Gear protection mechanism of vacuum planetary coating machine

Abstract

The utility model relates to a coating machine technical field, concretely relates to a vacuum planetary coating machine gear protection mechanism, including the coating chamber, the coating chamber lower part is provided with electron beam evaporation source and ion source, the upper portion of coating chamber has planetary gear set, the outside cover of planetary gear set is equipped with the cover body, the last stage planetary gear of planetary gear set projects outside cover body outside, each last stage planetary gear outside is equipped with the shield, and the coaxial connection in last stage planetary gear is established in the upper portion of planetary chuck, the lower end of shield is equipped with the avoiding mouth for avoiding the connection place of planetary chuck and last stage planetary gear. The utility model's protection cover simple structure, low cost, easy to disassemble and clean, convenient cleaning and maintenance, simultaneously do not influence the revolution and rotation movement of planetary mechanism, have guaranteed the uniformity of coating solved the long-standing planetary gear pollution problem, greatly prolonged the gear life, have very high practicality and economic value.

Description

Technical Field

[0001] This utility model relates to the field of coating machine technology, specifically to a gear protection mechanism for a vacuum planetary coating machine. Background Technology

[0002] High-vacuum planetary coating machines are core equipment in the modern precision coating field. They use a planetary rotation mechanism (combining revolution and rotation) to obtain a uniform thin film coating on the surface of workpieces (such as optical lenses, semiconductor wafers, etc.). During the vapor deposition process, the evaporation source (such as an electron gun or a resistance evaporation source) heats the film material (such as metals, oxides, etc.) to vaporization. The film vapor travels in a straight line and is deposited on the surface of the workpiece.

[0003] However, these high-energy film vapors can also deposit on other components within the coating chamber, especially the precision planetary gear system. Once gears are covered with film, it can lead to: 1. Reduced gear meshing accuracy: The deposited film can deform the gear tooth profile, resulting in unstable transmission, noise, and vibration. 2. Risk of jamming: Excessive film deposition may eliminate the clearance between gear pairs, ultimately causing the transmission system to jam and the equipment to stop. 3. High maintenance costs: Frequent disassembly, cleaning, or replacement of expensive planetary gear systems is required, which not only increases spare parts costs but, more seriously, disrupts the vacuum environment of the coating chamber, leading to low production efficiency. Currently, although there are simple shielding designs, they are insufficient to block film vapors that have been reflected multiple times by the inner wall of the chamber and can easily interfere with the complex movements of the planetary mechanism. Utility Model Content

[0004] The purpose of this invention is to provide a planetary gear protection mechanism for a vacuum planetary coating machine.

[0005] This utility model provides the following technical solution:

[0006] This utility model proposes a gear protection mechanism for a vacuum planetary coating machine, including a coating chamber. An electron beam evaporation source and an ion source are arranged at the lower part of the coating chamber. A planetary gear set is located above the coating chamber. An outer cover is provided for the planetary gear set. The last stage planetary gear of the planetary gear set extends out of the outer cover. Each last stage planetary gear is covered with a protective cover. The upper part of a planetary suction cup is coaxially connected to the last stage planetary gear. The lower end of the protective cover has a clearance opening for avoiding the connection between the planetary suction cup and the last stage planetary gear.

[0007] Furthermore, the upper end of the protective cover is open and fixedly connected to the lower surface of the outer cover.

[0008] Furthermore, the planetary suction cup is magnetically attached to a product suction cup for fixing the product.

[0009] Furthermore, the lower end of the protective cover is inclined, and the clearance opening is located on the inclined surface.

[0010] Furthermore, the outer edge of the upper opening of the protective cover extends with a baffle strip for tightly fitting against the lower surface of the outer cover body.

[0011] Furthermore, a drive motor is fixed outside the coating chamber, and the output end of the drive motor extends into the coating chamber and drives each planetary gear to rotate synchronously via gear transmission.

[0012] Furthermore, the angle between the inclined plane and the horizontal plane is 4-28°.

[0013] Compared with existing technologies, the protective cover of this utility model has a simple structure, low cost, and is easy to disassemble and clean, making it convenient for cleaning and maintenance. At the same time, it does not affect the revolution and rotation of the planetary mechanism, ensuring the uniformity of the coating, solving the long-standing problem of planetary gear contamination, and greatly extending the gear life. It has high practicality and economic value. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Figure 2 Schematic diagram of the protective cover structure Figure 1 .

[0016] Figure 3 Schematic diagram of the protective cover structure Figure 2 .

[0017] Figure 4 Schematic diagram of the protective cover structure Figure 3 .

[0018] Figure 5 A schematic diagram of a planetary gear structure installed inside the protective cover (the planetary suction cups in this diagram do not have product suction cups attached to them).

[0019] Figure 6 A schematic diagram (top view) of a planetary gear structure housed inside the protective cover.

[0020] In the diagram, 1-coating chamber; 2-electron gun evaporation source; 3-ion source; 4-outer casing; 5-planetary suction cup; 6-protective cover; 61-avoidance opening; 62-opening; 63-inclined surface; 64-stop bar; 65-fixing hole; 7-final stage planetary gear; 8-product suction cup; 9-drive motor; 10-positioning block. Detailed Implementation

[0021] The present invention will be further described below with reference to the accompanying drawings.

[0022] See Figure 1 , Figure 3 , Figure 5and Figure 6 In one embodiment of this utility model, a gear protection mechanism for a vacuum planetary coating machine includes a coating chamber 1. An electron beam evaporation source 2 and an ion source 3 are disposed at the lower part of the coating chamber 1. A planetary gear set is disposed above the coating chamber 1. An outer cover 4 is provided around the planetary gear set. The final stage planetary gear 7 of the planetary gear set extends outside the outer cover 4. Each final stage planetary gear 7 is fitted with a protective cover 6. A planetary suction cup 5 is coaxially connected to the final stage planetary gear 7 at its upper part. The lower end of the protective cover 6 has a clearance opening 61 for avoiding the connection between the planetary suction cup 5 and the final stage planetary gear 7. By fitting the final stage planetary gear 7 inside the protective cover, during the coating process of the vacuum planetary coating machine, film molecules will not contaminate the final stage planetary gear 7, thereby improving the service life of the final stage planetary gear 7, reducing friction contamination sources, and improving efficiency.

[0023] See Figure 2 In one embodiment of this utility model, the upper end of the protective cover 6 is open 62 and fixedly connected to the lower surface of the outer cover 4; the final stage planetary gear 7 is fitted into the protective cover 6 from the open 62.

[0024] See Figure 6 In the above embodiment, there is a positioning block 10 next to the final stage planetary gear 7, the protective cover 6 is fitted with the positioning block 10, and the protective cover 6 is fixedly connected to the outer cover 4 through the positioning block 10, and the top of the positioning block 10 is fixed on the outer cover 4.

[0025] See Figure 4 In the above embodiment, the side wall of the protective cover 6 is provided with a fixing hole 65, and the positioning block 10 and the protective cover 6 are locked and fixed by screws at the fixing hole.

[0026] The positioning block 10 is fixed to the lower surface of the outer cover 4 by two screws. The positioning block 10 has different angle blocks that mesh with gears. This is existing technology and will not be described in detail.

[0027] participate Figure 1 and Figure 6 In one embodiment of this utility model, the planetary suction cup 5 is magnetically attached to a product suction cup 8 for fixing the product.

[0028] See Figure 2 or Figure 3 In one embodiment of this utility model, the lower end of the protective cover 6 is inclined 63, and the clearance opening 61 is located on the inclined surface 63 to adapt to the original tilt of the planetary suction cup 5.

[0029] See Figure 2 In one embodiment of this utility model, the outer edge of the upper opening 32 of the protective cover 6 extends with a baffle 64 for tightly fitting with the lower surface of the outer cover body 4, thus shielding the gap and preventing contamination.

[0030] See Figure 1 In one embodiment of this utility model, a drive motor 9 is fixed outside the coating chamber 1, and the output end of the drive motor 9 extends into the coating chamber and drives each planetary gear to rotate synchronously via gear transmission.

[0031] See Figure 2 In one embodiment of this utility model, the angle α between the inclined surface 63 and the horizontal plane is 4-28°.

[0032] This invention encases the final-stage planetary gear within a protective cover, thus preventing contamination of the final-stage planetary gear by the film material molecules.

[0033] The embodiments of this utility model are given for the purpose of illustration and description. Although embodiments of this utility model have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this utility model. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this utility model.

Claims

1. A gear protection mechanism for a vacuum planetary coating machine, comprising a coating chamber, an electron beam evaporation source and an ion source disposed at the lower part of the coating chamber, a planetary gear set disposed above the coating chamber, an outer cover covering the planetary gear set, and the last stage planetary gear of the planetary gear set extending outside the outer cover, characterized in that: Each final stage planetary gear is covered with a protective cover. The upper part of the planetary suction cup is coaxially connected to the final stage planetary gear. The lower end of the protective cover has a clearance opening to avoid the connection between the planetary suction cup and the final stage planetary gear.

2. The gear protection mechanism for a vacuum planetary coating machine according to claim 1, characterized in that, The upper end of the protective cover is open and fixedly connected to the lower surface of the outer cover.

3. The gear protection mechanism for a vacuum planetary coating machine according to claim 1, characterized in that, The planetary suction cup has a magnetic suction cup for fixing the product.

4. The gear protection mechanism for a vacuum planetary coating machine according to claim 1, characterized in that, The lower end of the protective cover is inclined, and the clearance opening is located on the inclined surface.

5. The gear protection mechanism for a vacuum planetary coating machine according to claim 2, characterized in that: The outer edge of the upper opening of the protective cover extends with a baffle strip for tightly fitting against the lower surface of the outer cover body.

6. The gear protection mechanism for a vacuum planetary coating machine according to claim 1, characterized in that: A drive motor is fixed outside the coating chamber, and the output end of the drive motor extends into the coating chamber and drives each planetary gear to rotate synchronously via gear transmission.

7. The gear protection mechanism for a vacuum planetary coating machine according to claim 1, characterized in that: The angle between the inclined plane and the horizontal plane is 4-28°.

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