A wax pasting carrier conveying vehicle for a polishing process

Abstract

The utility model discloses a kind of waxing carrier conveying vehicles for polishing process, including movable frame;From top to bottom, carrier storage area and sink are sequentially arranged on the frame;The carrier storage area includes bottom plate and left side plate, rear side plate and right side plate located on the bottom plate;The front side of the carrier storage area is equipped with a stop bar below;The upper surface of the bottom plate is equipped with limiting strip for limiting waxing carrier;Drainage hole is equipped on the bottom plate, the bottom of the drainage hole is opposite the sink, water in the carrier storage area can be discharged to the sink;The waxing carrier conveying vehicle further includes floor cleaning chain, for removing static electricity.The conveying vehicle provided in the application has simple structure, low cost and simple operation, can reduce water splashing on workshop floor after cleaning the carrier, and can reduce the probability of Block collision damage and other conditions, reduce the risk of loss caused by human slip.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a wax-coating carrier transport vehicle used in the polishing process. Background Technology

[0002] CMP (chemical mechanical polishing) is an indispensable step in the surface planarization process of silicon substrates, and single-wafer polishing machines are a process to achieve atomic-level flatness of silicon substrates.

[0003] In the operation of a single-wafer polishing machine, the general process is as follows: 1. Apply wax in the wax application area, that is, apply special wax to the back of the wafer onto a circular block carrier (hereinafter referred to as Block); 2. Achieve the target removal amount and a better flatness parameter through three processes: coarse polishing, medium polishing and fine polishing.

[0004] In the manufacturing process of a single-wafer polishing machine, foreign matter on the back of the block and wafer can cause uneven contact pressure between the wafer and the polishing pad during polishing. If particles are present on the back, the pressure at that point will be greater, resulting in over-polishing. This manifests as a shallow pit, known as a "dimple," in the flatness test map after polishing. The presence of dimples can worsen the roughness of this area in downstream semiconductor processes, such as epitaxy and prevent proper focusing in photolithography, leading to defects. Since each defect in a silicon wafer represents a significant loss in downstream processes, it is crucial to reduce the occurrence of dimples on the substrate side, i.e., to improve the cleanliness of the block surface. This requires cleaning the block.

[0005] The cleaning process of blocks inevitably involves the use of water. After cleaning, blocks are placed in containers called "baskets" to ensure surface cleanliness. However, since the block surface is already wet, lifting it directly will cause water droplets to fall onto the raised floor, posing several risks: 1. Risk of slipping; 2. Risk of disrupting ambient humidity. Therefore, it is necessary to provide a block transport cart so that after cleaning, the "baskets" can be placed on top of the cart, thus reducing water droplets falling to the ground and minimizing the time employees spend lifting the "baskets," thereby reducing the probability of block collisions and damage. Utility Model Content

[0006] The purpose of this invention is to provide a wax-applying carrier transport vehicle for the polishing process to overcome the shortcomings of the existing technology.

[0007] The objective of this utility model is achieved through the following technical solution: A waxing carrier transport vehicle for a polishing process includes a movable frame; The vehicle frame is provided with a vehicle storage area and a water tank from top to bottom; The vehicle storage area includes a base plate and a left side plate, a rear side plate, and a right side plate located on the base plate; a stop bar is provided on the lower front side of the vehicle storage area; a limiting strip is provided on the upper surface of the base plate for limiting the waxing vehicle; a drainage hole is provided on the base plate, the bottom of which faces the water tank, so as to drain the water in the vehicle storage area into the water tank; The waxing carrier also includes a floor chain for removing static electricity.

[0008] Preferably, the bottom of the water tank is provided with a drainage pipe.

[0009] Preferably, a control switch is provided on the drainage pipe.

[0010] Preferably, the frame is provided with a placement slot for storing the tail end of the drainage pipe.

[0011] Preferably, the base plate, the left side plate, the rear side plate, and the right side plate are all made of PP material.

[0012] Preferably, the vehicle frame is further provided with a miscellaneous storage area below the water tank.

[0013] Preferably, the bottom of the miscellaneous storage area is provided with holes.

[0014] Preferably, the bottom of the vehicle frame is provided with multiple shock-absorbing casters.

[0015] Preferably, there is a certain distance between the top of the water tank and the bottom plate of the vehicle storage area.

[0016] Preferably, the limiting strip includes a plurality of intersecting transverse limiting strips and longitudinal limiting strips.

[0017] The conveyor provided in this application has a simple structure, low cost, and easy operation. It can reduce water spillage on the workshop floor after cleaning, effectively improve the production environment of the products, and reduce the time employees spend carrying "baskets", thereby reducing the probability of block collision damage and other situations, and reducing the risk of people slipping and causing losses. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the storage cabinet provided in this application; Figure 2 This is a three-dimensional structural diagram of the storage cabinet provided in this application from another perspective; Explanation of reference numerals in the attached figures: 1-Frame; 2-Vehicle storage area; 21-Bar; 3-Water tank; 31-Drainage pipe; 32-Placement slot; 4-Miscellaneous storage area; 41-Fence; 5-Drag chain; 6-Shock-absorbing caster wheel; 7-Handle; 8-Limit strip. Detailed Implementation

[0019] This application provides a wax-applying carrier transport vehicle for a polishing process, such as... Figures 1-2 As shown, it includes a movable frame 1, which can drive the entire transport vehicle to move.

[0020] The vehicle frame 1 is arranged from top to bottom as a vehicle storage area 2 and a water tank 3.

[0021] The vehicle storage area 2 includes a base plate and a left side plate, a rear side plate, and a right side plate located on the base plate; a stop bar 21 is provided on the lower front side of the vehicle storage area. A limiting strip 8 is provided on the upper surface of the base plate to limit the movement of the waxing vehicle, increasing its stability during transportation and preventing damage from impacts. Drainage holes are provided on the base plate, with the bottom of the drainage holes facing the water tank 3, allowing water from the vehicle storage area to be drained into the water tank. The waxing vehicle also includes a drag chain 5, which is preferably made of stainless steel. The drag chain is used to contact the ground to eliminate static electricity generated by the vehicle and reduce contamination caused by static electricity adsorption.

[0022] After cleaning, the wet vehicle can be placed on the base plate of the vehicle storage area. The left, rear, and right side panels, as well as the front guardrail, prevent the vehicle from falling. Limiting strips prevent the vehicle from moving freely on the base plate, thus increasing its stability during transportation and preventing damage from impacts. This application features a lower front guardrail, which facilitates placing the vehicle on the base plate while preventing it from falling. Moisture on the vehicle flows out through drainage holes and is collected in a water tank, effectively preventing water from spilling onto the workshop floor. This allows for better control of the temperature and humidity in the production workshop and reduces the risk of slipping and falling.

[0023] As those skilled in the art will understand, the conveyor can also be used for conveying other materials containing water, such as cleaned wafers.

[0024] Preferably, the limiting strip 8 includes a plurality of intersecting lateral and longitudinal limiting strips, which comprehensively limit the vehicle from both lateral and longitudinal directions to prevent it from moving arbitrarily. The number and position of the lateral and longitudinal limiting strips can be adjusted accordingly based on the size of the vehicle.

[0025] Preferably, the bottom of the water tank 3 is provided with a drain pipe 31. Specifically, a hole can be made at the bottom of the water tank, and the drain pipe 31 can be connected to the hole. When the water in the water tank accumulates to a certain level, the water in the water tank can be discharged through the drain pipe. Furthermore, a control switch is provided on the drain pipe 31, such as a drain valve at the connection between the hole and the drain pipe.

[0026] Preferably, there is a certain distance between the top of the water tank 3 and the bottom plate of the vehicle storage area 2, which allows for easy observation of the water level inside the tank and timely drainage. Alternatively, the water tank can be completely enclosed or made transparent, which also facilitates observation of the water level inside.

[0027] Preferably, the frame 1 is provided with a placement slot 32 for storing the tail end of the drainage pipe 31. By providing the placement slot, the drainage pipe 31 can be supported, preventing the tail end of the drainage pipe from falling to the ground and affecting the normal movement of the transport vehicle.

[0028] Preferably, the bottom plate, left side plate, rear side plate, and right side plate are all made of PP material. PP material is corrosion-resistant and does not produce particles.

[0029] Preferably, the frame 1 is also provided with a miscellaneous storage area 4 below the water tank, which can store other miscellaneous items.

[0030] More preferably, the bottom of the miscellaneous storage area 4 is provided with holes. Compared with not having holes, this can increase friction, reduce the shaking of stored items, and also reduce weight and save costs.

[0031] Preferably, the left, rear, and right sides of the storage area are equipped with railings 41 to prevent items from falling. There is no railing on the front side to facilitate the placement of items.

[0032] Preferably, the mop chain is located at the bottom of the clutter storage area.

[0033] Preferably, the bottom of the frame 1 is provided with multiple shock-absorbing casters 6 to reduce vibration and material collision during transportation.

[0034] Preferably, the frame 1 is provided with a handle 7, which can be gripped to push the vehicle. More preferably, the handle is located on the front side of the vehicle storage area, so that when pushing the vehicle by holding the handle, the storage status of the vehicles in the vehicle storage area can be easily observed, further preventing the vehicles from falling off.

[0035] Therefore, the conveyor provided in this application has a simple structure, low cost, and easy operation. It can reduce water spillage on the workshop floor after cleaning, effectively improve the production environment of the products, and reduce the time employees spend carrying "baskets", thereby reducing the probability of block collision damage and other situations, and reducing the risk of people slipping and causing losses.

[0036] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if these modifications and modifications of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and modifications.

Claims

1. A wax-applying carrier transport vehicle for a polishing process, characterized in that, Includes a movable frame; The vehicle frame is provided with a vehicle storage area and a water tank from top to bottom; The vehicle storage area includes a base plate and a left side plate, a rear side plate, and a right side plate located on the base plate; a stop bar is provided on the lower front side of the vehicle storage area; a limiting strip is provided on the upper surface of the base plate for limiting the waxing vehicle; a drainage hole is provided on the base plate, the bottom of which faces the water tank, so as to drain the water in the vehicle storage area into the water tank; The waxing carrier also includes a floor chain for removing static electricity.

2. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, The bottom of the water tank is equipped with a drainage pipe.

3. The wax-applying carrier transport vehicle for the polishing process as described in claim 2, characterized in that, A control switch is installed on the drainage pipe.

4. The wax-applying carrier transport vehicle for the polishing process as described in claim 2, characterized in that, The frame is provided with a storage slot for storing the tail end of the drainage pipe.

5. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, The base plate, the left side plate, the rear side plate, and the right side plate are all made of PP material.

6. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, The vehicle frame also has a storage area for miscellaneous items below the water tank.

7. The wax-applying carrier transport vehicle for the polishing process as described in claim 6, characterized in that, The bottom of the miscellaneous storage area is provided with holes.

8. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, The bottom of the frame is equipped with multiple shock-absorbing casters.

9. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, There is a certain distance between the top of the water tank and the bottom plate of the vehicle storage area.

10. The wax-applying carrier transport vehicle for the polishing process as described in claim 1, characterized in that, The limiting strip includes several intersecting horizontal limiting strips and vertical limiting strips.

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