Heat transfer device for magnetron sputtering coating machine

Abstract

The application relates to the technical field of magnetron sputtering coating machines, in particular to a heat transfer device of a magnetron sputtering coating machine, which comprises a heat transfer main body, a temperature regulation assembly and a heat conduction module. The temperature regulation assembly drives the heat conduction ring to rotate through a driving unit, and cooperates with a temperature adjusting plate, a sliding support and an adjusting rod to realize uniform heat distribution and solve the problem of local overheating of a suspended film material. The heat conduction module optimizes a heat conduction path by using heat conduction sheets, heat dissipation fins and cooling pipelines, and corrugated sections and arc-shaped grooves enhance heat transfer efficiency and reduce energy consumption. The application improves temperature control accuracy and heat transfer efficiency through the synergistic effect of the above structure, is compact in structure, low in maintenance cost and suitable for the coating process requirements of various material substrates.

Description

Technical Field

[0001] This utility model belongs to the technical field of magnetron sputtering coating equipment, specifically a heat transfer device for a magnetron sputtering coating machine. Background Technology

[0002] With the rapid development of magnetron sputtering coating technology, its application in industrial production is becoming increasingly widespread. However, existing magnetron sputtering coating machines still have some shortcomings in terms of heat transfer efficiency, temperature control accuracy, and equipment adaptability, which limit their further application in high-efficiency coating processes.

[0003] A search revealed a patent, CN113981376B, entitled "Coating Component, Coating Apparatus, and Coating Method," published on November 15, 2024. This patent designs a coating component including a first roller, a first cooling roller, and an evaporation mechanism. Heat is dissipated during the coating process by combining a suspended film material with a film material adhered to the cooling roller. While this design can reduce the film material temperature and improve heat transfer efficiency to some extent, its cooling method relies heavily on the adhesion state of the cooling roller, making comprehensive and effective temperature control of the suspended film material difficult, leading to localized overheating. Furthermore, the evaporation mechanism of this device has a fixed location, making it difficult to flexibly adjust according to actual process requirements, thus limiting its applicability in complex coating processes.

[0004] A search revealed a patent, CN102603174B, entitled "Forced Convection Heating Device for Low-Emissivity Coated Glass," published on March 30, 2016. This patent proposes a design for high-temperature hot air circulation heating via a forced convection duct and uniformly distributed heaters, aiming to improve heating uniformity and heat transfer efficiency. However, the heating system primarily focuses on uniform heating of the glass surface, failing to adequately consider the rapid heat conduction within the substrate during the coating process. Furthermore, due to its reliance on high-temperature fans and duct circulation, the system consumes significant energy, and the complex design of the convection duct results in high maintenance costs. Additionally, the device exhibits poor adaptability to different substrate materials; its heating efficiency significantly decreases when dealing with materials with high thermal conductivity or high reflectivity.

[0005] The aforementioned problems indicate that existing technologies in the design of heat transfer devices for magnetron sputtering coating machines still suffer from shortcomings such as inaccurate temperature control, limited heat transfer efficiency, and high energy consumption. Therefore, this invention provides a heat transfer device for a magnetron sputtering coating machine to overcome these deficiencies and achieve a more efficient, precise, and adaptable heat transfer solution. Utility Model Content

[0006] This utility model relates to a heat transfer device for a magnetron sputtering coating machine, comprising a heat transfer body, a temperature control component, and a heat conduction module. The temperature control component is installed inside the heat transfer body, and the heat conduction module is located on the top of the heat transfer body. The temperature control component includes a drive unit, a heat-conducting ring, a temperature regulating plate, a sliding bracket, an adjusting rod, an elastic element, and a positioning block. The heat-conducting rings are symmetrically installed inside the heat transfer body. A temperature regulating plate is fixedly connected to one outer wall of the heat-conducting ring. A sliding bracket is fixedly connected to one outer wall of the temperature regulating plate. A sliding groove is formed on one side of the sliding bracket, and an adjusting rod is slidably connected within the groove. An elastic element is sleeved on one outer wall of the adjusting rod. One end of the elastic element is fixedly connected to the outer wall of the sliding bracket, and the other end is fixedly connected to the outer wall of the adjusting rod. A positioning block is fixedly connected to the other end of the adjusting rod. Protrusions are distributed on one outer wall of the positioning block, and these protrusions are in close contact with the inner wall of the heat transfer body. A drive unit is embedded in the bottom of the heat transfer body, and the top of the output shaft of the drive unit is fixed to the outer wall of the heat conduction ring.

[0007] The heat transfer module includes heat-conducting plates, heat dissipation fins, cooling pipes, a flow divider, and flow guide holes. Heat-conducting plates are symmetrically mounted on the top of the heat transfer body. Heat dissipation fins are distributed between the heat-conducting plates. Cooling pipes are fixedly connected to one outer wall of each heat dissipation fin. A flow divider is fixedly connected to one end of the outer wall of each cooling pipe. A flow guide hole is formed on one side of the flow divider and communicates with the cooling pipe. Support frames are symmetrically fixed to one outer wall of the heat transfer body. A control panel is mounted at one end of the support frame. Operation keys are distributed on one outer wall of the control panel. Corrugated sections are distributed on one outer wall of each cooling pipe, with three corrugated sections in total. Arc-shaped grooves are distributed on one side of both the heat-conducting plates and the heat dissipation fins, and the heat-conducting plates and heat dissipation fins are symmetrical to each other.

[0008] An air inlet is provided on one side of the heat transfer body, and an exhaust outlet is provided on the other side, with the exhaust outlet located above the air inlet. A fixing frame is symmetrically fixed to the outer wall of one side of the heat transfer body. A display module is mounted on one end of each fixing frame, and indicator lights are distributed on the outer wall of one side of the display module. Four elastic elements are sleeved on the outer wall of the adjusting rod. A thermally conductive coating is distributed on one side of the heat-conducting ring and the temperature-regulating plate, and the thickness of the thermally conductive coating is uniform.

[0009] This invention solves the problem of localized overheating of suspended membrane materials in existing technologies through the design of a temperature control component. The drive unit rotates a heat-conducting ring, which transfers heat to a sliding support via a temperature-regulating plate. An adjusting rod slides within a groove and its position is adjusted via an elastic element. The protrusion on the positioning block adheres to the inner wall of the heat transfer body, ensuring uniform heat distribution. This design avoids the limitations of traditional cooling roller bonding methods, enabling comprehensive temperature control of the suspended membrane material.

[0010] The design of the heat conduction module solves the problem of low heat conduction efficiency within the substrate. The combination of heat-conducting fins and cooling fins enables rapid heat dissipation through the flow of cooling medium within the cooling pipes. The guide holes on the distribution plate optimize the flow path of the cooling medium, and the corrugated sections increase the contact area of ​​the cooling pipes, thereby improving heat transfer efficiency. Furthermore, the arc-shaped grooves on the heat-conducting fins and cooling fins further enhance heat dispersion and reduce energy consumption.

[0011] This invention, through the synergistic effect of the aforementioned structures, significantly improves the temperature control accuracy, heat transfer efficiency, and adaptability of the heat transfer device in a magnetron sputtering coating machine. The cooperation between the drive unit and the heat-conducting ring solves the problem of localized overheating of the suspended film material, while the optimized design of the cooling pipes and distribution plate reduces the heat conduction path and lowers system energy consumption. The overall structure is compact, with low maintenance costs, and is suitable for coating processes on various substrate materials. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model. Figure 2 This is a top view sectional structural diagram of the present invention. Figure 3 This is a schematic diagram of the internal three-dimensional structure of this utility model.

[0013] The attached figures are labeled as follows: 1. Heat transfer body; 2. Temperature control component; 3. Heat conduction module; 4. Drive unit; 5. Heat conduction ring; 6. Temperature regulating plate; 7. Sliding bracket; 8. Adjusting rod; 9. Elastic element; 10. Positioning block; 11. Heat conduction plate; 12. Heat dissipation fins; 13. Cooling pipe; 14. Flow divider; 15. Flow guide hole; 16. Support frame; 17. Control panel; 18. Air inlet; 19. Exhaust port; 20. Fixing frame; 21. Display module. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0015] Specific implementation examples are given below.

[0016] like Figures 1 to 3 As shown, the heat transfer device for a magnetron sputtering coating machine of this utility model includes a heat transfer body 1, a temperature control component 2, and a heat conduction module 3. The heat transfer body 1 is a load-bearing component with an integral structure, in which the temperature control component 2 is installed, and the heat conduction module 3 is set on the top. An air inlet 18 and an exhaust port 19 are opened on one side of the heat transfer body 1, with the air inlet 18 located below the exhaust port 19 to facilitate gas flow during the heat transfer process. A fixing frame 20 is symmetrically fixed to the outer wall of the heat transfer body 1, and a display module 21 is installed at one end of the fixing frame 20. Indicator lights are distributed on one side of the display module 21 for real-time monitoring of the device's working status. In addition, a support frame 16 is symmetrically fixed to one side of the outer wall of the heat transfer body 1, and a control panel 17 is installed at one end of the support frame 16. Operation keys are distributed on one side of the control panel 17 for parameter adjustment and control of the device.

[0017] The temperature control assembly 2 includes a drive unit 4, a heat-conducting ring 5, a temperature-regulating plate 6, a sliding bracket 7, an adjusting rod 8, an elastic element 9, and a positioning block 10. The drive unit 4 is embedded in the bottom of the heat transfer body 1, with its output shaft fixed to the outer wall of the heat-conducting ring 5 at its top, for driving the heat-conducting ring 5 to rotate. The heat-conducting ring 5 is symmetrically installed inside the heat transfer body 1, with a temperature-regulating plate 6 fixedly connected to one side of its outer wall. A sliding bracket 7 is fixedly connected to one end of the outer wall of the temperature-regulating plate 6. A groove is formed on one side of the sliding bracket 7, and an adjusting rod 8 is slidably connected within the groove. An elastic element 9 is sleeved on the outer wall of one end of the adjusting rod 8. One end of the elastic element 9 is fixed to the outer wall of the sliding bracket 7, and the other end is fixed to the outer wall of the adjusting rod 8, thereby adjusting the position of the adjusting rod 8 within the groove through the elastic force of the elastic element 9. The other end of the adjusting rod 8 is fixedly connected to a positioning block 10. A protrusion is distributed on one outer wall of the positioning block 10, and the protrusion is fitted against the inner wall of the heat transfer body 1 to ensure uniform heat distribution. A thermally conductive coating is distributed on one side of the heat-conducting ring 5 and the temperature-regulating plate 6. The thickness of the thermally conductive coating is uniform to improve the efficiency of heat transfer.

[0018] The heat transfer module 3 includes heat-conducting plates 11, heat dissipation fins 12, cooling pipes 13, a flow divider 14, and flow guide holes 15. The heat-conducting plates 11 are symmetrically mounted on the top of the heat transfer body 1. Heat dissipation fins 12 are distributed between the heat-conducting plates 11, and cooling pipes 13 are fixedly connected to one side of the outer wall of the heat dissipation fins 12. A flow divider 14 is fixedly connected to one end of the outer wall of the cooling pipe 13, and a flow guide hole 15 is provided on one side of the flow divider 14, communicating with the cooling pipe 13 to optimize the flow path of the cooling medium. Three corrugated sections are distributed on one side of the outer wall of the cooling pipe 13 to increase the contact area of ​​the cooling pipe 13, thereby improving the heat transfer efficiency. Arc-shaped grooves are distributed on one side of the heat-conducting plates 11 and the heat dissipation fins 12, and the heat-conducting plates 11 and the heat dissipation fins 12 are symmetrical to further enhance the heat dispersion effect.

[0019] During actual operation, after the drive unit 4 starts, it drives the heat-conducting ring 5 to rotate. The heat-conducting ring 5 transfers heat to the sliding bracket 7 through the temperature regulating plate 6. The sliding bracket 7 is displaced under the drive of the heat-conducting ring 5, and the adjusting rod 8 slides in the groove and is adjusted in position by the elastic force of the elastic element 9. This ensures that the protrusion on the positioning block 10 is in close contact with the inner wall of the heat transfer body 1, ensuring that the heat can be evenly distributed. In this process, the presence of the heat-conducting coating improves the heat transfer efficiency between the heat-conducting ring 5 and the temperature regulating plate 6, avoiding the problem of local overheating of the suspended membrane material.

[0020] Meanwhile, the heat-conducting fins 11 and 12 in the heat conduction module 3 combine to rapidly dissipate heat through the flow of cooling medium within the cooling pipes 13. The guide holes 15 on the distribution plate 14 optimize the flow path of the cooling medium, ensuring its uniform distribution within the cooling pipes 13. The corrugated sections on the cooling pipes 13 increase their contact area, thereby improving heat conduction efficiency. Furthermore, the arc-shaped grooves on the heat-conducting fins 11 and 12 further enhance heat dispersion, reducing system energy consumption.

[0021] The air inlet 18 and exhaust port 19 on one side of the heat transfer body 1 are used to allow the flow of gas inside the device, thereby assisting in heat dissipation. The operation keys on the control panel 17 can adjust the operating parameters of the device, while the indicator lights on the display module 21 are used to monitor the working status of the device in real time to ensure its normal operation. The mounting bracket 20 and the support bracket 16 are used to fix the display module 21 and the control panel 17 respectively, ensuring their stability during operation.

[0022] Through the synergistic effect of the above structures, the cooperation between the drive unit 4 and the heat-conducting ring 5 solves the problem of localized overheating of the suspended film material. The design of the cooling pipe 13 and the diverter plate 14 optimizes the heat conduction path and reduces system energy consumption. The overall structure is compact, with low maintenance costs, and is suitable for coating processes of various substrate materials. To better enable those skilled in the art to fully understand and implement this utility model, the specific implementation principle of this utility model is further explained below in conjunction with a specific application scenario.

[0023] In magnetron sputtering coating, temperature control of the suspended film is a critical step. When the device is started, the required operating parameters are first set via the operation keys on the control panel 17, such as the cooling medium flow rate, the rotational speed of the drive unit 4, and the gas flow rate at the inlet 18 and outlet 19. Indicator lights on the display module 21 provide real-time feedback on the device's operating status, ensuring the normal operation of all components. The mounting bracket 20 and support frame 16 respectively secure the display module 21 and control panel 17, ensuring their stability during operation.

[0024] Subsequently, the drive unit 4 begins operation, its output shaft driving the heat-conducting ring 5 to rotate. The rotational motion of the heat-conducting ring 5 is transmitted to the sliding bracket 7 through the temperature-regulating plate 6, causing the sliding bracket 7 to shift under the influence of the heat-conducting ring 5. The adjusting rod 8 slides within the groove, and the elastic element 9 dynamically adjusts the position of the adjusting rod 8 through its elastic force, ensuring that the protrusion on the positioning block 10 remains in close contact with the inner wall of the heat transfer body 1. This design ensures that heat is evenly distributed within the heat transfer body 1, avoiding the localized overheating problem caused by the traditional cooling roller bonding method. Simultaneously, the thermally conductive coating on the surfaces of the heat-conducting ring 5 and the temperature-regulating plate 6 further improves heat transfer efficiency, enabling comprehensive temperature control of the suspended membrane material.

[0025] Meanwhile, the heat conduction module 3 begins to function. The cooling medium within the cooling pipe 13 flows in through the guide holes 15 of the distribution plate 14 and is evenly distributed throughout the entire cooling pipe 13 along an optimized flow path. The corrugated sections on the cooling pipe 13 increase the contact area between the cooling medium and the pipe wall, thereby significantly improving heat conduction efficiency. The arc-shaped groove design between the heat-conducting fin 11 and the heat dissipation fin 12 further enhances the heat dispersion effect, allowing heat inside the substrate to be quickly dissipated. Furthermore, the symmetrical arrangement of the heat-conducting fin 11 and the heat dissipation fin 12 ensures uniform heat distribution throughout the entire heat conduction module 3, reducing the overall energy consumption of the system.

[0026] During heat conduction, the air inlet 18 and exhaust outlet 19 on one side of the heat transfer body 1 facilitate the flow of gas within the device. The air inlet 18 introduces cold air, while the exhaust outlet 19 discharges hot air, thereby aiding in heat dissipation. This gas flow design not only improves the heat dissipation performance of the device but also further optimizes the temperature control effect of the suspended membrane material.

[0027] Through the aforementioned synergistic effect, the cooperation between the drive unit 4 and the heat-conducting ring 5 solves the problem of localized overheating of the suspended film material. The design of the cooling pipe 13 and the flow divider 14 optimizes the heat conduction path and reduces system energy consumption. This device has a compact structure, low maintenance costs, and is suitable for coating processes on various substrate materials. For example, when processing high-reflectivity materials, the flow rate of the cooling medium in the cooling pipe 13 can be precisely adjusted via the control panel 17 to adapt to the thermal conductivity characteristics of different materials. Furthermore, the guide holes 15 on the flow divider 14 can be replaced with different specifications as needed to meet the flexible adjustment requirements of complex processes.

[0028] All content not described in detail in this specification is prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are prior art and are therefore not shown in the figures, nor will they be described further here.

[0029] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A heat transfer device for a magnetron sputtering coating machine, characterized in that, The device includes a heat transfer body (1), a temperature control component (2), and a heat conduction module (3). The temperature control component (2) is installed inside the heat transfer body (1), and the heat conduction module (3) is provided on the top of the heat transfer body (1). The temperature control component (2) includes a drive unit (4), a heat conduction ring (5), a temperature regulating plate (6), a sliding bracket (7), an adjusting rod (8), an elastic element (9), and a positioning block (10). The heat conduction ring (5) is symmetrically installed inside the heat transfer body (1). The temperature regulating plate (6) is fixedly connected to one side of the outer wall of the heat conduction ring (5). The sliding bracket (7) is fixedly connected to one end of the outer wall of the temperature regulating plate (6). A sliding groove is opened on one side of the sliding bracket (7), and an adjusting rod (8) is slidably connected in the sliding groove. An elastic element (9) is sleeved on one end of the outer wall of the adjusting rod (8). One end of the elastic element (9) is fixedly connected to the outer wall of the sliding bracket (7), and the other end is fixedly connected to the outer wall of the adjusting rod (8). (8) is fixedly connected to a positioning block (10) at the other end. The positioning block (10) has protrusions distributed on one side of its outer wall, and the protrusions are in close contact with the inner wall of the heat transfer body (1). The bottom of the heat transfer body (1) is inlaid with a driving unit (4), and the top of the output shaft of the driving unit (4) is fixed to the outer wall of the heat conduction ring (5). The heat conduction module (3) includes a heat conduction plate (11), a heat dissipation fin (12), a cooling pipe (13), and a flow divider (14). 4) and flow guide hole (15), heat conduction plates (11) are symmetrically installed on the top of the heat transfer body (1), heat dissipation fins (12) are distributed between the heat conduction plates (11), cooling pipes (13) are fixedly connected to one side of the outer wall of the heat dissipation fins (12), a flow divider plate (14) is fixedly connected to one end of the outer wall of the cooling pipe (13), and a flow guide hole (15) is opened on one side of the flow divider plate (14), and the flow guide hole (15) is connected to the cooling pipe (13).

2. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, An air inlet (18) is provided on one side of the heat transfer body (1), and an exhaust port (19) is provided on one side of the heat transfer body (1), with the exhaust port (19) located above the air inlet (18).

3. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, A support frame (16) is symmetrically fixed to one side of the outer wall of the heat transfer body (1). A control panel (17) is installed at one end of the support frame (16). Operation keys are distributed on one side of the outer wall of the control panel (17).

4. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, The cooling pipe (13) has three corrugated sections distributed on one side of its outer wall.

5. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, The heat-conducting plate (11) and the heat dissipation fin (12) are provided with arc-shaped grooves on one side, and the heat-conducting plate (11) and the heat dissipation fin (12) are symmetrical to each other.

6. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, A fixing frame (20) is symmetrically fixed to one side of the outer wall of the heat transfer body (1). A display module (21) is installed at one end of the fixing frame (20). Indicator lights are distributed on one side of the outer wall of the display module (21).

7. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, The elastic element (9) is sleeved on the outer wall of the adjusting rod (8), and there are four elastic elements (9).

8. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, The heat-conducting ring (5) and the temperature-regulating plate (6) are provided with heat-conducting coatings on one side, and the thickness of the heat-conducting coatings is uniform.

9. The heat transfer device for a magnetron sputtering coating machine according to claim 1, characterized in that, The sliding bracket (7) is adjusted in position by sliding the adjusting rod (8) in the groove, and the adjusting rod (8) is kept in contact with the inner wall of the heat transfer body (1) by the elastic force of the elastic element (9).

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