Chemical mechanical polishing apparatus

Abstract

The utility model relates to automatic grinding equipment technical field especially relates to chemical mechanical grinding device, this chemical mechanical grinding device includes clamping seat, grinding assembly, grinding liquid injection assembly and drive module, clamping seat has the clamping end face along the vertical direction extension, the clamping end face can be detachably fixed with the fixed end face of product, the grinding end of grinding assembly is opposite to the grinding end face of product along the first direction and is arranged, the grinding end of grinding assembly can rotate around the first direction, the first direction is parallel with the horizontal direction, grinding liquid injection assembly is fixed with grinding assembly, grinding liquid injection assembly is configured to spray grinding liquid to the grinding end face of product, drive module is configured to drive grinding assembly to move in space relative to product, makes product with the state that the grinding end face extends along the vertical direction is detachably clamped and fixed and carries out chemical mechanical grinding, to make grinding byproduct can be discharged under the action of gravity of itself.

Description

Technical Field

[0001] This utility model relates to the field of automated grinding equipment technology, and in particular to a chemical mechanical grinding device. Background Technology

[0002] Chemical mechanical grinding (CMP) machines combine chemical corrosion with mechanical grinding to remove excess material from product surfaces.

[0003] In existing technologies, chemical mechanical polishing (CMP) machines include a polishing disc, a polishing pad, a polishing head, and a spray head. The polishing pad is fixed to the upper surface of the polishing disc, and the product to be polished is fixed to the lower end of the polishing head. The polishing head drives the product to come into contact with the polishing pad and rotates relative to the polishing pad. The spray head sprays polishing fluid between the product and the polishing pad to achieve CMP polishing. In existing CMP machines, the polishing head can only clamp and fix small-sized products and drive them to rotate; it cannot clamp and drive medium to large-sized products. Furthermore, because the product and the polishing pad are positioned vertically relative to each other, polishing byproducts cannot be effectively removed during CMP polishing, affecting the polishing effect.

[0004] Therefore, there is an urgent need to invent a chemical mechanical grinding device to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a chemical mechanical grinding device to achieve stable clamping and grinding of products of various specifications with good grinding effect.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A chemical mechanical grinding (CMP) apparatus is used for chemically mechanically grinding a product having a face to be fixed and a face to be ground, the CMP apparatus comprising:

[0008] A clamping base having a clamping end face extending in a vertical direction, the clamping end face being detachably fixed to the end face of the product to be fixed;

[0009] A grinding assembly, wherein the grinding end of the grinding assembly is disposed opposite to the end face to be ground of the product along a first direction, and the grinding end of the grinding assembly is rotatable around the first direction, wherein the first direction is parallel to the horizontal direction;

[0010] A slurry spraying assembly, mounted and fixed to the grinding assembly, the slurry spraying assembly being configured to spray slurry toward the end face of the product to be ground; and

[0011] A drive module configured to drive the grinding assembly to move arbitrarily in space relative to the product.

[0012] As an optional solution, the grinding assembly includes:

[0013] The first driving component is fixedly connected to the output end of the driving module;

[0014] A first adapter is fixedly connected to the output end of the first driving member, and the first driving member is configured to drive the first adapter to rotate about the first direction; and

[0015] The grinding element is fixedly connected to the first adapter, and the grinding element can abut against the end face to be ground.

[0016] As an optional solution, the chemical mechanical grinding apparatus further includes:

[0017] A cleaning fluid spraying assembly is installed and fixed to the grinding assembly, and the cleaning fluid spraying assembly is configured to spray cleaning fluid toward the end face of the product to be ground.

[0018] As an optional solution, the chemical mechanical grinding apparatus further includes:

[0019] A drying assembly is mounted and fixed to the grinding assembly, and the drying assembly is configured to blow air toward the end face of the product to be ground.

[0020] As an optional solution, the drive module includes:

[0021] A first driving component, wherein the grinding component is connected to the output terminal of the first driving component, and the first driving component is configured to drive the grinding component to move along a second direction;

[0022] A second driving component is provided, wherein the output terminal of the first driving component is connected to the output terminal of the second driving component, and the second driving component is configured to drive the first driving component to move along the first direction; and

[0023] The third drive assembly is connected to the output end of the clamping base. The third drive assembly is configured to drive the clamping base to move along a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other in space.

[0024] As an optional solution, the first driving component includes:

[0025] A first mounting base is used to mount and fix the grinding assembly; and

[0026] A second driving element is installed at the output end of the second driving assembly. The output end of the second driving element is connected to the first mounting base. The second driving element is configured to drive the first mounting base to move along the second direction.

[0027] As an optional solution, the first driving component further includes:

[0028] A first guide rail is installed at the output end of the second drive assembly. The first guide rail extends along the second direction. The first mounting base has a first guide slider, which slides in cooperation with the first guide rail.

[0029] As an optional solution, the first drive assembly has multiple first guide rails, the first mounting base has multiple first guide sliders, each first guide rail extends along the second direction and is mounted on the output end of the second drive assembly, and each first guide rail slides in cooperation with at least one first guide slider.

[0030] As an optional solution, the clamping base can be detachably fixed to the product using a vacuum adsorption method.

[0031] As an optional solution, the chemical mechanical grinding apparatus further includes:

[0032] A waste box is disposed below the clamping base. The waste box has a storage space for accommodating grinding by-products. The upper end of the storage space has an opening, and the center of the opening is directly opposite the end face to be ground along the vertical direction.

[0033] The beneficial effects of this utility model are:

[0034] The chemical mechanical grinding device provided by this utility model, by setting a clamping end face extending vertically within a clamping base, allows for detachable fixing of the clamping end face to the product's end face. This enables the product to be detachably clamped and fixed by the clamping base with the end face to be ground extending vertically, meeting the clamping requirements of products of different specifications. By setting a grinding assembly, the grinding end of the grinding assembly is positioned opposite the end face to be ground of the product along a first direction, ensuring that the first direction is parallel to the horizontal direction. When the grinding end of the grinding assembly abuts against the end face to be ground of the product, the rotation of the grinding end of the grinding assembly around the first direction enables the grinding end of the grinding assembly to achieve a grinding effect on the end face to be ground of the product. The mechanical grinding of the contact part is achieved by setting a drive module to drive the grinding component to move arbitrarily in space relative to the product. This enables the grinding end of the grinding component to perform overall mechanical grinding of the end face of the product to be ground. Combined with the grinding slurry spraying device installed and fixed at the grinding component, the grinding slurry spraying device sprays grinding slurry onto the end face of the product to be ground. By utilizing the chemical reaction between the grinding slurry and the product, chemical mechanical grinding of the end face of the product to be ground can be achieved. Moreover, since the product is detachably clamped and fixed by the clamping seat in a state where the end face to be ground is extended in the vertical direction, the grinding by-products generated during the grinding process can be quickly discharged under the action of its own gravity, ensuring the grinding effect of the product. Attached Figure Description

[0035] Figure 1 This is a first structural schematic diagram of the chemical mechanical grinding apparatus provided in this embodiment of the present invention;

[0036] Figure 2 This is a second structural schematic diagram of the chemical mechanical grinding apparatus provided in this embodiment of the present invention;

[0037] Figure 3 This is a schematic diagram of the structure of the grinding assembly, grinding slurry spraying assembly, cleaning slurry spraying assembly, drying assembly, part of the first driving assembly, and part of the second driving assembly provided in the embodiments of this utility model;

[0038] Figure 4 This is a schematic diagram of the structure of the grinding assembly provided in this embodiment of the utility model.

[0039] In the picture:

[0040] 100. Clamping seat; 110. Third guide slider;

[0041] 200, Grinding assembly; 210, First drive component; 220, First adapter component; 230, Grinding component;

[0042] 300. Grinding fluid injection assembly;

[0043] 400. Cleaning fluid spraying assembly;

[0044] 500. Drying components;

[0045] 600, First drive assembly; 610, First mounting base; 611, First guide slider; 620, First guide rail;

[0046] 700. Second drive assembly; 710. Second mounting base; 711. Second guide slider; 720. Second guide rail;

[0047] 800. Third drive assembly; 810. Third guide rail;

[0048] 900, abutment;

[0049] 2000, Product. Detailed Implementation

[0050] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0051] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0052] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0054] The product to be processed has a fixed end face and a polishing end face positioned opposite each other. Existing chemical mechanical polishing (CMP) machines include a polishing disc, a polishing pad, a polishing head, and a spray head. The polishing pad is fixed to the upper end face of the polishing disc, and the lower end of the polishing head is fixedly connected to the product's fixed end face. The polishing head drives the product's polishing end face to abut against the polishing pad and rotate relative to the pad. The spray head sprays polishing fluid between the product and the polishing pad to achieve CMP polishing. In existing CMP machines, the polishing head can only clamp and fix small-sized products and drive them to rotate; it cannot clamp and drive medium to large-sized products. Furthermore, because the product and polishing pad are positioned relative to each other vertically, polishing byproducts cannot be effectively removed during CMP polishing, affecting the polishing effect.

[0055] To solve the above problems, such as Figures 1-3 As shown, this embodiment provides a chemical mechanical polishing (CMP) apparatus to achieve stable clamping and polishing of products 2000 of various specifications, ensuring polishing effect. Specifically, the CMP apparatus includes a clamping base 100, a polishing component 200, a polishing slurry spraying component 300, and a drive module. The clamping base 100 has a clamping end face extending in a vertical direction, which can be detachably fixed to the end face of the product 2000 to be fixed. The polishing end of the polishing component 200 is arranged opposite to the end face of the product 2000 to be polished along a first direction, and the polishing end of the polishing component 200 can rotate around the first direction, which is parallel to the horizontal direction. The polishing slurry spraying component 300 is installed and fixed to the polishing component 200 and is configured to spray polishing slurry toward the end face of the product 2000 to be polished. The drive module is configured to drive the polishing component 200 to move arbitrarily in space relative to the product 2000.

[0056] This chemical mechanical polishing apparatus features a vertically extending clamping end face within the clamping base 100, allowing for detachable fixation of the product 2000's end face to be polished. This enables the product 2000 to be detachably clamped and fixed by the clamping base 100 with the polished end face extending vertically, meeting the clamping requirements for products 2000 of different specifications. The polishing assembly 200 is positioned such that its polishing end is aligned with the polished end face of the product 200 along a first direction, ensuring that the first direction is parallel to the horizontal direction. When the polishing end of the polishing assembly 200 abuts against the polished end face of the product 2000, rotation of the polishing end of the assembly around the first direction allows for the polishing end of the assembly 200 to contact the part of the product 200's end face that is being polished. The mechanical grinding process involves setting up a drive module to drive the grinding assembly 200 to move arbitrarily within space relative to the product 2000. This enables the grinding end of the grinding assembly 200 to perform overall mechanical grinding of the end face of the product 2000 to be ground. Combined with the installation and fixing of the grinding liquid spraying assembly 300 at the grinding assembly 200, the grinding liquid spraying assembly 300 sprays grinding liquid towards the end face of the product 2000 to be ground. Utilizing the chemical reaction between the grinding liquid and the product 2000, chemical mechanical grinding of the end face of the product 2000 to be ground can be achieved. Moreover, since the product 2000 is detachably clamped and fixed by the clamping base 100 in a state where the end face to be ground extends in the vertical direction, the grinding by-products generated during the grinding process can be quickly discharged under its own gravity, ensuring the grinding effect on the product 2000.

[0057] It should be noted that in this embodiment, the first direction is the left-right direction, with the clamping base 100, product 2000, and grinding assembly 200 arranged sequentially from left to right. In other embodiments, the specific direction of the first direction can be adaptively adjusted according to actual needs, as long as the first direction is parallel to the horizontal direction; this embodiment does not impose specific limitations. In this embodiment, the product 2000 is a glass substrate; in other embodiments, the specific type of product 2000 can also be adjusted according to actual needs.

[0058] Furthermore, in this embodiment, the clamping base 100 is detachably fixed to the product 2000 using a vacuum adsorption method. This vacuum adsorption method not only ensures effective fixation of the product 2000 but also prevents damage to the product 2000 due to collisions during clamping. Specifically, in this embodiment, the clamping end face of the clamping base 100 has a vacuum suction cup, which is vacuum-adsorbed and fixed to the end face of the product 2000 to be fixed. The specific structure and working principle of the vacuum suction cup are existing technologies and will not be described in detail here.

[0059] Furthermore, in this embodiment, the clamping end face of the clamping base 100 has four vacuum suction cups, which are spaced apart and work together to vacuum-adhere and fix the product 2000. In other embodiments, the specific number of vacuum suction cups in the clamping base 100 can be adjusted according to actual needs; this embodiment does not impose a specific limitation.

[0060] As an optional solution, the chemical mechanical polishing apparatus also includes a cleaning fluid spraying assembly 400, which is fixedly installed with the polishing assembly 200. The cleaning fluid spraying assembly 400 is configured to spray cleaning fluid onto the end face of the product 2000 to be polished. By additionally installing the cleaning fluid spraying assembly 400 fixedly with the polishing assembly 200, the cleaning fluid is sprayed onto the end face of the product 2000 to be polished. After the polishing assembly 200 completes the chemical mechanical polishing of the end face of the product 2000, the cleaning fluid can quickly clean the end face of the product 2000, removing the polishing fluid and polishing byproducts adhering to the end face of the product 2000. It should be noted that the specific structure and working principle of the cleaning fluid spraying assembly 400 and the specific structure and working principle of the polishing fluid spraying assembly 300 are existing technologies and will not be described in detail here.

[0061] In an optional embodiment, the chemical mechanical polishing apparatus further includes a drying component 500, which is fixedly mounted to the polishing component 200. The drying component 500 is configured to blow air toward the end face of the product 2000 to be polished. By additionally setting the drying component 500, which is fixedly mounted to the polishing component 200, and blowing air toward the end face of the product 2000 to be polished after the cleaning solution has finished rinsing the end face of the product 2000, rapid drying of the end face of the product 2000 to be polished can be achieved, allowing for rapid subsequent processing of the product 2000 and improving the overall processing efficiency of the product 2000. It should be noted that the drying component 500 is a hot air blower, which blows hot air toward the end face of the product 2000 to be polished, further improving the drying efficiency of the end face of the product 2000 to be polished.

[0062] In addition, in this embodiment, the chemical mechanical polishing apparatus also includes a protective shell (not shown in the figure). The polishing assembly 200, the polishing slurry spraying assembly 300, the cleaning fluid spraying assembly 400, and the drying assembly 500 are respectively installed inside the protective shell to improve the protection of the polishing assembly 200, the polishing slurry spraying assembly 300, the cleaning fluid spraying assembly 400, and the drying assembly 500 while they are respectively installed and fixed to the polishing assembly 200.

[0063] As an optional feature, the chemical mechanical grinding apparatus also includes a waste container (not shown in the figure), which is located below the clamping base 100. The waste container has a storage space for containing grinding by-products, grinding fluid, and cleaning fluid. The upper end of the storage space has an opening, the center of which is vertically aligned with the end face to be ground. By arranging the waste container below the clamping base 100 and creating a storage space within it to contain grinding by-products, grinding fluid, and cleaning fluid, and ensuring that the center of the opening at the upper end of the storage space is vertically aligned with the end face to be ground, the grinding by-products, grinding fluid, and cleaning fluid can all flow downwards along the end face to be ground under their own gravity and fall into the storage space, thus achieving the collection of grinding by-products, grinding fluid, and cleaning fluid.

[0064] Combination Figure 4 The specific structure of the grinding assembly 200 is described below. The grinding assembly 200 includes a first driving member 210, a first adapter 220, and a grinding member 230. The first driving member 210 is fixedly connected to the output end of the driving module, the first adapter 220 is fixedly connected to the output end of the first driving member 210, the first driving member 210 is configured to drive the first adapter 220 to rotate around a first direction, and the grinding member 230 is fixedly connected to the first adapter 220, and the grinding member 230 can abut against the end face to be ground. By fixing the first driving component 210 to the output end of the driving module, fixing the first adapter 220 to the output end of the first driving component 210, and fixing the grinding component 230 to the first adapter 220, when the driving module drives the first driving component 210 to move arbitrarily in space, it can drive the grinding component 230 to move arbitrarily in space, so that the grinding component 230 abuts against the end face to be ground. Combined with the first driving component 210 driving the first adapter 220 to rotate around a first direction, it drives the grinding component 230 to rotate around the first direction, so that the end face to be ground is mechanically ground on the basis of the grinding component 230 abutting against the end face to be ground. With the chemical direction of the grinding fluid and the end face to be ground, chemical mechanical grinding of the end face to be ground is achieved. It should be noted that in this embodiment, the first driving component 210 is a rotary motor, and the grinding component 230 is a grinding pad. The specific structure and working principle of the rotary motor and the grinding pad are all prior art and will not be described in detail here.

[0065] In an alternative embodiment, such as Figures 1-3As shown, the drive module includes a first drive component 600, a second drive component 700, and a third drive component 800. The first drive element 210 in the grinding component 200 is connected to the output end of the first drive component 600. The first drive component 600 is configured to drive the grinding component 200 to move along a second direction. The first drive component 600 is connected to the output end of the second drive component 700. The second drive component 700 is configured to drive the first drive component 600 to move along a first direction. The clamping base 100 is connected to the output end of the third drive component 800. The third drive component 800 is configured to drive the clamping base 100 to move along a third direction. The first direction, the second direction, and the third direction are perpendicular to each other in space. By splitting the drive module into a first drive component 600, a second drive component 700, and a third drive component 800, and fixing the output end of the first drive component 600 to the first drive member 210 of the grinding component 200, the first drive component 600 drives the grinding component 200 to move along the second direction, thereby achieving the purpose of driving the grinding member 230 within the grinding component 200 to move relative to the product 200 in the second direction. Similarly, by connecting the output ends of the first drive component 600 and the second drive component 700, the second drive component 700 drives the first drive component 600 to move along the first direction, thus achieving the purpose of driving the grinding member 230 to move relative to the product 200 in the second direction. The purpose of the grinding component 230 in the grinding assembly 200 to move relative to the product 2000 in the first direction is achieved by connecting the output end of the third drive component 800 to the clamping base 100, and driving the clamping base 100 to move in the third direction by the third drive component 800. When the clamping base 100 clamps and fixes the product 2000, the purpose of driving the grinding component 230 of the grinding assembly 200 to move relative to the product 2000 in the third direction is achieved. By utilizing the characteristic that the first direction, the second direction and the third direction are perpendicular to each other in space, the purpose of driving the grinding component 230 of the grinding assembly 200 to move arbitrarily in space relative to the product 2000 is achieved.

[0066] It should be noted that in this embodiment, since the first direction is left-right, to satisfy the requirement that the first, second, and third directions are perpendicular to each other in space, the second direction is front-back and the third direction is up-down. In other embodiments, the specific directions of the second and third directions can be adaptively adjusted according to the specific direction of the first direction; this embodiment does not impose specific limitations.

[0067] Optionally, the first drive assembly 600 includes a first mounting base 610 and a second drive member (not shown in the figure). The first mounting base 610 is used to mount and fix the first drive member 210 of the grinding assembly 200. The second drive member is mounted on the output end of the second drive assembly 700 and connected to the first mounting base 610. The second drive member is configured to drive the first mounting base 610 to move along a second direction. It should be noted that, in this embodiment, the second drive member is a rotary motor and a lead screw and nut structure. The lead screw in the lead screw and nut structure extends along the second direction, and the nut is fixedly connected to the first mounting base 610. The rotary motor drives the lead screw to rotate around its own axis, thereby driving the nut and the first drive member 210 to move along the second direction.

[0068] Furthermore, the first drive assembly 600 also includes a first guide rail 620, which is mounted on the output end of the second drive assembly 700 and extends along a second direction. The first mounting base 610 has a first guide slider 611, which slides in cooperation with the first guide rail 620. When the first mounting base 610 moves along the second direction under the drive of the second drive member, the first guide slider 611 within the first mounting base 610 can slide along the first guide rail 620, thereby providing guidance for the movement of the first mounting base 610.

[0069] In one alternative embodiment, the first drive assembly 600 has multiple first guide rails 620, and the first mounting base 610 has multiple first guide sliders 611. Each first guide rail 620 extends along a second direction and is mounted on the output end of the second drive assembly 700, and each first guide rail 620 is slidably engaged with at least one first guide slider 611. By providing multiple first guide rails 620 extending along the second direction and ensuring that each first guide slider 611 is slidably engaged with at least one first guide slider 611, the guiding effect on the first mounting base 610 can be further improved. It should be noted that, in this embodiment, to save installation space and improve the structural compactness of the first drive assembly 600, the first drive assembly 600 has only one first guide rail 620, and this first guide rail 620 is slidably engaged with only one first guide slider 611. In other embodiments, the number of first guide slide rails 620 and the number of first guide sliders 611 that cooperate with each first guide slide rail 620 can be adjusted arbitrarily according to actual needs. This embodiment does not make specific limitations.

[0070] Understandably, the second drive assembly 700 includes a third drive member, a second mounting base 710, and a second guide rail 720. The second mounting base 710 has a second guide slider 711 that slidably engages with the second guide rail 720. The third drive assembly 800 includes a fourth drive member and a third guide rail 810. The clamping base 100 has a third guide slider 110 that slidably engages with the third guide rail 810. For simplicity, the specific structures of the second drive assembly 700 and the third drive assembly 800 will not be described in detail here. However, in this embodiment, the second drive assembly 700 has two second guide rails 720, and the second mounting base 710 has four second guide sliders 711, with each second guide rail 720 slidably engaging with two second guide sliders 711. Furthermore, the third drive assembly 800 has two third guide rails 810, and the clamping base 100 has four third guide sliders 110, with each third guide rail 810 slidably engaging with two third guide sliders 110.

[0071] In addition, in this embodiment, the chemical mechanical polishing apparatus also includes a base 900, and the clamping seat 100 and the moving module are all mounted on the base 900 to improve the structural compactness and structural strength of the chemical mechanical polishing apparatus.

[0072] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A chemical mechanical grinding apparatus, characterized in that, The chemical mechanical polishing apparatus is used for chemical mechanical polishing of a product (2000), the product having an end face to be fixed and an end face to be polished opposite to each other, and the chemical mechanical polishing apparatus includes: A clamping base (100) has a clamping end face extending in a vertical direction, which can be detachably fixed to the end face to be fixed of the product (2000). A grinding assembly (200) is provided with its grinding end facing the end face to be ground of the product (2000) along a first direction. The grinding end of the grinding assembly (200) is rotatable around the first direction, which is parallel to the horizontal direction. A slurry spraying assembly (300) is mounted and fixed to the grinding assembly (200), and the slurry spraying assembly (300) is configured to spray slurry onto the end face to be ground of the product (2000); and A drive module configured to drive the grinding assembly (200) to move arbitrarily in space relative to the product (2000).

2. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The grinding assembly (200) includes: The first driving component (210) is fixedly connected to the output end of the driving module; A first adapter (220) is fixedly connected to the output end of the first drive member (210), the first drive member (210) being configured to drive the first adapter (220) to rotate about the first direction; and The grinding part (230) is fixedly connected to the first adapter (220), and the grinding part (230) can abut against the end face to be ground.

3. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The chemical mechanical grinding apparatus also includes: A cleaning fluid spraying assembly (400) is installed and fixed to the grinding assembly (200), and the cleaning fluid spraying assembly (400) is configured to spray cleaning fluid toward the end face to be ground of the product (2000).

4. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The chemical mechanical grinding apparatus also includes: A drying assembly (500) is mounted and fixed to the grinding assembly (200), the drying assembly (500) being configured to blow air toward the end face to be ground of the product (2000).

5. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The drive module includes: A first driving component (600) is provided, wherein the grinding component (200) is connected to the output terminal of the first driving component (600), and the first driving component (600) is configured to drive the grinding component (200) to move along a second direction; A second drive component (700) is connected to the output terminal of the first drive component (600), and the second drive component (700) is configured to drive the first drive component (600) to move along the first direction; and A third drive assembly (800) is configured to drive the clamp (100) to move along a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other in space.

6. The chemical mechanical grinding apparatus according to claim 5, characterized in that, The first driving component (600) includes: A first mounting base (610) is used to mount and fix the grinding assembly (200); and A second drive element is installed at the output end of the second drive assembly (700), and the output end of the second drive element is connected to the first mounting base (610). The second drive element is configured to drive the first mounting base (610) to move along the second direction.

7. The chemical mechanical grinding apparatus according to claim 6, characterized in that, The first driving component (600) further includes: A first guide rail (620) is installed at the output end of the second drive assembly (700). The first guide rail (620) extends along the second direction. The first mounting base (610) has a first guide slider (611), which slides in cooperation with the first guide rail (620).

8. The chemical mechanical grinding apparatus according to claim 7, characterized in that, The first drive assembly (600) has a plurality of first guide slides (620), and the first mounting base (610) has a plurality of first guide sliders (611). Each first guide slide (620) extends along the second direction and is mounted on the output end of the second drive assembly (700). Each first guide slide (620) is slidably engaged with at least one first guide slider (611).

9. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The clamping base (100) is detachably fixed to the product (2000) by vacuum adsorption.

10. The chemical mechanical grinding apparatus according to claim 1, characterized in that, The chemical mechanical grinding apparatus also includes: A waste box is disposed below the clamping base (100). The waste box has a storage space for accommodating grinding by-products. The upper end of the storage space has an opening, and the center of the opening is directly opposite the end face to be ground along the vertical direction.

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