Auxiliary jig for oversized target material

Abstract

The utility model relates to target material processing technical field discloses a kind of auxiliary fixture of super-size target material. Target material includes main part and the connecting portion extending along the circumference of main part;The auxiliary fixture of super-size target material includes fixture main body and first fastener, fixture main body is provided with mounting groove and multiple positioning members, main part can be placed in mounting groove, multiple positioning members are arranged along the circumference of mounting groove, and connecting portion is positioned and placed in fixture main body by multiple positioning members;First fastener is used to connect portion is fixed in fixture main body, first fastener is provided with multiple, and multiple first fastener is arranged along the circumference of mounting groove with interval. The auxiliary fixture of super-size target material not only can effectively constrain the displacement of target material on fixture main body, but also significantly improve the constraint force to target material, so that super-size target material can be stably installed on fixture main body, improve target material production precision, reduce target material scrap rate.

Description

Technical Field

[0001] This utility model belongs to the field of target material processing technology, and in particular relates to an auxiliary fixture for ultra-large target materials. Background Technology

[0002] In sputtering processes, the target material is the core material for high-energy ion bombardment. When high-energy ions bombard the target surface, they cause target atoms to detach from the crystal lattice and migrate to the substrate, ultimately forming a thin film with specific functions. Currently, this crucial material is widely used in various fields such as the semiconductor industry, display technology, photovoltaics and new energy, magnetic storage devices, and biomedicine.

[0003] In the target material production process, specialized fixtures are typically used to temporarily hold the target material to ensure its stability during processing, thereby guaranteeing the machining accuracy of the final product. However, for ultra-large targets, due to their inherent characteristics of large weight and wide dimensions, existing fixtures struggle to achieve stable clamping, resulting in the target material's flatness and concentricity failing to meet requirements. This not only directly affects the production accuracy of the target material but can also, in severe cases, lead to the scrapping of the target material, resulting in economic losses.

[0004] Therefore, there is an urgent need for an auxiliary fixture for ultra-large target materials to solve the above problems. Utility Model Content

[0005] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an auxiliary fixture for ultra-large target materials, which can not only effectively constrain the displacement of the target material on the fixture body, but also significantly improve the constraint force on the target material, so that the ultra-large target material can be stably installed on the fixture body, thereby improving the production accuracy of the target material and reducing the scrap rate of the target material.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] An auxiliary fixture for an ultra-large target material is provided. The target material includes a main body and a connecting part extending circumferentially along the main body. The connecting part is connected to the upper end of the main body.

[0008] The auxiliary fixtures for ultra-large target materials include:

[0009] The fixture body is provided with a mounting groove and multiple positioning elements. The main body can be placed in the mounting groove, and the multiple positioning elements are arranged at intervals along the circumference of the mounting groove. The connecting part is positioned and placed on the fixture body by the multiple positioning elements.

[0010] The first fastener is used to fix the connecting part to the fixture body. Multiple first fasteners are provided and are arranged at intervals along the circumference of the mounting groove.

[0011] Optionally, the width of the mounting groove is greater than the width of the main body and less than the width of the connecting part, and the depth of the mounting groove is greater than the thickness of the main body.

[0012] Optionally, the auxiliary fixture for extra-large targets may also include a flexible pad layer disposed on the wall of the mounting slot.

[0013] Optionally, the fixture body is provided with a limiting groove, which is connected to the mounting groove and extends circumferentially along the mounting groove, and the connecting part can be locked in the limiting groove.

[0014] Optionally, the fixture body is provided with a first positioning hole corresponding to a plurality of positioning elements, and the connecting part is provided with a plurality of second positioning holes. The plurality of first positioning holes can correspond to the plurality of second positioning holes one by one, and the positioning elements are inserted into the corresponding first positioning holes and second positioning holes.

[0015] Optionally, the positioning element includes a clamping part and a positioning part. The positioning part is disposed on the fixture body and extends along the clamping direction. The clamping part is disposed on the positioning part in an adjustable position along the clamping direction. The clamping part can clamp the connecting part to the fixture body.

[0016] Optionally, the pressing part is provided with a waist-shaped hole, the positioning part passes through the waist-shaped hole and its position within the waist-shaped hole is adjustable, and the pressing part can rotate relative to the positioning part.

[0017] Optionally, the first fastener can pass through the connecting part and be threaded into the clamp body.

[0018] Optionally, the connecting part is provided with a connecting hole, the fixture body is provided with a threaded hole, and the fastener includes a screw part that can pass through the connecting hole and be threadedly connected to the wall of the threaded hole.

[0019] Optionally, the fixture body comprises a block made of aluminum alloy.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] This invention provides an auxiliary fixture for ultra-large target materials. The main body of the target material can be placed in a mounting groove, and the groove wall directly constrains the displacement of the main body, significantly improving the installation stability of the target material on the fixture body and helping to improve the accuracy of subsequent target material processing. During the installation stage, the positioning component can accurately position the connecting part on the fixture body, ensuring the accuracy of the target material installation position and helping to further improve the production accuracy of the target material. After the target material is installed on the fixture body, the circumferential direction of the connecting part is doubly constrained by the positioning component and the first fastener, significantly increasing the constraint force on the target material. This not only allows ultra-large target materials to be stably installed on the fixture body, preventing the target material from twisting and deforming, but also effectively constrains the displacement of the connecting part, further improving the production accuracy of the target material and reducing the target material scrap rate. Attached Figure Description

[0022] Figure 1 A cross-sectional view of the ultra-large target material provided by this utility model;

[0023] Figure 2 A cross-sectional view of an ultra-large target material mounted on an auxiliary fixture for the ultra-large target material provided in this utility model;

[0024] Figure 3 A cross-sectional view of the main body of the auxiliary fixture for the ultra-large target material provided by this utility model;

[0025] Figure 4 A plan view of the main body of the auxiliary fixture for the ultra-large target material provided by this utility model;

[0026] Figure 5 A schematic diagram of the second positioning component of the auxiliary clamp for the ultra-large target material provided by this utility model.

[0027] in:

[0028] 100. Target material; 110. Main body; 120. Connecting part; 121. Connecting hole;

[0029] 1. Fixture body; 11. Mounting groove; 12. Flexible pad; 13. Limiting groove; 14. First positioning hole; 15. Threaded hole;

[0030] 21. Pressing part; 211. Waist-shaped hole; 22. Positioning part;

[0031] 3. First fastener;

[0032] 4. Second fastener. Detailed Implementation

[0033] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0035] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0036] like Figures 1 to 5 As shown, this embodiment provides an auxiliary fixture for ultra-large target materials, which can not only effectively constrain the displacement of the target material 100 on the fixture body 1, but also significantly improve the constraint force on the target material 100, so that the ultra-large target material 100 can be stably installed on the fixture body 1, thereby improving the production accuracy of the target material 100 and reducing the scrap rate of the target material 100.

[0037] See Figure 1 and Figure 2 The target 100 includes a main body 110 and a connecting part 120 extending circumferentially along the main body 110. The connecting part 120 is connected to the upper end of the main body 110. The auxiliary fixture for the extra-large target includes a fixture body 1 and a first fastener 3. The fixture body 1 is provided with a mounting groove 11 and a plurality of positioning members. The main body 110 can be placed in the mounting groove 11. The plurality of positioning members are arranged at intervals circumferentially along the mounting groove 11. The connecting part 120 is positioned and placed on the fixture body 1 by the plurality of positioning members. The first fastener 3 is used to fix the connecting part 120 to the fixture body 1. A plurality of first fasteners 3 are provided. The plurality of first fasteners 3 are arranged at intervals circumferentially along the mounting groove 11.

[0038] The auxiliary fixture for the extra-large target material provided in this embodiment allows the main body 110 of the target material 100 to be placed in the mounting groove 11. The groove wall of the mounting groove 11 directly constrains the displacement of the main body 110, significantly improving the installation stability of the target material 100 on the fixture body 1, and helping to improve the accuracy of subsequent processing of the target material 100. During the installation stage, the positioning member can accurately position the connecting part 120 on the fixture body 1, ensuring the accuracy of the installation position of the target material 100, and helping to further improve the production accuracy of the target material 100. After the target material 100 is installed on the fixture body 1, the circumferential direction of the connecting part 120 is subject to the dual constraint of the positioning member and the first fastener 3. The constraint force on the target material 100 is significantly increased, which not only allows the extra-large target material 100 to be stably installed on the fixture body 1, preventing the target material 100 from twisting and deforming, but also effectively constrains the displacement of the connecting part 120, further improving the production accuracy of the target material 100 and reducing the scrap rate of the target material 100.

[0039] For example, see Figure 2 and Figure 4 The target material 100 has a bowl-shaped structure, the main body 110 has a bowl-shaped cross-section, the connecting part 120 has an annular cross-section, the clamp body 1 has a circular cross-section, and the mounting groove 11 has a rectangular cross-section.

[0040] In this embodiment, the fixture body 1 comprises a block made of aluminum alloy. Aluminum alloy is a material made by adding alloying elements such as copper, silicon, magnesium, zinc, and manganese to aluminum as the base material. It has the characteristics of low density, high specific strength, good plasticity, excellent electrical and thermal conductivity, and strong corrosion resistance, which enables the fixture body 1 to stably support the target material 100.

[0041] Optionally, see Figure 2 The width B1 of the mounting groove 11 is greater than the width B2 of the main body 110 and less than the width B3 of the connecting part 120, and the depth H1 of the mounting groove 11 is greater than the thickness H2 of the main body 110. This arrangement allows for sufficient clearance between the main body 110 placed within the mounting groove 11 and the groove wall, and prevents the connecting part 120 from falling into the mounting groove 11, thus improving the stability of the target material 100 mounted on the fixture body 1. Furthermore, it allows the fixture body 1 to hold target materials 100 of different specifications, improving the applicability of this auxiliary fixture.

[0042] Optionally, see Figure 2 and Figure 3The auxiliary fixture for the extra-large target material also includes a flexible pad 12 disposed on the wall of the mounting groove 11. The flexible pad 12 is located between the wall of the mounting groove 11 and the outer wall of the main body 110, which can effectively avoid hard contact between the fixture body 1 and the main body 110, prevent the fixture body 1 and the main body 110 from being damaged by collision, and improve the service life of the fixture body 1 and the processing accuracy of the target material 100.

[0043] In this embodiment, see Figure 2 Flexible pads 12 are provided on both the side walls and bottom walls of the mounting groove 11, and the flexible pads 12 are laid along the groove walls.

[0044] For example, the flexible pad 12 is made of rubber.

[0045] Optionally, see Figure 2 and Figure 3 The fixture body 1 is provided with a limiting groove 13, which is connected to the mounting groove 11 and extends along the circumference of the mounting groove 11. The connecting part 120 can be locked in the limiting groove 13 to restrict the movement of the connecting part 120 on the fixture body 1. This not only improves the convenience of connecting the connecting part 120 to the fixture body 1, but also improves the stability of the connecting part 120 when it is installed on the fixture body 1.

[0046] For example, the target material 100 has a bowl-shaped structure, the connecting part 120 has an annular cross-sectional shape, and the limiting groove 13 is an annular groove, which is disposed on the top of the fixture body 1.

[0047] In an optional embodiment, see [link to relevant documentation] Figure 1 and Figure 4 The fixture body 1 is provided with first positioning holes 14 corresponding to multiple positioning elements, and the connecting part 120 is provided with multiple second positioning holes (not shown in the figure). The multiple first positioning holes 14 can correspond one-to-one with the multiple second positioning holes. The positioning elements are inserted into the corresponding first positioning holes 14 and second positioning holes to achieve the positioning of the connecting part 120 on the fixture body 1. Moreover, the positioning elements position the connecting part 120 by insertion, which is convenient and quick to operate and helps to improve the production efficiency of the target material 100.

[0048] For example, the positioning element is a pin.

[0049] In another alternative embodiment, see [link to relevant documentation]. Figure 2 and Figure 5The positioning component includes a clamping part 21 and a positioning part 22. The positioning part 22 is disposed on the fixture body 1 and extends along the clamping direction. The clamping part 21 is adjustablely disposed on the positioning part 22 along the clamping direction. The clamping part 21 can clamp the connecting part 120 onto the fixture body 1 to achieve the positioning of the connecting part 120 on the fixture body 1. Moreover, this arrangement allows the positioning component to not only accurately position and install the connecting part 120 onto the fixture body 1 and ensure the secure installation of the connecting part 120, but also facilitates the release of the clamping component from the fixture body 1 to separate the connecting part 120 from the fixture body 1 for the next process. The operation is simple and the installation is quick. In addition, the adjustable position of the clamping part 21 along the clamping direction allows the positioning component to clamp and position connecting parts 120 of different sizes and specifications along the clamping direction onto the fixture body 1, expanding the applicability of this auxiliary fixture.

[0050] In this embodiment, the pressing direction is vertical.

[0051] Specifically, the fixture body 1 is provided with mounting holes, and the positioning part 22 is fixed to the fixture body 1 by being inserted into the mounting holes, which facilitates the installation of the positioning part.

[0052] For example, see Figure 2 and Figure 5 The clamping part 21 adopts a pressure block, and the positioning part 22 includes a screw and a nut. The screw passes through the pressure block and is connected to the clamp body 1. The pressure block is threadedly connected to the screw so that the position of the clamping part 21 on the positioning part 22 is adjustable. The nut is located on the side of the clamping part 21 away from the clamp body 1 and is threadedly connected to the screw. When the pressure block contacts the surface of the connecting part 120, the nut is rotated until it abuts against the side of the pressure block away from the connecting part 120. At this time, the clamping part 21 is pressed against the connecting part 120.

[0053] Preferably, the positioning component is also provided with a washer, which is sandwiched between the pressure block and the nut. This can increase the force-bearing area between the pressure block and the nut, prevent damage to the pressure block, and ensure the pressing effect of the pressure block.

[0054] In this embodiment, see Figure 2 and Figure 5The clamping part 21 is provided with a waist-shaped hole 211. The positioning part 22 passes through the waist-shaped hole 211 and its position within the waist-shaped hole 211 is adjustable. The clamping part 21 can rotate relative to the positioning part 22. The contact area between the clamping part 21 and the connecting part 120 can be adjusted by adjusting the position of the positioning part 22 within the waist-shaped hole 211, thereby adjusting the clamping degree of the clamping part 21 on the connecting part 120. The clamping area of ​​the clamping part 21 on the connecting part 120 can also be adjusted by adjusting the rotation angle of the clamping part 21 relative to the positioning part 22, so that the clamping part 21 can rotate to disengage from the connecting part 120 or rotate to press the connecting part 120 above it, which facilitates the disassembly or installation of the connecting part 120 on the fixture body 1. At the same time, adjusting the rotation angle of the clamping part 21 can also adaptively adjust the position of the clamping part 21 pressing on the connecting part 120 according to the shape of the target material 100, ensuring that each clamping part 21 can fully press against the connecting part 120.

[0055] Optionally, see Figure 2 The first fastener 3 can pass through the connecting part 120 and be threadedly connected to the fixture body 1. This not only ensures the stability of the connecting part 120 on the fixture body 1, but also makes it easier to separate the connecting part 120 from the fixture body 1 for the next process. The operation is simple and the installation is quick.

[0056] In this embodiment, see Figure 1 , Figure 2 and Figure 4 The connecting part 120 is provided with a connecting hole 121, and the clamp body 1 is provided with a threaded hole 15. The first fastener 3 includes a screw part, which can pass through the connecting hole 121 and be threadedly connected to the hole wall of the threaded hole 15 to fix the connecting part 120 to the clamp body 1.

[0057] For example, the first fastener 3 is a bolt.

[0058] Optionally, see Figure 3 The auxiliary fixture includes a second fastener 4, which passes through the fixture body 1 and can be connected to an external device to stably install the fixture body 1 in the current processing position.

[0059] In this embodiment, multiple second fasteners 4 are provided, and the multiple second fasteners 4 are arranged at intervals along the circumference of the clamp body 1, which helps to improve the stability of the clamp body 1 when installed on external equipment.

[0060] For example, the second fastener 4 is a bolt, and the second fastener 4 is threadedly connected to an external device.

[0061] The above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. An auxiliary fixture for ultra-large target materials, characterized in that, The target (100) includes a main body (110) and a connecting part (120) extending circumferentially along the main body (110), the connecting part (120) being connected to the upper end of the main body (110); The auxiliary fixture for the ultra-large target material includes: The fixture body (1) is provided with a mounting groove (11) and a plurality of positioning members. The main body (110) can be placed in the mounting groove (11). The plurality of positioning members are arranged at intervals along the circumference of the mounting groove (11). The connecting part (120) is positioned on the fixture body (1) by the plurality of positioning members. First fastener (3) is used to fix the connecting part (120) to the clamp body (1). Multiple first fasteners (3) are provided, and multiple first fasteners (3) are arranged at intervals along the circumferential direction of the mounting groove (11).

2. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The width of the mounting groove (11) is greater than the width of the main body (110) and less than the width of the connecting part (120), and the depth of the mounting groove (11) is greater than the thickness of the main body (110).

3. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The auxiliary fixture for the ultra-large target material also includes a flexible pad (12) disposed on the wall of the mounting groove (11).

4. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The fixture body (1) is provided with a limiting groove (13), the limiting groove (13) is connected to the mounting groove (11) and extends along the circumference of the mounting groove (11), and the connecting part (120) can be locked in the limiting groove (13).

5. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The fixture body (1) is provided with a first positioning hole (14) corresponding to a plurality of positioning elements, and the connecting part (120) is provided with a plurality of second positioning holes. The plurality of first positioning holes (14) can correspond to a plurality of second positioning holes, and the positioning elements are inserted into the corresponding first positioning holes (14) and second positioning holes.

6. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The positioning component includes a clamping part (21) and a positioning part (22). The positioning part (22) is disposed on the clamp body (1) and extends along the clamping direction. The clamping part (21) is disposed on the positioning part (22) in an adjustable position along the clamping direction. The clamping part (21) can clamp the connecting part (120) onto the clamp body (1).

7. The auxiliary fixture for ultra-large target materials according to claim 6, characterized in that, The pressing part (21) is provided with a waist-shaped hole (211), the positioning part (22) passes through the waist-shaped hole (211) and its position within the waist-shaped hole (211) is adjustable, and the pressing part (21) can rotate relative to the positioning part (22).

8. The auxiliary fixture for ultra-large target materials according to claim 1, characterized in that, The first fastener (3) can pass through the connecting part (120) and be threadedly connected to the clamp body (1).

9. The auxiliary fixture for ultra-large target materials according to claim 8, characterized in that, The connecting part (120) is provided with a connecting hole (121), the clamp body (1) is provided with a threaded hole (15), the fastener includes a screw part, the screw part can pass through the connecting hole (121) and be threadedly connected to the hole wall of the threaded hole (15).

10. The auxiliary fixture for ultra-large target materials according to any one of claims 1-9, characterized in that, The fixture body (1) comprises a block made of aluminum alloy.

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