A semiconductor-grade stainless steel ba tube unloading structure

Abstract

The utility model provides a kind of semiconductor grade stainless steel BA pipe unloading structure, it is related in the field of semiconductor manufacturing technology, including flat car, two mounting brackets are symmetrically equipped on flat car, connecting plate is slidably equipped on each mounting bracket, connecting block is equipped on two connecting plates, mounting block is equipped between two connecting blocks, sleeve ring is sleeved on mounting block, multiple connecting rods are slidably penetrated around sleeve ring, one end of each connecting rod located inside sleeve ring is equipped with clamping plate, first spring is sleeved on the end of each connecting rod towards sleeve ring.The utility model realizes the self-adaptive clamping of stainless steel BA pipe by the cooperation of multiple clamping plates distributed around and spring, avoids surface scratch caused by the clamping arm of traditional mechanical clamping, and reaches the effect of fast and no damage to stainless steel BA pipe.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically a semiconductor-grade stainless steel BA tube unloading structure. Background Technology

[0002] In the semiconductor manufacturing field, the transport systems for ultrapure media (such as high-purity gases, ultrapure water, and specialty chemicals) place extremely stringent requirements on the cleanliness, corrosion resistance, and surface roughness of the piping materials. Stainless steel BA tubing (Bright Annealed Tube), due to its high-temperature bright annealing treatment, forms a dense oxide film on its surface without oxide scale residue. It is widely used in semiconductor clean piping systems to meet the stringent control requirements of microelectronic processes for metal ion deposition, particulate contamination, and microbial growth.

[0003] All stainless steel BA pipes must undergo non-destructive testing. After the testing, during unloading, traditional unloading methods (such as manual handling or direct gripping by a robotic arm) may cause surface scratches due to friction or contact. Especially if protection is not provided in time after non-destructive testing, the risk of contamination increases significantly.

[0004] Therefore, there is an urgent need for a new type of unloading structure that can operate directly after non-destructive testing, avoid scratches on the surface of stainless steel BA pipes caused by human contact, eliminate direct human operation, ensure the cleanliness and integrity of the pipeline, and meet the needs of automated production. Utility Model Content

[0005] To address the aforementioned issues, this invention provides a semiconductor-grade stainless steel BA tube unloading structure. Multiple circumferentially distributed clamping plates, in conjunction with springs, achieve adaptive clamping of the stainless steel BA tube, avoiding surface scratches caused by traditional mechanical clamping arms and achieving a quick and damage-free unloading effect.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a semiconductor-grade stainless steel BA tube unloading structure, including a flatbed cart, on which two mounting brackets are symmetrically arranged, and a connecting plate is slidably arranged on each mounting bracket. A connecting block is provided on each of the two connecting plates, and a mounting block is provided between the two connecting blocks. A collar is fitted on the mounting block, and multiple connecting rods are slidably passed through the collar. A clamping plate is provided at one end of each connecting rod located inside the collar, and a first spring is fitted at one end of each connecting rod facing the collar.

[0007] Preferably, a motor is provided on one side of the mounting bracket, a gear is provided on the output shaft of the motor, and a rack is provided on the connecting plate that meshes with the gear.

[0008] Preferably, a ratchet rack is provided on the connecting plate on the other side, and a locking rod slides through the mounting bracket from the outside to the inside. A second spring is sleeved on the outside of the locking rod, and the locking rod cooperates with the ratchet rack.

[0009] Preferably, each of the clamping plates is provided with guide plates at both ends.

[0010] Preferably, each of the clamps has a soft pad on its inner side.

[0011] Preferably, the mounting block is provided with a cylinder, and the output end of the cylinder is provided with a connecting plate connected to the collar.

[0012] Preferably, the outward-facing end of the lever is provided with a handle.

[0013] Compared with the prior art, the beneficial effects of this utility model are: This invention utilizes multiple surrounding clamping plates in conjunction with springs to achieve self-adaptive clamping of stainless steel BA pipes, avoiding surface scratches or localized stress concentrations caused by traditional mechanical clamping arms. Simultaneously, soft pads prevent direct contact between the stainless steel BA pipe and the clamping plates, preventing wear and protecting the pipe's smoothness and integrity. The guide plate employs a beveled structure, radially constraining and axially guiding the stainless steel BA pipe during clamping, automatically aligning the pipe with the clamping center, reducing manual adjustment and offset errors, improving unloading efficiency and positioning accuracy, and preventing misalignment and friction damage, thus meeting the automation requirements of semiconductor cleanrooms. A motor-driven rack and pinion mechanism enables automatic lifting and lowering of the connecting plate (and clamping components), improving unloading efficiency and reducing operator workload; the ratchet rack and lever prevent accidental pipe slippage during lifting, ensuring operational safety. A cylinder, via a connecting plate, drives the collar to move horizontally, further fine-tuning the pipe clamping position. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of the unloading structure of this utility model; Figure 2 This is a partial structural diagram of the unloading structure of this utility model; Figure 3 This is a detailed structural drawing of the clamping plate and guide plate of this utility model; Figure 4 This is a schematic diagram of the vertical moving mechanism between the mounting bracket and the connecting plate of this utility model. Figure 5 This is a partial view of the vertical moving mechanism between the mounting bracket and the connecting plate of this utility model; Figure 6 This is a detailed partial structural view of the ratchet rack and lever of this utility model.

[0015] In the diagram: 1. Flatbed trolley; 2. Mounting frame; 3. Connecting plate; 4. Mounting block; 41. Collar; 5. Connecting block; 51. Clamping plate; 6. Connecting rod; 7. First spring; 8. Guide plate; 9. Motor; 10. Gear; 11. Rack; 12. Ratchet; 13. Locking rod; 14. Second spring; 15. Handle; 16. Cylinder; 17. Connecting plate; 18. Soft pad. Detailed Implementation

[0016] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0017] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0019] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0020] Please see Figure 1-6This embodiment provides a semiconductor-grade stainless steel BA pipe unloading structure, including a flatbed trolley 1. The flatbed trolley 1 is electrically driven and does not require manual pushing. Two mounting brackets 2 are symmetrically arranged on the flatbed trolley 1. The two mounting brackets 2 are welded to the top surface of the flatbed trolley 1. Each mounting bracket 2 has a sliding connecting plate 3. The connecting plate 3 slides up and down on the mounting bracket 2 to adjust according to different working heights. Each of the two connecting plates 3 has a connecting block 5. The two connecting blocks 5 are welded to the top of the connecting plate 3. An mounting block 4 is provided between the two connecting blocks 5. The mounting block 4 is annular and welded to the connecting blocks 5 on both sides. A collar 41 is fitted on the mounting block 4. The collar 41 can slide back and forth parallel within the mounting block 4 to achieve the effect of fine adjustment of position. Multiple connecting rods 6 slide through the collar 41. Each connecting rod 6 has a clamping plate 51 at one end inside the collar 41. The clamping plate 51 adopts an arc design, with a flexible rubber layer attached to the inside. The surface is treated with special anti-static treatment, which not only protects the pipe surface from scratches, but also effectively avoids electrostatic adsorption of particles. Each connecting rod 6 has a first spring 7 fitted onto one end facing the collar 41; like Figure 2 As shown, the operator moves the electric flatbed cart 1 to below the stainless steel BA pipe and manually pushes the collar 41 to slide along the axis of the mounting block 4 towards the pipe, so that the collar 41 is completely fitted into the outer circumference of the pipe. During the fitting process, the outer wall of the pipe squeezes the clamping plate 51. After the clamping plate 51 is compressed, it drives the connecting rod 6 to slide outward along the guide hole of the collar 41 and compress the first spring 7. When the pipe is completely in the clamping area, the elastic force of the first spring 7 pushes the clamping plate 51 inward through the connecting rod 6, so that the arc-shaped inner wall of the clamping plate 51 is tightly attached to the surface of the pipe with the silicone pad, forming an adaptive clamping force to fix the pipe.

[0021] In some embodiments, a motor 9 is provided on one side of the mounting bracket 2, a gear 10 is provided on the motor output shaft, and a rack 11 that meshes with the gear 10 is provided on the connecting plate 3. like Figure 5 As shown, the output shaft of motor 9 drives gear 10 to rotate synchronously. Through the meshing transmission of rack 11, which is vertically fixed to the side of connecting plate 3, the rotational motion of gear 10 is converted into the precise linear lifting and lowering motion of connecting plate 3 along the column of mounting bracket 2. When gear 10 rotates clockwise, it drives rack 11 to move connecting plate 3 downward, so that the clamping component accurately aligns with the stainless steel BA pipe sleeve and automatically aligns with the pipe axis, realizing unmanned positioning operation. When gear 10 rotates counterclockwise, it pulls connecting plate 3 upward to reset through rack 11, completing the preparation for unloading. The rigidity of gear and rack meshing transmission ensures that connecting plate 3 remains horizontal and stable throughout the lifting and lowering process, without deviation or shaking.

[0022] In some embodiments, a ratchet 12 is provided on the other side connecting plate 3. The downward side of the ratchet 12 is a leather surface, and the upward side is a slope surface. A locking rod 13 slides through the mounting bracket 2 from the outside to the inside. A second spring 14 is sleeved on the outside of the locking rod 13. The locking rod 13 cooperates with the ratchet 12. like Figure 6 As shown, in the initial state, the second spring 14 pushes the inner end of the latch 13 against the plane of the ratchet 12. When the connecting plate 3 moves upward under the drive of the motor 9, the inclined surface of the ratchet 12 presses the latch 13, causing it to slide outward and compress the second spring 14. After the latch 13 passes the ratchet, the second spring 14 rebounds and resets. The inner end of the latch 13 engages with the flat surface of the next ratchet, forming a one-way limit. When the connecting plate 3 needs to move downward, since the lower end is a flat surface in contact with the latch, it cannot press the latch 13 outward like the inclined surface. It can only be manually pulled outward to disengage it from the ratchet 12. After the limit is released, the connecting plate 3 moves downward under the drive of the gear rack. Through the cooperation of the ratchet 12 and the latch 13, the one-way self-locking of the connecting plate 3 when it rises is achieved. This ensures that if the motor 9 cannot support the plate and it falls, the ratchet 12 and the latch 13 can hold it firmly in place.

[0023] In some embodiments, each clamping plate 51 has a guide plate 8 at both ends. The outward-facing side of the guide plate 8 is inclined, similar to a funnel structure. This structure makes it easier and faster to insert the stainless steel BA tube into the unloading structure. The guide plate 8 is made of soft silicone, so it will not damage the stainless steel BA tube during the insertion process.

[0024] In some embodiments, each clamping plate 51 has a soft pad 18 on its inner side. The soft pad 18 is made of silicone or polyurethane and its surface is frosted to increase friction. When the clamping plate 51 is clamped to the pipe by spring force, the soft pad 18 fits the outer wall of the pipe through elastic deformation, buffering pressure and dispersing stress, avoiding indentation or scratches on the pipe surface during clamping, and enhancing clamping stability to prevent the pipe from slipping.

[0025] In some embodiments, the mounting block 4 is provided with a cylinder 16, and the output end of the cylinder 16 is provided with a connecting plate 17 connected to the collar 41. The connecting plate 17 is rigidly connected to the outer wall of the collar 41 by welding or threaded fasteners. When the piston rod of the cylinder 16 extends, the connecting plate 17 pushes the collar 41 to slide along the axial direction of the mounting block 4 to fit the stainless steel BA tube. At the same time, the clamping plate 51 on the inner side of the collar 41 is compressed to complete the clamping. When the cylinder 16 retracts, it drives the already clamped stainless steel BA tube to retract, thereby achieving the effect of unloading.

[0026] In some embodiments, the outward-facing end of the lever 13 is provided with a handle 15, which has an L-shaped structure to enhance the gripping point when the lever 13 is pulled out.

[0027] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A semiconductor-grade stainless steel BA tube unloading structure, characterized in that: The device includes a flatbed cart (1), on which two mounting brackets (2) are symmetrically arranged. Each mounting bracket (2) is slidably provided with a connecting plate (3). Each of the two connecting plates (3) is provided with a connecting block (5). A mounting block (4) is provided between the two connecting blocks (5). A collar (41) is fitted on the mounting block (4). Multiple connecting rods (6) are slidably passed through the collar (41). Each connecting rod (6) has a clamp (51) at one end inside the collar (41). A first spring (7) is fitted on one end of each connecting rod (6) facing the collar (41).

2. The semiconductor-grade stainless steel BA tube unloading structure according to claim 1, characterized in that: One of the mounting brackets (2) is equipped with a motor (9), the output shaft of the motor is equipped with a gear (10), and the connecting plate (3) is equipped with a rack (11) that meshes with the gear (10).

3. The semiconductor-grade stainless steel BA tube unloading structure according to claim 2, characterized in that: On the other side, the connecting plate (3) is provided with a ratchet (12), and a locking rod (13) slides through the mounting bracket (2) from the outside to the inside. A second spring (14) is sleeved on the outside of the locking rod (13), and the locking rod (13) cooperates with the ratchet (12).

4. The semiconductor-grade stainless steel BA tube unloading structure according to claim 3, characterized in that: Each of the clamps (51) is provided with guide plates (8) at both ends.

5. The semiconductor-grade stainless steel BA tube unloading structure according to claim 1, characterized in that: Each of the clamps (51) has a soft pad (18) on its inner side.

6. The semiconductor-grade stainless steel BA tube unloading structure according to claim 1, characterized in that: The mounting block (4) is provided with a cylinder (16), and the output end of the cylinder (16) is provided with a connecting plate (17) connected to the collar (41).

7. The semiconductor-grade stainless steel BA tube unloading structure according to claim 3, characterized in that: The lever (13) is provided with a handle (15) at the outward end.

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