Slurry stable liquid supply system

Abstract

The embodiment of the present application provides a polishing liquid stable supply system, which aims to maintain the continuous operation of a supply module without interruption. The polishing liquid stable supply system comprises a supply module, a main controller and at least two power modules. The supply module is electrically connected to the main controller. The supply module has a storage tank, a plurality of pumps and a plurality of normally open valves. The storage tank is used to store liquid. The pump is connected to the storage tank by a pipeline to suck the liquid for machine use. The main controller is electrically connected to the pump. When the main controller cannot maintain the control of the supply module due to abnormality or failure, the pump will execute the end value locking. The isolating switch can cut off the signal between the supply module and the main controller, so that the operator can maintain the running state of the supply module to repair the main controller. The polishing liquid stable supply system of the present application can maintain the liquid supply under the condition of any single component abnormality or failure, so as to achieve uninterrupted liquid supply and keep the machine continuously running.

Description

Technical Field

[0001] This utility model relates to the field of grinding fluid supply technology, and in particular to a stable grinding fluid supply system that will not stop supplying fluid due to abnormal conditions. Background Technology

[0002] In semiconductor manufacturing, chemical mechanical polishing (CMP) is a critical process that typically requires the use of acid as part of the polishing slurry. The acid supply system places extremely high demands on production stability, product yield, and equipment safety. However, traditional acid supply systems usually rely on a single device, such as a single power supply, a single pump, or a single pressure gauge. A failure in any of these devices can easily lead to a complete supply disruption, significantly impacting production.

[0003] To address these issues, some systems have incorporated redundancy design. However, existing redundancy configurations are often insufficient or inefficient, failing to quickly switch to backup equipment in the event of a failure. Alternatively, a malfunction in the control system may cause the fluid supply system to shut down, rendering even redundancy designs ineffective. Utility Model Content

[0004] The main purpose of this invention is to provide a stable slurry supply system. The system adopts a multi-group parallel or series architecture in various parts. When some components fail, the system can automatically switch and continue the original slurry supply mode and immediately send a signal to the operator for maintenance. In this way, the fault can be quickly eliminated without interrupting the slurry supply. If it is necessary to stop the machine for testing, the slurry supply can be maintained without interruption until all grinding operations are completed, so as to avoid the generation of a large number of defective products due to temporary interruption.

[0005] The secondary objective of this invention is to utilize a final value locking setting to ensure that when an abnormality occurs in the equipment control system, the last input parameters before the abnormality are maintained, preventing the system from shutting down. Simultaneously, an alarm is issued to remind operators to perform maintenance.

[0006] The secondary objective of this invention is to maintain the operation of the liquid supply system while repairing the main controller when the main controller malfunctions due to the use of an isolating switch, until the repair is completed.

[0007] Another objective of this invention is to set up multiple sets of equipment that work together, and some of them are normally open equipment, so that when the equipment is abnormal, the liquid supply can still be maintained and an alarm can be issued, so as to avoid defects in the grinding operation of the downstream grinding machine due to interruption of the liquid supply.

[0008] This utility model discloses a stable grinding slurry supply system, comprising: a slurry supply module, a main controller, and at least two power modules. The slurry supply module is electrically connected to the main controller and includes: a storage tank, multiple pumps, and multiple normally open valves. The storage tank stores liquid; the multiple pumps are connected in series to the storage tank via pipelines to draw liquid and supply it to the machine tool; and the multiple normally open valves are located at opposite ends of the pipelines to control their opening and closing, ensuring that the normally open valves only receive a signal to close the pipeline when the system needs to shut it off.

[0009] The main controller is electrically connected to multiple pumps and can output control signals and receive sensing signals to operate the grinding slurry stable supply system. It is also connected via wiring to multiple pressure sensing units, isolating switches, and alarm units. The multiple pressure sensing units are installed on the pipeline to monitor pressure changes in the liquid and detect whether the pumps are operating normally. The isolating switch is located between the main controller and the pumps. The alarm unit is located within the main controller and is used to issue alarm messages.

[0010] At least two power modules are electrically connected to the main controller to supply power, and each module has: a power supply unit for electrically connecting to an external power source; and a connection unit for connecting to the main controller to supply power. The two power modules are connected in parallel via the connection unit, thereby simultaneously electrically connecting to the main controller, and the electrical circuits of the two power modules are independent.

[0011] When the main controller malfunctions or fails to maintain control of the liquid supply module, it will lock the pump to execute the last parameter command input by the main controller, thus keeping the liquid supply module running continuously.

[0012] The isolating switch can disconnect the signal between the liquid supply module and the main controller, allowing the operator to maintain the operation of the liquid supply module while repairing the main controller.

[0013] In a preferred embodiment of this invention, when one of the two power modules fails to supply power or malfunctions, the main controller can detect the fault through voltage changes. However, this does not affect the power supply, so the main controller can still continuously send signals without interrupting the liquid supply. Simultaneously, the main controller immediately notifies the operator for maintenance via the alarm unit. Meanwhile, the other normal power modules maintain continuous power supply to keep the system running.

[0014] In a preferred embodiment of the present invention, the plurality of pressure sensing units are two, and one pressure sensing unit is configured to hold the system pressure control, while the other pressure sensing units are used to cross-compare the pressure values ​​of the pipeline.

[0015] In a preferred embodiment of this utility model, when the pressure sensing unit holding the system pressure control is determined to be faulty, the system pressure control will be automatically switched to other non-faulty pressure sensing units to avoid the failure of a single sensing unit affecting the operation of the liquid supply module.

[0016] In a preferred embodiment of this invention, each of the plurality of pressure sensing units is electrically connected to a main controller, which receives the intra-tube pressure values ​​transmitted from two of the pressure sensing units in real time. When the detection results of the plurality of pressure sensing units are abnormal or interrupted, the main controller will issue a warning signal through an alarm unit so that the operator can troubleshoot the fault. Furthermore, the main controller will perform a final value lock to maintain the operation of the fluid supply module at the value before the abnormality.

[0017] In a preferred embodiment of this invention, at least two pumps are included, each comprising a pump power source and a pump drive unit. The two pumps operate independently and are connected in series in the pipeline. Normally, both pumps operate simultaneously to assist the liquid flow within the pipeline. This prevents excessive pressure fluctuations in the output liquid when one pump malfunctions or fails, thus avoiding impacts on the liquid supply quality.

[0018] In a preferred embodiment of this utility model, when one of the pumps malfunctions, the main controller will also issue a warning signal through the alarm unit to notify the operator for maintenance.

[0019] Preferably, the normally open valve is of the normally open type, keeping the pipeline unobstructed under normal circumstances, and only closing the normally open valve through a signal sent by the main controller when the liquid supply needs to be interrupted. Furthermore, the pipeline can still remain unobstructed when the power source of the normally open valve fails.

[0020] The advantage of this invention lies in the fact that, by utilizing the cooperation of various components within the system, when a single component fails, the other components can still maintain normal operation, reducing the dependence between components. Furthermore, combined with other design features, a single function is achieved by multiple independent components, thereby minimizing the impact of component failure on the liquid supply system. Attached Figure Description

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0022] Figure 1 A schematic diagram of the architecture of the grinding slurry stable supply system provided in the embodiment of this utility model.

[0023] Explanation of reference numerals in the attached figures: 1: Liquid supply module; 11: Pump; 111: Pump drive unit; 12: Storage tank; 13: Normally open valve; 2: Main controller; 21: Isolating switch; 22: Pressure sensing unit; 23: Alarm unit; 3: Power module; 31: Power supply unit; 32: Connection unit. Detailed Implementation

[0024] To facilitate understanding of this utility model, it will be described in detail below with reference to the accompanying drawings and embodiments. The drawings show some, but not all, embodiments of this utility model. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without any inventive effort are within the scope of protection of this utility model.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0026] like Figure 1 As shown in the schematic diagram of the system architecture of this utility model, the grinding slurry stable supply system of this utility model includes: a supply module 1, a main controller 2, and at least two power modules 3. The supply module 1 is electrically connected to the main controller 2 and includes: multiple pumps 11, a storage tank 12, multiple normally open valves 13, and pipelines connecting the aforementioned components. The storage tank 12 stores liquid and recovers liquid returning from the machine via the pipelines. The multiple pumps 11 are connected in series to the storage tank 12 via pipelines to draw liquid for use by the machine. The multiple normally open valves 13 are disposed at opposite ends of the pipelines to maintain and stabilize the pressure of the liquid in the pipelines. The purpose of using the normally open valves 13 is to receive a signal and open / close only when the system needs to shut down the pipeline; if the system malfunctions, it will not immediately close, thus achieving the purpose of uninterrupted liquid supply.

[0027] It should be noted that the term "pump" is used to refer to a device that transports fluids through mechanical action.

[0028] The main controller 2 is electrically connected to two pumps 11 and can output control signals and receive sensing signals to operate the grinding slurry stable supply system. In this embodiment, the main controller 2 is an industrial computer and is connected via a circuit to an isolating switch 21, two pressure sensing units 22, and an alarm unit 23. The isolating switch 21 is located between the main controller 2 and the pumps 11; the two pressure sensing units 22 are located in the pipeline to monitor the pressure of the liquid in the pipeline. The main controller 2 controls the two pumps 11 to operate simultaneously. When one pump 11 fails, the pressure sensing unit 22 detects the change in hydraulic pressure and immediately increases the operating efficiency of the other pump 11 to maintain stable output; the alarm unit 23 is located in the main controller 2 and is used to issue an alarm according to the system status. The alarm unit 23 is a buzzer or warning light to achieve the purpose of quick reminder. For example, if one pump 11 fails, or if the values ​​obtained by the two pressure sensing units 22 are too different, it also indicates that one of them may be damaged. At this time, an alarm is issued to remind the operator to repair it without immediately interrupting the liquid supply.

[0029] At least two power modules 3 are electrically connected to the main controller 2 to supply power, and each has: a power supply unit 31 and a connection unit 32, wherein the power supply unit 31 is electrically connected to an external power source; and the connection unit 32 is connected to the main controller 2 to supply power. The two power modules 3 are connected in parallel via the connection unit 32, thereby simultaneously being electrically connected to the main controller 2, and the electrical circuits of the two power modules 3 are independent of each other.

[0030] Specifically, the two power modules 3 have different power sources and can independently supply power to the main controller 2. At least two power modules 3 are connected in parallel via the connection unit 32 so that they can supply power simultaneously.

[0031] In the operation mode of this utility model, when the main controller 2 malfunctions or fails and cannot maintain control of the liquid supply module 1, the pump 11 will perform a last value lock to maintain the execution of the last parameter command input by the main controller 2 and keep the liquid supply module 1 operating continuously.

[0032] In detail, although pump 11 is controlled by the signals output by the main controller 2 during operation, if the main controller 2 malfunctions or loses signal due to disconnection, pump 11 will continue to operate based on the previous normal signal from the main controller 2, thus preventing the malfunction or disconnection of the main controller 2 from affecting the operation of the liquid supply module 1.

[0033] In addition, the isolating switch 21 can disconnect the signal between the liquid supply module 1 and the main controller 2 in the above state, so that the operator can maintain the operation of the liquid supply module 1 while maintaining the main controller 2.

[0034] Specifically, the isolating switch 21 can cut off the output signal of the main controller 2 while maintaining the operation of the liquid supply system. This achieves the effect of maintaining the main controller 2 without shutting down the system, reducing production waste and maintaining uptime. Once the operator has completed the maintenance, the isolating switch 21 is reset, allowing the main controller 2 to reconnect and control the liquid supply module 1.

[0035] Additionally, the main controller 2 receives power from the power module 3. Since the power modules 3 use a parallel circuit, if one of them fails to supply power or malfunctions, the main controller 2 can detect the fault through voltage changes, but this fault will not affect the power supply. Therefore, the main controller 2 can continue to send signals without interrupting the liquid supply. Simultaneously, the main controller 2 will immediately issue an alarm message through the alarm unit 23 to notify the operator for maintenance, ensuring that the liquid supply is not immediately interrupted in the event of a fault. If maintenance must be stopped, the machine will be shut down only after the grinding operation is completed to avoid a large number of defective products resulting from temporary interruptions.

[0036] In this embodiment, there are two pressure sensing units 22, and one of the pressure sensing units 22 is set to hold the system pressure control, while the other pressure sensing units 22 are used to cross-compare the pressure values ​​of the pipeline.

[0037] When the pressure sensing unit 22 holding the system pressure control is determined to be faulty, the system pressure control can be automatically switched to another non-faulty pressure sensing unit 22 to avoid the failure of a single pressure sensing unit 22 affecting the operation of the liquid supply module 1.

[0038] Two pressure sensing units 22 are electrically connected to the main controller 2. The main controller 2 receives the pressure values ​​in the pipeline transmitted by the two pressure sensing units 22 in a timely manner. When the detection result of the pressure sensing unit 22 deviates too much, exceeds the preset safety value, or loses signal, the main controller 2 will issue a warning signal through the alarm unit 23 so that the operator can be notified and troubleshoot the fault. The main controller 2 will also perform a final value lock, maintaining the operation of the liquid supply module 1 based on the value before the abnormality. The probability of both pressure sensing units 22 failing at the same time is extremely low. This method allows for immediate repair if one fails, while the other continues to operate normally to achieve the purpose of uninterrupted liquid supply.

[0039] This invention comprises two pumps 11, each including a power source (not shown) and a pump drive unit 111. The two pumps 11 operate independently and are connected in series in the pipeline, simultaneously assisting in the flow of liquid within the pipeline. The pipeline pressure is measured by the pressure sensing unit 22, and the main controller 2 controls the rotational speed of the pumps 111 via the pump drive unit 111 to maintain the flow pressure of the liquid within the pipeline. Normally, both pumps 11 operate simultaneously. When one pump 11 malfunctions or fails, the rotational speed of the other pump 11 can be immediately increased to maintain the liquid pressure within the pipeline, ensuring the stable operation of the liquid supply module 1. This avoids the situation where one pump 11 malfunctions or fails before activating the other, which would cause excessive fluctuations in the output liquid pressure, affecting the quality of the liquid supply.

[0040] In addition, when one of the pumps 11 malfunctions, the main controller 2 will also issue a warning signal through the alarm unit 23 to notify the operator to perform maintenance.

[0041] The normally open valve 13 of this invention is normally open, keeping the pipeline unobstructed under normal circumstances. When it is necessary to interrupt the liquid supply, the main controller 2 sends a signal to close the normally open valve 13, so as to prevent the normally open valve 13 from closing malfunctioning in the event of a failure of the main controller 2 or an interruption of the circuit for unknown reasons.

[0042] In detail, the use of a normally open valve 13 ensures that the pipeline remains unobstructed even if the normally open valve 13 fails. Furthermore, even if the power source for the normally open valve 13 fails to supply power, the normally open structure will not block the pipeline and prevent liquid supply from being interrupted, even if the normally open valve 13 cannot operate normally.

[0043] The embodiments described above are merely preferred embodiments of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various changes and modifications without departing from the concept of the present invention, and these all fall within the protection scope of the present invention.

Claims

1. A stable grinding slurry supply system, characterized in that, include: A liquid supply module, electrically connected to a main controller, and having: a storage tank for storing a liquid; Multiple pumps are connected to the storage tank via pipelines to draw the liquid for use by the machine; multiple normally open valves are located at opposite ends of the pipeline to maintain the opening and closing of the pipeline. The main controller is electrically connected to the pump and includes: multiple pressure sensing units disposed on the pipeline for monitoring the pressure of the liquid in the pipeline; and a disconnect switch disposed between the main controller and the pump. And an alarm unit, installed in the main controller, for issuing an alarm message; as well as At least two power modules are electrically connected to the main controller, and each has: a power supply unit electrically connected to an external power source, and a connection unit, the two power modules are connected in parallel through the connection unit and electrically connected to the main controller, and the two power modules are electrically independent of each other. When the main controller malfunctions and cannot control the liquid supply module, the pump will perform a last value lock to keep the liquid supply module running, thereby avoiding interruption of the liquid supply. The isolating switch can disconnect the signal between the liquid supply module and the main controller, so that the main controller can be repaired while maintaining the liquid supply.

2. The grinding slurry stable supply system according to claim 1, characterized in that, The number of pressure sensing units is two, and one pressure sensing unit is set to hold the pressure control of a system, while the other pressure sensing unit is used to cross-compare the pressure values ​​of the pipeline. When the pressure sensing unit that holds the pressure control of the system fails, the pressure control of the system will be automatically switched to another pressure sensing unit that is not faulty.

3. The grinding slurry stable supply system according to claim 1, characterized in that, The plurality of pumps consists of two pumps, each comprising a power source for the pump and a pump drive unit. The pumps are connected in series on the pipeline to maintain the operation of the liquid supply module by means of the other pump in the event of an malfunction in one of the two pumps.

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