A large generation line metal mask plate

Abstract

The utility model discloses a kind of big generation line metal mask, belong to mask field, including first segmentation metal mask, second segmentation metal mask, ……And the nth segmentation metal mask, at least one set of alignment mark is provided on each segmentation metal mask, and two adjacent segmentation metal mask are connected as a whole by a welding line;Wherein, n is natural number greater than 1.The utility model realizes the production of super large size metal mask, and the layout of whole metal mask is occupied very small in splicing area.

Description

Technical Field

[0001] This utility model relates to the field of photomasks, and more specifically, to a large-generation line metal photomask. Background Technology

[0002] Metal masks are used in the evaporation of organic materials in the OLED display industry and are an essential component for OLED display production. As the demand for OLEDs expands to tablets, IT, and automotive products, display panel sizes are increasing. Existing generational OLED production lines suffer from low utilization rates due to substrate size limitations, leading to a demand for large-generation OLED display production lines. The substrate size of large-generation lines increases exponentially, meaning the size of the metal mask also needs to increase. However, the raw material for metal masks mainly uses 100-200µm Invar 36 rolls. Limited by the precision rolling equipment and process experience for 100-200µm Invar 36, the width of currently available 100-200µm Invar 36 rolls is only within 1300mm, which cannot be directly used to manufacture large-generation line metal masks (Invar 36 foil requires a width of 1500mm or more). Therefore, it is impossible to produce large-generation metal masks.

[0003] Therefore, there is an urgent need to find a method to prepare large-generation metal photomasks using existing Invar36 roll-to-roll materials and to prepare large-generation metal photomasks that meet the requirements. Utility Model Content

[0004] To address the aforementioned issues, this invention provides a large-generation line metal mask, the splicing area of ​​which occupies minimal space in the overall layout of the metal mask.

[0005] A large generation line metal mask includes a first segmented metal mask, a second segmented metal mask, ... and an nth segmented metal mask. Each segmented metal mask has at least one set of alignment marks. Adjacent segmented metal masks are connected as one unit by a welding line. Where n is a natural number greater than 1.

[0006] Optionally, each segmented metal mask has a pattern area, and the welding line between two adjacent segmented metal masks is located between the pattern areas of the two adjacent segmented metal masks.

[0007] Optionally, the welding line is a laser welding line.

[0008] Optionally, the material of the large generation line metal mask is Invar material.

[0009] Optionally, the length of at least one side of the large-generation line metal mask is greater than the width of the Invar roll.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: This invention enables the fabrication of ultra-large metal photomasks. The method of splicing and then welding results in a splicing area that is only the width of a weld seam, minimizing the layout space occupied by the entire metal photomask. After splicing and before welding, the laser treatment ensures that the two spliced ​​edges have the same shape, achieving a "perfect fit" in the splicing area. By dividing the metal photomask, the fabrication of any large generation line metal photomask can be achieved. Apart from the need to simultaneously create alignment marks during the metal photomask fabrication process, there are no additional requirements for the equipment, chemicals, and process parameters used in the metal photomask fabrication process. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the segmented state of the segmented metal mask of this utility model; Figure 2 This is an enlarged cross-sectional view of the fixed gap splicing position of this utility model; Figure 3 This is an enlarged cross-sectional view of the alignment and splicing position of this utility model; Figure 4 This is an enlarged cross-sectional view of the angle interlocking splicing position of this utility model; Figure 5 This is a schematic diagram of the pre-jointed seam area of ​​this utility model; Figure 6 This is a schematic diagram of the metal mask for large-generation lines of this utility model; Explanation of reference numerals in the attached diagram: 1. First segmented metal mask; 2. Second segmented metal mask; 3. Alignment mark; 4. Joint area; 5. Welding line. Detailed Implementation

[0013] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, an indirect connection through an intermediate medium, or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0014] In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, "a plurality of" means two or more, unless otherwise precisely specified.

[0015] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0017] The technical solution of this utility model will be described in detail below with specific embodiments. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments.

[0018] A method for fabricating a high-generation line metal mask includes the following steps: S1, as Figure 1 According to the existing graphic conversion method, the first segmented metal mask 1 and the second segmented metal mask 2 are respectively made to obtain the first segmented metal mask 1 and the second segmented metal mask 2. At least one set of alignment marks 3 are provided on the edge part of the first segmented metal mask 1 and the second segmented metal mask 2. The alignment marks 3 are used to confirm the splicing accuracy during the splicing process.

[0019] S2, Pre-stitching: The first segmented metal mask 1 and the second segmented metal mask 2 are pre-stitched using alignment mark 3 as a reference. Pre-stitching methods include fixed-gap stitching, aligned stitching, or angled interlocking stitching. A magnified cross-sectional diagram of the fixed-gap stitching position is shown below. Figure 2 An enlarged cross-sectional diagram of the aligned splicing position is shown below. Figure 3 An enlarged cross-sectional diagram of the angle interlocking splice joint is shown below. Figure 4 .

[0020] Because the two edges of the first segmented metal mask 1 and the second segmented metal mask 2 have straightness issues, the splicing cannot be perfectly aligned. Figure 5 As shown, Figure 5 In the process, because the two edges of the spliced ​​area 4 are not straight (this is the case in the actual process), there are gaps in some places of the spliced ​​area 4, while there are gaps in other places.

[0021] S3, Laser treatment of the seam area 4, so that the two opposite edges of the first segmented metal mask 1 and the second segmented metal mask 2 are identical, achieving a "perfect fit" in the splicing area.

[0022] S4, single-sided or double-sided laser welding seam area 4, welding the segmented metal mask to form a complete large-generation line metal mask, the complete large-generation line metal mask as shown in the image. Figure 6 .

[0023] Figure 6 The high-generation line metal mask includes a first segmented metal mask 1 and a second segmented metal mask 2. At least one set of alignment marks 3 are provided on the first segmented metal mask 1 and the second segmented metal mask 2. A first pattern area is provided on the first segmented metal mask 1 and a second pattern area is provided on the second segmented metal mask 2. The first pattern area and the second pattern area are connected as one unit by a bonding line 5.

[0024] This invention enables the fabrication of ultra-large metal photomasks. The method of splicing and then welding results in a splicing area that is only the width of a weld seam, minimizing the layout space occupied by the entire metal photomask. After splicing and before welding, the laser treatment ensures that the two spliced ​​edges have the same shape, achieving a "perfect fit" in the splicing area. By dividing the metal photomask, the fabrication of any large generation line metal photomask can be achieved. Apart from the need to simultaneously create alignment marks 3 during the fabrication of the metal photomask, there are no additional requirements for the equipment, chemicals, and process parameters of the metal photomask fabrication process.

[0025] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A high-generation line metal photomask, characterized in that, It includes a first segmented metal mask, a second segmented metal mask, ... and an nth segmented metal mask. Each segmented metal mask has at least one set of alignment marks. Adjacent segmented metal masks are connected as one unit by a welding line. Where n is a natural number greater than 1.

2. The high-generation line metal mask according to claim 1, characterized in that, Each segmented metal mask has a pattern area, and the welding line between two adjacent segmented metal masks is located between the pattern areas of the two adjacent segmented metal masks.

3. The high-generation line metal mask according to claim 1, characterized in that, The welding line is a laser welding line.

4. The high-generation line metal mask according to claim 3, characterized in that, The material of the metal mask for the high-generation line is Invar.

5. The high-generation line metal mask according to claim 4, characterized in that, The length of at least one side of the large-generation line metal mask is greater than the width of the Invar roll.

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