Crystal bar chuck and rounding machine

Abstract

The utility model relates to the technical field of semiconductor, disclose a crystal bar chuck and rounder, the crystal bar chuck includes fixed base and chuck body, fixed base is detachably connected in headstock or tailstock, chuck body is detachably connected in fixed base, the side away from fixed base of chuck body is equipped with flat end groove, the flat end of the crystal bar to be handled can be embedded in the flat end groove, the groove bottom of flat end groove is also equipped with taper groove, the taper tip of the crystal bar to be handled can be inserted in the taper groove, when the crystal bar chuck of the utility model is arranged on the headstock and tailstock respectively, can carry out the clamping to the crystal bar to be handled that both ends are flat end, or both ends are taper tip, or one end is flat end, the other end is taper tip, it is strong in adaptability, can satisfy the clamping installation of multiple crystal bar to be handled, and the taper tip of the crystal bar to be handled and taper groove surface contact, thereby no clamping damage.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a crystal rod chuck and a rounding machine. Background Technology

[0002] In the semiconductor industry chain, hard and brittle material ingots such as single-crystal silicon ingots and sapphire ingots typically require external cylindrical grinding before slicing. This process removes surface roughness and unevenness, resulting in cylinders with high roundness and consistent diameter. This step is crucial for subsequent slicing quality and yield. The ingot rounding machine is the core equipment for this process. Its basic principle is that chucks on the head and tailstocks clamp both ends of the ingot, and the spindle drives the headstock chucks to rotate the ingot. Simultaneously, a rounding grinding wheel mounted on the tool holder grinds the rotating ingot.

[0003] In the prior art, the chucks on the head and tail are usually three-jaw or four-jaw chucks. The crystal rods are clamped and fixed by adjusting the jaws of the three-jaw or four-jaw chuck. However, this structure has poor adaptability and can only clamp regular columnar crystal rods. When clamping crystal rods with conical tips, it is very easy to cause damage to the conical surface. Utility Model Content

[0004] The purpose of this invention is to provide a crystal rod chuck and a rounding machine to solve the problem that the existing chucks have poor adaptability, can only clamp regular cylindrical crystal rods, and are prone to damage to the conical surface when clamping crystal rods with conical tips.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] On one hand, this utility model provides a crystal rod chuck, which can be respectively disposed on a head seat and a tail seat for clamping crystal rods to be processed from both sides. The ends of the crystal rods to be processed are flat ends or tapered tips. The crystal rod chuck includes:

[0007] A fixing base, wherein the fixing base is detachably connected to the head base or the tail base;

[0008] The chuck body is detachably connected to the fixed base; a flat-head groove is provided on the side of the chuck body away from the fixed base, and the flat end of the crystal rod to be processed can be embedded in the flat-head groove; a conical groove is also provided at the bottom of the flat-head groove, and the conical tip of the crystal rod to be processed can be inserted into the conical groove.

[0009] As an alternative to the aforementioned crystal rod chuck, the tapered groove has a tapered pressing surface, which is arc-shaped along the axial direction of the chuck body.

[0010] As an alternative to the aforementioned crystal rod chuck, the chuck body is further provided with a clearance channel, which is connected to the bottom of the tapered groove along the axial direction of the chuck body.

[0011] As an alternative to the aforementioned crystal rod chuck, the fixing base has a hollow channel, which is connected to the clearance channel along the axial direction of the fixing base.

[0012] As an alternative to the above-mentioned crystal rod chuck, the crystal rod chuck further includes a positioning ring, which is detachably sleeved on the chuck body. The positioning ring has a stepped groove on the side opposite to the fixed base, and the flat end of the crystal rod to be processed can be embedded in the stepped groove.

[0013] As an alternative to the aforementioned crystal rod chuck, the groove opening edge of the stepped groove is provided with an arc-shaped chamfer.

[0014] As an alternative to the aforementioned crystal rod chuck, the stepped groove includes several grooves, which are arranged in a stepped structure along the axial direction of the retaining ring.

[0015] As an alternative to the above-mentioned crystal rod chuck, the outer periphery of the fixing seat is recessed inward to form an annular groove. The crystal rod chuck also includes a connector, which passes through the groove wall of the annular groove along the axial direction of the fixing seat and is connected to the chuck body. The connector includes several connectors, which are arranged around the fixing seat.

[0016] As an alternative to the aforementioned crystal rod chuck, the fixing base has a positioning groove, and the chuck body has a positioning boss that can be embedded in the positioning groove.

[0017] On the other hand, this utility model provides a rounding machine, including the crystal rod chuck as described above.

[0018] The beneficial effects of this utility model are:

[0019] The crystal ingot chuck includes a fixed base and a chuck body. The fixed base is detachably connected to a head seat or a tail seat, and the chuck body is detachably connected to the fixed base. This allows for convenient installation and removal of the crystal ingot chuck on the head seat or tail seat, avoiding the difficulty of installation or removal caused by the excessive weight of a one-piece molded crystal ingot chuck. The chuck body has a flat-end groove on the side opposite to the fixed base, allowing the flat end of the crystal ingot to be processed to be inserted into the groove for adaptation to a flat end. A conical groove is also formed at the bottom of the flat-end groove, allowing the conical tip of the crystal ingot to be inserted into the conical groove for adaptation to a conical tip. When the crystal ingot chuck is mounted on the head seat or tail seat, it can accommodate crystals with either flat ends or conical tips. It can clamp crystal rods with one flat end and one tapered tip, or crystal rods with one flat end and the other tapered tip. It is highly adaptable and can meet the clamping and installation of various crystal rods. The tapered tip of the crystal rod contacts the tapered groove surface, so there is no clamping damage. It has high self-centering accuracy and can ensure that the axis of the crystal rod is coincident with the axis of the crystal rod chuck. At the same time, it is easy to operate. It can achieve clamping and loosening by simply controlling the axial displacement or abutment force of the crystal rod chuck on the head and tail seats. It is easy to automate. Attached Figure Description

[0020] Figure 1 A cross-sectional view of the crystal rod chuck provided in an embodiment of this utility model;

[0021] Figure 2 A cross-sectional view of a crystal rod chuck with a positioning retaining ring provided in an embodiment of this utility model.

[0022] In the picture:

[0023] 1. Fixed base; 11. Hollow channel; 12. Annular groove; 13. Positioning groove; 2. Chuck body; 21. Flat head groove; 22. Conical groove; 23. Clearance channel; 24. Positioning boss; 3. Positioning retaining ring; 31. Step groove; 4. Connecting piece. Detailed Implementation

[0024] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0025] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0028] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0029] like Figure 1 and Figure 2 As shown, this utility model provides a crystal rod chuck that can be respectively mounted on a head seat and a tail seat for clamping crystal rods to be processed from both sides. The ends of the crystal rods to be processed are flat ends or conical tips.

[0030] The crystal rod chuck includes a fixed base 1 and a chuck body 2. The fixed base 1 is detachably connected to the head seat or the tail seat, and the chuck body 2 is detachably connected to the fixed base 1. Thus, using the crystal rod chuck composed of the fixed base 1 and the chuck body 2, it is possible to easily install or remove the crystal rod chuck on the head seat or the tail seat, avoiding the difficulty of installation or removal caused by the excessive weight of the one-piece molded crystal rod chuck.

[0031] The chuck body 2 has a flat-head groove 21 on the side opposite to the fixing base 1. The flat end of the crystal rod to be processed can be embedded in the flat-head groove 21 to adapt to the flat end of the crystal rod. The bottom of the flat-head groove 21 also has a conical groove 22, and the conical tip of the crystal rod to be processed can be inserted into the conical groove 22 to adapt to the conical tip of the crystal rod. When the crystal rod chuck is respectively set on the head seat and the tail seat, it can accommodate crystal rods with flat ends, or It can clamp crystal rods with tapered tips at both ends, or one end with a flat end and the other end with a tapered tip. It is highly adaptable and can meet the clamping and installation of various crystal rods. The tapered tip of the crystal rod is in contact with the tapered groove 22, so there is no clamping damage. It has high self-centering accuracy and can ensure that the axis of the crystal rod is coincident with the axis of the crystal rod chuck. At the same time, it is easy to operate. It can achieve clamping and loosening by simply controlling the axial displacement or abutment force of the crystal rod chuck on the head and tail seats. It is easy to automate.

[0032] Specifically, the conical groove 22 has a conical pressing surface, which is arc-shaped along the axial direction of the chuck body 2. This arc-shaped conical pressing surface can adapt to conical tips of different sizes, thus improving the versatility of the crystal ingot chuck. Simultaneously, the chuck body 2 also has a clearance channel 23, which connects to the bottom of the conical groove 22 along the axial direction of the chuck body 2. Through the cooperation of the clearance channel 23 and the arc-shaped conical pressing surface, it can adapt to tall conical tips, meaning the surface of the conical tip can fit against the arc-shaped conical pressing surface, and the tip of the conical tip can be located within the clearance channel 23, further improving the versatility of the crystal ingot chuck. Optionally, the fixing base 1 is provided with a hollow channel 11, which is connected to the avoidance channel 23 along the axial direction of the fixing base 1. By setting the hollow channel 11, the weight of the fixing base 1 can be reduced, thereby facilitating the installation and disassembly of the crystal rod chuck. The hollow channel 11 can also avoid the tip of the cone tip.

[0033] Furthermore, the crystal ingot chuck also includes a positioning retaining ring 3, which is detachably sleeved on the outside of the chuck body 2. A stepped groove 31 is provided on the side of the positioning retaining ring 3 facing away from the fixing base 1. The flat end of the crystal ingot to be processed can be embedded in the stepped groove 31. By replacing the stepped grooves 31 with different shapes and sizes, it can accommodate flat ends of different shapes and sizes, thereby improving the versatility of the crystal ingot chuck. Simultaneously, there are several stepped grooves 31 arranged in a stepped structure along the axial direction of the retaining ring. This allows for the adaptation of flat ends of different sizes without disassembling the positioning retaining ring 3, using stepped grooves 31 of different sizes. Optionally, the edge of the stepped groove 31 is chamfered to reduce the difficulty of embedding the flat end of the crystal ingot to be processed into the stepped groove 31, avoiding collision damage to the edge of the flat end during installation. Further optionally, the positioning retaining ring 3 is connected to the chuck body 2 by an internal thread or by bolts.

[0034] Furthermore, the outer periphery of the fixing base 1 is recessed inward to form an annular groove. The crystal chuck also includes a connector 4, which passes through the groove wall of the annular groove along the axial direction of the fixing base 1 and connects to the chuck body 2. Several connectors 4 are arranged around the fixing base 1. The annular groove further reduces the weight of the fixing base 1 and can also accommodate the connectors 4, thereby reducing the radial dimension of the crystal chuck. The fixing base 1 has a positioning groove 13, and the chuck body 2 has a positioning boss 24. The positioning boss 24 can be embedded in the positioning groove 13. The positioning of the positioning boss 24 and the positioning groove 13 facilitates the installation and alignment of the connectors 4, reducing the assembly difficulty of the chuck body 2 and the fixing base 1. Optionally, the connector 4 is a bolt. After passing through the groove wall of the annular groove, the bolt is threaded to the chuck body 2. At the same time, the fixing seat 1 is also connected to the head seat or tail seat through the bolt. That is, after passing through the groove wall at the other end of the annular groove, the bolt is threaded to the head seat or tail seat.

[0035] This embodiment also provides a rounding machine, including the crystal rod chuck as described above. By using the crystal rod chuck as described above, the rounding machine can meet the clamping and installation of various crystal rods to be processed. The flat-head groove 21 is used to adapt the crystal rod to be processed to a flat-head end, and the conical groove 22 is used to adapt the crystal rod to be processed to a conical-tipped end. The rounding machine includes a head seat and a tail seat.

[0036] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A crystal ingot chuck, respectively mounted on a headstock and a tailstock, for clamping a crystal ingot to be processed from both sides, wherein the end of the crystal ingot to be processed is a flat end or a tapered tip, characterized in that, The ingot chuck includes: A fixing seat (1) is detachably connected to the head seat or the tail seat; The chuck body (2) is detachably connected to the fixed base (1); a flat-head groove (21) is provided on the side of the chuck body (2) away from the fixed base (1), and the flat end of the crystal rod to be processed can be embedded in the flat-head groove (21); a conical groove (22) is also provided at the bottom of the flat-head groove (21), and the conical tip of the crystal rod to be processed can be inserted into the conical groove (22).

2. The crystal rod chuck according to claim 1, characterized in that, The conical groove (22) has a conical pressing surface, which is arc-shaped along the axial direction of the chuck body (2).

3. The crystal rod chuck according to claim 2, characterized in that, The chuck body (2) is also provided with a clearance channel (23), which is connected to the bottom of the conical groove (22) along the axial direction of the chuck body (2).

4. The crystal rod chuck according to claim 3, characterized in that, The fixed base (1) has a hollow channel (11) which is connected to the clearance channel (23) along the axial direction of the fixed base (1).

5. The crystal rod chuck according to claim 1, characterized in that, The crystal rod chuck also includes a positioning ring (3), which is detachably sleeved on the outside of the chuck body (2). The positioning ring (3) has a stepped groove (31) on the side away from the fixed base (1), and the flat end of the crystal rod to be processed can be embedded in the stepped groove (31).

6. The crystal rod chuck according to claim 5, characterized in that, The groove edge of the stepped groove (31) is set with an arc-shaped chamfer.

7. The crystal rod chuck according to claim 5, characterized in that, The stepped groove (31) includes several, and the several stepped grooves (31) are arranged in a stepped structure along the axial direction of the retaining ring.

8. The crystal rod chuck according to claim 1, characterized in that, The outer periphery of the fixed seat (1) is recessed inward to form an annular groove. The crystal bar chuck also includes a connector (4). The connector (4) passes through the groove wall of the annular groove along the axial direction of the fixed seat (1) and is connected to the chuck body (2). The connector (4) includes several of them, and several connectors (4) are arranged around the fixed seat (1).

9. The crystal rod chuck according to claim 7, characterized in that, The fixed base (1) has a positioning groove (13), and the clamp body (2) has a positioning boss (24), which can be embedded in the positioning groove (13).

10. A rounding machine, characterized in that, Including the crystal rod chuck as described in any one of claims 1 to 9.

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