High-reliability ldi fiber bundle polishing device

Abstract

The utility model discloses a kind of high-reliability LDI fiber bundle grinding device, it is related to fiber bundle processing technical field, including workbench, further including recovery mouth, pressure pump, grinding head, grinding disc, polishing liquid supply mechanism and gap adjusting mechanism, the recess is equipped in the workbench, the grinding head is located in recess, the grinding head is equipped with fiber bundle, the grinding disc is fixedly installed in recess, groove is opened in the grinding disc, the utility model is driven polishing liquid by pressure pump and forms stable bearing liquid film, the grinding head is suspended by gap adjusting mechanism, avoid the stress damage caused by mechanical contact, reduce end surface flaw generation from root, groove guides fluid to generate vortex, form uniform shear force when oblique incidence to fiber bundle surface, remove fiber bundle subsurface damage layer and form smooth end surface by the mechanism of " stratified peeling " remove fiber bundle subsurface damage layer and form smooth end surface, greatly improve the grinding accuracy, can effectively improve the grinding quality and reliability of LDI fiber bundle.

Description

Technical Field

[0001] This utility model relates to the field of optical fiber bundle processing technology, specifically a highly reliable LDI optical fiber bundle polishing device. Background Technology

[0002] In LDI (Light Diffusion Laser) technology applications, the fiber bundle, as the core component for transmitting ultraviolet (UV) lasers, is of paramount importance in terms of its end-face quality. UV photons have high energy and are extremely sensitive to surface and subsurface defects in materials, easily leading to localized energy absorption and heat accumulation. Among these, the subsurface damage layer (referring to a latent defect layer introduced below the material surface due to mechanical grinding or other processing methods, difficult to detect with conventional inspection, but significantly reducing the material's resistance to laser damage) is a key hidden danger leading to equipment failure. Especially with the ever-increasing precision requirements in fields such as semiconductor manufacturing, the output power of LDI light sources has continued to rise (from several watts to tens or even hundreds of watts), placing unprecedentedly stringent demands on the reliability and damage resistance of fiber bundle transmission.

[0003] However, existing grinding processes mostly use mechanical contact grinding, which is prone to stress damage and exacerbates defects on the fiber end face. Furthermore, the grinding accuracy depends solely on the mechanical structure control, making it difficult to achieve ultra-smooth surface treatment. Utility Model Content

[0004] The purpose of this invention is to provide a highly reliable LDI fiber bundle polishing device to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a highly reliable LDI fiber bundle polishing device, including a worktable, a pressure pump, a polishing head, a polishing disc, a groove, a polishing slurry supply mechanism, and a gap adjustment mechanism. The worktable has a groove, the polishing head is disposed in the groove through the gap adjustment mechanism, the polishing head is provided with a fiber bundle, the polishing disc is fixedly installed in the groove, the groove is formed on the polishing disc, the polishing slurry supply system is disposed at one end of the pressure pump, and the pressure pump is disposed on one side of the worktable.

[0006] In a preferred embodiment: the cross-sectional structure of the grinding head is inverted T-shaped and is suspended above the center of the groove. Two sets of symmetrically distributed mounting holes are provided on both sides of the grinding head, and each set of mounting holes contains several holes. The optical fiber bundle is inserted into each mounting hole. A liquid inlet is fixedly connected to the upper end of the grinding head, and the grinding disc is provided directly below the grinding head.

[0007] In a preferred embodiment: the number of grooves is several, and the grooves adopt an annular structure with different diameters. Adjacent grooves are distributed at equal intervals along the center point of the grinding disc on the upper surface of the grinding disc.

[0008] In a preferred embodiment: the diameter of the grooves decreases gradually from the outside to the inside, the spacing between adjacent grooves is 5 mm, and the distance between the grinding head and the grinding disc ranges from 10 μm to 30 μm.

[0009] In a preferred embodiment: the grinding slurry supply mechanism includes a first pipe and a storage tank. The storage tank is located on one side of the workbench and is connected to the pressure pump through the first pipe. One end of the pressure pump is connected to a delivery pipe, and the other end of the delivery pipe is located in the inlet. A recovery port is provided on the groove and is connected to one end of a second pipe. The other end of the second pipe is located at the upper end of the storage tank and is connected to the storage tank.

[0010] In a preferred embodiment: a filter screen is installed inside the liquid storage tank, the filter screen is located below the outlet end of the second pipe, and a pump is installed on the second pipe.

[0011] In a preferred embodiment: the gap adjustment mechanism includes an adjustment plate, a base plate, slide rails and a clamping component. The base plate is fixedly connected to the upper end face of the groove. Two symmetrically distributed slide rails are fixedly connected to the upper end of the base plate. The adjustment plate is sleeved on the outer wall of the two slide rails. One end of the adjustment plate is integrally formed with the grinding head. A clamping component is provided between the adjustment plate and the two slide rails.

[0012] In a preferred embodiment: the clamping member includes a fastening plate, a fastening bolt, an extension post, and a fixing plate. The fastening plate is fixedly connected to one side of the adjusting plate. The fastening bolt is threadedly connected to the fastening plate. One end of the fastening bolt is rotatably connected to the extension post. One sidewall of the fixing plate is fixedly connected to the extension post. A sliding cavity is provided at the end of the adjusting plate near the fastening bolt. The fixing plate slides within the sliding cavity. Limiting plates are fixedly connected to the top ends of the two slide rails.

[0013] Compared with the prior art, the beneficial effects achieved by this utility model are: This invention, through the configuration of a pressure pump, grinding head, grinding disc, grooves, a polishing slurry supply mechanism, and a gap adjustment mechanism, allows for the adjustment of the gap between the grinding head and grinding disc and the flow rate of the polishing slurry. It enables gradient polishing of LDI fiber bundles of different specifications, adapting to various polishing needs. The pressure pump drives the polishing slurry to form a stable carrier liquid film, providing a good medium foundation for ultra-fine polishing. Simultaneously, the gap adjustment mechanism suspends the grinding head, avoiding stress damage caused by mechanical contact and reducing end-face defects at the source. Grooves of different diameters on the grinding disc guide the fluid to generate eddies, creating uniform shear force when obliquely incident on the fiber bundle surface. A "layered peeling" mechanism removes the subsurface damage layer of the fiber bundle, forming a smooth end face. Compared to the traditional "squeezing destruction" method, this increases polishing efficiency, significantly improves polishing accuracy, and reduces damage to the fiber bundle. Furthermore, the polishing slurry supply mechanism and recovery port allow for slurry recycling, saving resources and reducing production costs. The entire device operates precisely and reliably, effectively improving the polishing quality and reliability of LDI fiber bundles. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings: Figure 1 This is a first-view schematic diagram of the overall structure of the grinding device of this utility model; Figure 2 This is a second-view schematic diagram of the overall structure of the grinding device of this utility model; Figure 3 This is a utility model Figure 2 A magnified structural diagram at point A; Figure 4 This is a top view schematic diagram of the grinding disc structure of this utility model; Figure 5 This is a schematic diagram of the clamping component of this utility model; Figure 6 This is a schematic diagram of the lower end structure of the grinding head of this utility model; Figure 7 This is a schematic diagram of the grinding disc and groove structure of this utility model; In the diagram: 1. Workbench; 2. Fiber optic bundle; 3. Groove; 4. Grinding head; 5. Mounting hole; 6. Liquid inlet; 7. Grinding disc; 8. Trench; 9. Pressure pump; 10. First pipe; 11. Storage tank; 12. Delivery pipe; 13. Recovery port; 14. Second pipe; 15. Adjusting plate; 16. Base plate; 17. Slide rail; 18. Limiting plate; 19. Fastening plate; 20. Fastening bolt; 21. Fixing plate; 22. Extension column. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Please see Figures 1-7 This utility model provides a technical solution: a highly reliable LDI fiber bundle polishing device, including a worktable 1, a pressure pump 9, a polishing head 4, a polishing disc 7, a groove 8, a polishing slurry supply mechanism, and a gap adjustment mechanism. The worktable 1 is provided with a groove 3. The polishing head 4 is located in the groove 3 through the gap adjustment mechanism. The polishing head 4 is provided with a fiber bundle 2. The polishing disc 7 is fixedly installed in the groove 3. The polishing disc 7 is provided with a groove 8. The polishing slurry supply system is located at one end of the pressure pump 9. The pressure pump 9 is located on one side of the worktable 1. The polishing slurry is sprayed from the bottom of the polishing head 4 through the pressure pump 9 to form a suspension film.

[0017] During use, the pressure pump 9 is turned on, and the grinding fluid in the storage tank 11 enters the inlet 6 at the upper end of the grinding head 4 through the first pipe 10, the pressure pump 9, and the delivery pipe 12. It diffuses from the center of the grinding head 4 to the surrounding area. When the grinding fluid forms a 5-30μm thick carrier liquid film between the grinding head 4 and the grinding disc 7, and the grinding fluid flows through the threaded groove 8 at the upper end of the grinding disc 7, the contraction of the flow channel in the groove 8 disrupts the laminar flow state of the fluid, causing the grinding fluid to generate a 45° oblique incident vortex. According to the surface roughness requirements of the fiber bundle 2, the fastening bolt 20 of the gap adjustment mechanism is rotated in the forward direction. Under the action of the fastening plate 19, the extension column 22, along with the fixing plate 21, slides away from the slide rail 17 and is no longer in contact with the slide rail 17. At this time, the moving adjustment plate 15 moves up and down along the slide rail 17, thereby adjusting the height of the grinding head 4 and changing the gap between the grinding head 4 and the grinding disc 7. After the adjustment is completed, the reverse rotation is performed. Similarly, the fixed plate 21, in conjunction with the adjusting plate 15, is fastened to the slide rail 17 by the arc surface of the fixed plate 20. This fixes the position of the adjusting plate 15 after adjustment, thus adjusting the vertical distance between the grinding head 4 and the grinding disc 7. Simultaneously, the flow rate of the polishing fluid is adjusted by the pressure pump 9, allowing the damaged layer to be removed layer by layer using a "layered peeling" mechanism. After polishing is completed, the pressure pump 9 is turned off to stop the supply of polishing fluid. The fiber bundle 2 is removed and its end face is thoroughly rinsed with deionized water to remove residual polishing fluid and abrasive particles. The surface quality of the polished end face of the fiber bundle 2 is tested to confirm that the subsurface damage layer removal rate is ≥99.9%, the roughness Ra is ≤0.5nm, and the defect removal rate reaches 100%. The pump on the second pipe 14 is turned on, and the residual polishing fluid is returned to the storage tank 11 through the recovery port 13 at the bottom of the workbench 1, completing the recycling.

[0018] The cross-sectional structure of the grinding head 4 is inverted T-shaped and is suspended above the center of the groove 3. There are two sets of symmetrically distributed mounting holes 5 on both sides of the grinding head 4. Each set of mounting holes 5 contains several holes. An optical fiber bundle 2 is inserted into each mounting hole 5. A liquid inlet 6 is fixedly connected to the upper end of the grinding head 4. A grinding disc 7 is located directly below the grinding head 4.

[0019] There are several grooves 8, and the grooves 8 adopt a ring structure with different diameters. Adjacent grooves 8 are distributed at equal intervals along the center point of the grinding disk 7 on the upper surface of the grinding disk 7.

[0020] The diameter of several grooves 8 decreases gradually from the outside to the inside, the spacing between adjacent grooves 8 is 5mm, and the spacing between the grinding head 4 and the grinding disc 7 ranges from 10μm to 30μm.

[0021] The grinding fluid supply mechanism includes a first pipe 10 and a storage tank 11. The storage tank 11 is located on one side of the workbench 1. The storage tank 11 is connected to a pressure pump 9 through the first pipe 10. The pressure pump 9 drives the grinding fluid to flow. One end of the pressure pump 9 is connected to a delivery pipe 12. The other end of the delivery pipe 12 is located in the inlet 6. A recovery port 13 is opened on the groove 3. The recovery port 13 is connected to one end of the second pipe 14. When in use, the pump on the second pipe 14 is started. The second pipe 14 guides the grinding fluid containing grinding debris into the groove 3 back to the storage tank 11. The other end of the second pipe 14 is located at the upper end of the storage tank 11 and is connected to the storage tank 11. The storage tank 11 is used to store the grinding fluid, which facilitates the subsequent recycling of the grinding fluid.

[0022] A filter screen is installed inside the storage tank 11. The filter screen is located below the outlet end of the second pipe 14. A pump is installed on the second pipe 14. The filter screen can filter the grinding fluid containing grinding debris that is returned to the storage tank 11, so that the filtered grinding fluid can be recycled.

[0023] The gap adjustment mechanism includes an adjustment plate 15, a base plate 16, a slide rail 17, and a clamping component. The base plate 16 is fixedly connected to the upper end of the groove 3. Two symmetrically distributed slide rails 17 are fixedly connected to the upper end of the base plate 16. The adjustment plate 15 is sleeved on the outer wall of the two slide rails 17. One end of the adjustment plate 15 is integrally formed with the grinding head 4. A clamping component is provided between the adjustment plate 15 and the two slide rails 17.

[0024] The clamping components include a fastening plate 19, a fastening bolt 20, an extension post 22, and a fixing plate 21. The fastening plate 19 is fixedly connected to one side of the adjusting plate 15. The fastening bolt 20 is threadedly connected to the fastening plate 19. One end of the fastening bolt 20 is rotatably connected to the extension post 22. One sidewall of the fixing plate 21 is fixedly connected to the extension post 22. A sliding cavity is formed at the end of the adjusting plate 15 near the fastening bolt 20, and the fixing plate 21 slides within the sliding cavity. Limiting plates 18 are fixedly connected to the top ends of the two slide rails 17, and are fastened by forward rotation. Bolt 20, under the action of fastening plate 19, causes extension column 22 to slide away from slide rail 17 along fixing plate 21. At this time, moving adjustment plate 15 moves up and down along slide rail 17 to adjust the height of grinding head 4 and change the gap between grinding head 4 and grinding disc 7. After adjustment, fastening bolt 20 is rotated in the opposite direction. Similarly, fixing plate 21, together with the arc surface of adjustment plate 15 in contact with slide rail 17, is fastened and clamped on slide rail 17 to fix the position of adjustment plate 15 after adjustment, so as to realize subsequent gradient grinding.

[0025] Finally, it should be noted that: all parts not described in this utility model are the same as or can be implemented using existing technology. The above description is only a preferred embodiment of this utility model and is not intended to limit this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-reliability LDI fiber bundle polishing device, comprising a worktable (1), characterized in that: It also includes a pressure pump (9), a grinding head (4), a grinding disc (7), a groove (8), a grinding fluid supply mechanism, and a gap adjustment mechanism. The worktable (1) is provided with a groove (3). The grinding head (4) is located in the groove (3) through the gap adjustment mechanism. The grinding head (4) is provided with an optical fiber bundle (2). The grinding disc (7) is fixedly installed in the groove (3). The groove (8) is opened on the grinding disc (7). The grinding fluid supply system is located at one end of the pressure pump (9). The pressure pump (9) is located on one side of the worktable (1).

2. The high-reliability LDI fiber bundle polishing device according to claim 1, characterized in that: The cross-sectional structure of the grinding head (4) is inverted T-shaped and is suspended above the center of the groove (3). The grinding head (4) has two sets of symmetrically distributed mounting holes (5) on both sides. Each set of mounting holes (5) has several holes. Each mounting hole (5) is inserted with the fiber bundle (2). The upper end of the grinding head (4) is fixedly connected to the liquid inlet (6). The grinding disc (7) is located directly below the grinding head (4).

3. The high-reliability LDI fiber bundle polishing device according to claim 2, characterized in that: The number of grooves (8) is several, and the grooves (8) adopt a ring structure with different diameters. Adjacent grooves (8) are distributed at equal intervals along the center point of the grinding disc (7) on the upper surface of the grinding disc (7).

4. The high-reliability LDI fiber bundle polishing device according to claim 3, characterized in that: The diameter of several grooves (8) decreases from the outside to the inside, the distance between adjacent grooves (8) is 5 mm, and the distance between the grinding head (4) and the grinding disc (7) is 10 μm-30 μm.

5. The high-reliability LDI fiber bundle polishing device according to claim 4, characterized in that: The grinding fluid supply mechanism includes a first pipe (10) and a storage tank (11). The storage tank (11) is located on one side of the workbench (1). The storage tank (11) is connected to the pressure pump (9) through the first pipe (10). One end of the pressure pump (9) is connected to a delivery pipe (12). The other end of the delivery pipe (12) is located in the inlet (6). A recovery port (13) is opened on the groove (3). The recovery port (13) is connected to one end of the second pipe (14). The other end of the second pipe (14) is located at the upper end of the storage tank (11) and is connected to the storage tank (11).

6. The high-reliability LDI fiber bundle polishing device according to claim 5, characterized in that: A filter screen is installed inside the liquid storage tank (11), and the filter screen is located below the outlet end of the second pipe (14). A pump is installed on the second pipe (14).

7. The high-reliability LDI fiber bundle polishing device according to claim 1, characterized in that: The gap adjustment mechanism includes an adjustment plate (15), a base plate (16), a slide rail (17), and a clamping component. The base plate (16) is fixedly connected to the upper end of the groove (3). Two symmetrically distributed slide rails (17) are fixedly connected to the upper end of the base plate (16). The adjustment plate (15) is sleeved on the outer wall of the two slide rails (17). One end of the adjustment plate (15) is integrally formed with the grinding head (4). A clamping component is provided between the adjustment plate (15) and the two slide rails (17).

8. The high-reliability LDI fiber bundle polishing device according to claim 7, characterized in that: The clamping components include a fastening plate (19), a fastening bolt (20), an extension post (22), and a fixing plate (21). The fastening plate (19) is fixedly connected to one side of the adjusting plate (15). The fastening bolt (20) is threadedly connected to the fastening plate (19). The extension post (22) is rotatably connected to one end of the fastening bolt (20). The side wall of one end of the fixing plate (21) is fixedly connected to the extension post (22). A sliding cavity is provided at one end of the adjusting plate (15) near the fastening bolt (20). The fixing plate (21) slides in the sliding cavity. Limiting plates (18) are fixedly connected to the top ends of the two slide rails (17).

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