Supporting tool for assembling a sub-chamber of a single crystal furnace

CN224795592UActive Publication Date: 2026-09-25LINTON KAYEX TECH CO LTD
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Patent Information

Application Number
CN202522068034.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-25
Publication Date
2026-09-25
Estimated Expiration
2035-09-25

AI Technical Summary

Technical Problem

[0006]为了弥补现有技术的不足,解决不方便调节滚轮之间的尺寸的问题,提出的一种单晶炉副室装配用支撑工装

Benefits of technology

本实用新型提供一种单晶炉副室装配用支撑工装,通过设置双向丝杆,通过开启电机,通过电机的输出轴带动双向丝杆转动,通过双向丝杆带动移动块向相反的方向运动,通过移动块带动滚轮向相反的方向运动,直至调节至合适的位置,通过双向丝杆带动所连接的链轮带动链条转动,通过链条带动另一个链轮转动,从而通过该链轮带动所连接的双向丝杆转动,实现四个滚轮的同步转动,从而解决了不方便调节滚轮之间的尺寸的问题。

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Abstract

The utility model belongs to single crystal furnace vice chamber assembly technical field, concretely speaking is a kind of single crystal furnace vice chamber assembly and is supported frock, including bottom plate, the adjustable height lifting frame of being provided with in the top of bottom plate, the top of lifting frame is provided with adjusting mechanism, the adjusting mechanism includes two fixed plates of being fixed in the top of both ends of lifting frame, and the both sides of two the fixed plate between all are rotated and are connected with bidirectional screw rod through bearing;By opening motor, by the output shaft of motor drives bidirectional screw rod rotation, by bidirectional screw rod drive moving block to the opposite direction movement, by moving block drive roller to the opposite direction movement, until adjusting to appropriate position, by bidirectional screw rod drive the sprocket connected with chain rotation, by chain drive another sprocket rotation, to be driven by the sprocket connected with bidirectional screw rod rotation, realize the synchronous rotation of four rollers, to solve the problem of inconveniently adjusting the size between rollers.
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Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace sub-chamber assembly technology, specifically a support tooling for assembling a single crystal furnace sub-chamber. Background Technology

[0002] The auxiliary chamber serves as a buffer zone between the main furnace chamber and external equipment, providing a dedicated channel for seed crystal introduction and new crystal extraction. Pressure and temperature are controlled in zones via isolation valves to ensure the independence of the crystal growth environment. The auxiliary chamber is typically supported during assembly using a connected auxiliary chamber support fixture.

[0003] Chinese patent CN222958516U discloses a support fixture for assembling a sub-chamber of a single crystal furnace. The fixture includes a support frame, vertical square tubes, and rollers. A vertical square tube is connected to the center of each of the two sides of the top of the support frame. A horizontal square tube connects to the upper middle part of the two vertical square tubes. Support plates connected to the vertical tubes are located on the front and rear sides of both ends of the horizontal square tube. Rollers are rotatably connected between two support plates on one side via a rotating shaft. A sealing plate is provided at the top of the vertical tube. Reinforcing ribs are provided between the top of the support frame and the vertical tube, and between the bottom of the horizontal square tube and the vertical tube. Through its reasonable structural design, the fixture effectively supports the sub-chamber of the single crystal furnace and keeps it away from the bottom surface, facilitating assembly operations, improving assembly efficiency, and allowing for the auxiliary rotation or fixation of the sub-chamber as needed, enabling assembly operations from different angles and improving usability.

[0004] In the current technology, because the diameters of the single crystal furnace sub-chambers are different, while the distance between the rollers is fixed, when a larger single crystal furnace sub-chamber is placed, it may be unstable and easily fall off during rotation; when a smaller single crystal furnace sub-chamber is placed, it may be impossible to place it due to its small diameter, resulting in limited applicability of the aforementioned support fixture.

[0005] Therefore, a support fixture for assembling the sub-chamber of a single crystal furnace is proposed to address the above problems. Utility Model Content

[0006] To overcome the shortcomings of existing technologies and solve the problem of inconvenient adjustment of the dimensions between rollers, a support fixture for assembling the sub-chamber of a single crystal furnace is proposed.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: The supporting fixture for assembling the auxiliary chamber of a single crystal furnace according to this utility model includes a base plate, an adjustable lifting frame is provided above the base plate, an adjustment mechanism is provided above the lifting frame, the adjustment mechanism includes two fixed plates fixed to the top of both ends of the lifting frame, and a bidirectional lead screw is rotatably connected between the two fixed plates on the same side through a bearing. Two moving blocks are threadedly connected to each bidirectional lead screw, and rollers are rotatably connected to the top of each moving block. A linkage mechanism is provided between the two bidirectional lead screws for driving the two bidirectional lead screws to rotate synchronously. A motor is fixedly connected to the side wall of one of the fixed plates, and the output shaft of the motor is fixedly connected to one end of the bidirectional lead screw.

[0008] Preferably, the linkage mechanism includes sprockets fixed to one end of two bidirectional lead screws, a chain is sleeved between the two sprockets, and a tension sensor is integrated on the chain.

[0009] Preferably, two guide rods are fixedly connected between the two fixed plates on the same side, and the moving blocks are slidably connected to the two guide rods.

[0010] Preferably, the bottom of both ends of the lifting frame is slidably connected to a fixed frame, the bottom of the two fixed frames is fixedly connected to a rotating frame, the top of the rotating frame is fixedly connected to a cylinder, and the output end of the cylinder is fixedly connected to the bottom of the lifting frame.

[0011] Preferably, the bottom ends of the lifting frame are symmetrically fixed with connecting blocks, and each connecting block is rotatably connected with a connecting rod via a pin. The bottom end of each connecting rod is rotatably connected with a sliding block via a pin. A horizontal plate is fixed between the fixed frames, and each bottom end of the horizontal plate is fixed with a slide rail. The sliding blocks slide within the slide rail.

[0012] Preferably, the top of the base plate is rotatably connected to a turntable via a bearing, and the rotating frame is fixed to the top of the turntable.

[0013] Preferably, each of the four corners of the bottom of the base plate is fixedly connected to a fixing tube; each fixing tube is slidably connected to a support block at its bottom end; each fixing tube has a threaded rod rotatably connected to its top inner wall via a bearing; each threaded rod has a first bevel gear fixedly connected to its top; each fixing tube has a rotating rod rotatably connected to its top; each rotating rod has a second bevel gear fixedly connected to one end of its rotating rod, the second bevel gear meshing with the first bevel gear; and each rotating rod has a rotating block fixedly connected to the other end of its rotating rod.

[0014] Preferably, each of the four corners of the bottom of the base plate is equipped with a caster wheel, and a brake pad is provided on one side of each caster wheel.

[0015] The beneficial effects of this utility model are: This utility model provides a support fixture for assembling the auxiliary chamber of a single crystal furnace. By setting a bidirectional lead screw, the motor is turned on, and the output shaft of the motor drives the bidirectional lead screw to rotate. The bidirectional lead screw drives a moving block to move in the opposite direction, and the moving block drives a roller to move in the opposite direction until it is adjusted to a suitable position. The bidirectional lead screw drives a connected sprocket to rotate a chain, and the chain drives another sprocket to rotate. In turn, the sprocket drives the connected bidirectional lead screw to rotate, realizing the synchronous rotation of the four rollers, thus solving the problem of inconvenient adjustment of the size between the rollers.

[0016] This utility model provides a support fixture for assembling the auxiliary chamber of a single crystal furnace. By setting up a connecting rod, a connecting block, and a slider, a cylinder needs to be activated. The output end of the cylinder drives the lifting frame to move. During the movement of the lifting frame, the lifting frame drives one end of the connecting block to move. During the movement of the connecting block, a pin drives one end of the connecting rod to move upward. The other end of the connecting rod drives the slider to slide on the slide rail via the pin. Finally, the connecting rod and the lifting frame form a triangle, providing stability for the lifting frame. Attached Figure Description

[0017] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 This is the first perspective view of the present invention; Figure 2 This is the second perspective view of the present invention; Figure 3 This is a cross-sectional view of the fixing tube in this utility model; Figure 4 This is a perspective view of the lifting frame in this utility model; Figure 5 This is a perspective view of the horizontal plate in this utility model; Figure 6 This is a perspective view of the movable block in this utility model; Legend: 1. Base plate; 11. Rotating frame; 12. Moving wheel; 13. Fixed tube; 14. Support block; 15. Threaded rod; 16. First bevel gear; 17. Second bevel gear; 18. Rotating rod; 19. Rotating block; 110. Turntable; 2. Fixed frame; 21. Lifting frame; 22. Cylinder; 23. Connecting block; 24. Horizontal plate; 25. Slide rail; 26. Sliding block; 27. Connecting rod; 3. Fixed plate; 31. Moving block; 32. Roller; 33. Chain; 34. Motor; 35. Double-acting lead screw; 36. Guide rod; 37. Sprocket. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] Specific implementation examples are given below.

[0020] Please see Figure 1 - Figure 6 This utility model provides a support fixture for assembling a sub-chamber of a single crystal furnace, including a base plate 1. An adjustable lifting frame 21 is provided above the base plate 1. An adjustment mechanism is provided above the lifting frame 21. The adjustment mechanism includes two fixed plates 3 fixed to the top of both ends of the lifting frame 21. A bidirectional lead screw 35 is rotatably connected between the two fixed plates 3 on the same side through a bearing. Two moving blocks 31 are threadedly connected to each bidirectional lead screw 35. Rollers 32 are rotatably connected to the top of each moving block 31. A linkage mechanism is provided between the two bidirectional lead screws 35 for driving the two bidirectional lead screws 35 to rotate synchronously. A motor 34 is fixed to the side wall of one of the fixed plates 3, and the output shaft of the motor 34 is fixed to one end of the bidirectional lead screw 35.

[0021] During operation, to address the inconvenience of adjusting the dimensions between rollers 32, it is necessary to adjust the distance between adjacent rollers 32. This is achieved by activating motor 34, which drives bidirectional lead screw 35 to rotate via its output shaft. The bidirectional lead screw 35 then drives moving block 31 in the opposite direction, which in turn drives roller 32 in the opposite direction until the desired position is reached. Furthermore, the two bidirectional lead screws 35 are connected by a linkage mechanism, which in turn drives another bidirectional lead screw 35 to rotate, thus achieving synchronous rotation of the four rollers 32. This solves the problem of inconvenience in adjusting the dimensions between rollers 32 and facilitates improved stability of the single crystal furnace sub-chamber.

[0022] Furthermore, such as Figure 2 and Figure 6 As shown, the linkage mechanism includes sprockets 37 fixed to one end of two bidirectional lead screws 35, and a chain 33 is sleeved between the two sprockets 37. A tension sensor is integrated on the chain 33.

[0023] During operation, the motor 34 drives the connected bidirectional lead screw 35 to rotate, which in turn drives the connected sprocket 37 to rotate the chain 33. The chain 33 then drives another sprocket 37 to rotate, which in turn drives the connected bidirectional lead screw 35 to rotate, thus achieving synchronous rotation of the two bidirectional lead screws 35.

[0024] Furthermore, such as Figure 6 As shown, two guide rods 36 are fixedly connected between the two fixed plates 3 on the same side, and the moving blocks 31 are slidably connected to the two guide rods 36.

[0025] During operation, the movable block 31 slides on the two guide rods 36, which limit the movable block 31 to slide in the horizontal direction.

[0026] Furthermore, such as Figure 1 and Figure 2 As shown, fixed frames 2 are slidably connected to the bottom of both ends of the lifting frame 21, and rotating frames 11 are fixedly connected to the bottom of the two fixed frames 2. A cylinder 22 is fixedly connected to the top of the rotating frame 11, and the output end of the cylinder 22 is fixedly connected to the bottom of the lifting frame 21.

[0027] When the height of the lifting frame 21 needs to be adjusted to meet the assembly requirements during operation, the cylinder 22 needs to be activated. The output end of the cylinder 22 drives the lifting frame 21 to move. During the movement, both ends of the lifting frame 21 slide within the fixed frame 2. The fixed frame 2 limits the lifting frame 21 to move stably in the vertical direction.

[0028] Furthermore, such as Figure 5 As shown, connecting blocks 23 are symmetrically fixed at both ends of the bottom of the lifting frame 21. Connecting rods 27 are rotatably connected to each connecting block 23 via pins. Sliding blocks 26 are rotatably connected to the bottom ends of each connecting rod 27 via pins. A horizontal plate 24 is fixed between the fixed frames 2. Slide rails 25 are fixed at both ends of the bottom of the horizontal plate 24. The sliding blocks 26 slide within the slide rails 25.

[0029] During operation, as the lifting frame 21 moves, it drives one end of the connecting block 23 to move. As the connecting block 23 moves, it drives one end of the connecting rod 27 to move upward through the pin. The other end of the connecting rod 27 drives the sliding block 26 to slide through the pin. The sliding block 26 slides on the slide rail 25. Finally, the connecting rod 27 and the lifting frame 21 form a triangle, which provides stability for the lifting frame 21.

[0030] Furthermore, such as Figure 4 As shown, the top of the base plate 1 is rotatably connected to a turntable 110 via a bearing, and the rotating frame 11 is fixedly connected to the top of the turntable 110.

[0031] During operation, the turntable 110 facilitates the rotation of the rotating frame 11, lifting mechanism, adjustment mechanism and single crystal furnace sub-chamber, thereby facilitating the assembly of the single crystal furnace sub-chamber at different angles.

[0032] Furthermore, such as Figure 2 and Figure 3 As shown, a fixing tube 13 is fixedly connected to each of the four corners of the bottom of the base plate 1; a support block 14 is slidably connected to the bottom end of each fixing tube 13; a threaded rod 15 is rotatably connected to the top inner wall of each fixing tube 13 through a bearing; a first bevel gear 16 is fixedly connected to the top of each threaded rod 15; a rotating rod 18 is rotatably connected to each fixing tube 13; a second bevel gear 17 is fixedly connected to one end of each rotating rod 18; the second bevel gear 17 meshes with the first bevel gear 16; and a rotating block 19 is fixedly connected to the other end of each rotating rod 18.

[0033] During operation, the ground may not be flat, causing the support fixture to wobble during assembly. The height of the support block 14 needs to be adjusted to ensure the stability of the support fixture. When adjustment is needed, the rotating block 19 is rotated, which drives the rotating rod 18 to rotate. The rotating rod 18 drives the second bevel gear 17 to rotate, which drives the first bevel gear 16 to rotate. The first bevel gear 16 drives the threaded rod 15 to rotate, which drives the support block 14 to move until it reaches the appropriate height.

[0034] Furthermore, such as Figure 2 As shown, each of the four corners of the bottom of the base plate 1 is equipped with a movable wheel 12, and a brake pad is provided on one side of the movable wheel 12.

[0035] During operation, the moving wheels 12 facilitate the movement of the support fixture to a suitable position, and the brake pads facilitate the fixing of the support fixture in the set position to prevent shaking during assembly.

[0036] Working principle: To adjust the distance between two adjacent rollers 32, the motor 34 is turned on. The output shaft of the motor 34 drives the bidirectional lead screw 35 to rotate. The bidirectional lead screw 35 drives the moving block 31 to move in the opposite direction. The moving block 31 drives the rollers 32 to move in the opposite direction until the appropriate position is reached. The bidirectional lead screw 35 drives the connected sprocket 37 to rotate the chain 33. The chain 33 drives another sprocket 37 to rotate, which in turn drives the connected bidirectional lead screw 35 to rotate. This achieves synchronous rotation of the four rollers 32, thus solving the problem of inconvenient adjustment of the size between the rollers 32 and improving the stability of the single crystal furnace sub-chamber.

[0037] When the height of the lifting frame 21 needs to be adjusted to meet assembly requirements, the cylinder 22 needs to be activated. The output end of the cylinder 22 drives the lifting frame 21 to move. During the movement, both ends of the lifting frame 21 slide within the fixed frame 2. The fixed frame 2 limits the lifting frame 21 to move stably in the vertical direction. During the movement, the lifting frame 21 drives one end of the connecting block 23 to move. During the movement, the connecting block 23 drives one end of the connecting rod 27 to move upward through the pin. The other end of the connecting rod 27 drives the sliding block 26 to slide through the pin. The sliding block 26 slides on the slide rail 25. Finally, the connecting rod 27 and the lifting frame 21 form a triangle, providing stability for the lifting frame 21.

[0038] When the support fixture is in operation, the ground may not be flat, causing shaking during assembly. It is necessary to adjust the height of the support block 14 to ensure the stability of the support fixture. When adjustment is needed, the rotating block 19 is rotated, which drives the rotating rod 18 to rotate. The rotating rod 18 drives the second bevel gear 17 to rotate, which drives the first bevel gear 16 to rotate. The first bevel gear 16 drives the threaded rod 15 to rotate, which drives the support block 14 to move until it reaches the appropriate height.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A support fixture for assembling a sub-chamber of a single crystal furnace, comprising a base plate (1), an adjustable-height lifting frame (21) above the base plate (1), and an adjustment mechanism above the lifting frame (21), characterized in that: The adjustment mechanism includes two fixed plates (3) fixed to the top of both ends of the lifting frame (21). Two fixed plates (3) on the same side are rotatably connected to a double-acting screw (35) through a bearing. Two moving blocks (31) are threaded onto each double-acting screw (35). Rollers (32) are rotatably connected to the top of each moving block (31). A linkage mechanism is provided between the two double-acting screws (35) to drive the two double-acting screws (35) to rotate synchronously. A motor (34) is fixed to the side wall of one of the fixed plates (3). The output shaft of the motor (34) is fixed to one end of the double-acting screw (35).

2. The support fixture for assembling a single crystal furnace auxiliary chamber according to claim 1, characterized in that: The linkage mechanism includes sprockets (37) fixed to one end of two bidirectional lead screws (35), and a chain (33) is sleeved between the two sprockets (37). A tension sensor is integrated on the chain (33).

3. The support fixture for assembling the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that: Two guide rods (36) are fixedly connected between the two fixed plates (3) on the same side, and the moving blocks (31) are slidably connected to the two guide rods (36).

4. The support fixture for assembling a single crystal furnace auxiliary chamber according to claim 3, characterized in that: The bottom of both ends of the lifting frame (21) is slidably connected to a fixed frame (2), and the bottom of the two fixed frames (2) is fixedly connected to a rotating frame (11). The top of the rotating frame (11) is fixedly connected to a cylinder (22), and the output end of the cylinder (22) is fixedly connected to the bottom of the lifting frame (21).

5. The support fixture for assembling the auxiliary chamber of a single crystal furnace according to claim 4, characterized in that: The bottom ends of the lifting frame (21) are symmetrically fixed with connecting blocks (23), and each connecting block (23) is rotatably connected with a connecting rod (27) by a pin. The bottom end of each connecting rod (27) is rotatably connected with a sliding block (26) by a pin. A horizontal plate (24) is fixed between the fixed frames (2), and each bottom end of the horizontal plate (24) is fixed with a slide rail (25). The sliding blocks (26) slide within the slide rail (25).

6. The support fixture for assembling a single crystal furnace auxiliary chamber according to claim 5, characterized in that: The top of the base plate (1) is rotatably connected to a turntable (110) via a bearing, and the rotating frame (11) is fixed to the top of the turntable (110).

7. The support fixture for assembling a single crystal furnace auxiliary chamber according to claim 6, characterized in that: The bottom of the base plate (1) is fixed with a fixed tube (13) at each of the four corners; the bottom end of the fixed tube (13) is slidably connected with a support block (14); the top inner wall of the fixed tube (13) is rotatably connected with a threaded rod (15) through a bearing; the top of the threaded rod (15) is fixed with a first bevel gear (16); a rotating rod (18) is rotatably connected to the fixed tube (13); one end of the rotating rod (18) is fixed with a second bevel gear (17); the second bevel gear (17) meshes with the first bevel gear (16); the other end of the rotating rod (18) is fixed with a rotating block (19).

8. The support fixture for assembling a single crystal furnace auxiliary chamber according to claim 7, characterized in that: The bottom of the base plate (1) is equipped with four movable wheels (12) at the four corners, and a brake pad is provided on one side of each movable wheel (12).

Citation Information

Patent Citations

  • Supporting tool for assembling auxiliary chamber of single crystal furnace

    CN222958516U