A cleaning seat centering device and a single crystal furnace sub-chamber cleaner

Abstract

The utility model provides a kind of clean seat centering device and single crystal furnace auxiliary chamber cleaner, it is related to single crystal silicon production manufacturing technical field, the device includes the fixed seat that can set cleaning part, at least two clamping components are uniformly arranged in the fixed seat periphery, the clamping component includes the ejector rod for being resisted with single crystal furnace weight along the radial direction of fixed seat, the ejector rod is elastically connected with the fixed seat, the ejector rod can elastically move along the radial direction of the fixed seat.The cleaner includes cleaning part, the cleaning part is set to the periphery of the fixed seat of clean seat centering device, the cleaning part can clean single crystal furnace auxiliary chamber inner wall.The utility model has the beneficial effect that it avoids the problem that cleaning part is inclined and difficult to be accurately aligned with auxiliary chamber entrance, cannot smoothly enter auxiliary chamber and component is knocked due to inclination, no need manual repeated adjustment when using, significantly save manpower and time cost.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production and manufacturing technology, and in particular to a cleaning seat centering device and a cleaning device for the auxiliary chamber of a monocrystalline furnace. Background Technology

[0002] During the silicon rod production process, the auxiliary chamber of the single crystal furnace needs to be cleaned regularly to ensure production quality.

[0003] In the prior art, the Chinese utility model patent entitled "A Single Crystal Furnace Sub-chamber Cleaner," with application number CN202320955911.4 and publication number CN219581290U, can achieve rapid cleaning of the inner wall of the sub-chamber, reduce the labor intensity of operators, and improve the effective utilization rate of working hours. However, the applicant has found that it has the following obvious defects when actually applied to a single crystal furnace:

[0004] When the cleaner is lifted by the counterweight, if the cleaner is not placed correctly on the trolley, or if the counterweight swings due to external force, the cleaner may tilt and rise. The tilted cleaner is difficult to align precisely with the entrance of the auxiliary chamber and cannot enter the auxiliary chamber smoothly. It is necessary to manually lower the cleaner and readjust its position. Such repeated operations not only waste a lot of manpower and time, but also seriously affect the overall efficiency of the current 210mm silicon rod and subsequent G12R silicon wafer production.

[0005] Therefore, there is an urgent need for a cleaning seat centering device and a single crystal furnace auxiliary chamber cleaner to solve the above-mentioned technical problems. Utility Model Content

[0006] The purpose of this invention is to provide a cleaning seat centering device and a single crystal furnace auxiliary chamber cleaner to solve the technical problem in the prior art where existing single crystal furnace auxiliary chamber cleaners cannot smoothly enter the auxiliary chamber, affecting cleaning efficiency. The various technical effects of the preferred solutions among the many technical solutions provided by this invention are detailed below.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] This utility model provides a cleaning seat centering device, including a fixed seat capable of setting a cleaning component. At least two clamping components are evenly arranged in the inner circumference of the fixed seat. Each clamping component includes a push rod for abutting against the single crystal furnace counterweight in the radial direction of the fixed seat. The push rod is elastically connected to the fixed seat and can move elastically in the radial direction of the fixed seat.

[0009] Preferably, the push rod is slidably connected to the fixed base in the radial direction along the fixed base.

[0010] Preferably, the clamping assembly further includes a fixed sleeve and a spring, the fixed sleeve being fixedly disposed on the side wall of the fixed seat; the push rod being slidably connected to the fixed sleeve, the end of the push rod near the central axis of the fixed seat extending out of the fixed sleeve in the radial direction of the fixed seat; the spring being disposed between the push rod and the side wall of the fixed seat, or the spring being disposed between the push rod and the fixed sleeve.

[0011] Preferably, the side wall of the fixing seat has a groove structure, and at least a portion of the top rod is located in the groove structure and is slidably connected to the groove structure.

[0012] Preferably, the groove structure has an opening on the outer wall of the fixing seat, and the end of the top rod extends out of the fixing seat through the opening.

[0013] Preferably, the slot structure is provided with circumferentially spaced locking blocks, and a slot is formed between two adjacent locking blocks. The top rod is provided with a stop bar, and the locking block is provided with a blocking surface on the side away from the central axis of the fixed seat. The stop bar can move with the top rod through the slot to the side of the blocking surface, and can rotate with the top rod to abut against the blocking surface.

[0014] Preferably, the blocking surface has a slot, and at least a portion of the stop bar can be located within the slot.

[0015] This utility model provides a single crystal furnace auxiliary chamber cleaner, including a cleaning component, which is disposed around the fixed seat of the above-mentioned cleaning seat centering device, and the cleaning component is capable of cleaning the inner wall of the single crystal furnace auxiliary chamber.

[0016] Preferably, the fixing base is circumferentially fitted with an annular air tube, the annular air tube having multiple air outlets, and the orientation of the air outlets can be adjusted.

[0017] Preferably, the fixing base is provided with a guide sleeve, the cleaning component can be wrapped around the guide sleeve, and the end of the cleaning component is provided with a drawstring that can tightly wrap the cleaning component around the guide sleeve.

[0018] The cleaning seat centering device and single crystal furnace auxiliary chamber cleaner provided by this utility model, by evenly arranging at least two clamping components on the inner circumference of the fixed seat, and fixing the clamping components to center the weight, ensures that the weight is accurately located at the center of the fixed seat when lifted, ensuring that the cleaning component connected to the weight can rise vertically. This improves the alignment accuracy between the cleaning component and the entrance of the single crystal furnace auxiliary chamber, avoiding the problems of difficulty in accurately aligning with the auxiliary chamber entrance due to the tilt of the cleaning component, preventing smooth entry into the auxiliary chamber, and preventing the component from bumping or hitting due to tilt. No manual repeated adjustments are required during use, significantly saving manpower and time costs. Furthermore, when the drive cable lifts the cleaning component through the weight to clean the inner wall of the single crystal furnace auxiliary chamber, the centering state of the weight ensures that the cleaning component adheres evenly to the inner wall of the single crystal furnace auxiliary chamber, reducing cleaning dead corners and indirectly improving the cleaning effect of the inner wall of the single crystal furnace auxiliary chamber. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of an embodiment of the cleaning seat centering device of this utility model;

[0021] Figure 2 This is a partial sectional view of the cleaning seat centering device of this utility model;

[0022] Figure 3 This is a schematic diagram showing the distribution of multiple clamping components in the cleaning seat centering device of this utility model;

[0023] Figure 4 This is a schematic diagram of the internal structure of the fixed seat in the cleaning seat centering device of this utility model;

[0024] Figure 5 yes Figure 4 A schematic diagram of the AA cross-sectional structure;

[0025] Figure 6 This is a schematic diagram of the top rod at the groove structure of the cleaning seat centering device of this utility model;

[0026] Figure 7 yes Figure 6 A top-view structural diagram.

[0027] In the diagram: 1. Fixed base; 2. Counterweight; 10. Slot structure; 11. Top rod; 110. Channel; 12. Fixed sleeve; 13. Spring; 14. Baffle; 15. Clamping block; 16. Buffer pad; 17. Opening; 18. Knob; 19. Reinforcing block; 20. Locking block; 21. Slot; 22. Blocking surface; 23. Slot; 24. Stop bar;

[0028] 100. Cleaning parts; 200. Locking mechanism; 300. Steel cable. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0030] Example 1

[0031] like Figure 1 and Figure 2 As shown, this utility model provides a cleaning seat centering device, including a fixed seat 1 capable of setting a cleaning component 100. At least two clamping components are evenly arranged in the inner circumference of the fixed seat 1. The clamping components are used to center and fix the weight 2, so that the weight 2 can be accurately located at the center of the fixed seat 1 when it is lifted.

[0032] Specifically, the clamping assembly in this embodiment includes a push rod 11 for abutting against the single crystal furnace hammer 2 in the radial direction of the fixed base 1. The push rod 11 is elastically connected to the fixed base 1 and can move elastically in the radial direction of the fixed base 1.

[0033] By setting the push rod 11 to be elastically connected to the fixed seat 1, and the push rod 11 being able to move elastically along the radial direction of the fixed seat 1, when the weight 2 enters the fixed seat 1, the push rod 11 of the clamping assembly can radially abut against the weight 2. At this time, the elastically movable push rod 11 can adapt to the slight size deviation or placement error of the weight, and can provide a continuous clamping force through elasticity to form a constraint, so that the fixed seat 1 and the weight 2 are coaxial, while ensuring the stability of the centering state and improving the success rate of the cleaning seat entering the single crystal furnace auxiliary chamber.

[0034] Optionally, such as Figure 3 As shown, the number of clamping components is preferably three, and the three clamping components are evenly distributed along the circumference of the fixing base 1. In this embodiment, the three clamping components are set at 120° intervals to ensure that the clamping force of the clamping components on the counterweight is balanced.

[0035] In its natural state, the channel 110 formed between the three clamping components should be smaller than the diameter of the hammer 2 to achieve a clamping effect after the hammer 2 enters the channel 110. To facilitate the smooth entry of the hammer 2 into the channel 110, a push rod 11 can be provided with a ramp surface. This ramp surface can be a bevel or an arc surface cut on the bottom surface of the push rod 11 on the side that contacts the hammer 2. This creates a funnel-shaped structure at the bottom of the channel 110, allowing the hammer 2 to quickly and smoothly enter the channel 110 formed between the multiple clamping components after contacting the clamping components. However, in actual use, since both the upper and lower ends of the hammer 2 have a certain conical surface, the end of the push rod 11 near the hammer 2 does not require special design.

[0036] In some embodiments, the number of clamping components may be set to two, arranged symmetrically at 180°, depending on actual usage needs. Preferably, the end faces of the two clamping components that contact the counterweight 2 are set to be arc-shaped to fit the surface of the counterweight, so as to improve the stability of clamping.

[0037] To improve the clamping effect, the number of clamping components can be set to four, five, six, or even more to meet different usage needs.

[0038] Understandably, the distance from the top of the counterweight 2 to the clamping component needs to be less than the length of the counterweight 2 itself to achieve the clamping effect. Of course, since different models of the fixing base 1 and the counterweight 2 are used, the lengths of the fixing base 1 and the counterweight 2 are also different. The specific position of the clamping component can be adjusted according to the actual use needs, and no specific limitation is made here.

[0039] As an optional implementation, the push rod 11 is slidably connected to the fixed base 1 in the radial direction. By setting the push rod 11 to be slidably connected to the fixed base 1, the movement direction of the push rod 11 is strictly constrained, avoiding centering deviation caused by force offset of the push rod, and ensuring that the push rod 11 always presses against the counterweight 2 radially, thereby improving the centering accuracy.

[0040] As an optional implementation method, such as Figure 2 As shown, the clamping assembly also includes a fixed sleeve 12 and a spring 13. The fixed sleeve 12 is fixed on the side wall of the fixed seat 1. The push rod 11 is slidably connected to the fixed sleeve 12, and the end of the push rod 11 near the central axis of the fixed seat 1 extends out of the fixed sleeve 12 in the radial direction of the fixed seat 1.

[0041] By setting the fixed sleeve 12, the guiding stability of the push rod 11 can be enhanced, and the push rod 11 can be prevented from bending due to excessive length-to-diameter ratio during sliding. In this embodiment, the spring 13 can be set between the push rod 11 and the side wall of the fixed seat 1, or the spring 13 can be set between the push rod 11 and the fixed sleeve 12, depending on the actual installation situation.

[0042] To ensure the stability of the spring 13, in this embodiment, a baffle 14 for connecting the spring is provided on the top rod 11. The baffle 14 is disposed inside the fixed sleeve 12 and fixedly connected to the top rod 11. The spring 13 is configured such that one end is fixedly connected to the baffle 14 and the other end is connected to the side wall of the fixed seat 1 or the fixed sleeve 12.

[0043] To improve the contact effect between the push rod 11 and the counterweight 2, in this embodiment, a clamping block 15 is provided at the end of the push rod 11 that extends out of the fixed sleeve 12 and is close to the central axis of the fixed seat 1, so that the counterweight 2 can be clamped by the clamping block 15.

[0044] Optionally, a buffer pad 16 can be provided on the surface of the clamping block 15 to improve the buffering effect with the counterweight 2. In actual production and use, a reinforcing block 19 can be provided on the side of the clamping block 15 away from the counterweight 2 to improve the structural strength of the clamping block 15.

[0045] As an optional implementation, the side wall of the fixed base 1 is provided with a groove structure 10, and at least a portion of the top rod 11 is located in the groove structure 10 and is slidably connected to the groove structure 10.

[0046] Thus, by setting a power component for pneumatic or electric control of the push rod 11 within the groove structure 10, the push rod 11 can be driven to move by the power component, allowing for more automated and intelligent control of the push rod 11.

[0047] In some embodiments, an opening 17 may be provided on the outer wall surface of the groove structure 10 located on the fixed base 1, and the end of the push rod 11 extends out of the fixed base 1 through the opening 17. On the one hand, the opening 17 serves as a guide structure for the push rod 11, facilitating centering operation; on the other hand, the opening 17 is used to adjust the push rod 11 after it extends out of the fixed base 1.

[0048] As an optional implementation method, such as Figures 4-7 As shown, the slot structure 10 is provided with circumferentially spaced locking blocks 20, and a slot 21 is formed between two adjacent locking blocks 20. The top rod 11 is provided with a stop rod 24. The locking block 20 is provided with a blocking surface 22 on the side away from the central axis of the fixed seat 1. The stop rod 24 can move with the top rod 11 through the slot 21 to the side of the blocking surface 22, and can rotate with the top rod 11 to abut against the blocking surface 22.

[0049] In this embodiment, there are two stop rods 24, which are symmetrically arranged on both sides of the top rod 11. In use, when the spring 13 is not under force, the stop rods 24 are movably placed in the groove structure 10. When it is necessary to fix the top rod 11, push the top rod 11 towards the counterweight 2 to disengage the stop rods 24 from the groove structure 10. Then rotate the top rod 11 to make the stop rods 24 lock into the blocking surface 22, thus achieving relative fixation of the counterweight 2 by the clamping block 15.

[0050] Optionally, in this embodiment, the blocking surface 22 is provided with a slot 23, and at least a portion of the stop bar 24 can be located within the slot 23. By providing the slot 23, the stop bar 24 can be placed within the slot 23 after rotation. The slot 23 limits the stop bar 24, thereby improving the locking stability of the stop bar 24.

[0051] In actual production and use, a knob 18 can be installed at the end of the push rod 11 that extends beyond the fixed base 1, facilitating manual rotation of the push rod 11 via the knob 18. By providing a built-in knob 18 at the end of the push rod 11, during fixing, the push rod 11 can be moved to the blocking surface 22 by pushing it inwards into the fixed base 1 and rotating the knob 18, thus securing the push rod 11. During use, operators do not need to use tools such as wrenches; they can adjust the clamping assembly simply by manually adjusting the knob 18, improving adjustment efficiency and simplifying the operation process.

[0052] Example 2

[0053] Based on Embodiment 1, this embodiment provides a single crystal furnace auxiliary chamber cleaner. The cleaning component 100 is disposed around the fixed seat 1 of the cleaning seat centering device in Embodiment 1, and the cleaning component 100 can clean the inner wall of the single crystal furnace auxiliary chamber.

[0054] By evenly arranging multiple clamping components throughout the circumference of the fixed base 1, the weight 2 is centered and fixed, ensuring that the cleaning component 100 connected to the weight 2 can rise vertically. This improves the alignment accuracy between the cleaning component 100 and the entrance of the single crystal furnace sub-chamber, avoiding problems such as difficulty in accurately aligning with the sub-chamber entrance due to the tilt of the cleaning component 100, preventing smooth entry into the sub-chamber, and avoiding collisions caused by tilting. No repeated manual adjustments are required during use, significantly saving manpower and time costs. Furthermore, when the drive cable 300 lifts the fixed base 1 along with the cleaning component 100 via the weight 2 to clean the inner wall of the single crystal furnace sub-chamber, the centered state of the weight 2 ensures uniform contact between the cleaning component 100 and the inner wall of the single crystal furnace sub-chamber, reducing cleaning dead angles and indirectly improving the cleaning effect of the inner wall of the single crystal furnace sub-chamber.

[0055] As an optional implementation, a ring-shaped air pipe is circumferentially fitted onto the mounting base 1. This ring-shaped air pipe has multiple air outlets, the orientation of which is adjustable. Generally, the air outlets are oriented vertically upwards or diagonally upwards, used to purge and clean the top of the auxiliary chamber and the upper observation window. This solves the problem in existing technologies that only clean the inner wall of the single crystal furnace auxiliary chamber, failing to clean the top and observation window. Of course, in some special cases, the orientation of the air outlets can also be adjusted according to actual usage needs to meet different application requirements.

[0056] As an optional implementation, the fixing base 1 is provided with a guide sleeve, the cleaning component 100 can be wrapped in the guide sleeve, and the end of the cleaning component 100 is provided with a drawstring that can tightly wrap the cleaning component 100 in the guide sleeve.

[0057] By designing the cleaning component 100 to be wrapped around the outside of the guide sleeve and secured with a drawstring, a good fixing effect is achieved, preventing the cleaning component 100 from shifting during use and facilitating its disassembly and replacement. When the cleaning component 100 becomes dirty, simply loosen the drawstring to remove it for cleaning or replacement, making operation convenient and easy to use.

[0058] In use, the cleaning component 100 is positioned circumferentially on the fixed base 1. Since the steel cable 300 suspends the counterweight 2, with the locking mechanism 200 on the fixed base 1 in the open position, the counterweight 2 descends while simultaneously driving the steel cable 300 through the central channel inside the fixed base 1. Subsequently, the locking mechanism 200 is engaged, causing the steel cable 300 to rise, pulling the counterweight 2 upwards.

[0059] As the hammer 2 rises to contact the top rod 11 of the clamping assembly and continues to rise, it exerts force on the top rod 11, the baffle 14, and the spring 13. Due to the resistance of the spring 13, the movement of the top rod 11 away from the central axis of the fixed base 1 is buffered. When the hammer 2 rises to the point where all the top rods 11 are pushed outward, the multiple knobs 18 are pushed inward. Because the spring 13 is in a compressed state, it has elasticity. By rotating the knobs 18, the top rods 11 can be rotated, and the baffle 24 can be rotated to abut against the blocking surface 22. This achieves the centering and fixing of the hammer 2 by the multiple evenly arranged top rods 11, and thus achieves the centering and stabilization of the hammer 2 and the fixed base 1. It can be understood that when the baffle 24 of each top rod 11 is fixed against the blocking surface 22, the channel 110 formed between the multiple top rods 11 should be slightly larger than the diameter of the hammer 2 to ensure that the hammer 2 can pass through the channel 110.

[0060] At this point, under the upward pulling action of the steel cable 300, the counterweight 2 continues to rise until it engages with the locking mechanism 200, which then drives the fixed seat 1 and the cleaner to smoothly enter the auxiliary chamber and thoroughly clean the inner wall of the auxiliary chamber.

[0061] This single-crystal furnace auxiliary chamber cleaner, by evenly arranging at least two clamping components on the inner circumference of the fixed base 1, centers and fixes the weight 2, ensuring that the weight 2 is accurately positioned at the center of the fixed base 1 when lifted. This ensures that the cleaning component 100 connected to the weight 2 can rise vertically, thereby improving the alignment accuracy between the cleaning component 100 and the entrance of the single-crystal furnace auxiliary chamber. This avoids problems such as difficulty in accurately aligning with the auxiliary chamber entrance due to the tilt of the cleaning component 100, preventing smooth entry into the auxiliary chamber, and avoiding collisions caused by tilting. No repeated manual adjustments are required during use, significantly saving manpower and time costs. Furthermore, when the drive cable 300 lifts the fixed base 1 along with the cleaning component 100 to clean the inner wall of the single-crystal furnace auxiliary chamber via the weight 2, the centered state of the weight 2 ensures that the cleaning component 100 adheres evenly to the inner wall of the single-crystal furnace auxiliary chamber, reducing cleaning dead corners and indirectly improving the cleaning effect of the inner wall of the single-crystal furnace auxiliary chamber.

[0062] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A cleaning seat centering device, comprising a fixed seat capable of mounting a cleaning component, characterized in that: At least two clamping assemblies are evenly arranged on the inner circumference of the fixed base. Each clamping assembly includes a push rod for abutting against the single crystal furnace hammer in the radial direction of the fixed base. The push rod is elastically connected to the fixed base and can move elastically in the radial direction of the fixed base.

2. The cleaning seat centering device according to claim 1, characterized in that: The push rod is slidably connected to the fixed seat in the radial direction along the fixed seat.

3. The cleaning seat centering device according to claim 2, characterized in that: The clamping assembly further includes a fixed sleeve and a spring. The fixed sleeve is fixed to the side wall of the fixed seat. The push rod is slidably connected to the fixed sleeve, and the end of the push rod near the central axis of the fixed seat extends out of the fixed sleeve in the radial direction of the fixed seat. The spring is disposed between the push rod and the side wall of the fixed seat, or the spring is disposed between the push rod and the fixed sleeve.

4. The cleaning seat centering device according to claim 2 or 3, characterized in that: The side wall of the fixed base has a groove structure, and at least a portion of the top rod is located in the groove structure and is slidably connected to the groove structure.

5. The cleaning seat centering device according to claim 4, characterized in that: The groove structure has an opening on the outer wall of the fixed base, and the end of the top rod extends out of the fixed base through the opening.

6. The cleaning seat centering device according to claim 4, characterized in that: The groove structure is provided with circumferentially spaced locking blocks, and a slot is formed between two adjacent locking blocks. The top rod is provided with a stop bar, and the locking block is provided with a blocking surface on the side away from the central axis of the fixed seat. The stop bar can move with the top rod through the slot to the side of the blocking surface, and can rotate with the top rod to abut against the blocking surface.

7. The cleaning seat centering device according to claim 6, characterized in that: The blocking surface has a slot, and at least a portion of the stop bar can be located within the slot.

8. A single crystal furnace auxiliary chamber cleaner, comprising a cleaning component, characterized in that: The cleaning component is disposed circumferentially on the fixing seat of the cleaning seat centering device according to any one of claims 1-7, and the cleaning component is capable of cleaning the inner wall of the single crystal furnace auxiliary chamber.

9. The single crystal furnace auxiliary chamber cleaner according to claim 8, characterized in that: The fixed base is circumferentially fitted with an annular air tube, which has multiple air outlets, and the orientation of the air outlets can be adjusted.

10. The single crystal furnace auxiliary chamber cleaner according to claim 8, characterized in that: The fixed base is provided with a guide sleeve, the cleaning component can be wrapped around the guide sleeve, and the end of the cleaning component is provided with a drawstring that can tightly wrap the cleaning component around the guide sleeve.

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