Evaporation boat capable of preventing metal liquid from splashing and vacuum evaporation device thereof

Abstract

The utility model discloses an evaporate boat of prevent metal liquid splashing and vacuum evaporation coater thereof belongs to evaporate boat technical field, including boat body, the upper surface of boat body is equipped with the evaporation tank for loading plating material, the opening shape of evaporation tank is annular structure of smooth transition, the upper surface of boat body is provided with baffle, the middle of baffle is provided with the hollow area corresponding with evaporation tank, the shape of hollow area is same with the opening shape of evaporation tank, the area of hollow area is less than the area of evaporation tank, and baffle is connected with boat body. The utility model discloses through setting evaporation tank as annular of smooth transition, reduces the thermal stress concentration of evaporate boat sharp corner, prevents the temperature uneven in evaporation tank, guarantees the uniformity of evaporation coating, reduces splashing, and the baffle of setting simultaneously is favorable to the splashing of blocking groove wall and the splashing of groove bottom junction metal liquid splashing to base film, guarantees the quality of coating.

Description

Technical Field

[0001] This utility model relates to an evaporation boat and its vacuum evaporation device for preventing molten metal splashing, belonging to the field of evaporation boat technology. Background Technology

[0002] In the preparation process of composite current collectors used in lithium batteries, roll-to-roll vacuum coating equipment is typically required to deposit metal materials on both sides of a polymer base film, forming a composite current collector with a "metal layer-base film-metal layer" sandwich structure. The evaporation boat is a core component in the physical vapor deposition process; essentially, it is a device that evaporates the coating material through resistance heating.

[0003] Existing evaporation boats mostly use V-shaped or square grooves as the area for holding the plating material. This design is simple and easy to process.

[0004] However, the above solution has the following shortcomings in practical use:

[0005] 1. In the above scheme, the sharp corners of the V-shaped or square grooves of the evaporation boat are prone to electrothermal stress concentration, which leads to local overheating of the evaporation boat. This results in uneven temperature distribution in the groove, unstable evaporation rate, and ultimately uneven film thickness on the base film.

[0006] 2. In evaporation boats, the molten material tends to accumulate and overheat at the sharp corners of the V-shaped groove, and the connection between the groove wall and the bottom of the groove is also prone to overheating, causing the plating solution to boil and churn violently, generating a large number of splashing droplets. These splashing particles will fall directly onto the base film, forming film defects and seriously affecting the product yield. Utility Model Content

[0007] To solve the above-mentioned technical problems, this utility model provides an evaporation boat that prevents molten metal from splashing, thereby achieving...

[0008] The technical solution adopted by this utility model to solve its technical problem is:

[0009] An evaporation boat for preventing molten metal splashing includes a boat body, characterized in that: the upper surface of the boat body is provided with an evaporation tank for holding plating material, the opening shape of the evaporation tank is a smoothly transitioned annular structure, a baffle is provided on the upper surface of the boat body, the baffle has a hollow area in the middle corresponding to the evaporation tank, the shape of the hollow area is the same as the opening shape of the evaporation tank, the area of ​​the hollow area is smaller than the area of ​​the evaporation tank, and the baffle is connected to the boat body.

[0010] In this scheme, by setting the evaporation tank as a smoothly transitioning ring, the thermal stress concentration at the sharp corner of the evaporation boat is reduced, the temperature in the evaporation tank is prevented from being uneven, the uniformity of the evaporation coating is ensured, and splashing is reduced. At the same time, the baffles set up help to prevent the splashed molten metal from the tank wall and bottom from splashing onto the base film, thus ensuring the quality of the coating.

[0011] Preferably, the opening shape and the shape of the hollow region of the evaporation tank are set to be elliptical;

[0012] In this design, the elliptical opening structure of the evaporation tank has a continuous and symmetrical curvature change, which can provide a uniform and dead-angle-free spreading environment for the molten plating material. This achieves a good spreading effect while effectively eliminating local overheating caused by sharp corners. Furthermore, the baffle forms an elliptical hollow area in the center, which does not affect the overall evaporation effect of the evaporation tank and can also block the boiling and splashing plating liquid at the connection between the tank wall and the bottom of the tank, reducing splashing.

[0013] Preferably, the connection between the wall and the bottom of the evaporation tank is a continuous and smooth curved surface;

[0014] In this design, the connection between the tank wall and the tank bottom is a continuous and smooth curved surface, which facilitates the full spread of the plating solution in the evaporation tank and provides an unobstructed path for the flow of the plating solution, thereby maximizing the effective evaporation surface area. The smooth and continuous curved surface eliminates the heat stress concentration points, thereby avoiding the formation of local hot spots at the connection between the tank wall and the tank bottom, so that the heat field distribution reaches a uniform state, greatly reducing splashing caused by local boiling, and also helping to avoid cleaning dead corners.

[0015] Preferably, when the opening shape of the evaporation tank and the shape of the hollow region are elliptical, the length ratio of the major axis to the minor axis of the evaporation tank is 4:1 to 5:1, and the length ratio of the major axis to the minor axis of the hollow region is 4:1 to 5:1.

[0016] In this scheme, the ratio of the major axis to the minor axis of the elliptical evaporation tank is 4:1 to 5:1. Within this range, the plating solution is spread into an elliptical shape, which is more conducive to the stable evaporation of the evaporation boat and ensures sufficient evaporation area. This ratio range ensures a sufficiently gentle temperature gradient from the center to both ends of the evaporation boat, so that the metal in the entire tank can be heated and evaporated synchronously and uniformly.

[0017] Preferably, the ratio of the length of the major axis of the evaporation tank to the length of the major axis of the hollow region is 1.1:1 to 1.2:1, and the ratio of the length of the minor axis of the evaporation tank to the length of the minor axis of the hollow region is 1.1:1 to 1.2:1.

[0018] In this scheme, by controlling the ratio of the major and minor axes of the evaporation tank and the hollow area within this range, the baffle can block along the periphery of the evaporation tank. On the one hand, it can ensure that the baffle of the evaporation boat does not affect the evaporation coating effect, and on the other hand, it can block the splashing molten metal. At the same time, it can block the edge of the evaporation tank where uneven temperature is likely to occur, so as to prevent uneven coating thickness or even affect product yield due to excessive evaporation or splashing caused by excessive temperature at the edge.

[0019] Preferably, the baffle is connected to the boat hull via a connecting structure, the connecting structure being used to detachably fix the baffle to the boat hull;

[0020] In this design, the baffle and the boat hull are detachably connected, making it easy to disassemble, clean, and maintain the baffle.

[0021] Preferably, the connection structure includes pins and connectors. The number of pins is set to two, and the bottom ends of the two pins are respectively fixedly connected to both ends of the boat body. The number of connectors is set to two, and the two connectors are respectively fixedly connected to both ends of the baffle. The bottom of the two connectors is provided with insertion holes, and the pins are adapted to be inserted into the insertion holes.

[0022] This solution uses a pin and socket to achieve a detachable connection structure, which enables quick assembly and disassembly of the baffle, meets the different requirements of various vapor deposition processes for baffle specifications, and improves the adaptability of the evaporation boat. At the same time, the matching design of the pin and socket ensures accurate baffle installation and positioning, ensuring that the empty area is always aligned with the opening of the evaporation tank, without affecting evaporation efficiency and anti-splashing effect.

[0023] Preferably, a magnet is fixedly connected to the top of each of the two pins, and a magnetic attractant is fixedly connected to the top wall of each of the two sockets, wherein the magnetic attractant is attracted to the magnet accordingly;

[0024] The connection stability is enhanced by the attraction between the magnet and the magnetic chuck, which prevents the baffle from shifting due to vibration under high temperature conditions, thus further ensuring the connection effect.

[0025] Preferably, the pin has a closed hollow cavity inside;

[0026] The pin can fix the magnet away from the boat body, thus keeping the magnet away from the heat source. At the same time, the hollow cavity in the middle of the pin uses the low thermal conductivity of air to block the transfer of heat from the boat body to the magnet, preventing the magnet from losing magnetism due to high temperature and ensuring the long-term effectiveness of the magnetic connection.

[0027] Preferably, a vacuum evaporation apparatus includes the aforementioned evaporation boat.

[0028] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0029] 1. This utility model eliminates local hot spots and dead flow angles by using an evaporation tank with a smooth elliptical arc shape and ensuring that the tank wall is smooth and without sharp corners. This results in extremely uniform heat distribution and stable current transmission, thereby achieving stability and uniformity of the evaporation boat during the evaporation process. It also suppresses the problem of coating splashing caused by uneven heating and poor flow in the evaporation boat, thereby improving the quality of the coating material produced.

[0030] 2. This utility model, by setting a baffle on the boat body and designing the hollow area formed by the baffle to correspond to the size of the opening of the evaporation tank, concentrates the protection range of the baffle on the edge area of ​​the boat body that needs to be prevented from splashing, without obstructing the effective evaporation surface of the device, thereby achieving the function of splash suppression without reducing the evaporation efficiency of the device.

[0031] 3. This utility model uses a detachable connection structure combined with a stepped hollow heat insulation design with pins to achieve quick assembly and disassembly of the baffle to adapt to different vapor deposition process requirements, while also blocking the transfer of heat from the boat body to the magnet and ensuring magnetic attraction stability, thus taking into account both structural reliability and usage flexibility. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0034] Figure 2 This is a cross-sectional view of the present invention;

[0035] Figure 3 This is an exploded view of the present invention;

[0036] Figure 4 This is a schematic diagram of the connection structure of this utility model;

[0037] Figure 5 This is a schematic diagram of the first embodiment of the present invention.

[0038] In the picture:

[0039] 1. Hull; 11. Evaporation tank; 12. Baffle.

[0040] 2. Connection structure; 21. Pin; 22. Connector; 23. Magnet; 24. Socket; 25. Magnetic attachment;

[0041] 211. Hollow cavity. Detailed Implementation

[0042] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0043] Please see Figure 1 This utility model provides a technical solution:

[0044] An evaporation boat for preventing molten metal splashing includes a boat body 1. The upper surface of the boat body 1 is provided with an evaporation tank 11 for holding plating material. The opening shape of the evaporation tank 11 is a smoothly transitioning annular structure along the length of the boat body 1. A baffle 12 is provided on the upper surface of the boat body 1. A hollow area corresponding to the evaporation tank 11 is provided in the middle of the baffle 12. The shape of the hollow area is the same as the opening shape of the evaporation tank 11. The area of ​​the hollow area is smaller than the area of ​​the evaporation tank 11. The baffle 12 is connected to the boat body 1. It can be understood that the center of the hollow area and the center of the evaporation tank 11 coincide. The hollow area is used for the passage of metal vapor. By setting the opening shape of the evaporation tank 11 to a smoothly transitioning annular structure, such as a circle or an ellipse, the melting and spreading of the metal plating solution can be guaranteed, which is beneficial to the stability and uniformity of the evaporation process. Since the edge of the evaporation tank 11, i.e. the connection between the tank wall and the bottom, is prone to overheating and violent boiling of the plating solution, the hollow area of ​​the baffle 12 is set to correspond to the evaporation tank 11. The baffle 12 blocks the splash at the edge of the evaporation tank 11, preventing splash from falling onto the base film and affecting the yield.

[0045] Further, please refer to Figure 1 and Figure 2 The opening shape and the hollow area shape of the evaporation tank 11 are both set to be elliptical. The major axis of the elliptical evaporation tank 11 is set along the length of the evaporation boat. The change from the center to both ends of the elliptical evaporation tank 11 is very gentle and continuous, which is more conducive to the spread of metal plating solution and improves the evaporation effect. The elliptical hollow area of ​​the baffle 12 does not affect the overall evaporation effect of the evaporation tank 11, and can also block the boiling and splashing plating solution at the connection between the tank wall and the bottom of the tank, reducing splashing.

[0046] Preferably, when the evaporation tank 11 and the hollow region are elliptical in shape, the ratio of the major axis to the minor axis of the evaporation tank 11 is 4:1 to 5:1, and the ratio of the major axis to the minor axis of the hollow region is also 4:1 to 5:1. Within this range, the elliptical evaporation tank 11 changes very gently and gradually from the center to both ends, which is more conducive to the spreading of the plating solution and ensures sufficient evaporation area, resulting in more uniform heating and more stable evaporation. The baffles can precisely block the edges of the evaporation tank 11 to prevent splashing.

[0047] Furthermore, in this embodiment, the ratio of the major axis of the evaporation tank 11 to the major axis of the hollow region is 1.1:1 to 1.2:1, and the ratio of the minor axis of the evaporation tank 11 to the minor axis of the hollow region is also 1.1:1 to 1.2:1. By controlling the ratios of the major and minor axes of the evaporation tank 11 and the hollow region within these ranges, the baffle 12 can block the flow of liquid metal along the periphery of the evaporation tank 11. This ensures that the baffle does not affect the evaporation coating effect, while also preventing splashed liquid metal. Simultaneously, it blocks the edges of the evaporation tank 11 where uneven temperatures are likely to occur, preventing uneven coating thickness or even affecting product yield due to excessively high temperatures or splashing at the edges.

[0048] In one embodiment, the connection between the wall and bottom of the evaporation tank 11 is a continuous and smooth curved surface. This continuous and smooth curved surface further improves the fluidity of the metal plating solution, facilitates its spread, reduces thermal stress concentration points, minimizes localized boiling and splashing, and also reduces cleaning dead zones, making it easier to clean the edges of the evaporation boat.

[0049] In one embodiment, the baffle 12 is connected to the boat body 1 via a connecting structure 2, which is used to detachably fix the baffle 12 to the boat body 1. When the evaporation boat needs to be replaced during the production process, the baffle 12 on the old evaporation boat can be removed and reinstalled on the new evaporation boat. The baffle can be reused, avoiding waste and effectively reducing costs. On the other hand, it is also convenient to clean the baffle 12.

[0050] Preferably, please refer to Figure 3 and Figure 4 The connecting structure 2 includes two pins 21 and two connectors 22. The bottom ends of the two pins 21 are fixedly connected to both ends of the boat body 1, respectively. The two connectors 22 are fixedly connected to both ends of the baffle 12, respectively. Each connector 22 has a hole 24 at its bottom, and the pin 21 is inserted into the hole 24. The magnetic attractant 25 is attracted to the magnet 23. Through the detachable connecting structure combined with the pin design, the baffle can be quickly disassembled and reassembled, and its installation can be positioned correctly. It also facilitates cleaning of the baffle 12, making it convenient and practical.

[0051] Furthermore, in this embodiment, magnets 23 are fixedly connected to the top ends of both pins 21, and magnetic attractants 25 are fixedly connected to the top walls of both holes 24. The magnetic attractants 25 are attracted to the magnets 23 respectively. The magnets 23 and magnetic attractants 25 facilitate the corresponding insertion of the pins 21 and the connectors 22, and enhance the stability of the connection.

[0052] Further, please refer to Figure 4 The pin 21 has a closed hollow cavity 211 inside. This can block the transfer of heat from the boat body to the magnet, ensure the stability of the magnetic attraction, and balance structural reliability with usage flexibility.

[0053] In another preferred embodiment, the connection structure is a magnetic attraction structure, which includes a permanent magnet and a magnetic conductor. The permanent magnet is embedded in the bottom end of the baffle 12, and the top of the boat 1 is recessed with a mounting groove. The magnetic conductor is embedded in the mounting groove. When the baffle 12 is installed in a preset position, the permanent magnet and the magnetic conductor correspond to each other to achieve magnetic attraction, thus securing the baffle 12 and the evaporation boat together. Preferably, the top of the evaporation boat may also be provided with several positioning blocks, which surround the outer periphery of the baffle 12 to position the baffle 12 and facilitate reliable alignment of the permanent magnet and the magnetic conductor.

[0054] It should be noted that the above-mentioned connection structures are all made of high-temperature resistant materials to reliably connect the evaporation boat and the baffle 12 in high-temperature environments.

[0055] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An evaporation boat for preventing splashing of molten metal, comprising a hull (1), characterized in that: The upper surface of the boat body (1) is provided with an evaporation tank (11) for holding the plating material. The opening shape of the evaporation tank (11) is a smoothly transitioned annular structure. A baffle (12) is provided on the upper surface of the boat body (1). A hollow area corresponding to the evaporation tank (11) is provided in the middle of the baffle (12). The shape of the hollow area is the same as the opening shape of the evaporation tank (11). The area of ​​the hollow area is smaller than the area of ​​the evaporation tank (11). The baffle (12) is connected to the boat body (1).

2. The evaporation boat for preventing molten metal splashing according to claim 1, characterized in that, The opening shape and the shape of the hollow area of ​​the evaporation tank (11) are both set to be elliptical.

3. The evaporation boat for preventing molten metal splashing according to claim 1, characterized in that, The connection between the wall and the bottom of the evaporation tank (11) is a continuous and smooth curved surface.

4. The evaporation boat for preventing molten metal splashing according to claim 2, characterized in that, When the opening shape of the evaporation tank (11) and the shape of the hollow region are elliptical, the length ratio of the major axis to the minor axis of the evaporation tank (11) is 4:1 to 5:1, and the length ratio of the major axis to the minor axis of the hollow region is 4:1 to 5:

1.

5. An evaporation boat for preventing molten metal splashing according to claim 4, characterized in that, The ratio of the length of the major axis of the evaporation tank (11) to the length of the major axis of the hollow region is 1.1:1 to 1.2:1, and the ratio of the length of the minor axis of the evaporation tank (11) to the length of the minor axis of the hollow region is 1.1:1 to 1.2:

1.

6. An evaporation boat for preventing molten metal splashing according to claim 1, characterized in that, The baffle (12) is connected to the boat body (1) via a connecting structure (2), which is used to detachably fix the baffle (12) to the boat body (1).

7. An evaporation boat for preventing molten metal splashing according to claim 6, characterized in that, The connection structure (2) includes a pin (21) and a connector (22). There are two pins (21), and the bottom ends of the two pins (21) are fixedly connected to both ends of the boat body (1). There are two connectors (22), and the two connectors (22) are fixedly connected to both ends of the baffle (12). The bottom of each connector (22) is provided with a socket (24), and the pin (21) is adapted to be inserted into the socket (24).

8. An evaporation boat for preventing molten metal splashing according to claim 7, characterized in that, Magnets (23) are fixedly connected to the top of each of the two pins (21), and magnetic attractants (25) are fixedly connected to the top walls of each of the two holes (24). The magnetic attractants (25) are attracted to the magnets (23).

9. An evaporation boat for preventing molten metal splashing according to claim 8, characterized in that, The pin (21) has a closed hollow cavity (211) inside.

10. A vacuum evaporation apparatus, characterized in that, Includes the evaporation boat as described in any one of claims 1 to 9.

Images