipment for cleaning equipment, wherein exhaust device includes exhaust pipe, detection component and cleaning component, exhaust pipe is used to connect cleaning equipment;Detection component includes connector, air pressure sensor and first connecting pipe, connector is set on exhaust pipe, one end of connector extends to exhaust pipe, one end of first connecting pipe is connected with air pressure sensor, first connecting pipe is communicated with exhaust pipe by connector;Cleaning component includes air pump, second connecting pipe and three-way valve, air pump is connected with second connecting pipe, second connecting pipe is connected with first connecting pipe by three-way valve.The utility model for cleaning equipment of exhaust device is set through cleaning component, so that gas generated by air pump can be blown to connector by second connecting pipe, water droplet formed on the inner side wall of the inlet end of connector is automatically cleaned, avoid the interference of water droplet to air pressure sensor, effectively guarantee the accuracy and stability of air pressure sensor.

Description

Technical Field

[0001] This utility model relates to the field of panel production equipment technology, and in particular to an exhaust device and a cleaning device for cleaning equipment. Background Technology

[0002] During the production process of display panels, cleaning equipment is typically used to remove dirt or tiny particulate dust and other impurities left on the surface of the display panel in order to ensure the surface cleanliness of the display panel.

[0003] Currently, the existing cleaning equipment includes a cleaning chamber 1', an ultrasonic cleaning head 2', a spray head 3', and an exhaust pipe 4' connected to the cleaning chamber 1'. The ultrasonic cleaning head 2' and the spray head 3' are spaced apart along the conveying direction, with the spray head 3' located behind the ultrasonic cleaning head 2' along the conveying direction. An air outlet 21' is provided inside the ultrasonic cleaning head 2'. The ultrasonic waves generated inside the ultrasonic cleaning head 2' are blown onto the display panel 100' inside the cleaning chamber 1' along with the gas ejected from the air outlet 21' to remove impurities. The gas is then discharged through the exhaust pipe 4'. The spray head 3' is used to wash the display panel 100', achieving secondary cleaning. To ensure stable air pressure and gas flow within the cleaning chamber 1', a connector 5' is provided on the exhaust pipe 4'. The connector 5' is connected to a pressure sensor 7' via a connecting pipe 6' to detect changes in air pressure within the exhaust pipe 4' in real time. The existing technology has the following defects: Since the gas discharged from the exhaust pipe 4′ contains water mist, after the equipment has been used for a period of time, the water mist is easy to form water droplets on the inner side wall of the inlet end of the connector 5′. The presence of water droplets can easily affect the detection accuracy of the pressure sensor 7′, affect the detection results, or even cause the detection results to exceed the set threshold and trigger an alarm shutdown. Utility Model Content

[0004] The purpose of this invention is to provide an exhaust device and a cleaning device for cleaning equipment. The structure is simple, and the cleaning components can effectively remove water droplets inside the connector, ensuring the detection accuracy of the air pressure sensor.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] In a first aspect, an exhaust device for a cleaning equipment is provided, comprising an exhaust pipe, a detection component, and a cleaning component. The exhaust pipe is used to connect to the cleaning equipment. The detection component includes a connector, a pressure sensor, and a first connecting pipe. The connector is disposed on the exhaust pipe, with one end extending into the exhaust pipe. The pressure sensor is spaced apart on one side of the exhaust pipe. One end of the first connecting pipe is connected to the pressure sensor, and the end of the first connecting pipe away from the pressure sensor is connected to the exhaust pipe through the connector. The cleaning component includes an air pump, a second connecting pipe, and a three-way valve. The air pump is spaced apart on one side of the exhaust pipe and is connected to the second connecting pipe. The end of the second connecting pipe away from the air pump is connected to the first connecting pipe through the three-way valve.

[0007] In one embodiment, the exhaust pipe is connected to the lower part of the cleaning device, and the length of the exhaust pipe extends vertically, with the connector angled downward from one end adjacent to the first connecting pipe toward the end away from the first connecting pipe.

[0008] In one embodiment, the connector is detachably connected to the exhaust pipe; and / or,

[0009] The first connecting pipe is detachably connected to the connector.

[0010] In one embodiment, the length of the exhaust pipe extends vertically, and the connector includes a first pipe segment and a second pipe segment arranged at an angle. The first pipe segment passes through the exhaust pipe and is sealed to the exhaust pipe. A first connecting pipe is connected to the first pipe segment, and the second pipe segment is connected to the end of the first pipe segment away from the first connecting pipe. The length of the second pipe segment extends vertically, and the end of the second pipe segment away from the first pipe segment is located below the first pipe segment.

[0011] In one embodiment, the first pipe segment and the second pipe segment are arranged at an obtuse angle.

[0012] In one embodiment, the end of the connector away from the first connecting pipe has an air inlet, and the diameter of the air inlet gradually increases from the end adjacent to the first connecting pipe toward the end away from the first connecting pipe.

[0013] In one embodiment, the inner wall of the connector is provided with a water-resistant coating.

[0014] In one embodiment, the exhaust device for cleaning equipment includes two sets of the detection components and two sets of the cleaning components, with each set of detection components corresponding to one set of cleaning components, and the connectors of the two sets of detection components are spaced apart along the length of the exhaust pipe; and / or,

[0015] The cleaning equipment has multiple cleaning chambers arranged horizontally. Each cleaning chamber is connected to at least one exhaust pipe. Each exhaust pipe is connected to a set of detection components. The connector of each set of detection components is connected to a second connecting pipe. All the second connecting pipes are connected to the same air pump.

[0016] In one embodiment, the cleaning assembly further includes a hot air box, which is disposed on the second connecting pipe. A heating element is disposed inside the hot air box, and the heating element is capable of heating the gas flowing through the second connecting pipe at the hot air box.

[0017] Secondly, a cleaning device is provided, including a cleaning chamber, an ultrasonic cleaning head, a spray head, and the aforementioned exhaust device for the cleaning device. The cleaning chamber has a cleaning cavity, and the ultrasonic cleaning head and the spray head are spaced apart within the cleaning cavity. The ultrasonic cleaning head can spray ultrasonic gas to clean a display panel conveyed in the cleaning cavity, and the spray head can spray cleaning liquid to wash the display panel. The exhaust pipe of the exhaust device for the cleaning device is connected to the cleaning cavity.

[0018] The beneficial effects of this utility model are:

[0019] This utility model discloses an exhaust device for cleaning equipment. Through the setting of the cleaning component, the gas generated by the air pump can be blown towards the connector through the second connecting pipe, automatically cleaning the water droplets formed on the inner side wall of the inlet end of the connector. This avoids the water droplets interfering with the air pressure sensor, effectively ensuring the accuracy and stability of the air pressure sensor, thereby ensuring the accuracy of the detection results, preventing the air pressure sensor from misinterpreting air pressure changes and causing the equipment to falsely alarm and shut down, reducing unnecessary downtime during production, and thus ensuring the production efficiency of the equipment. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of an existing exhaust device used for cleaning equipment;

[0021] Figure 2 This is a schematic diagram of the structure of an exhaust device for a cleaning equipment according to an embodiment of the present invention;

[0022] Figure 3 This is a schematic diagram of the exhaust device for cleaning equipment according to another embodiment of the present invention;

[0023] Figure 4 yes Figure 3 An enlarged view of point A;

[0024] Figure 5 This is a structural schematic diagram of an exhaust device for a cleaning equipment according to another embodiment of the present invention.

[0025] Figure 1 middle:

[0026] 1′ Cleaning chamber; 2′ Ultrasonic cleaning head; 21′ Air outlet; 3′ Spray head; 4′ Exhaust pipe; 5′ Connector; 6′ Connecting pipe; 7′ Pressure sensor; 100′ Display panel;

[0027] Figures 2 to 5 middle:

[0028] 100. Cleaning chamber; 101. Cleaning cavity; 200. Ultrasonic cleaning head; 300. Spray head;

[0029] 1. Exhaust pipe; 2. Detection assembly; 21. Connector; 211. First pipe section; 212. Second pipe section; 213. Air inlet; 22. Air pressure sensor; 23. First connecting pipe; 3. Cleaning assembly; 31. Air pump; 32. Second connecting pipe; 33. Three-way valve; 4. Hot air box. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0031] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] like Figures 2 to 5 As shown, an exhaust device for cleaning equipment according to this embodiment includes an exhaust pipe 1, a detection component 2, and a cleaning component 3. The exhaust pipe 1 is used to connect to the cleaning equipment. The detection component 2 includes a connector 21, a pressure sensor 22, and a first connecting pipe 23. The connector 21 is disposed on the exhaust pipe 1, and one end of the connector 21 extends into the exhaust pipe 1. The pressure sensor 22 is spaced apart on one side of the exhaust pipe 1. One end of the first connecting pipe 23 is connected to the pressure sensor 22, and the end of the first connecting pipe 23 away from the pressure sensor 22 is connected to the exhaust pipe 1 through the connector 21. The cleaning component 3 includes an air pump 31, a second connecting pipe 32, and a three-way valve 33. The air pump 31 is spaced apart on one side of the exhaust pipe 1 and is connected to the second connecting pipe 32. The end of the second connecting pipe 32 away from the air pump 31 is connected to the first connecting pipe 23 through the three-way valve 33.

[0035] Understandably, by setting up the cleaning component 3, the gas generated by the air pump 31 can be blown towards the connector 21 through the second connecting pipe 32, automatically cleaning the water droplets formed on the inner wall of the inlet end of the connector 21, avoiding interference from the water droplets with the pressure sensor 22, effectively ensuring the accuracy and stability of the pressure sensor 22, thereby ensuring the accuracy of the detection results, preventing the pressure sensor 22 from misinterpreting pressure changes and causing the equipment to falsely alarm and shut down, reducing unnecessary downtime during production, and thus ensuring the production efficiency of the equipment.

[0036] Taking timed cleaning as an example, the specific operation process is as follows: the exhaust pipe 1 exhausts gas normally, and the air pressure sensor 22 is connected to the connector 21 through the first connecting pipe 23 to monitor the air pressure in the exhaust pipe 1 in real time. After a period of time, the valve connected to the air pressure sensor 22 by the three-way valve 33 is closed, the air pump 31 is started to generate high-pressure gas and transmit it to the connector 21 through the second connecting pipe 32 and the three-way valve 33, blowing the water droplets on the inner side wall of the inlet end of the connector 21 into the exhaust pipe 1 to ensure the cleanliness of the connector 21. Then the air pump 31 and the valve connecting the three-way valve 33 to the second connecting pipe 32 are closed, so that the air pressure sensor 22, the first connecting pipe 23, the three-way valve 33 and the connector 21 are connected.

[0037] In one embodiment, such as Figure 2 As shown, the exhaust pipe 1 is connected to the bottom of the cleaning equipment, and the length of the exhaust pipe 1 extends vertically (vertical direction is the Z direction shown in the figure). The connector 21 is inclined downward from the end adjacent to the first connecting pipe 23 toward the end away from the first connecting pipe 23. By tilting the connector 21 downward, some water droplets formed inside the connector 21 can flow under their own gravity and fall off the connector 21. Before the cleaning component 3 intervenes, the water droplets are actively guided and fall off, thereby reducing the impact on the air pressure sensor 22. At the same time, when the cleaning component 3 is in operation, it is convenient for high-pressure gas to blow the water droplets, so that the water droplets can fall down along the inner side wall of the inclined connector 21, thereby improving the cleaning effect of the connector 21.

[0038] Furthermore, the connector 21 is detachably connected to the exhaust pipe 1. On the one hand, compared to the production of a one-piece structure, the detachable connection improves the convenience of producing the connector 21 and the exhaust pipe 1 separately; on the other hand, it effectively improves the maintenance convenience of the connector 21, preventing the situation where impurities adhere to the inner wall of the exhaust pipe 1 after long-term use, making it difficult to clean. For example, the connector 21 has a tubular structure, and the outer peripheral wall of the connector 21 is provided with external threads. The outer peripheral wall of the exhaust pipe 1 has a threaded hole. The external threads mate with the threaded hole. By screwing the connector 21, the connector 21 passes through the threaded hole, making disassembly and assembly convenient.

[0039] Optionally, the first connecting pipe 23 and the connector 21 can be detachably connected to improve the ease of maintenance of the first connecting pipe 23 and the connector 21. For example, the end of the first connecting pipe 23 furthest from the pressure sensor 22 is fitted onto the connector 21 to achieve a convenient and quick connection between the first connecting pipe 23 and the connector 21. It should be noted that the detachable connection between the first connecting pipe 23 and the connector 21, and the detachable connection between the connector 21 and the exhaust pipe 1, must ensure airtightness to guarantee the detection accuracy of the pressure sensor 22.

[0040] In some embodiments, such as Figure 3 and Figure 4As shown, the exhaust pipe 1 extends vertically. The connector 21 includes a first pipe section 211 and a second pipe section 212 arranged at an angle. The first pipe section 211 passes through the exhaust pipe 1 and is sealed to the exhaust pipe 1. A first connecting pipe 23 is connected to the first pipe section 211. The second pipe section 212 is connected to the end of the first pipe section 211 away from the first connecting pipe 23. The length of the second pipe section 212 extends vertically, and the end of the second pipe section 212 away from the first pipe section 211 is located below the first pipe section 211. By setting the second pipe section 212 of the connector 21 at an angle to the first pipe section 211 and extending the length of the second pipe section 212 vertically, the portion of the connector 21 inside the exhaust pipe 1 maintains a certain length, preventing water droplets from flowing into the first connecting pipe 23 through the connector 21. At the same time, it also reduces the obstruction of airflow inside the exhaust pipe 1 by the connector 21, ensuring exhaust efficiency. Furthermore, the length of the second pipe section 212 extends vertically, and the water droplets formed by the condensation of water mist inside the second pipe section 212 can slide off due to their own gravity, so that the cleaning component 3 can automatically reduce the water droplets before intervention, thereby reducing the impact of water droplets on the air pressure sensor 22.

[0041] Furthermore, the first pipe segment 211 and the second pipe segment 212 are set at an obtuse angle. That is, based on the second pipe segment 212 extending in the vertical direction, the first pipe segment 211 is set inclined downward from the end adjacent to the first connecting pipe 23 toward the end away from the first connecting pipe 23. By setting the first pipe segment 211 inclined downward, the length of the connector 21 set downward inside the exhaust pipe 1 can be further extended, increasing the length of water droplets that can condense inside the connector 21, thereby increasing the length of water droplets that can slide down due to their own gravity.

[0042] Furthermore, such as Figures 2 to 5 As shown, the end of connector 21 furthest from the first connecting pipe 23 has an air inlet 213, the diameter of which gradually increases from the end adjacent to the first connecting pipe 23 toward the end furthest from it. Water mist mainly condenses at the air inlet 213. Therefore, by making the air inlet 213 funnel-shaped and increasing in size toward the end furthest from the first connecting pipe 23, the area of ​​gas flow at the air inlet 213 can be effectively guaranteed, reducing the resistance of airflow when passing through the air inlet 213. Even if water mist condenses on the cavity wall of the air inlet 213, the impact on gas pressure detection is small. At the same time, the inclined cavity wall can also guide the water droplets to slide off.

[0043] Preferably, the inner wall of the connector 21 is provided with a water-repellent coating. This coating further enhances the hydrophobicity of the inner wall of the connector 21, making it easier for water droplets condensed on the inner wall to slide off, thus improving cleaning convenience. The water-repellent coating can be a silane or siloxane coating, which has good weather resistance, high temperature resistance, and corrosion resistance.

[0044] In other embodiments, such as Figure 5 As shown, the exhaust device for cleaning equipment includes two sets of detection components 2 and two sets of cleaning components 3. Each set of detection components 2 is equipped with a corresponding set of cleaning components 3. The connectors 21 of the two sets of detection components 2 are spaced apart along the length of the exhaust pipe 1. By setting two sets of detection components 2 to detect simultaneously, the controller can compare and analyze the data to obtain the average value to obtain the air pressure information in the exhaust pipe 1, improving the accuracy of air pressure detection and avoiding errors caused by a single detection. Furthermore, when one set of air pressure detection data deviates, the other set of data can be used as the standard, or when one set of data deviates, the corresponding cleaning component 3 can be used to clean the connector 21 of that set of detection components 2, while the other set of air pressure sensors 22 continues to monitor, achieving cleaning without stopping the machine.

[0045] Furthermore, such as Figure 2 and Figure 3 As shown, the cleaning equipment has multiple cleaning chambers 101 arranged horizontally. Each cleaning chamber 101 is connected to at least one exhaust pipe 1, and each exhaust pipe 1 is connected to a set of detection components 2. The connector 21 of each set of detection components 2 is connected to a second connecting pipe 32, and all the second connecting pipes 32 are connected to the same air pump 31. By setting multiple cleaning chambers 101, the cleaning equipment can clean multiple display panels simultaneously, significantly improving cleaning efficiency. Furthermore, the independent exhaust pipe 1 and detection components 2 of each cleaning chamber 101 can precisely control the cleaning status of each cleaning unit, thereby ensuring that each display panel is thoroughly cleaned. All the second connecting pipes 32 are connected to the same air pump 31, enabling centralized control and management. The unified drive of the air pump 31 ensures airflow stability, avoids uneven airflow or inconvenient adjustment caused by multiple air sources, and improves system coordination and consistency. At the same time, reducing the number of air pumps 31 reduces equipment production costs and daily energy waste.

[0046] Furthermore, the cleaning component 3 also includes a hot air box 4. The hot air box 4 is installed on the second connecting pipe 32, and a heating element is installed inside the hot air box 4. The heating element can heat the gas flowing through the second connecting pipe 32 at the hot air box 4. By setting up the hot air box 4, the high-pressure gas generated by the air pump 31 can be heated by the hot air box 4 to form hot air, which is then delivered to the connector 21 to blow off the water droplets on the inner wall of the connector 21. At the same time, under the action of hot air, the evaporation of moisture on the inner wall of the connector 21 is accelerated, improving the dryness and cleanliness of the connector 21.

[0047] like Figures 2 to 5As shown, an embodiment of this utility model also provides a cleaning device, including a cleaning chamber 100, an ultrasonic cleaning head 200, a spray head 300, and the aforementioned exhaust device for the cleaning device. The cleaning chamber 100 is provided with a cleaning cavity 101. The ultrasonic cleaning head 200 and the spray head 300 are spaced apart in the cleaning cavity 101. The ultrasonic cleaning head 200 can spray ultrasonic gas to clean the display panel conveyed in the cleaning cavity 101, and the spray head 300 can spray cleaning liquid to wash the display panel. The exhaust pipe 1 of the exhaust device for the cleaning device is connected to the cleaning cavity 101.

[0048] Understandably, the cleaning equipment, through the cleaning component 3 in the exhaust device, enables the gas generated by the air pump 31 to be blown towards the connector 21 through the second connecting pipe 32, automatically cleaning the water droplets formed on the inner wall of the inlet end of the connector 21. This avoids the water droplets interfering with the air pressure sensor 22, effectively ensuring the accuracy and stability of the air pressure sensor 22, thereby ensuring the accuracy of the detection results and preventing the air pressure sensor 22 from misinterpreting air pressure changes and causing the equipment to falsely alarm and shut down. This reduces unnecessary downtime during production, thus ensuring the production efficiency of the cleaning equipment.

[0049] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An exhaust device for cleaning equipment, characterized in that, include: An exhaust pipe, used for connecting to cleaning equipment; The detection component includes a connector, a pressure sensor, and a first connecting pipe. The connector is disposed on the exhaust pipe, and one end of the connector extends into the exhaust pipe. The pressure sensors are spaced apart on one side of the exhaust pipe. One end of the first connecting pipe is connected to the pressure sensor, and the end of the first connecting pipe away from the pressure sensor communicates with the exhaust pipe through the connector. A cleaning assembly includes an air pump, a second connecting pipe, and a three-way valve. The air pump is spaced apart on one side of the exhaust pipe and is connected to the second connecting pipe. The end of the second connecting pipe away from the air pump is connected to the first connecting pipe through the three-way valve.

2. The exhaust device for cleaning equipment according to claim 1, characterized in that, The exhaust pipe is connected to the bottom of the cleaning equipment, and the length of the exhaust pipe extends vertically. The connector is inclined downward from the end adjacent to the first connecting pipe toward the end away from the first connecting pipe.

3. The exhaust device for cleaning equipment according to claim 2, characterized in that, The connector is detachably connected to the exhaust pipe; and / or The first connecting pipe is detachably connected to the connector.

4. The exhaust device for cleaning equipment according to claim 1, characterized in that, The length of the exhaust pipe extends vertically, and the connector includes a first pipe section and a second pipe section arranged at an angle. The first pipe section passes through the exhaust pipe and is sealed to the exhaust pipe. The first connecting pipe is connected to the first pipe section, and the second pipe section is connected to the end of the first pipe section away from the first connecting pipe. The length of the second pipe section extends vertically, and the end of the second pipe section away from the first pipe section is located below the first pipe section.

5. The exhaust device for cleaning equipment according to claim 4, characterized in that, The first pipe section and the second pipe section are set at an obtuse angle.

6. The exhaust device for cleaning equipment according to any one of claims 1 to 5, characterized in that, The connector has an air inlet at the end away from the first connecting pipe, and the diameter of the air inlet gradually increases from the end adjacent to the first connecting pipe toward the end away from the first connecting pipe.

7. The exhaust device for cleaning equipment according to any one of claims 1 to 5, characterized in that, The inner wall of the connector is provided with a water-resistant coating.

8. The exhaust device for cleaning equipment according to any one of claims 1 to 5, characterized in that, The exhaust device for the cleaning equipment includes two sets of detection components and two sets of cleaning components, with each set of detection components corresponding to one set of cleaning components. The connectors of the two sets of detection components are spaced apart along the length of the exhaust pipe; and / or, The cleaning equipment has multiple cleaning chambers arranged horizontally. Each cleaning chamber is connected to at least one exhaust pipe. Each exhaust pipe is connected to a set of detection components. The connector of each set of detection components is connected to a second connecting pipe. All the second connecting pipes are connected to the same air pump.

9. The exhaust device for cleaning equipment according to any one of claims 1 to 5, characterized in that, The cleaning assembly also includes a hot air box, which is installed on the second connecting pipe. A heating element is installed inside the hot air box, which can heat the gas flowing through the second connecting pipe at the hot air box.

10. A cleaning device, characterized in that, The device includes a cleaning chamber, an ultrasonic cleaning head, a spray head, and an exhaust device for cleaning equipment as described in any one of claims 1 to 9. The cleaning chamber has a cleaning cavity, the ultrasonic cleaning head and the spray head are spaced apart in the cleaning cavity, the ultrasonic cleaning head can spray ultrasonic gas to clean the display panel conveyed in the cleaning cavity, the spray head can spray cleaning liquid to wash the display panel, and the exhaust pipe of the exhaust device for cleaning equipment is connected to the cleaning cavity.

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