Cooling cycle system

Abstract

The application provides a cooling circulation system for a semiconductor cutting machine, comprising: a cutting machine body, wherein the cutting machine body comprises an air floating spindle, and an inlet and an outlet are arranged on the cutting machine body; a cooling device, wherein the cooling device comprises a refrigerating unit arranged outside the cutting machine body, a water inlet pipe connected to the refrigerating unit and the inlet of the cutting machine body respectively, and a water outlet pipe connected to the refrigerating unit and the outlet of the cutting machine body respectively, and at least a valve body is arranged on the water inlet pipe. The cooling circulation system provided by the application can realize water cooling circulation, timely open and close the cooling state of the circulation system, and avoid resource waste.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically to a cooling circulation system. Background Technology

[0002] In semiconductor manufacturing, QP (Quick Placement) dicing machines are used to cut substrates into required sizes. The air-bearing spindle within these machines requires cooling during operation. Currently, the air-bearing spindle is cooled by supplying pure water through a single pipeline. Even when the cutting machine is shut down, the pure water continues to be discharged, keeping the spindle cooled. Furthermore, the cooled pure water is directly discarded without recycling, resulting in significant pure water consumption and resource waste. Utility Model Content

[0003] To overcome the shortcomings of the prior art, this utility model provides a cooling circulation system that can realize cooling water circulation, and can promptly turn the cooling state of the circulation system on and off to avoid resource waste.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] This utility model discloses a cooling circulation system for use in a semiconductor cutting machine, comprising:

[0006] The cutting machine body includes an air-bearing main shaft and has an inlet and an outlet.

[0007] A cooling device, comprising a refrigeration unit located outside the main body of the cutting machine, an inlet pipe connected to the inlets of the refrigeration unit and the main body of the cutting machine respectively, and an outlet pipe connected to the outlets of the refrigeration unit and the main body of the cutting machine respectively, wherein at least the inlet pipe is provided with a valve body.

[0008] The cooling circulation system for a cutting machine provided in this application can recover the cooling water flowing out of the cutting machine body by means of a cooling device installed outside the cutting machine body, thereby realizing the recycling of cooling water and avoiding the waste of water resources.

[0009] Furthermore, it also includes a filter, which is at least located on the water inlet pipe. The filter is used to filter the cooling water entering the cutting machine body, removing impurities and particulate matter, preventing blockage or damage to the cooling system due to excessive impurities in the cooling water, and further improving the stability and reliability of the cooling circulation system.

[0010] Furthermore, the air-float main shaft is provided with an inlet and an outlet, the inlet being connected to the inlet pipe and the outlet being connected to the outlet pipe. Cooling water can circulate within the air-float main shaft, directly cooling it and improving its cooling efficiency, ensuring that the air-float main shaft will not be damaged due to overheating during high-speed operation.

[0011] Furthermore, the refrigeration unit includes a chiller and a water pump. The chiller cools the water to a preset temperature and then pumps it to the inlet pipe. The chiller is used to quickly and stably cool the cooling water to the preset temperature, and the water pump is used to deliver the chilled water to the inlet pipe at appropriate pressure and flow rate, providing continuous and stable chilled water for the cutting machine body, thereby effectively cooling the air-bearing spindle.

[0012] Furthermore, the preset temperature of the chilled water generated by the chiller is 8–12°C. Setting the chilled water temperature within this range can effectively reduce the heat generated by the cutting machine body and the air-bearing spindle, while preventing the equipment from freezing or producing condensation due to excessively low temperatures.

[0013] Furthermore, the valve body is a solenoid valve, which responds to the opening and closing of the cutting machine body to control the opening and closing of the water inlet pipe. When the cutting machine body starts, the solenoid valve receives a signal and automatically opens, allowing chilled water to flow into the air-float spindle through the water inlet pipe. When the cutting machine body is closed, the solenoid valve closes accordingly, thereby cutting off the cooling water supply and avoiding energy waste and water loss.

[0014] Furthermore, the inlet and outlet of the cutting machine body are located on the back of the cutting machine body. This ensures that the chilled water circulates inside the cutting machine body while avoiding interference with the cutting operation area.

[0015] Furthermore, the cutting machine body is also equipped with an exhaust vent, and an exhaust pipe is installed on the exhaust vent. One end of the exhaust pipe is connected to the interior of the cutting machine body through the exhaust vent, and the other end is connected to the exterior of the cutting machine body. The exhaust pipe can discharge the high-temperature exhaust gas and dust generated inside the cutting machine body during operation, ensuring air circulation inside the cutting machine body and preventing overheating or performance degradation of the equipment due to high temperature and dust accumulation.

[0016] Furthermore, the exhaust pipe is located near the top of the cutting machine body. This effectively removes high-temperature exhaust gas and dust from inside the cutting machine body.

[0017] Furthermore, the cooling circulation system also includes a control device connected to the cutting machine body, the cooling device, and the solenoid valve, used to control the opening and closing of the cutting machine body, the cooling device, and the solenoid valve. This allows the cooling circulation system to be controlled according to the cutting machine's on / off state, avoiding resource waste.

[0018] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0019] The cooling circulation system for a cutting machine provided in this application can recover chilled water flowing out of the cutting machine body through a cooling device installed outside the cutting machine body, realizing the recycling of cooling water and avoiding waste of water resources. In addition, the solenoid valve can respond to the opening and closing state of the cutting machine body to connect and disconnect the water inlet pipe, thereby avoiding energy waste.

[0020] To make the above and other objects, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of a cooling circulation system structure provided in an embodiment of the present invention;

[0023] Figure 2 This is a control principle diagram of a cooling circulation system provided in an embodiment of the present invention.

[0024] The reference numerals in the above attached figures are as follows: 1. Cutting machine body; 2. Air-float main shaft; 3. Refrigeration unit; 4. Water inlet pipe; 5. Water outlet pipe; 6. Valve body; 7. Filter; 8. Exhaust pipe. Detailed Implementation

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. In addition, the accompanying drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as stated in advance.

[0026] In this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "forward," "backward," "between," "nearer," and "farthest" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. It should also be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0028] Reference Figure 1 This application provides a cooling circulation system for a semiconductor cutting machine, which includes a cutting machine body 1 and a cooling device connected to the cutting machine body 1. The cooling device delivers chilled water into the cutting machine body 1, and the chilled water flowing out of the cutting machine body 1 can flow back to the cooling device to achieve circulation, thereby avoiding waste of water resources.

[0029] The cutting machine body 1 includes an air-floating spindle 2. The cutting machine body 1 is provided with an inlet and an outlet for supplying chilled water. Optionally, the inlet and outlet of the cutting machine body 1 are located on the back of the cutting machine body 1 away from the operating end, and the air-floating spindle 2 is located inside the cutting machine body 1.

[0030] In this embodiment, the cutting machine body 1 is also provided with an exhaust port, and an exhaust pipe 8 is provided on the exhaust port. One end of the exhaust pipe 8 is connected to the interior of the cutting machine body 1 through the exhaust port, and the other end can be connected to an exhaust device outside the cutting machine body 1. Optionally, the exhaust pipe 8 is located near the top of the cutting machine body 1.

[0031] The cooling device includes a refrigeration unit 3 located outside the main body 1 of the cutting machine, a water inlet pipe 4 connected to the inlets of the refrigeration unit 3 and the main body 1 of the cutting machine, and a water outlet pipe 5 connected to the outlets of the refrigeration unit 3 and the main body 1 of the cutting machine. At least the water inlet pipe 4 is equipped with a valve body 6 for controlling the delivery of chilled water, thereby controlling the opening and closing of the cooling of the air-floating spindle 2.

[0032] Optionally, chilled water can be used to cool the air-float spindle 2 from the outside or inside. In this embodiment, the air-float spindle 2 is provided with an inlet and an outlet. The inlet pipe 4 and the outlet pipe 5 can extend into the body of the cutting machine 1, so that the inlet pipe 4 is connected to the inlet of the air-float spindle 2, and the outlet pipe 5 is connected to the outlet of the air-float spindle 2.

[0033] Optionally, the valve body 6 is a solenoid valve, which can control the opening and closing of the water inlet pipe 4 in response to the opening and closing of the cutting machine body 1. In some embodiments, valve bodies 6 can be respectively provided on the water inlet pipe 4 and the water outlet pipe 5, and the valve body 6 can also be configured as an electric ball valve.

[0034] To prevent blockage in the inlet and outlet water pipes during cooling of the air-float spindle 2, a filter is installed in at least one of the inlet pipe 4 and outlet pipe 5, such as... Figure 1 As shown, in this embodiment of the application, the filter 7 is only provided on the water inlet pipe 4.

[0035] The chiller unit 3 includes a chiller and a water pump. The chiller cools the water to a preset temperature and then pumps it to the inlet pipe 4. The power and flow rate of the water pump are flexibly set according to the cooling requirements of the cutting machine body 1 and the air-bearing spindle 2. Optionally, the chiller unit 3 also includes a temperature control system to monitor the temperature of the chilled water and adjust the operating status of the chiller as needed. Optionally, the preset temperature of the chilled water generated by the chiller is 8–12°C.

[0036] The cooling circulation system also includes a control device connected to the cutting machine body 1, the cooling device, and the valve body 6, used to control the opening and closing of the cutting machine body 1, the cooling device, and the valve body 6. When the cutting machine body 1 starts working, the cooling circulation system starts and the valve body 6 opens; when the cutting machine body 1 closes, the cooling circulation system closes and the valve body 6 closes.

[0037] This utility model uses specific embodiments to illustrate the principle and implementation of the utility model. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​the utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the utility model. Therefore, the content of this specification should not be construed as a limitation of the utility model.

Claims

1. A cooling circulation system, characterized in that, The cooling circulation system is used in a semiconductor cutting machine and includes: The cutting machine body includes an air-bearing main shaft and has an inlet and an outlet. A cooling device, comprising a refrigeration unit located outside the main body of the cutting machine, an inlet pipe connected to the inlets of the refrigeration unit and the main body of the cutting machine respectively, and an outlet pipe connected to the outlets of the refrigeration unit and the main body of the cutting machine respectively, wherein at least the inlet pipe is provided with a valve body.

2. The cooling circulation system according to claim 1, characterized in that, It also includes a filter, which is at least located on the inlet pipe.

3. The cooling circulation system according to claim 1, characterized in that, The air flotation main shaft is provided with an inlet and an outlet. The inlet is connected to the inlet pipe, and the outlet is connected to the outlet pipe.

4. A cooling circulation system according to claim 1, characterized in that, The refrigeration unit includes a chiller and a water pump. The chiller cools the water to a preset temperature and then pumps it to the inlet pipe.

5. A cooling circulation system according to claim 4, characterized in that, The preset temperature of the chilled water generated by the chiller is 8-12℃.

6. A cooling circulation system according to claim 1, characterized in that, The valve body is a solenoid valve, which responds to the opening and closing of the cutting machine body and controls the opening and closing of the water inlet pipe.

7. A cooling circulation system according to claim 1, characterized in that, The inlet and outlet of the cutting machine body are located on the back of the cutting machine body.

8. A cooling circulation system according to claim 1, characterized in that, The cutting machine body is also provided with an exhaust port, and an exhaust pipe is provided on the exhaust port. One end of the exhaust pipe is connected to the inside of the cutting machine body through the exhaust port, and the other end is connected to the outside of the cutting machine body.

9. A cooling circulation system according to claim 8, characterized in that, The exhaust pipe is located near the top of the cutting machine body.

10. A cooling circulation system according to claim 1, characterized in that, The cooling circulation system also includes a control device, which is connected to the cutting machine body, the cooling device and the solenoid valve, and is used to control the opening and closing of the cutting machine body, the cooling device and the solenoid valve.

Images