A sharpening assembly, cutting motion component and cutting device

Abstract

The utility model relates to a technical field of semiconductor processing equipment especially relates to a knife grinding assembly, cutting motion part and cutting equipment. Knife grinding assembly includes knife grinding pedestal, knife grinding board, pressure holding mechanism and limiting mechanism, and one side of knife grinding pedestal along first direction is equipped with the installation part for fixed connection with cutting motion part, and knife grinding board sets up the top of knife grinding pedestal, and pressure holding mechanism sets up the two sides of knife grinding pedestal along second direction, and limiting mechanism movably sets up the other side of knife grinding pedestal along first direction, when pressure holding mechanism is in the pressure state, and limiting mechanism is in the limiting state, knife grinding board is pressed tightly fixed on knife grinding pedestal, when pressure holding mechanism is in the open state, and limiting mechanism is in the release state, can along first direction dismouting knife grinding board. The utility model discloses through the cooperation of pressure holding mechanism and limiting mechanism, can continuously hold mechanically knife grinding board fixed on knife grinding pedestal, and simultaneously facilitate quick dismounting replacement knife grinding board.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a grinding tool assembly, a cutting motion component, and a cutting device. Background Technology

[0002] During the cutting process, powder from the product's cutting path can adhere to the sides of the cutting blade, causing it to become dull. Therefore, a sharpening plate is needed to sharpen the blade. The cutting blade cuts against the rough surface of the sharpening plate, leaving a cutting path that removes the adhering material, resulting in a more regular blade tip and ensuring the quality of the cutting path during subsequent product cutting.

[0003] In existing technologies, most sharpening plates are vacuum-adhesive structures that are attached to the sharpening table during use. When water enters the vacuum, the sharpening plate may detach and fly out, or it may shift during sharpening, causing damage to the blade. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art or related technologies.

[0005] Therefore, this utility model provides a sharpening assembly that, through the cooperation of a holding mechanism and a limiting mechanism, can continuously and mechanically hold and fix the sharpening plate on the sharpening table, while facilitating quick disassembly and replacement of the sharpening plate.

[0006] This utility model also provides a cutting motion component including the above-mentioned grinding assembly.

[0007] This utility model also provides a cutting device that includes the above-mentioned grinding assembly or cutting motion component.

[0008] A grinding assembly for cutting moving parts according to a first aspect embodiment of the present invention includes a grinding table, a grinding plate, a holding mechanism, and a limiting mechanism. The grinding table has a mounting portion on one side along a first direction, which is used to fix it to the cutting moving part. The grinding plate is disposed above the grinding table. The holding mechanism is disposed on both sides of the grinding table along a second direction, and the holding mechanism includes a pressed state and an open state. The limiting mechanism is movably disposed on the other side of the grinding table along the first direction, and the limiting mechanism includes a limiting state and a released state. When the holding mechanism is in the pressing state and the limiting mechanism is in the limiting state, the grinding plate is pressed and fixed on the grinding table base; when the holding mechanism is in the open state and the limiting mechanism is in the released state, the grinding plate can be disassembled and assembled along the first direction.

[0009] Optionally, the holding mechanism is a pressure plate; the pressure plate is connected to the grinding table base so that a groove is formed between the pressure plate and the grinding table base, and the grinding plate is slidably engaged in the groove along the first direction.

[0010] Optionally, the pressure plate has a connecting part and a pressing part that are connected to each other, with a bend between the connecting part and the pressing part. The connecting part is fixedly connected to the grinding table so that the pressing part is located above the grinding table. A slot is formed between the upper surface of the grinding table and the lower surface of the pressing part.

[0011] Optionally, the sharpening assembly also includes an adjustment mechanism disposed between the pressure plate and the sharpening table, the adjustment mechanism being used to adjust the size of the slot.

[0012] Optionally, the adjustment mechanism is a clamping screw, with a first adjustment hole on the lower pressing part and a second adjustment hole matching the first adjustment hole on the grinding table base, and the clamping screw is screwed into the first adjustment hole and the second adjustment hole.

[0013] Optionally, the limiting mechanism is a limiting top block, which is rotatably connected to the grinding table base and has a limiting protrusion. When the limiting top block rotates to the point where the limiting protrusion is close to the grinding plate, the limiting top block is in a limiting state. When the limiting top block rotates to the point where the limiting protrusion is far away from the grinding plate, the limiting top block is in a releasing state.

[0014] Optionally, the mounting part is provided with a positioning pin; when the mounting part is fixedly connected to the cutting motion component, the positioning pin is used to position the mounting part.

[0015] Optionally, the grinding table is also provided with laser-etched marks; the laser-etched marks are used to position the grinding plate.

[0016] A cutting motion component according to a second aspect of the present invention includes a grinding assembly as described in the first aspect of the present invention.

[0017] Optionally, the cutting motion component includes a cutting disc with a pin hole; when the mounting part of the sharpening assembly is connected to the cutting motion component, the positioning pin of the sharpening assembly passes through the pin hole.

[0018] A cutting device according to a third aspect of the present invention includes a grinding assembly as described in the first aspect embodiment, or a cutting motion component as described in the second aspect embodiment.

[0019] One of the above technical solutions has at least the following advantages or beneficial effects: In one embodiment of the present invention, a grinding assembly is provided, through the cooperation of a holding mechanism and a limiting mechanism, which can continuously mechanically hold and fix the grinding plate on the grinding table base, thereby solving the problem of displacement or even detachment of the grinding plate during use caused by vacuum adsorption failure, and at the same time facilitating quick disassembly and replacement of the grinding plate.

[0020] The cutting motion component provided in this embodiment of the utility model is equipped with the aforementioned sharpening assembly. Since the sharpening assembly has the above-mentioned technical effects, the cutting motion component equipped with the sharpening assembly should also have the corresponding technical effects.

[0021] The cutting device provided in this embodiment of the utility model is equipped with the above-mentioned grinding assembly or cutting motion component. Since both the grinding assembly and the cutting motion component have the above-mentioned technical effects, the cutting device equipped with the grinding assembly or the cutting motion component should also have the corresponding technical effects. Attached Figure Description

[0022] Figure 1 This diagram shows a first-view structural schematic of a grinding assembly according to an embodiment of the present invention; Figure 2 This diagram shows a second-view structural schematic of a grinding assembly according to an embodiment of the present invention. Figure 3 A schematic diagram of the cutting motion component according to an embodiment of the present invention is shown.

[0023] Explanation of reference numerals in the attached figures: 100. Cutting moving parts; 110. Cutting disc; 200. Grinding table; 210. Mounting part; 220. Positioning pin; 230. Laser etching mark; 300. Grinding plate; 400. Pressure plate; 410. Connecting part; 420. Pressing part; 500. Limiting block; 510. Limiting protrusion; 600. Clamping screw. Detailed Implementation

[0024] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In existing technologies, the grinding plates of cutting equipment are mostly of a vacuum adsorption type, which are adsorbed onto the grinding table during use. When water enters the vacuum, the grinding plate may fall off and fly out, or the grinding plate may shift during grinding, causing the blade to break.

[0026] To address at least one of the technical problems existing in the prior art or related technologies, this utility model provides a sharpening assembly, a cutting motion component, and a cutting device. The sharpening assembly includes a sharpening table, a sharpening plate, a holding mechanism, and a limiting mechanism. The sharpening table has a mounting portion on one side along a first direction for fixed connection with the cutting motion component. The sharpening plate is positioned above the sharpening table. The holding mechanism is positioned on both sides of the sharpening table along a second direction. The limiting mechanism is movably positioned on the other side of the sharpening table along the first direction. When the holding mechanism is in a pressing state and the limiting mechanism is in a limiting state, the sharpening plate is pressed and fixed on the sharpening table. When the holding mechanism is in an open state and the limiting mechanism is in a released state, the sharpening plate can be disassembled and installed along the first direction. The device provided in this application, through the cooperation of the holding mechanism and the limiting mechanism, can continuously mechanically press and fix the sharpening plate on the sharpening table, thus solving the problem of displacement or even detachment of the sharpening plate during use caused by vacuum adsorption failure, while also facilitating quick disassembly and replacement of the sharpening plate.

[0027] The following description, with reference to the accompanying drawings, describes a grinding assembly, a cutting motion component, and a cutting device according to some embodiments provided by the present invention.

[0028] See Figures 1 to 3 This utility model provides a sharpening assembly for a cutting motion component 100, comprising a sharpening table 200, a sharpening plate 300, a holding mechanism, and a limiting mechanism. The sharpening table 200 has a mounting portion 210 on one side along a first direction, which is used to fixably connect to the cutting motion component 100, thereby mounting the sharpening assembly to the cutting motion component 100. The sharpening plate 300 is disposed above the sharpening table 200 and is used for sharpening the cutting tool of the cutting motion component 100. The holding mechanism is disposed on both sides of the sharpening table 200 along a second direction, and includes a pressing state and an open state. The limiting mechanism is movably disposed on the other side of the sharpening table 200 along the first direction, and includes a limiting state and a released state.

[0029] The existing cutting motion component 100 is equipped with a cutting tool and a cutting disc 110 for carrying the product to be cut. Here, the mounting part 210 of the sharpening assembly is connected to one side of the cutting disc 110, which facilitates sharpening of the cutting tool of the cutting motion component 100 as needed during the product cutting process. See also... Figures 1 to 2 As shown, the first direction refers to the direction that is close to or far from the cutting disc 110, and the other two sides of the second direction are the other two sides of the grinding table 200 that are different from the first direction.

[0030] It should be noted that when the holding mechanism is in the clamping state, it presses the grinding plate 300 onto the grinding table 200 to limit the grinding plate 300 in the second direction; when the holding mechanism is in the open state, the limitation on the grinding plate 300 in the second direction can be released. When the limiting mechanism is in the limiting state, the grinding plate 300 abuts against the mounting part 210 on one side along the first direction and against the limiting mechanism on the other side to limit the grinding plate 300 in the first direction; when the limiting mechanism is in the releasing state, the limitation on the grinding plate 300 in the first direction can be released.

[0031] Furthermore, when the holding mechanism is in the pressed state and the limiting mechanism is in the limited state, the grinding plate 300 is pressed and fixed on the grinding table 200, so that the cutting tool of the cutting motion component 100 can be sharpened using the grinding plate 300; when the holding mechanism is in the open state and the limiting mechanism is in the released state, the grinding plate 300 can be disassembled and installed along the first direction, thereby quickly disassembling and replacing the grinding plate 300.

[0032] It can be seen that the grinding assembly, through the cooperation of the holding mechanism and the limiting mechanism, can continuously mechanically hold and fix the grinding plate 300 on the grinding table 200, so as to solve the problem of displacement or even falling off of the grinding plate 300 during use caused by vacuum adsorption failure, and at the same time facilitate quick disassembly and replacement of the grinding plate 300.

[0033] In some possible implementations, see [link to relevant documentation]. Figures 1 to 2 The holding mechanism is a pressure plate 400. The pressure plate 400 is connected to the grinding table 200 so that a slot for mounting the grinding plate 300 is formed between the pressure plate 400 and the grinding table 200. The grinding plate 300 is slidably locked in the slot along the first direction so as to facilitate the disassembly and replacement of the grinding plate 300.

[0034] In some possible implementations, see [link to relevant documentation]. Figures 1 to 2 The pressure plate 400 has a connecting portion 410 and a pressing portion 420 that are connected to each other. A bend is formed between the connecting portion 410 and the pressing portion 420. The connecting portion 410 is fixedly connected to the grinding table 200 so that the pressing portion 420 is located above the grinding table 200, thereby connecting the pressure plate 400 to the grinding table 200 and forming a groove between the pressure plate 400 and the grinding table 200. Specifically, the groove is formed between the upper surface of the grinding table 200 and the lower surface of the pressing portion 420.

[0035] In some possible implementations, see [link to relevant documentation]. Figures 1 to 2The sharpening assembly also includes an adjustment mechanism, which is located between the pressure plate 400 and the sharpening table 200. The adjustment mechanism is used to adjust the size of the slot, allowing the holding mechanism to switch between a pressed state and an open state. Furthermore, because the size of the slot is adjustable, it can also accommodate sharpening plates 300 of different sizes, thus enabling the sharpening assembly to be used with different types of cutting equipment.

[0036] In some possible implementations, see [link to relevant documentation]. Figures 1 to 2 The adjustment mechanism is a clamping screw 600. A first adjustment hole is provided on the lower pressing part 420, and a second adjustment hole matching the first adjustment hole is provided on the grinding table 200. The clamping screw 600 is screwed into both the first and second adjustment holes. By tightening the clamping screw 600, the distance between the lower surface of the lower pressing part 420 and the upper surface of the grinding table 200 can be adjusted, thus adjusting the size of the slot.

[0037] In some possible implementations, see [link to relevant documentation]. Figures 1 to 2 The limiting mechanism is a limiting top block 500. The limiting top block 500 is rotatably connected to the grinding table 200, and the limiting top block 500 is provided with a limiting protrusion 510. When the limiting top block 500 rotates until the limiting protrusion 510 is close to the grinding plate 300, the limiting top block 500 is in a limiting state, at which time the limiting protrusion 510 abuts against the grinding plate 300 to limit the grinding plate 300. When the limiting top block 500 rotates until the limiting protrusion 510 is away from the grinding plate 300, the limiting top block 500 is in a released state to cancel the limiting of the grinding plate 300.

[0038] Here, when the limiting top block 500 is in the released state, the holding mechanism is opened by turning the clamping screw 600, so that the grinding plate 300 can be pulled out in the first direction and a new grinding plate 300 can be inserted into the slot; the limiting top block 500 is adjusted to the limiting state, and the clamping screw 600 is turned in the opposite direction to the clamping state, so that the grinding plate 300 is fixed.

[0039] In some possible implementations, see [link to relevant documentation]. Figure 2 The mounting part 210 is provided with a positioning pin 220. When the mounting part 210 is fixedly connected to the cutting motion component 100, the positioning pin 220 is used to position the mounting part 210 so as to facilitate the quick and easy installation and removal of the grinding tool assembly on the cutting motion component 100.

[0040] In some possible implementations, see [link to relevant documentation]. Figure 2The grinding table 200 is also equipped with laser etching marks 230, which are used to position the grinding plate 300. Specifically, when the cutting tool of the cutting motion part 100 is sharpened using the grinding assembly, the camera of the cutting equipment can visually align with the grinding plate 300 on the grinding table 200 by acquiring the position coordinates of the laser etching marks 230, thereby accurately finding the cutting position and positioning the grinding plate 300.

[0041] One embodiment of the cutting motion component of this utility model includes the sharpening assembly of any of the above embodiments. Since the cutting motion component of this embodiment includes any of the sharpening assemblies in the first aspect, it has the beneficial effects of any of the above embodiments, which will not be repeated here.

[0042] Furthermore, the cutting motion component 100 includes a cutting disc 110, on which a pin hole is formed. When the mounting part 210 of the sharpening assembly is connected to the cutting motion component 100, the positioning pin 220 of the sharpening assembly passes through the pin hole to achieve positioning of the sharpening assembly.

[0043] In some possible embodiments, the cutting disc 110 has a pin hole and a threaded hole on its side, and the grinding table 200 has a positioning pin 220 and a fixing hole on its side at the corresponding position. By inserting the positioning pin 220 into the pin hole, and simultaneously using screws to pass through the fixing hole and the threaded hole in sequence and lock them, the grinding assembly is installed on the side of the cutting disc 110.

[0044] Here, because the positioning pin 220 has a positioning function, the upper surface of the grinding table 200 and the plane of the cutting disc 110 maintain a good parallelism, thereby ensuring the positioning accuracy of the cutting tool of the cutting motion component 100 during grinding.

[0045] The cutting device of one embodiment of the present invention includes the sharpening assembly of any of the above embodiments, or the cutting motion component 100 of any of the above embodiments. Since the cutting device of this embodiment includes any of the sharpening assemblies in the first aspect or any of the cutting motion components 100 in the second aspect, it has the beneficial effects of any of the above embodiments, which will not be repeated here.

[0046] Here, there is no restriction on the specific type of cutting equipment. It can be a wafer dicing machine used for cutting wafers, or a cutting equipment used for cutting other products, or a dicing machine, grinding and cutting integrated machine, grinding, cutting and sorting integrated machine, etc. that have the function of cutting products.

[0047] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0048] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0049] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0050] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "exemplary embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0051] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A sharpening assembly for cutting moving parts (100), characterized in that, include: A grinding table (200) is provided with a mounting part (210) on one side along a first direction, the mounting part (210) being used to be fixedly connected to the cutting motion component (100); A sharpening plate (300) is disposed above the sharpening table (200); A holding mechanism is provided on both sides of the grinding table (200) along the second direction, and the holding mechanism includes a pressed state and an open state; A limiting mechanism is movably disposed on the other side of the grinding table (200) along the first direction, the limiting mechanism including a limiting state and a releasing state; When the holding mechanism is in the pressing state and the limiting mechanism is in the limiting state, the grinding plate (300) is pressed and fixed on the grinding table base (200); when the holding mechanism is in the open state and the limiting mechanism is in the released state, the grinding plate (300) can be disassembled and assembled along the first direction.

2. The sharpening assembly according to claim 1, characterized in that, The pressing mechanism is a pressure plate (400); The pressure plate (400) is connected to the grinding table (200) so that a groove is formed between the pressure plate (400) and the grinding table (200), and the grinding plate (300) is slidably engaged in the groove along the first direction.

3. The sharpening assembly according to claim 2, characterized in that, The pressure plate (400) has a connecting part (410) and a pressing part (420) that are connected to each other, and a bend is formed between the connecting part (410) and the pressing part (420). The connecting part (410) is fixedly connected to the grinding table (200) so that the pressing part (420) is located above the grinding table (200). The slot is formed between the upper surface of the grinding table (200) and the lower surface of the pressing part (420).

4. The sharpening assembly according to claim 3, characterized in that, Also includes: An adjustment mechanism is provided between the pressure plate (400) and the grinding table (200), and the adjustment mechanism is used to adjust the size of the slot.

5. The grinding assembly according to claim 4, characterized in that, The adjustment mechanism is a clamping screw (600). The pressing part (420) has a first adjustment hole, and the grinding table (200) has a second adjustment hole that matches the first adjustment hole. The clamping screw (600) is screwed into the first adjustment hole and the second adjustment hole.

6. The sharpening assembly according to claim 1, characterized in that, The limiting mechanism is a limiting top block (500), which is rotatably connected to the grinding table (200). The limiting top block (500) is provided with a limiting protrusion (510). When the limiting top block (500) rotates to the point where the limiting protrusion (510) is close to the grinding plate (300), the limiting top block (500) is in a limiting state; when the limiting top block (500) rotates to the point where the limiting protrusion (510) is far away from the grinding plate (300), the limiting top block (500) is in a releasing state.

7. The sharpening assembly according to claim 1, characterized in that, The mounting part (210) is provided with a positioning pin (220); when the mounting part (210) is fixedly connected to the cutting motion component (100), the positioning pin (220) is used to position the mounting part (210).

8. The sharpening assembly according to claim 1, characterized in that, The grinding table (200) is also provided with laser etching marks (230); the laser etching marks (230) are used to position the grinding plate (300).

9. A cutting motion component, characterized in that, Includes the sharpening assembly as described in any one of claims 1 to 8.

10. The cutting motion component according to claim 9, characterized in that, The cutting motion component (100) includes a cutting disc (110), on which a pin hole is provided; When the mounting part (210) of the sharpening assembly is connected to the cutting motion component (100), the positioning pin (220) of the sharpening assembly passes through the pin hole.

11. A cutting device, characterized in that, It includes the sharpening assembly as described in any one of claims 1 to 8, or the cutting motion component as described in any one of claims 9 to 10.

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