A laser processing apparatus

Abstract

The utility model discloses a kind of laser processing equipment, including laser processing system, first feeding and discharging component, second feeding and discharging component, turnover assembly and handling manipulator, laser processing system includes base, fixed jig, processing transfer module and laser head, processing transfer module is installed on base, fixed jig is set in the drive end of processing transfer module, laser head is set in the above of processing transfer module by portal frame;First feeding and discharging component includes first storage bin, first feeding and discharging manipulator and first transfer platform;Second feeding and discharging component and first feeding and discharging component are respectively set in the both sides of laser processing system, second feeding and discharging component includes second storage bin, second feeding and discharging manipulator and second transfer platform;Turnover assembly includes turnover transfer module, turnover lifting module, turnover module and turnover manipulator.The utility model integrates automatic feeding and discharging, automatic turnover front and back laser processing, and degree of automation is high, and production efficiency is high.

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and specifically to a laser processing device. Background Technology

[0002] Existing laser processing equipment is mostly used for precision machining processes such as drilling, splitting, and cutting workpieces. Traditional equipment often adopts a fixed single-table processing structure, which generally suffers from problems such as limited processing modes, inefficient loading and unloading, and inability to process both sides. In addition, conventional laser processing equipment only supports single-sided processing of the substrate and lacks an autonomous rotating station structure. When the substrate needs to be processed on both sides, it is necessary to unload and reload or manually flip it, which greatly increases the process interval time and further reduces the overall production efficiency. Utility Model Content

[0003] In order to overcome the shortcomings of the existing technology, this utility model provides a laser processing equipment to solve the problem of low production efficiency in the existing technology.

[0004] The technical solution adopted by this utility model to solve its technical problem is: A laser processing device, comprising: A laser processing system includes a base, a fixed fixture, a processing transfer module, and a laser head. The processing transfer module is mounted on the base, and the fixed fixture is disposed at the drive end of the processing transfer module. The processing transfer module is used to drive the fixed fixture to move along the Y-axis from the loading position to the processing position. The laser head is straddling the processing transfer module above the processing transfer module via a gantry frame and is used to perform laser processing on the substrate at the processing position. The first loading and unloading assembly includes a first storage bin, a first loading and unloading robot, and a first transfer platform. The first loading and unloading robot is used to transport products between the first storage bin and the first transfer platform. The second loading and unloading assembly is respectively disposed on both sides of the laser processing system with the first loading and unloading assembly, and the second loading and unloading assembly includes a second storage bin, a second loading and unloading robot, and a second transfer platform. The second loading and unloading robot is used to transport the substrate between the second storage bin and the second transfer platform. The flipping assembly includes a flipping transfer loading module, a flipping lifting module disposed at the drive end of the flipping transfer loading module, a flipping module disposed at the drive end of the flipping lifting module, and a flipping robot disposed at the drive end of the flipping module. The flipping module is used to drive the flipping robot to flip 180°. A handling robot is used to move substrates between a first transfer platform, a second transfer platform, a fixed fixture, and a second fixture.

[0005] As a further improvement to the above technical solution, the first storage bin and the second storage bin have the same structure, both including a support frame, a material plate set on the support frame, and a material plate lifting module for driving the material plate to rise and fall. The support frame is provided with multiple baffles, and the multiple baffles form a stacking space to accommodate the substrate. The material plate is provided with through holes to avoid the baffles.

[0006] As a further improvement to the above technical solution, the first transfer platform and the second transfer platform have the same structure, both including a transfer loading module and a transfer fixture disposed at the drive end of the transfer loading module. The transfer loading module of the first transfer platform is used to drive the transfer fixture to move between the first transfer position and the second transfer position, and the transfer loading module of the second transfer platform is used to drive the transfer fixture to move between the third transfer position and the fourth transfer position.

[0007] As a further improvement to the above technical solution, the first transfer platform and the second transfer platform also include a waste collection bin. The waste collection bin of the first transfer platform is located directly below the first transfer position, and the waste collection bin of the second transfer platform is located directly below the third transfer position.

[0008] As a further improvement to the above technical solution, the fixed fixture and the transfer fixture have the same structure, both including a vacuum adsorption plate.

[0009] As a further improvement to the above technical solution, the first loading / unloading robot and the second loading / unloading robot have the same structure, both including a loading / unloading bracket, a loading / unloading transfer module disposed on the loading / unloading bracket, a loading / unloading lifting module disposed on the drive end of the loading / unloading transfer module, and a loading / unloading suction cup assembly disposed on the drive end of the loading / unloading lifting module. The loading / unloading transfer module of the first loading / unloading robot is used to drive the loading / unloading suction cup assembly to move between the loading / unloading position and the first intermediate transfer position, and the loading / unloading transfer module of the second loading / unloading robot is used to drive the loading / unloading suction cup assembly to move between the loading / unloading position and the third intermediate transfer position.

[0010] As a further improvement to the above technical solution, the handling robot includes a handling bracket and a handling and transfer module disposed on the handling bracket. The handling and transfer module has two drive ends, and the two drive ends of the handling and transfer module are respectively provided with a first handling lifting module and a second handling lifting module. The drive end of the first handling lifting module is provided with a first handling suction cup assembly, and the drive end of the second handling lifting module is provided with a second handling suction cup assembly. The handling and transfer module is used to drive the first handling suction cup assembly to move between the loading position and the second intermediate transfer position, and to drive the second handling suction cup assembly to move between the loading position and the fourth intermediate transfer position.

[0011] As a further improvement to the above technical solution, the flipping robot includes a support rod, a flipping suction cup bracket fixedly connected to the support rod, and a plurality of flipping suction nozzles installed on the flipping suction cup bracket. The support rod is fixedly connected to the drive end of the flipping module.

[0012] As a further improvement to the above technical solution, at least two processing transfer modules are provided on the machine base, and the same number of laser heads as the processing transfer modules are provided on the gantry.

[0013] As a further improvement to the above technical solution, a laser head transfer module is provided on the gantry, and the laser head is located at the drive end of the laser head transfer module. The laser head transfer module is used to drive the laser head to move along the X-axis.

[0014] The beneficial effects of this utility model are: 1. The laser processing equipment of this utility model adopts independent loading and unloading components on both the left and right sides, together with the handling robot to complete the automatic material picking and placing across workstations. The loading and unloading actions can be staggered and paralleled with the laser processing process, which greatly shortens the waiting time for loading and unloading of a single batch of substrates and effectively improves production efficiency.

[0015] 2. The laser processing equipment of this utility model is independently equipped with a flipping component. Through the flipping transfer loading module and the flipping lifting module, the flipping robot can be driven to accurately complete the 180° flipping operation of the substrate, realizing automatic switching processing of the front and back sides of the substrate without manual intervention in flipping.

[0016] 3. The laser processing equipment of this utility model has a reasonable structural layout and strong workstation coordination. It can automatically complete the entire process of substrate storage and feeding, automatic loading and unloading, workstation transfer, automatic flipping of front and back sides, and continuous laser processing. It takes into account processing accuracy, processing efficiency and equipment automation level, and is suitable for the production needs of large-volume, single and double-sided precision laser processing. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0018] Figure 1 This is an assembly diagram of a laser processing equipment according to an embodiment of the present invention; Figure 2 This is a top view of a laser processing device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a laser processing system in a laser processing equipment according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of a hidden laser processing system in a laser processing equipment according to an embodiment of the present invention; Figure 5This is a schematic diagram of the structure of the first storage bin in a laser processing equipment according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the first loading and unloading robot in a laser processing equipment according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of the first transfer platform in a laser processing equipment according to an embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of a handling robot in a laser processing equipment according to an embodiment of the present invention; Figure 9 This is a schematic diagram of the structure of a flipping component in a laser processing equipment according to an embodiment of the present invention.

[0019] Reference numerals: 100, Laser processing system; 101, Base; 102, First processing and transfer module; 103, First fixing fixture; 104, Second processing and transfer module; 105, Second fixing fixture; 106, First laser head; 107, Second laser head; 108, Laser head transfer module; 200, First loading and unloading assembly; 300, Second loading and unloading assembly; 400, Tilting assembly; 401, Tilting and transfer module; 402, Tilting and lifting module; 403, Tilting module; 404, Support rod; 405, Tilting suction cup bracket; 406, Tilting suction nozzle; 500, Handling robot; 501, Handling bracket; 502, Handling and transfer module; 503, First handling fixing frame; 504, First handling and lifting module; 505, First handling suction cup bracket; 506, First handling suction nozzle; 507, ... 508. Second transport fixing frame; 509. Second transport lifting module; 510. Second transport suction cup bracket; 600. Second transport suction nozzle; 601. First storage bin; 602. Support frame; 603. Material plate; 604. Stop bar; 605. Servo motor; 606. Lead screw; 607. Support plate; 700. First loading / unloading robot; 701. Loading / unloading bracket; 702. Loading / unloading transfer module; 703. Loading / unloading fixing frame; 704. Loading / unloading lifting module; 705. Loading / unloading suction cup bracket; 706. Loading / unloading suction nozzle; 800. First transfer platform; 801. Base plate; 802. Limiting rod; 803. Scrap plate; 804. Transfer module; 805. Transfer fixture; 806. Linear guide rail; 900. Second storage bin; 1000. Second loading / unloading robot; 1100. Second transfer platform; A1, First processing station; A2, Second processing station; B1, First loading station; B2, Second loading station; C1, First loading / unloading station; C2, Second loading / unloading station; D1, First transfer station; D2, Second transfer station; D3, Third transfer station; D4, Fourth transfer station. Detailed Implementation

[0020] The following will clearly and completely describe the concept, specific structure, and technical effects of this utility model in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of this utility model. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are all within the scope of protection of this utility model. Furthermore, all connections / connections involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. For example, fixed connections / fixed installations can use screw connections, bolt connections, pin connections, key connections, adhesive connections, mortise and tenon connections, welding, riveting, etc., as needed. For detachable connections, screw connections, bolt connections, threaded connections, snap-fit ​​connections, mortise and tenon connections, Velcro connections, etc., can be used as needed. The various technical features in this utility model can be combined interactively without contradicting each other.

[0021] Reference Figure 1 , Figure 2 and Figure 4 This utility model provides a laser processing equipment for laser processing operations such as drilling and film peeling on PCB, FPC, PI, glass substrate and other materials. The laser processing equipment includes a laser processing system 100, a first loading and unloading assembly 200, a second loading and unloading assembly 300, a flipping assembly 400 and a handling robot 500. The first loading and unloading assembly 200 and the second loading and unloading assembly 300 are symmetrically arranged on the left and right sides of the laser processing system 100. The flipping assembly 400 and the handling robot 500 are arranged on the rear side of the laser processing system 100 to facilitate maintenance of the processing side (front side) of the laser processing system 100.

[0022] It is understood that, when performing single-sided processing, the laser processing equipment in this embodiment adopts a left-in, right-out loading and unloading sequence. That is, the substrate is fed from the first loading and unloading assembly 200, and then the transport robot 500 transports the substrate to the laser processing system 100. After processing, the transport robot 500 then transports the substrate to the second loading and unloading assembly 300 to complete the unloading. In other embodiments, a right-in, left-out loading and unloading sequence can also be used.

[0023] When double-sided processing is required, the following two sequences can be used: 1. The substrate is fed from the first loading and unloading assembly 200, and then the transport robot 500 transports the substrate to the laser processing system 100 for front-side processing. After processing, the flipping assembly 400 removes the substrate and flips it 180°. Then the transport robot 500 transports the substrate to the laser processing system 100 for reverse-side processing. After processing, the transport robot 500 transports the substrate to the second loading and unloading assembly 300 to complete unloading.

[0024] 2. The substrate is fed from the first loading / unloading assembly 200, and then the transport robot 500 transports the substrate to the laser processing system 100. After processing, the transport robot 500 transports the substrate to the second loading / unloading assembly 300 for unloading. After the front side processing of all substrates is completed, the transport robot 500 transports the substrate supplied by the second loading / unloading assembly 300 to the laser processing system 100. The flipping assembly 400 first removes the substrate and flips it 180°. Then the transport robot 500 transports the substrate to the laser processing system 100 for reverse processing. After processing, the transport robot 500 transports the substrate to the first loading / unloading assembly 200 for unloading.

[0025] In the two sequences described above, the feeding / unloading functions of the first loading / unloading component 200 and the second loading / unloading component 300 can be interchanged.

[0026] In this embodiment, refer to Figure 2 and Figure 3 A laser processing system 100 includes a base 101, a gantry frame, a first processing and transfer module 102, a second processing and transfer module 104, a first laser head 106, and a second laser head 107 (the first laser head 106 and the second laser head 107 can be ultrafast lasers, red lasers, ultraviolet lasers, green lasers, etc.). The first processing and transfer module 102 and the second processing and transfer module 104 are mounted side by side on the base 101. The drive end of the first processing and transfer module 102 is provided with a first fixing fixture 103. The first processing and transfer module 102 is used to drive the first fixing fixture 103 to move along the Y-axis from the first loading position B1 to the first processing position A1. The second processing and transfer module 104... A second fixed fixture 105 is provided at the drive end. A second processing transfer module 104 is used to drive the second fixed fixture 105 to move from the second loading position B2 to the second processing position A2 along the Y-axis direction. A laser head transfer module 108 is provided on the gantry. The first laser head 106 and the second laser head 107 are respectively provided at the two drive ends of the laser head transfer module 108. The laser head transfer module 108 is used to drive the first laser head 106 and the second laser head 107 to move along the X-axis direction. The first laser head 106 is used to perform laser processing on the substrate of the first processing position A1, and the second laser head 107 is used to perform laser processing on the substrate of the second processing position A2.

[0027] It is understandable that the first laser head 106 and the second laser head 107 can process the front or the two back sides of two substrates simultaneously, or one laser head can process the front side of the substrate and then immediately flip it over through the flipping component 400, so that the other laser head can process the back side of the substrate.

[0028] In this embodiment, refer to Figure 2 and Figure 4 The first loading / unloading assembly 200 includes a first storage bin 600, a first loading / unloading robot 700, and a first transfer platform 800. The first loading / unloading robot 700 is used for transporting products between the first loading / unloading position C1 and the first transfer position D1. The second loading / unloading assembly 300 includes a second storage bin 900, a second loading / unloading robot 1000, and a second transfer platform 1100. The second loading / unloading robot 1000 is used for transporting substrates between the second loading / unloading position C2 and the third transfer position D3. The transport robot 500 is used for transporting substrates between the first transfer position D1, the second transfer position D2, the first loading position B1, and the second loading position B2.

[0029] In this embodiment, the first storage bin 600 and the second storage bin 900 have the same structure, as shown in the figure. Figure 5 Taking the first storage bin 600 as an example, it includes a support frame 601, a material plate 602 disposed on the support frame 601, and a material plate lifting module for driving the material plate 602 to rise and fall. The support frame 601 is provided with multiple stop bars 603, and the multiple stop bars 603 form a stacking space for accommodating the substrate. The material plate 602 is provided with through holes to avoid the stop bars 603. The material plate lifting module includes a servo motor 604 and a lead screw 605. The lead screw 605 is mounted on the support frame 601 along the Z-axis direction. The ball nut of the lead screw 605 is connected to a support plate 606, and the support plate 606 is located below the material plate 602.

[0030] Understandably, when the servo motor 604 drives the lever to move, it moves the nut of the lead screw 605 up and down, which in turn moves the support plate 606 up and down, thereby raising and lowering the material plate 602. Thus, during material feeding, after the first loading / unloading robot 700 removes a substrate, the material plate lifting module can move the material plate 602 upwards by a set distance, facilitating the next material removal by the first loading / unloading robot 700. Similarly, during material unloading, after the first loading / unloading robot removes a substrate, the material plate lifting module can move the material plate 602 downwards by a set distance, facilitating the next material release by the first loading / unloading robot 700.

[0031] In this embodiment, the first transfer platform 800 and the second transfer platform 1100 have the same structure, as shown in the reference. Figure 7Taking the first transfer platform 800 as an example, it includes a base plate 801, a transfer loading module 804, and a transfer fixture 805 disposed at the drive end of the transfer loading module 804. The transfer fixture 805 is slidably connected to the base plate 801 along the X-axis direction via a linear guide rail 806. The transfer loading module 804 of the first transfer platform 800 is used to drive the transfer fixture 805 to move between the first transfer position D1 and the second transfer position D2. The transfer loading module 804 of the second transfer platform 1100 is used to drive the transfer fixture 805 to move between the third transfer position D3 and the fourth transfer position D4.

[0032] Preferably, the first transfer platform 800 and the second transfer platform 1100 further include a waste collection bin. The waste collection bin of the first transfer platform 800 is located directly below the first transfer position D1, and the waste collection bin of the second transfer platform 1100 is located directly below the third transfer position D3. Figure 7 Taking the first transfer platform 800 as an example, the waste collection bin includes a waste plate 803, and multiple limiting rods 802 are provided on the waste plate 803, forming a stacking space for accommodating the substrate between the multiple limiting rods 802.

[0033] Understandably, after processing generates waste, the handling robot 500 transports the waste to the transfer fixture 805 at the second transfer station, and the first loading / unloading robot 700 then transports the substrate to the first transfer station and places it on the waste plate 803. Similarly, when the waste collection bin of the second transfer platform 1100 collects waste, the handling robot 500 transports the waste to the transfer fixture 805 at the fourth transfer station, and the second loading / unloading robot 1000 then transports the substrate to the third transfer station and places it on the waste plate 803.

[0034] In this embodiment, the first fixing fixture 103, the second fixing fixture 105, and the transfer fixture 805 all adopt vacuum adsorption plates. The vacuum adsorption plates are provided with a number of negative pressure holes to facilitate the adsorption and fixing of the substrate, which is stable and reliable. Preferably, the vacuum adsorption plates can adopt a partitioned design, which can automatically switch the adsorption area according to the different sizes of the substrate.

[0035] In this embodiment, the first loading / unloading robot 700 and the second loading / unloading robot 1000 have the same structure, as shown in the reference. Figure 6Taking the first loading / unloading robot 700 as an example, it includes a loading / unloading bracket 701, a loading / unloading transfer module 702, a loading / unloading lifting module 704, and a loading / unloading suction cup assembly. The loading / unloading transfer module 702 is mounted on the loading / unloading bracket 701 along the Y-axis. The drive end of the loading / unloading transfer module 702 is provided with a loading / unloading fixing frame 703. The loading / unloading lifting module 704 is mounted on the loading / unloading fixing frame 703. The loading / unloading suction cup assembly includes a loading / unloading suction cup bracket 705 and a plurality of loading / unloading suction nozzles 706 mounted on the loading / unloading suction cup bracket 705. The loading / unloading suction cup bracket 705 is mounted on the drive end of the loading / unloading lifting module 704 and is used to drive the loading / unloading suction nozzles 706 to rise and fall, facilitating material handling.

[0036] Reference Figure 2 The loading and unloading transfer module 702 of the first loading and unloading robot 700 is used to drive the loading and unloading suction cup assembly to move between the first loading and unloading position C1 and the first intermediate transfer position D1. The loading and unloading transfer module 702 of the second loading and unloading robot 1000 is used to drive the loading and unloading suction cup assembly to move between the second loading and unloading position C2 and the third intermediate transfer position D3.

[0037] In this embodiment, refer to Figure 8 The handling robot 500 includes a handling bracket 501, a handling and transfer module 502, a first handling and lifting module 504, a second handling and lifting module 508, a first handling suction cup assembly, and a second handling suction cup assembly. The handling and transfer module 502 is mounted on the handling bracket 501 along the X-axis and has two drive ends. The first handling and lifting module 504 is disposed on one drive end of the handling and transfer module 502 via a first handling fixing frame 503. The first handling suction cup assembly includes a first handling suction cup bracket 505 and a plurality of first handling suction nozzles 506 mounted on the first handling suction cup bracket 505. A first transport suction cup bracket 505 is mounted on the drive end of the first transport lifting module 504 to drive the first transport suction nozzle 506 to rise and fall, facilitating material handling. A second transport lifting module 508 is mounted on the other drive end of the transport transfer module 502 via a second transport fixing frame 507. The second transport suction cup assembly includes a second transport suction cup bracket 509 and several second transport suction nozzles 510 mounted on the second transport suction cup bracket 509. The second transport suction cup bracket 509 is mounted on the drive end of the second transport lifting module 508 to drive the second transport suction nozzles 510 to rise and fall, facilitating material handling. (Refer to...) Figure 2 The transport and transfer module 502 is used to drive the first transport suction cup assembly to move between the first loading position B1 and the second transfer position D2, and to drive the second transport suction cup assembly to move between the second loading position B2 and the fourth transfer position D4.

[0038] In this embodiment, refer to Figure 9The flipping assembly 400 includes a flipping transfer loading module 401, a flipping lifting module 402 disposed at the drive end of the flipping transfer loading module 401, a flipping module 403 disposed at the drive end of the flipping lifting module 402, and a flipping manipulator disposed at the drive end of the flipping module 403. The flipping module 403 is used to drive the flipping manipulator to flip 180°. The flipping manipulator includes a support rod 404, a flipping suction cup bracket 405 fixedly connected to the support rod 404, and a plurality of flipping suction nozzles 406 mounted on the flipping suction cup bracket 405. The support rod 404 is fixedly connected to the drive end of the flipping module 403.

[0039] Understandably, when it is necessary to flip the substrate, the flipping and loading module 401 drives the flipping robot to move along the X-axis to the first loading position B1 or the second loading position B2. The flipping and lifting module 402 drives the flipping robot to move downward until the flipping suction nozzle 406 picks up the substrate. Then, the flipping and lifting module 402 drives the substrate to move upward to the preset position. At this time, the flipping module 403 drives the flipping robot to rotate 180°, so that the reverse side of the substrate is facing upward and the substrate is above the flipping robot, which makes it easy for the handling robot 500 to take away the substrate. Then, the flipping and loading module 401 drives the flipping robot to move laterally to the avoidance position (for example, between the first loading position B1 and the second intermediate transfer position D2) to avoid interfering with the handling action of the handling robot 500.

[0040] In this embodiment, each transfer module and lifting module can adopt a linear drive mechanism such as a linear motor, cylinder, or servo electric cylinder, while the flipping module 403 can adopt a rotary drive mechanism such as a stepper motor.

[0041] The above is a detailed description of the preferred embodiments of the present utility model. The embodiments and descriptions in the specification are only preferred examples of the present utility model and are not intended to limit the present utility model. Various changes and modifications can be made to the present utility model without departing from the spirit and scope of the present utility model. All such changes and modifications fall within the scope of the present utility model as claimed. The scope of protection of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A laser processing device, characterized in that, include: A laser processing system includes a base, a fixed fixture, a processing transfer module, and a laser head. The processing transfer module is mounted on the base, and the fixed fixture is disposed at the drive end of the processing transfer module. The processing transfer module is used to drive the fixed fixture to move along the Y-axis from the loading position to the processing position. The laser head is straddling the processing transfer module above the processing transfer module via a gantry frame and is used to perform laser processing on the substrate at the processing position. The first loading and unloading assembly includes a first storage bin, a first loading and unloading robot, and a first transfer platform. The first loading and unloading robot is used to transport products between the first storage bin and the first transfer platform. The second loading and unloading assembly is respectively disposed on both sides of the laser processing system with the first loading and unloading assembly, and the second loading and unloading assembly includes a second storage bin, a second loading and unloading robot, and a second transfer platform. The second loading and unloading robot is used to transport the substrate between the second storage bin and the second transfer platform. The flipping assembly includes a flipping transfer loading module, a flipping lifting module disposed at the drive end of the flipping transfer loading module, a flipping module disposed at the drive end of the flipping lifting module, and a flipping robot disposed at the drive end of the flipping module. The flipping module is used to drive the flipping robot to flip 180°. A handling robot is used to move substrates between a first transfer platform, a second transfer platform, a fixed fixture, and a second fixture.

2. The laser processing equipment according to claim 1, characterized in that: The first and second storage bins have the same structure, both including a support frame, a material plate set on the support frame, and a material plate lifting module for driving the material plate to rise and fall. The support frame is provided with multiple baffles, and the multiple baffles form a stacking space to accommodate the substrate. The material plate is provided with through holes to avoid the baffles.

3. The laser processing equipment according to claim 1, characterized in that: The first transfer platform and the second transfer platform have the same structure, both including a transfer loading module and a transfer fixture disposed at the drive end of the transfer loading module. The transfer loading module of the first transfer platform is used to drive the transfer fixture to move between the first transfer position and the second transfer position, and the transfer loading module of the second transfer platform is used to drive the transfer fixture to move between the third transfer position and the fourth transfer position.

4. The laser processing equipment according to claim 3, characterized in that: The first and second transfer platforms also include waste collection bins. The waste collection bin of the first transfer platform is located directly below the first transfer position, and the waste collection bin of the second transfer platform is located directly below the third transfer position.

5. The laser processing equipment according to claim 3, characterized in that: The fixed fixture and the transfer fixture have the same structure, both including a vacuum adsorption plate.

6. The laser processing equipment according to claim 1, characterized in that: The first and second loading / unloading robots have the same structure, each including a loading / unloading bracket, a loading / unloading transfer module mounted on the loading / unloading bracket, a loading / unloading lifting module mounted on the drive end of the loading / unloading transfer module, and a loading / unloading suction cup assembly mounted on the drive end of the loading / unloading lifting module. The loading / unloading transfer module of the first loading / unloading robot is used to drive the loading / unloading suction cup assembly to move between the loading / unloading position and the first intermediate transfer position, and the loading / unloading transfer module of the second loading / unloading robot is used to drive the loading / unloading suction cup assembly to move between the loading / unloading position and the third intermediate transfer position.

7. The laser processing equipment according to claim 1, characterized in that: The handling robot includes a handling bracket and a handling and transfer module mounted on the handling bracket. The handling and transfer module has two drive ends, and the two drive ends of the handling and transfer module are respectively provided with a first handling lifting module and a second handling lifting module. The drive end of the first handling lifting module is provided with a first handling suction cup assembly, and the drive end of the second handling lifting module is provided with a second handling suction cup assembly. The handling and transfer module is used to drive the first handling suction cup assembly to move between the loading position and the second intermediate transfer position, and to drive the second handling suction cup assembly to move between the loading position and the fourth intermediate transfer position.

8. The laser processing equipment according to claim 1, characterized in that: The flipping robot includes a support rod, a flipping suction cup bracket fixedly connected to the support rod, and a plurality of flipping suction nozzles mounted on the flipping suction cup bracket. The support rod is fixedly connected to the drive end of the flipping module.

9. A laser processing device according to claim 1, characterized in that: At least two processing transfer modules are provided on the base, and the same number of laser heads as the processing transfer modules are provided on the gantry.

10. A laser processing device according to claim 1, characterized in that: A laser head transfer module is installed on the gantry frame, and the laser head is located at the drive end of the laser head transfer module. The laser head transfer module is used to drive the laser head to move along the X-axis.

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