Carrier plate blanking device

Abstract

The application relates to a carrier plate unloading device, which comprises a conveying assembly for receiving a carrier plate and conveying the carrier plate to a predetermined position; the conveying assembly comprises a containing cavity, and multiple layers of placing assemblies for placing the carrier plate are arranged in the containing cavity from top to bottom; an unloading assembly cooperates with the conveying assembly to convey the carrier plate to the conveying assembly; the unloading assembly comprises a lifting mechanism and a runway for supporting the carrier plate, the runway moves up and down under the driving of the lifting mechanism, so that the runway is docked with one of the layers of the placing assemblies in the conveying assembly, and the carrier plate on the runway is conveyed to the corresponding placing assembly. The carrier plate unloading device can automatically take out the carrier plate from the runway without manual participation, so that the carrier plate unloading efficiency can be improved.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a carrier plate feeding device. Background Technology

[0002] In PVD (Physical Vapor Deposition) processes, the carrier plate is primarily used to carry the workpiece to be coated into and out of the coating chamber for coating. Some coating production systems employ a circulating carrier plate track. At a preset starting position, the loading device places the workpiece to be coated onto the carrier plate. The carrier plate then enters the carrier plate track and is conveyed into the coating chamber for coating. After coating, the unloading device removes the coated workpiece from the carrier plate, and the empty carrier plate returns to the starting position via the carrier plate track, awaiting the next coating cycle. When the carrier plate enters the coating chamber multiple times, some coating material may remain on it, affecting coating efficiency. Therefore, some coating production systems manually remove the carrier plate from the carrier plate track after multiple entries into the coating chamber to avoid impacting coating efficiency. However, manual handling increases labor costs and time, resulting in lower carrier plate unloading efficiency. Utility Model Content

[0003] Therefore, it is necessary to provide a carrier plate unloading device to address the above problems and solve the problem of low unloading efficiency caused by manually removing the carrier plate from the runway in the prior art.

[0004] On one hand, this application provides a carrier plate unloading device, including: a transport component for receiving a carrier plate and transporting the carrier plate to a predetermined position; the transport component includes a receiving cavity, in which multiple layers of placement components for placing the carrier plate are arranged from top to bottom; an unloading component, which cooperates with the transport component to transport the carrier plate to the transport component; the unloading component includes a lifting mechanism and a track supporting the carrier plate connected to each other, the track moving up and down under the drive of the lifting mechanism, so that the track docks with one of the placement components in the transport component, and transports the carrier plate on the track to the corresponding placement component.

[0005] Optionally, each placement component includes placement modules disposed opposite to the two side walls of the receiving cavity. Each placement module includes a first driving member, a driving wheel, a belt, and a driven wheel. The belt is sleeved on the driving wheel and the driven wheel. The first driving member drives the driving wheel to rotate, thereby driving the belt to move.

[0006] Optionally, the runway includes two first supports arranged opposite each other; each support is provided with a plurality of conveyor wheels, which rotate in a controlled manner to transport a carrier plate on the conveyor wheel.

[0007] Optionally, multiple conveyor wheels on each first support are located on opposite sides of the two first supports.

[0008] Optionally, the lifting mechanism includes: two second driving members; two second supporting members, each second supporting member being connected to one of the second driving members and moving up and down under the drive of the second driving member; each second supporting member being connected to one of the first supporting members, such that the second supporting member drives the first supporting member to move up and down, thereby adjusting the height of the carrier plate on the first supporting member.

[0009] Optionally, the carrier plate unloading device also includes a positioning component, which is disposed on the side of the unloading component and is used to dock with the transport component and position the transport component.

[0010] Optionally, the positioning component includes a frame structure with an opening, the frame structure including two guide posts on both sides of the opening and a positioning post on the side opposite to the opening; the transport component enters the positioning component through the opening and reaches the positioning post for positioning under the guidance of the guide posts.

[0011] Optionally, each guide post is equipped with multiple guide wheels to guide the transport components entering the frame structure.

[0012] Optionally, two guide posts are arranged in parallel, and the inner side of each guide post near the opening has a chamfered structure, so that the distance between the two guide posts at the opening position is greater than the distance near the positioning post.

[0013] Optionally, the chamfered structure has a bevel or a curved surface.

[0014] The embodiments provided in this application, by setting a lifting mechanism and a transport component in the unloading component, enable the runway to transport the carrier plate on the runway to the corresponding transport component, thereby automatically removing the carrier plate from the runway without manual intervention, thus improving the unloading efficiency of the carrier plate. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a carrier plate unloading device provided in one embodiment of this application;

[0016] Figure 2 for Figure 1 A schematic diagram of the transportation components in the diagram;

[0017] Figure 3 for Figure 2 A magnified view of part A in the image;

[0018] Figure 4 for Figure 1 Schematic diagram of the lifting mechanism;

[0019] Figure 5 for Figure 1 Schematic diagram of the middle runway;

[0020] Figure 6 for Figure 1 A magnified view of part B in the image.

[0021] Explanation of reference numerals in the attached figures

[0022] 100. Carrier plate unloading device; 110. Transport component; 111. Receiving cavity; 112. Placement component; 1121. Placement module; 1122. Drive wheel; 1123. Driven wheel; 1124. Bearing component; 120. Unloading component; 121. Lifting mechanism; 1211. Second drive component; 1212. Second support component; 122. Track; 1221. First support component; 1222. Conveyor wheel; 130. Positioning component; 131. Frame structure; 1311. Guide column; 1312. Positioning column; 1313. Guide wheel; 1314. Chamfering mechanism; 140. Laser positioner; F1. First direction; F2. Second direction; F3. Third direction. Detailed Implementation

[0023] To make the technical solution and beneficial effects of this application more apparent and understandable, a detailed description is provided below by listing specific embodiments. The accompanying drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application pertains.

[0024] refer to Figures 1 to 5 This application provides a carrier plate unloading device 100, including a transport component 110 and an unloading component 120. The transport component 110 receives carrier plates and transports them to a predetermined position. The transport component 110 includes a receiving cavity 111. Multiple layers of placement components 112 for placing carrier plates are arranged from top to bottom within the receiving cavity 111. The unloading component 120 cooperates with the transport component 110 to transport the carrier plate to the transport component 110. The unloading component 120 includes an interconnected lifting mechanism 121 and a track 122 supporting the carrier plate. The track 122 moves up and down under the drive of the lifting mechanism 121, causing the track 122 to dock with one of the placement components 112 within the transport component 110, and conveying the carrier plate on the track 122 to the corresponding placement component 112.

[0025] It is understood that in this embodiment, the first direction F1 is defined as the transport direction of the carrier plate, the second direction F2 is the vertical direction, and the third direction F3 is perpendicular to the first direction F1 and the second direction F2, as shown in the figure. Figure 1 As shown.

[0026] The aforementioned carrier plate unloading device 100, by setting a lifting mechanism 121 and a transport component 110 in the unloading component 120, enables the runway 122 to transport the carrier plate on the runway 122 to the corresponding transport component 110, thereby automatically removing the carrier plate from the runway 122 without manual intervention, thus improving the carrier plate unloading efficiency.

[0027] Furthermore, improved substrate cutting efficiency can save time and labor costs required for substrate cutting, thereby increasing the production efficiency of the coating process.

[0028] Furthermore, in the aforementioned carrier plate unloading device 100, the transport component 110 is able to receive the carrier plate and transport it to a predetermined position. This allows the transport component 110 to transport the stored carrier plate to the predetermined position for unloading after it is full, thereby enabling the transport component 110 to be reused.

[0029] Furthermore, in the aforementioned carrier plate unloading device 100, a multi-layer placement assembly 112 is arranged from top to bottom within the receiving cavity 111, enabling the transport assembly 110 to simultaneously accommodate and transport multiple carrier plates. Simultaneously, the unloading assembly 120 is equipped with a lifting mechanism 121. This allows the runway 122 to dock with the multi-layer placement assembly 112 within the receiving cavity. Consequently, the transport assembly 110 can store multiple carrier plates at once before transporting them to a predetermined location. This reduces the frequency of transporting carrier plates to the predetermined location, saving the overall time required to transport multiple carrier plates and further improving carrier plate unloading efficiency.

[0030] Furthermore, in the aforementioned carrier plate unloading device 100, the unloading assembly 120 is equipped with a lifting mechanism 121. When it is not necessary to remove the carrier plate, the lifting mechanism 121 can move the track 122 to a position where it can dock with other tracks in the production system, allowing the track 122 to be used for transporting carrier plates in the coating process. This enables the reuse of the track 122, thereby reducing the hardware cost of the carrier plate unloading device 100.

[0031] refer to Figure 2 and Figure 3 In this embodiment, each placement assembly 112 includes placement modules 1121 disposed opposite each other on the two side walls of the receiving cavity 111. Each placement module 1121 includes a first driving member (not shown), a driving wheel 1122, a belt (not shown), and a driven wheel 1123. The belt is sleeved on the driving wheel 1122 and the driven wheel 1123. The first driving member drives the driving wheel 1122 to rotate, thereby driving the belt to move. The belt can carry the carrier plate conveyed from the track 122 to the placement module 1121, and transport the carrier plate into the placement module 1121 through movement, so that the placement assembly 112 can cooperate with the unloading assembly 120 to transport the carrier plate into the transport assembly 110.

[0032] It is understandable that the first driving component can be a cylinder, motor, or other driving mechanism; no specific restrictions are imposed here.

[0033] Further reference Figure 3 Each placement module 1121 also includes a support member 1124, which provides vertical load-bearing force to the belt, thereby enabling the belt to better carry and transport the carrier plate.

[0034] refer to Figure 4 In this embodiment, the runway 122 includes two first support members 1221 arranged opposite to each other. Each support member is provided with a plurality of conveyor wheels 1222, which rotate in a controlled manner to transport a carrier plate on the conveyor wheel 1222.

[0035] In this embodiment, multiple conveying wheels 1222 can transport the carrier plate by rotating synchronously, making the carrier plate more stable during transportation and reducing the risk of collision between the carrier plate and the transport component 110, the runway 122 and other mechanisms, thereby improving the reliability of the carrier plate unloading device 100.

[0036] Furthermore, in this embodiment, when a single conveyor wheel 1222 experiences a power failure, the remaining conveyor wheels 1222 can still synchronously rotate the transport plate, thereby improving the reliability of the runway 122's conveying function.

[0037] Furthermore, in this embodiment, multiple conveying wheels 1222 can jointly support the carrier plate, allowing the carrier plate to bear force at multiple points, reducing the risk of local stress concentration on the carrier plate, reducing the risk of deformation of the carrier plate, and thus reducing the wear rate of the carrier plate.

[0038] refer to Figure 4 In this embodiment, the multiple conveying wheels 1222 on each first support member 1221 are located on opposite sides of the two first support members 1221. This allows the two sets of conveying wheels 1222 to be positioned inside the two first support members 1221, thereby enabling the first support members 1221 to guide the conveying wheels 1222 and allowing the carrier plate to move along the first direction during the conveying process, thus improving the stability of the conveying function of the runway 122.

[0039] Furthermore, the two sets of conveyor wheels 1222 are located inside the two first support members 1221, which makes the first support members 122 also protect the conveyor wheels 1222, preventing the conveyor wheels 1222 from being damaged by external force collisions, thereby improving the reliability of the runway 122.

[0040] refer to Figure 1 and Figure 5In this embodiment, the lifting mechanism 121 includes two second driving members 1211 and two second supporting members 1212. Each second supporting member 1212 is connected to one of the second driving members 1211 and moves up and down under the drive of the second driving member 1211. Each second supporting member 1212 is connected to one of the first supporting members 1221, such that the second supporting member 1212 drives the first supporting member 1221 to move up and down, thereby adjusting the height of the carrier plate on the first supporting member 1221. Thus, the second driving members 1211 and the second supporting members 1212 can realize the function of the lifting mechanism 121 in driving the track 122 to move up and down.

[0041] Furthermore, it is understood that the second driving component 1211 can be a driving mechanism such as a linear motor, and no specific restrictions are made here.

[0042] Furthermore, during operation, the two second drive components 1211 can operate synchronously to prevent the runway 122 from tilting, thereby improving the reliability of the lifting mechanism 121.

[0043] refer to Figure 1 In this embodiment, the carrier plate unloading device 100 further includes a positioning component 130. The positioning component 130 is disposed on the side of the unloading component 120 and is used to dock with the transport component 110 and position the transport component 110. The positioning component 130 can fix the relative positions of the transport component 110 and the unloading component 120, thereby ensuring that during the process of the carrier plate entering the transport component 110 from the runway 122, there will be no problem of collision or failure of the carrier plate to smoothly reach the transport component 110 due to the relative position error of the transport component 110 and the unloading component 120, thereby improving the reliability of the carrier plate unloading device 100.

[0044] refer to Figure 1 In this embodiment, the positioning component 130 includes a frame structure 131 with an opening. The frame structure 131 includes two guide posts 1311 located on both sides of the opening and a positioning post 1312 located on the side opposite to the opening. The transport component 110 enters the positioning component 130 through the opening and, guided by the guide posts 1311, reaches the positioning post 1312 for positioning. The frame structure 131, through the combined action of the positioning post 1312 and the guide posts 1311, can fix the relative positions of the transport component 110 and the unloading component 120, thus achieving the positioning function.

[0045] Specifically, the transport component 110 can enter the frame structure 131 through the opening, and the guide post 1311 enables the transport component 110 to move towards the positioning post 1312 until the transport component 110 abuts against the positioning post 1312. At this time, the positioning post 1312 can restrict the transport component 110 from continuing to approach the unloading component 120 along the first direction F1, thereby realizing the positioning function.

[0046] In addition, in this embodiment, the positioning post 1312 also has a limiting function, which can restrict the movement of the transport component 110 along the third direction F3, reduce the risk of misalignment between the transport component 110 and the unloading component 120 in the third direction F3, and cause the carrier plate to collide with the transport component 110, thereby further improving the reliability of the carrier plate unloading device 100.

[0047] refer to Figure 1 In this embodiment, each guide post 1311 is provided with multiple guide wheels 1313, which guide the transport component 110 entering the frame structure 131. The guide wheels 1313 can change the friction between the transport component 110 and the guide post 1311 into rolling friction, thereby allowing the transport component 110 to enter and exit the frame structure 131 more smoothly, reducing friction loss, avoiding wear on the transport component 110 and the frame structure 131, and thus improving the service life of the transport component 110 and the frame structure 131.

[0048] refer to Figure 6 In this embodiment, two guide posts 1311 are arranged in parallel. Each guide post 1311 has a chamfered structure 1314 formed on the inner side near the opening, so that the distance between the two guide posts 1311 at the opening position is greater than the distance near the positioning post 1312.

[0049] It is understandable that the chamfered structure 1314 refers to the inner side of the guide post 1311 near the opening being inclined outward, so that the distance between the inner sides of the two guide posts 1311 is larger at the opening, thereby making it easier for the transport component 110 to enter between the two guide posts 1311 from the opening.

[0050] In this embodiment, by providing a chamfered structure 1314 on each guide post 1311, the guide post 1311 can more easily and accurately guide the transport component 110 to the correct position between the two guide posts 1311, reducing the risk of jamming and impact, thereby improving the reliability of the carrier plate unloading device 100.

[0051] Optionally, the chamfered structure 1314 has a bevel or an arc surface. The beveled and arc surface structures make it easier for the transport component 110 to enter the frame structure 131, reducing the risk of jamming and collision, thereby further improving the reliability of the carrier plate unloading device 100.

[0052] refer to Figure 1 and Figure 5 In this embodiment, the carrier plate unloading device 100 also includes a laser positioner 140, which is fixedly mounted on the track 122 and the laser direction is directed towards the transport assembly 110. When a carrier plate needs to be transported into the transport assembly 110, the laser positioner 140 can move up and down with the track 122 and detect whether each placement assembly 112 in the transport assembly 110 already contains a carrier plate by using laser detection. This allows the carrier plate unloading device 100 to automatically find an empty placement assembly 112 to place the carrier plate, thereby improving the space utilization rate of the transport assembly 110 and thus improving the working efficiency of the carrier plate unloading device 100.

[0053] In this application, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "height," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the purpose of simplifying the description of this application and do not indicate that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In other words, they should not be construed as limitations on this application.

[0054] In this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating the relative importance of the indicated features or the number of indicated technical features. Therefore, a feature specified as "first" or "second" may explicitly include at least one of those features. In this application, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise explicitly specified.

[0055] In this application, unless otherwise expressly defined, the terms "installation," "connection," "linking," "fixing," "setting," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0056] In this application, unless otherwise expressly defined, the terms "above," "on top of," "over," "above," "below," "below," "below," or "below" for "first feature over second feature" can refer to the first and second features being in direct contact, or to the first and second features being in indirect contact through an intermediate medium. Furthermore, "above," "over," and "below" for "first feature over second feature" can mean the first feature is directly above or diagonally above the second feature, or simply indicates that the horizontal height of the first feature is higher than the horizontal height of the second feature. Similarly, "below," "below," and "below" for "first feature over second feature" can mean the first feature is directly below or diagonally below the second feature, or simply indicates that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0057] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations included in the claims. Various modifications and changes can be made to the above embodiments without departing from the scope of this disclosure. Similarly, the various technical features of the above embodiments can be arbitrarily combined to form other embodiments of this application that may not be explicitly described. Therefore, the above embodiments only illustrate several implementations of this application and do not limit the scope of protection of this patent application.

Claims

1. A carrier plate unloading device, characterized in that, include: A transport assembly for receiving a carrier plate and transporting the carrier plate to a predetermined position; the transport assembly includes a receiving cavity, in which multiple layers of placement assemblies for placing the carrier plate are arranged from top to bottom; A feeding assembly, which cooperates with the transport assembly to transport the carrier plate to the transport assembly; the feeding assembly includes an interconnected lifting mechanism and a track supporting the carrier plate, the track moving up and down under the drive of the lifting mechanism, so that the track docks with one of the placement components in the transport assembly, and transports the carrier plate on the track to the corresponding placement component.

2. The carrier plate unloading device according to claim 1, characterized in that, Each of the placement components includes placement modules disposed opposite to each other on the two side walls of the receiving cavity. Each placement module includes a first driving member, a driving wheel, a belt, and a driven wheel. The belt is sleeved on the driving wheel and the driven wheel. The first driving member drives the driving wheel to rotate, thereby driving the belt to move.

3. The carrier plate unloading device according to claim 1, characterized in that, The runway includes two first supports arranged opposite each other; each support is provided with a plurality of conveyor wheels, which are controlled to rotate to transport the carrier plate on the conveyor wheels.

4. The carrier plate unloading device according to claim 3, characterized in that, The plurality of conveyor wheels on each of the first supports are located on opposite sides of the two first supports.

5. The carrier plate unloading device according to claim 3, characterized in that, The lifting mechanism includes: Two secondary drive units; Two second support members, each of which is connected to one of the second drive members and moves up and down under the drive of the second drive member; each of the second support members is connected to one of the first support members, such that the second support member drives the first support member to move up and down, thereby adjusting the height of the carrier plate on the first support member.

6. The carrier plate unloading device according to any one of claims 1-5, characterized in that, It also includes a positioning component, which is disposed on the side of the unloading component and is used to dock with the transport component and position the transport component.

7. The carrier plate unloading device according to claim 6, characterized in that, The positioning component includes a frame structure with an opening, the frame structure including two guide posts located on both sides of the opening and a positioning post located on the side opposite to the opening; The transport component enters the positioning component through the opening and, guided by the guide post, reaches the positioning post for positioning.

8. The carrier plate unloading device according to claim 7, characterized in that, Each of the guide posts is provided with multiple guide wheels, which guide the transport components entering the frame structure.

9. The carrier plate unloading device according to claim 7, characterized in that, The two guide posts are arranged in parallel, and the inner side of each guide post near the opening has a chamfered structure, so that the distance between the two guide posts at the opening is greater than the distance near the positioning post.

10. The carrier plate unloading device according to claim 9, characterized in that, The chamfered structure has a beveled surface or a curved surface.

Images