A dismounting device for an elastomer of a wafer calibrator and a wafer calibrator

Abstract

A dismounting device for an elastomer of a wafer calibrator and the wafer calibrator, the elastomer is arranged in a through hole of a disc, the dismounting device comprises a base, a sliding part and a heating part. The base is provided with a containing groove matched with the disc; one end of the sliding part is fixedly connected with the base, and the other end is reciprocally movable along a vertical direction; the side wall of the heating part is fixedly connected with the sliding part, the heating part is provided with a push rod reciprocally movable along the vertical direction, the heating part has a cavity matched with the elastomer, and the heating part provides a preset temperature; when the disc is placed in the containing groove, the sliding part moves downward along the vertical direction, the heating part moves downward along the vertical direction, so that the cavity of the heating part contains the elastomer, the preset temperature is transmitted to the elastomer to soften the elastomer, and the push rod moves downward along the vertical direction to separate the elastomer from the through hole of the disc. The dismounting device is simple to operate, and can avoid damage to the elastomer caused by dismounting the elastomer.

Description

Technical Field

[0001] This application relates to the field of disassembly tools in the semiconductor industry, and more specifically, to a disassembly apparatus for an elastomer of a wafer calibrator and a wafer calibrator. Background Technology

[0002] The wafer calibrator achieves wafer rotation through friction between an elastomer on a disk and the wafer. As the number of wafers handled increases, the elastomer's contact surface gradually wears down. When handling hundreds of thousands or even millions of wafers, the elastomer's contact surface may stick to the wafer, requiring replacement of the elastomer. The elastomer is made of polymer materials and possesses a certain degree of elasticity and hardness.

[0003] like Figure 1 As shown, the elastomer can be installed in the through hole of the disk via an interference fit. Currently, the elastomer is removed using common tools such as tweezers and a flathead screwdriver. The applicant has found that this method easily causes damage to the elastomer, scratches or damage to the disk surface, potentially rendering the disk unusable.

[0004] The content of the background section is merely technology known to the public and does not necessarily represent existing technology in the field. Utility Model Content

[0005] This application aims to provide a device for removing the elastomer of a wafer calibrator and a wafer calibrator to solve the above-mentioned technical problems.

[0006] According to one aspect of this application, a device for removing an elastomer for a wafer calibrator is provided. The wafer calibrator includes a disk, and the elastomer is disposed in a through-hole of the disk. The device includes a base, a sliding part, and a heating part. The base is provided with a receiving groove that mates with the disk. One end of the sliding part is fixedly connected to the base, and the other end is reciprocating vertically. The sidewall of the heating part is fixedly connected to the sliding part. The heating part is provided with a push rod that is reciprocating vertically. The heating part has a cavity that mates with the elastomer. The heating part provides a preset temperature. When the disk is placed in the receiving groove, the sliding part moves downward vertically, causing the heating part to move downward vertically, so that the cavity accommodates the elastomer. The cavity of the heating part transfers the preset temperature to the elastomer to soften it. The push rod moves downward vertically to disengage the elastomer from the through-hole of the disk.

[0007] According to some embodiments of this application, the sliding part includes a transmission assembly and a support plate. One end of the transmission assembly is rotatably connected to the base; the support plate is rotatably connected to the transmission assembly, and the support plate can reciprocate in the vertical direction when the transmission assembly rotates.

[0008] According to some embodiments of this application, the transmission assembly is rotatably connected to the base via a bearing assembly.

[0009] According to some embodiments of this application, the sliding part further includes a guide rod. The guide rod is fixedly connected to the base and slidably connected to the support plate.

[0010] According to some embodiments of this application, the heating unit includes a housing, a heating module, and a temperature control module. The housing is fixedly connected to the tray; the heating module is fixedly disposed inside the housing; the temperature control module is fixedly connected to the base and electrically connected to the heating module, which provides a preset temperature; a push rod is rotatably and movablely connected to the housing so that the push rod can reciprocate in the vertical direction.

[0011] According to some embodiments of this application, the disassembly device further includes a handle. The handle is fixedly connected to the other end of the push rod.

[0012] According to some embodiments of this application, the upper surface of the housing has a connecting hole that mates with the push rod, and the side wall of the connecting hole is provided with an internal thread; the outer periphery of the push rod is provided with an external thread that mates with the internal thread.

[0013] According to some embodiments of this application, the heating module is a heating rod.

[0014] According to one aspect of this application, a wafer calibrator is provided, which includes the disassembly device as described above.

[0015] The technical solution of this application can drive the heating part to move vertically through the sliding part, so that the cavity of the heating part can accommodate the elastomer. The technical solution of this application can provide a preset temperature through the heating part, and transfer the preset temperature to the elastomer through the cavity of the heating part to soften the elastomer. The technical solution of this application can push the elastomer out of the through hole of the disc by moving the push rod downwards vertically, thereby causing the elastomer to detach from the through hole of the disc.

[0016] The technical solution of this application is simple to operate and can avoid the problems of damage to the elastomer, scratches or damage to the disk surface, or even the scrapping of the disk caused by using conventional tools (such as tweezers, flathead screwdrivers, etc.) to disassemble the elastomer. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1A schematic diagram of the structure of the elastomer and the disk is shown; Figure 2 A schematic diagram of the disassembly apparatus according to an embodiment of this application is shown; Figure 3 A schematic diagram showing the structure of a receiving groove for a disk placed on a base according to an embodiment of this application; Figure 4 A cross-sectional schematic diagram showing a disk placed in a receiving groove on a base according to an embodiment of this application; Figure 5 A schematic diagram of the structure of the heating element according to an embodiment of this application is shown.

[0019] Explanation of reference numerals in the attached figures: Disassembly device 100.

[0020] Base 11; sliding part 12; heating part 13; handle 14.

[0021] Receiving tank 111.

[0022] Transmission assembly 121; support plate 122; bearing assembly 123; guide rod 124.

[0023] Push rod 131; housing 132; heating module 133; temperature control module 134.

[0024] Lifting screw 1211 and knob 1212.

[0025] Bearing 1231; bearing end cover 1232; shaft elastic retaining ring 1233.

[0026] 2. Disk; 3. Elastomer; 4. Through hole. Detailed Implementation

[0027] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0028] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials, or operations will not be shown or described in detail.

[0029] Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0030] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order.

[0031] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0032] According to one aspect of this application, a device 100 for removing an elastomer from a wafer calibrator, the wafer calibrator including a disk 2, is provided. See also Figure 1 The elastomer 3 is disposed in the through hole 4 of the disk 2. See also... Figure 2 The disassembly device 100 includes a base 11, a sliding part 12, and a heating part 13.

[0033] According to an example embodiment, the base 11 is provided with a receiving groove 111 that mates with the disk 2. The size of the receiving groove 111 can correspond to that of the disk 2, and the disk 2 can be placed in the receiving groove 111.

[0034] One end of the sliding part 12 is fixedly connected to the base 11, and the other end of the sliding part 12 can reciprocate in the vertical direction. For example, the sliding part 12 can be connected to the base 11 via a bearing.

[0035] The side wall of the heating part 13 is fixedly connected to the sliding part 12. When the other end of the sliding part 12 reciprocates in the vertical direction, the heating part 13 can be driven to reciprocate in the vertical direction, thereby adjusting the vertical position of the heating part 13.

[0036] The heating section 13 is equipped with a push rod 131 that can reciprocate vertically. One end of the push rod 131 is built into the cavity of the heating section 13, which provides a preset temperature. For example, the heating section 13 can generate heat through a resistance wire, heating coil, or the like to provide the preset temperature. The cavity of the heating section 13 can conduct the preset temperature to the elastic body 3.

[0037] When the disc 2 is placed in the receiving groove 111, the sliding part 12 moves downward in the vertical direction, causing the heating part 13 to move downward in the vertical direction, so that the cavity can accommodate the elastic body 3. The cavity transmits the preset temperature to the elastic body 3 to soften the elastic body 3. The push rod 131 moves downward in the vertical direction to disengage the elastic body 3 from the through hole 4 of the disc 2.

[0038] Through the above embodiments, the technical solution of this application can drive the heating part to move vertically through the sliding part, so that the cavity of the heating part can accommodate the elastomer. The technical solution of this application can provide a preset temperature through the heating part, and transfer the preset temperature to the elastomer through the cavity of the heating part to soften the elastomer. The technical solution of this application can push the elastomer out of the through hole of the disk by moving the push rod downwards vertically, thereby causing the elastomer to detach from the through hole of the disk.

[0039] The technical solution of this application is simple to operate and can avoid the problems of damage to the elastomer, scratches or damage to the disk surface, or even the scrapping of the disk caused by using conventional tools (such as tweezers, flathead screwdrivers, etc.) to disassemble the elastomer.

[0040] Optionally, see Figure 2 The sliding part 12 includes a transmission assembly 121 and a support plate 122. One end of the transmission assembly 121 is rotatably connected to the base 11. For example, see... Figure 3 The transmission assembly 121 includes a lifting screw 1211 and a knob 1212. One end of the lifting screw 1211 can be rotatably connected to the base 11, and a threaded pair can be provided on the outer periphery of the lifting screw 1211. The knob 1212 can be fixedly connected to the other end of the lifting screw 1211. When the knob 1211 is rotated, the knob 1212 can drive the lifting screw 1211 to rotate.

[0041] According to an example embodiment, the pallet 122 is rotatably connected to the transmission assembly 121, and the pallet 122 can reciprocate in the vertical direction when the transmission assembly 121 rotates. For example, the pallet 122 can be rotatably connected to the lifting screw 1211 through a connecting hole, the inner side of which is provided with a thread that mates with the threaded pair of the lifting screw 1211. When the lifting screw 1211 rotates, the pallet 122 can reciprocate in the vertical direction.

[0042] Optionally, see Figure 4 The transmission assembly 121 is rotatably connected to the base 11 via a bearing assembly 123. See, for example, [reference needed]. Figure 4The bearing assembly 123 may include a bearing 1231, a bearing end cap 1232, and a shaft retaining ring 1233. The bearing 1231 may surround the lifting screw 1211, and the bearing 1231 may be coaxially arranged with the lifting screw 1211, allowing the lifting screw 1211 to rotate within the inner ring of the bearing 1231. The bearing end cap 1232 may be connected to the upper surface of the bearing 1231 and may be used to fix the bearing 1232. The shaft retaining ring 1233 may be connected to the lower surface of the bearing 1231 and may be used to fix the bearing 1231 and the lifting screw 1211.

[0043] Through the above embodiments, the technical solution of this application can make the pallet reciprocate in the vertical direction by rotating the lifting screw.

[0044] Optionally, see Figure 2 and Figure 3 The sliding part 12 also includes a guide rod 124. The guide rod 124 is fixedly connected to the base 11 and slidably connected to the support plate 122. For example, the guide rod 124 can be fixed to the upper surface of the base 11 by screws and slidably connected to the support plate 122 through a guide hole. The guide rod 124 can prevent the support plate 122 from rotating during reciprocating movement in the vertical direction. The sliding part 12 also includes two guide rods 124. The two guide rods 124 are respectively arranged on opposite sides of the lifting screw 1211.

[0045] Optionally, see Figure 2 and Figure 5 The heating unit 13 includes a housing 132, a heating module 133, and a temperature control module 134.

[0046] According to the example embodiment, the housing 132 is fixedly connected to the tray 122. When the tray 122 reciprocates vertically, it can drive the housing 132 to reciprocate vertically as well. For example, the volume of the housing 132 can be set to 100mm × 150mm × 100mm, thus occupying only a small volume. The heating module 133 is fixedly disposed inside the housing 132.

[0047] Optionally, the heating module 133 can be a heating rod, a heating resistance wire, or a heating coil, etc.

[0048] The temperature control module 134 is fixedly connected to the base 11 and electrically connected to the heating module 133, which provides a preset temperature. For example, the temperature control module 134 can be fixedly connected to the base 11 by screws or adhesive. The temperature control module 134 can be electrically connected to the heating module 133 to control the preset temperature and heating time of the heating module 133. For example, the preset temperature range can be 150℃~200℃, and the heating time can be 10 seconds.

[0049] The push rod 131 is rotatably and movablely connected to the housing 132 so that the push rod 131 can reciprocate in the vertical direction.

[0050] For example, push rod 131 can be rotatably and movablely connected to the housing by means of threads, bearings or rotary splines.

[0051] Optionally, see Figures 2-4 The disassembly device 100 also includes a handle 14. The handle 14 is fixedly connected to the other end of the push rod 131. The push rod 131 can be rotated by rotating the handle 14.

[0052] Optionally, the upper surface of the housing 132 has a connecting hole that mates with the push rod 131, and the side wall of the connecting hole is provided with an internal thread. The outer periphery of the push rod 131 is provided with an external thread that mates with the internal thread. When the push rod 131 rotates, the external thread of the push rod 131 mates with the internal thread of the connecting hole, allowing the push rod 131 to reciprocate in the vertical direction, thereby adjusting the height of the push rod 131. The surface of the push rod 131 can be coated with a high-temperature resistant coating.

[0053] With the disc 2 placed in the receiving groove 111, turning the knob 1212 can drive the lifting screw 1211 to rotate, thereby driving the tray 122 to move downward in the vertical direction, and then driving the box 132 to move downward in the vertical direction, so that the cavity of the heating part 13 can accommodate the elastomer.

[0054] By setting the temperature control module 134, the preset temperature and heating time of the heating module 133 can be controlled. The cavity of the heating part transmits the preset temperature to the elastic body 3 to soften the elastic body 3. By rotating the handle 14, the push rod 131 moves downward in the vertical direction, pushing the elastic body 3 out of the through hole 4 of the disk 2, thereby causing the elastic body 3 to detach from the through hole 4 of the disk 2.

[0055] According to one aspect of this application, a wafer calibrator is provided, which includes the disassembly device as described above.

[0056] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A device for removing an elastomer for a wafer calibrator, the wafer calibrator comprising a disk, the elastomer being disposed in a through-hole of the disk, characterized in that, The disassembly device includes: The base is provided with a receiving groove that mates with the disk; The sliding part has one end fixedly connected to the base, and the other end can reciprocate in the vertical direction; The heating part has a side wall that is fixedly connected to the sliding part. The heating part is provided with a push rod that can reciprocate in the vertical direction. The heating part has a cavity that cooperates with the elastic body. The heating part provides a preset temperature. When the disk is placed in the receiving groove, the sliding part moves downward in the vertical direction, causing the heating part to move downward in the vertical direction, so that the cavity accommodates the elastomer. The cavity of the heating part transmits the preset temperature to the elastomer to soften the elastomer. The push rod moves downward in the vertical direction to disengage the elastomer from the through hole of the disk.

2. The disassembly device according to claim 1, characterized in that, The sliding part includes: A transmission assembly, one end of which is rotatably connected to the base; The pallet is rotatably connected to the transmission assembly, and the pallet can reciprocate in the vertical direction when the transmission assembly rotates.

3. The disassembly device according to claim 2, characterized in that, The transmission assembly is rotatably connected to the base via a bearing assembly.

4. The disassembly device according to claim 2, characterized in that, The sliding part further includes: The guide rod is fixedly connected to the base and slidably connected to the support plate.

5. The disassembly device according to claim 2, characterized in that, The heating element includes: The box body is fixedly connected to the tray; The heating module is fixedly installed inside the housing; A temperature control module is fixedly connected to the base and electrically connected to the heating module, wherein the heating module provides the preset temperature; The push rod is rotatably and movably connected to the housing so that the push rod can reciprocate in the vertical direction.

6. The disassembly device according to claim 5, characterized in that, The disassembly device further includes: The handle is fixedly connected to the other end of the push rod.

7. The disassembly device according to claim 5, characterized in that, The upper surface of the housing has a connection hole that mates with the push rod, and the side wall of the connection hole is provided with an internal thread; The push rod has an external thread on its outer periphery that mates with the internal thread.

8. The disassembly device according to claim 5, characterized in that, The heating module is a heating rod.

9. A wafer calibrator, characterized in that, Includes the disassembly device as described in any one of claims 1-8.

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