A device for the all-round tumbling of single crystal silicon rods

Abstract

The utility model belongs to the single crystal silicon rod field especially, it is a kind of all -round roll grinding device to single crystal silicon rod, it includes single crystal silicon rod roll grinder, the all -round roll grinding device to single crystal silicon rod further includes linear motor, linear motor bolt connection is in the top of single crystal silicon rod roll grinder;Slide sleeve, slide sleeve bolt connection is in the top of linear motor;Portal frame, portal frame sliding connection is in the surface of slide sleeve;Base, base bolt connection is in the bottom of portal frame;Reciprocating assembly, reciprocating assembly includes reduction motor, transmission arm and articulated rod, the output of reduction motor and the hole key connection of transmission arm, in the utility model, by moving single crystal silicon rod roll grinder, let it can cover greater range left and right, after installing single crystal silicon rod, let single crystal silicon rod roll grinder carry out roll grinding to longer single crystal silicon rod by moving, to reach the effect of all -round roll grinding, avoid the problem of needing to roll grinding for multiple times due to single crystal silicon rod too long.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon rod technology, and in particular to an all-around grinding device for monocrystalline silicon rods. Background Technology

[0002] As an important semiconductor material, monocrystalline silicon has good electrical properties and thermal stability. During the production process, it needs to be ground using a grinding device. In the prior art, Chinese patent document with application number: 202021929404.6 discloses a monocrystalline silicon rod grinding device.

[0003] However, due to structural defects, the above technical solution still has the following problems: 1. When the length of the monocrystalline silicon rod exceeds the length of the grinding column, the grinding column can only grind a portion of the monocrystalline silicon rod and cannot achieve all-round grinding. 2. The adjustable spacing of its clamps is limited, and the length of the single crystal silicon rods it can hold is also limited, which affects the processing applicability of the device. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies, such as the inability to perform omnidirectional tumbling on long monocrystalline silicon rods and the limitation of clamping length in the clamping structure, and to propose an omnidirectional tumbling device for monocrystalline silicon rods.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An omnidirectional grinding apparatus for monocrystalline silicon rods includes a monocrystalline silicon rod grinding machine, and the omnidirectional grinding apparatus for monocrystalline silicon rods further includes... A linear motor is bolted to the top of the single-crystal silicon rod grinding machine; The sliding sleeve is bolted to the top of the linear motor; Gantry frame, the gantry frame is slidably connected to the surface of the sliding sleeve; The base is bolted to the bottom of the gantry frame; The reciprocating assembly includes a geared motor, a transmission arm, and a hinge rod. The output end of the geared motor is connected to the keyway of the transmission arm. The left end of the transmission arm is hinged to the right end of the hinge rod, and the left end of the hinge rod is hinged to the right side of the top of the sliding sleeve. Support frame, bolted to the top of the base; A rotary motor, bolted to the right side of the support frame; Rotary disk, the key of which is connected to the output end of the rotary motor; The fixing mechanism is connected to the base. By moving the monocrystalline silicon rod grinding machine, it can cover a larger area to the left and right. After the monocrystalline silicon rod is installed, the monocrystalline silicon rod grinding machine can be moved to grind the longer monocrystalline silicon rod, thereby achieving the effect of all-round grinding and avoiding the problem of having to grind multiple times due to the monocrystalline silicon rod being too long.

[0006] As a preferred embodiment of this utility model, the fixing mechanism includes an L-shaped frame, a clamping plate, and a translation component. The left end of the translation component is bolted to the right end of the L-shaped frame, and the hole at the top of the L-shaped frame is rotatably connected to the axis of the clamping plate.

[0007] Furthermore, the translation component can move the L-shaped frame to the right, and the L-shaped frame can move the clamping plate to the right. The cooperation between the clamping plate and the rotating disk can clamp and fix the monocrystalline silicon rod.

[0008] As a preferred embodiment of this utility model, the translation component includes a translation motor, a lead screw, and a slider. The output end of the translation motor is keyed to the right end of the lead screw, the surface of the lead screw is threaded to the screw hole of the slider, and the top of the slider is bolted to the right end of the L-shaped frame.

[0009] Furthermore, the power supply to the translation motor is turned on. The power supply can be an external power supply or a self-provided power supply. The translation motor is controlled by a controller. The translation motor can drive the lead screw to rotate. The lead screw can drive the slider to move to the right through the thread. The slider is guided by the slide rail and the base. The slider can drive the L-shaped frame to move to the right.

[0010] In a preferred embodiment of this utility model, the left side of the translation motor is bolted to the right side of the base, the left end of the lead screw is rotatably sleeved with the inner side of the base, and the bottom of the L-shaped frame is slidably connected to the sliding groove at the top of the base.

[0011] Furthermore, the translation motor is fixed to the base, and the lead screw is rotatably set to the base via bearings to ensure the smoothness of the lead screw rotation. The L-shaped frame is slidably set to the base via slide rails to guide the L-shaped frame.

[0012] As a preferred embodiment of this utility model, the bottom of the support frame is connected to a sliding frame by a recessed bolt, and the interior of the sliding frame is slidably connected to the surface of the L-shaped frame.

[0013] Furthermore, the L-shaped frame is guided by a sliding frame, facilitating its left and right movement.

[0014] In a preferred embodiment of this utility model, the surface of the geared motor is bolted to the right side of the gantry frame, and the left end of the hinge rod is connected to the groove on the right side of the top of the sliding sleeve.

[0015] Furthermore, the geared motor is fixed to the gantry frame, which facilitates the geared motor to drive the transmission arm to rotate, and the connection between the hinge rod and the sliding sleeve facilitates the movement of the sliding sleeve by the hinge rod. Beneficial effects

[0016] 1. The geared motor can drive the transmission arm to rotate, the transmission arm can drive the hinge rod to move, the hinge rod can drive the sliding sleeve to move, the sliding sleeve can drive the linear motor to move, and the linear motor can drive the single crystal silicon rod grinding machine to move, so that the single crystal silicon rod grinding machine can grind longer single crystal silicon rods. 2. The translation motor can drive the lead screw to rotate, the lead screw can drive the slider to move, the slider can drive the L-shaped frame to move, and the L-shaped frame can drive the clamping plate to move. The cooperation between the clamping plate and the rotating disk can clamp single crystal silicon rods of various lengths. In this invention, by moving the monocrystalline silicon rod grinding machine, it can cover a larger area to the left and right. After the monocrystalline silicon rod is installed, the grinding machine moves to grind the longer monocrystalline silicon rod, thereby achieving the effect of all-round grinding and avoiding the problem of having to grind multiple times due to the monocrystalline silicon rod being too long. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of an all-around grinding device for monocrystalline silicon rods proposed in this utility model. Figure 2 A three-dimensional schematic diagram of the frame for an all-around grinding device for single-crystal silicon rods proposed in this utility model; Figure 3 This is a three-dimensional schematic diagram of the sliding sleeve of an all-around grinding device for single-crystal silicon rods proposed in this utility model. Figure 4 This is a three-dimensional schematic diagram of the base of an all-around grinding device for monocrystalline silicon rods proposed in this utility model.

[0018] In the diagram: 1. Single crystal silicon rod grinding machine; 2. Linear motor; 3. Sliding sleeve; 4. Gantry frame; 5. Base; 6. Gear motor; 7. Transmission arm; 8. Hinge rod; 9. Support frame; 10. Rotary motor; 11. Rotary disk; 12. Translation motor; 13. Lead screw; 14. Slider; 15. L-shaped frame; 16. Clamping plate. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Example

[0020] Reference Figure 1-4An omnidirectional grinding apparatus for monocrystalline silicon rods includes a monocrystalline silicon rod grinding machine 1, and the omnidirectional grinding apparatus for monocrystalline silicon rods further includes... Linear motor 2 is bolted to the top of the single crystal silicon rod grinding machine 1; Sliding sleeve 3 is bolted to the top of linear motor 2; Gantry 4 is slidably connected to the surface of slide sleeve 3; Base 5 is bolted to the bottom of gantry frame 4; The reciprocating assembly includes a geared motor 6, a transmission arm 7, and a hinge rod 8. The output end of the geared motor 6 is connected to the keyway of the transmission arm 7. The left end of the transmission arm 7 is hinged to the right end of the hinge rod 8. The left end of the hinge rod 8 is hinged to the right side of the top of the sliding sleeve 3. Support frame 9 is bolted to the top of base 5; Rotary motor 10 is bolted to the right side of support frame 9; Rotary disk 11 is keyed to the output end of rotary motor 10; The fixing mechanism is connected to the base 5.

[0021] With the above structure, by moving the monocrystalline silicon rod grinding machine 1, it can cover a larger area to the left and right. After the monocrystalline silicon rod is installed, the monocrystalline silicon rod grinding machine 1 can be moved to grind the longer monocrystalline silicon rod, thereby achieving the effect of all-round grinding and avoiding the problem of having to grind multiple times due to the monocrystalline silicon rod being too long.

[0022] In this utility model, the fixing mechanism includes an L-shaped frame 15, a clamping plate 16, and a translation component. The left end of the translation component is bolted to the right end of the L-shaped frame 15. The hole at the top of the L-shaped frame 15 is rotatably connected to the axis of the clamping plate 16. The translation component can drive the L-shaped frame 15 to move to the right, and the L-shaped frame 15 can drive the clamping plate 16 to move to the right. The cooperation between the clamping plate 16 and the rotating disk 11 can clamp and fix the monocrystalline silicon rod.

[0023] In this utility model, the translation component includes a translation motor 12, a lead screw 13, and a slider 14. The output end of the translation motor 12 is keyed to the right end of the lead screw 13. The surface of the lead screw 13 is threaded to the screw hole of the slider 14. The top of the slider 14 is bolted to the right end of the L-shaped frame 15. The power supply of the translation motor 12 is turned on. The power supply can be an external power supply or a self-provided power supply. The translation motor 12 is controlled by a controller. The translation motor 12 can drive the lead screw 13 to rotate. The lead screw 13 can drive the slider 14 to move to the right using the thread. The slider 14 is slidably set with the base 5 through a slide rail to guide the slider 14. The slider 14 can drive the L-shaped frame 15 to move to the right.

[0024] In this utility model, the left side of the translation motor 12 is bolted to the right side of the base 5, the left end of the lead screw 13 is rotatably sleeved with the inner side of the base 5, the bottom of the L-shaped frame 15 is slidably connected to the slide groove at the top of the base 5, the translation motor 12 is fixed by the base 5, the lead screw 13 is rotatably set with the base 5 through the bearing to ensure the smoothness of the rotation of the lead screw 13, and the L-shaped frame 15 is slidably set with the base 5 through the slide rail to guide the L-shaped frame 15.

[0025] In this utility model, a sliding frame is connected to the recessed bolt at the bottom of the support frame 9. The interior of the sliding frame is slidably connected to the surface of the L-shaped frame 15. The L-shaped frame 15 is guided by the sliding frame, which facilitates the left and right movement of the L-shaped frame 15.

[0026] In this utility model, the surface of the geared motor 6 is bolted to the right side of the gantry frame 4, and the left end of the hinge rod 8 is connected to the groove on the top right side of the sliding sleeve 3. The geared motor 6 is fixed by the gantry frame 4, which facilitates the geared motor 6 to drive the transmission arm 7 to rotate. The connection between the hinge rod 8 and the sliding sleeve 3 facilitates the hinge rod 8 to drive the sliding sleeve 3 to move.

[0027] The single crystal silicon rod grinding machine 1 adopts the grinding structure of the prior art, such as the fixing device, grinding column and motor a of application number 202021929404.6.

[0028] The working principle of this utility model is as follows: A single-crystal silicon rod to be tumbled is obtained and placed between a rotating disk 11 and a clamping plate 16. When clamping is required, the power supply to the translation motor 12 is turned on. The power supply can be an external power source or a self-contained power source. The translation motor 12 is controlled by a controller. The translation motor 12 can drive the lead screw 13 to rotate. The lead screw 13 can drive the slider 14 to move to the right via a thread. The slider 14 is slidably set with the base 5 via a slide rail, guiding the slider 14. The slider 14 can drive the L-shaped frame 15 to move to the right. The L-shaped frame 15 can drive the clamping plate 16 to move to the right. The cooperation between the clamping plate 16 and the rotating disk 11 can clamp and fix the single-crystal silicon rod. By turning on the power supply to the rotary motor 10, the rotary motor 10 can drive the rotating disk 11 to rotate, and the rotating disk 11 can drive the single-crystal silicon rod to rotate. By turning on the power supply to the linear motor 2, the linear motor 10 can drive the rotating disk 11 to rotate, and the rotating disk 11 can drive the single-crystal silicon rod to rotate. Linear motor 2 drives the monocrystalline silicon rod grinding machine 1 downward to grind the monocrystalline silicon rod. After grinding the left side of the monocrystalline silicon rod surface, linear motor 2 drives the monocrystalline silicon rod grinding machine 1 upward. The power supply of geared motor 6 is turned on. The power supply can be an external power supply or a self-provided power supply, controlled by a controller. Geared motor 6 can drive transmission arm 7 to rotate. The right end of transmission arm 7 is connected to geared motor 6, and the left end is connected to the right end of hinge rod 8. In this way, the left side of transmission arm 7 is equivalent to an eccentric structure relative to geared motor 6. Transmission arm 7 can drive hinge rod 8 to move to the right. Hinge rod 8 can drive sliding sleeve 3 to move to the right. Sliding sleeve 3 can drive linear motor 2 to move. Linear motor 2 can drive monocrystalline silicon rod grinding machine 1 to move to the right. After moving to the position where grinding has not yet started, monocrystalline silicon rod grinding machine 1 continues to grind downward.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An omnidirectional grinding apparatus for monocrystalline silicon rods, comprising a monocrystalline silicon rod grinding machine (1), characterized in that, The omnidirectional grinding device for single-crystal silicon rods also includes Linear motor (2), which is bolted to the top of the single crystal silicon rod grinding machine (1); Sliding sleeve (3) is bolted to the top of linear motor (2); Gantry frame (4), the gantry frame (4) is slidably connected to the surface of the sliding sleeve (3); The base (5) is bolted to the bottom of the gantry frame (4); The reciprocating assembly includes a geared motor (6), a transmission arm (7) and a hinge rod (8). The output end of the geared motor (6) is connected to the key of the hole of the transmission arm (7). The left end of the transmission arm (7) is hinged to the right end of the hinge rod (8). The left end of the hinge rod (8) is hinged to the right side of the top of the sliding sleeve (3). Support frame (9) is bolted to the top of base (5); Rotary motor (10) is bolted to the right side of support frame (9); Rotary disk (11) is keyed to the output end of rotary motor (10); The fixing mechanism is connected to the base (5).

2. The omnidirectional grinding device for single-crystal silicon rods according to claim 1, characterized in that, The fixing mechanism includes an L-shaped frame (15), a clamp (16), and a translation component. The left end of the translation component is bolted to the right end of the L-shaped frame (15), and the hole at the top of the L-shaped frame (15) is rotatably connected to the axis of the clamp (16).

3. The omnidirectional grinding device for single-crystal silicon rods according to claim 2, characterized in that, The translation assembly includes a translation motor (12), a lead screw (13), and a slider (14). The output end of the translation motor (12) is keyed to the right end of the lead screw (13), the surface of the lead screw (13) is threaded to the screw hole of the slider (14), and the top of the slider (14) is bolted to the right end of the L-shaped frame (15).

4. The omnidirectional grinding device for single-crystal silicon rods according to claim 3, characterized in that, The left side of the translation motor (12) is bolted to the right side of the base (5), the left end of the lead screw (13) is rotatably sleeved with the inner side of the base (5), and the bottom of the L-shaped frame (15) is slidably connected to the groove at the top of the base (5).

5. The omnidirectional grinding apparatus for single-crystal silicon rods according to claim 1, characterized in that, The bottom of the support frame (9) is connected to a sliding frame by a notch bolt, and the inside of the sliding frame is slidably connected to the surface of the L-shaped frame (15).

6. The omnidirectional grinding apparatus for single-crystal silicon rods according to claim 1, characterized in that, The surface of the geared motor (6) is bolted to the right side of the gantry (4), and the left end of the hinge rod (8) is connected to the groove on the right side of the top of the sliding sleeve (3).

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