A viewing window structure for use in a vacuum environment

Abstract

The utility model discloses a kind of observation window structures applied to vacuum environment, it is related to vacuum chamber observation window technical field.The utility model includes observation tube, strong magnetic flip blocking component and water cooling component, the front side of observation tube is equipped with sealing mechanism, high-temperature-resistant quartz glass is arranged between sealing mechanism and observation tube, water cooling component includes sealed tube, the inner wall of observation tube is fixedly connected with the front side of sealed tube.The utility model is driven rotating baffle to shield observation window opening by strong magnetic flip blocking component, using the magnetic force coupling effect between rotating strong magnet and passive strong magnet in vacuum coating process, avoid metal or compound steam directly adhering to high-temperature-resistant quartz glass surface, reduce deposition pollution problem, simultaneously, magnetic force coupling transmission does not need to penetrate rotating tube, effectively reduce the potential leakage risk of sealing structure, reduce the equipment downtime caused by repeated cleaning or replacing observation window, improve process continuity and observation stability.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum chamber observation window technology, and in particular relates to an observation window structure applied in a vacuum environment. Background Technology

[0002] The vacuum chamber observation window of vacuum coating is a transparent viewing window device installed on the chamber wall. It is used to monitor the internal coating process and equipment operation status in real time. It is usually made of special glass or crystal materials that are resistant to high temperature and pressure difference, such as quartz glass or sapphire, to withstand the pressure difference between the vacuum environment and the external atmosphere. Its sealing structure ensures vacuum integrity and prevents gas leakage through metal flanges or rubber rings.

[0003] Existing vacuum coating chamber observation windows only use a single layer of high-temperature resistant quartz glass. Although they can directly observe the internal working conditions of the chamber, during the PVD coating process, metal or compound vapors directly adhere to the inner surface of the quartz glass. As the number of coatings increases, the vapor deposition layer gradually thickens and becomes difficult to remove, resulting in a continuous decrease in the light transmittance of the observation window. Eventually, due to severe contamination, the entire quartz glass needs to be disassembled and cleaned or replaced. This process is not only cumbersome and costly to maintain, but repeated disassembly and reassembly can also damage the airtightness of the vacuum chamber, directly affecting the stability of the coating process and the continuous operating efficiency of the equipment, which is not conducive to its use.

[0004] To address these issues, we provide an observation window structure for use in vacuum environments. Utility Model Content

[0005] The purpose of this invention is to provide an observation window structure for use in a vacuum environment. By combining a water-cooling component and a strong magnetic flip-blocking component, it solves the problem in the prior art that vacuum chamber observation windows with vacuum coating are prone to metal or compound vapors adhering to the glass surface during the PVD coating process, resulting in a decrease in the light transmittance of the observation window glass and affecting the observation effect of the staff.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0007] This utility model relates to an observation window structure for use in a vacuum environment, comprising an observation tube, a strong magnetic flip-blocking assembly, and a water-cooling assembly. A sealing mechanism is installed on the front side of the observation tube, and high-temperature resistant quartz glass is disposed between the sealing mechanism and the observation tube. The water-cooling assembly includes a sealing tube, the front side of which is fixedly connected to the inner wall of the observation tube. A mounting flange is fixedly connected to the rear side of the sealing tube, and the front side of the mounting flange is fixedly connected to the observation tube. A water cavity interlayer is provided between the observation tube and the sealing tube. Cooling water inlets are connected to both sides of the observation tube. The strong magnetic flip-blocking assembly includes a positioning tube, the bottom of which extends into the inner cavity of the sealing tube. A rotating tube is fixedly connected to the inner wall of the positioning tube. The top of the rotating tube extends to the outside of the positioning tube and is rotatably connected to a mounting base. Rotating strong magnets are fixedly connected to both sides of the inner cavity of the mounting base. A rotating sleeve is fixedly connected to the surface of the mounting base. A passive strong magnet is disposed in the inner cavity of the rotating tube. A rotating shaft is fixedly connected to the bottom of the passive strong magnet, and a rotating baffle is fixedly connected to the bottom of the rotating shaft.

[0008] The present invention is further configured such that the sealing mechanism includes a glass clamping flange, a high-temperature resistant quartz glass is disposed on the rear side of the glass clamping flange, an annular positioning groove is provided on the inner wall of the observation tube, a bracket is disposed on the inner wall of the annular positioning groove, and the rear side of the glass clamping flange is fixedly connected to the observation tube by bolts. The glass clamping flange can stably install and fix the high-temperature resistant quartz glass, while the bracket inside the annular positioning groove can limit the high-temperature resistant quartz glass to prevent it from displacing and affecting the sealing performance.

[0009] The present invention is further provided with a sealing ring on the front side of the high-temperature resistant quartz glass and a sealing rubber ring on the rear side of the high-temperature resistant quartz glass. The sealing ring and the sealing rubber ring can increase the sealing effect after the high-temperature resistant quartz glass is installed and fixed, and prevent it from affecting the sealing effect of the vacuum chamber.

[0010] The present invention is further configured such that the inner wall of the rotating tube is slidably connected to the surface of the rotating shaft, and the left side of the rotating shaft is fixedly connected to the rotating baffle by screws. The rotating shaft can rotate stably in the inner wall of the rotating tube, and the screws facilitate the installation and disassembly of the rotating baffle.

[0011] The present invention is further configured such that the top of the passive strong magnet is provided with a mounting hole, the inner cavity of the mounting hole is provided with a screw, the bottom of the screw is threadedly connected to the rotating shaft, and the mounting hole can facilitate the screw to install and fix the passive strong magnet, so that the passive strong magnet can be quickly installed on the top of the rotating shaft.

[0012] The present invention is further provided with a sealing gasket on the rear side of the mounting flange, and a fixing ring groove for cooperating with the sealing gasket is provided on the rear side of the mounting flange. The sealing gasket is used to increase the sealing effect between the mounting flange and the vacuum chamber, and the fixing ring groove can limit the sealing gasket.

[0013] The present invention is further configured such that an anti-slip ring is fixedly connected to the surface of the rotating sleeve, and a positioning groove is provided on the front side of the observation tube. The anti-slip ring can increase the anti-slip effect of the rotating sleeve, and the positioning groove can improve the stability of the high-temperature resistant quartz glass installation.

[0014] The present invention has the following beneficial effects.

[0015] 1. This utility model utilizes a strong magnetic flip-blocking component to drive a rotating baffle to block the opening of the observation window during the vacuum coating process, using the magnetic coupling between a rotating strong magnet and a passive strong magnet. This prevents metal or compound vapors from directly adhering to the surface of the high-temperature resistant quartz glass, reducing deposition and contamination problems. At the same time, the magnetic coupling transmission does not require penetration of the rotating tube, effectively reducing the potential leakage risk of the sealing structure, reducing equipment downtime caused by repeated cleaning or replacement of the observation window, and improving process continuity and observation stability.

[0016] 2. This utility model utilizes a water-cooling assembly to form a circulating cooling channel through the water cavity sandwiched between the observation tube and the sealing tube. The cooling medium flows continuously through the cooling water interface, quickly removing heat from the high-temperature resistant quartz glass and surrounding areas. This reduces the thermal shock of the high-temperature environment to the high-temperature resistant quartz glass, preventing cracking or sealing failure caused by temperature fluctuations. At the same time, it inhibits the condensation of steam near the observation window, further reducing the adhesion of contaminants, ensuring that the observation window maintains high light transmittance for a long time, reducing maintenance frequency and extending service life. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0018] Figure 1 A three-dimensional view of an observation window structure used in a vacuum environment;

[0019] Figure 2 A cross-sectional view of an observation window structure used in a vacuum environment;

[0020] Figure 3 An exploded view of the sealing mechanism in an observation window structure used in a vacuum environment;

[0021] Figure 4 This is a cross-sectional view of a water-cooled component in an observation window structure used in a vacuum environment.

[0022] Figure 5 This is an exploded view of a strong magnetic reversal shielding component in an observation window structure used in a vacuum environment.

[0023] In the attached diagram: 1. Observation tube; 2. Sealing mechanism; 3. High-temperature resistant quartz glass; 4. Water cooling assembly; 41. Sealing tube; 42. Mounting flange; 43. Water cavity interlayer; 44. Cooling water interface; 5. Strong magnetic flip-blocking assembly; 51. Positioning tube; 52. Rotating tube; 53. Mounting base; 54. Rotating strong magnet; 55. Rotating sleeve; 56. Passive strong magnet; 57. Rotating shaft; 58. Rotating baffle; 21. Glass clamping flange; 22. Annular positioning groove; 23. Bracket; 24. Sealing ring; 25. Sealing rubber ring; 6. Sealing gasket. Detailed Implementation

[0024] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] Example 1

[0026] Please see Figure 1-5 This utility model relates to an observation window structure for use in a vacuum environment, comprising an observation tube 1, a strong magnetic flip-blocking assembly 5, and a water-cooling assembly 4. A sealing mechanism 2 is installed on the front side of the observation tube 1, and a high-temperature resistant quartz glass 3 is disposed between the sealing mechanism 2 and the observation tube 1. The water-cooling assembly 4 includes a sealing tube 41, the front side of which is fixedly connected to the inner wall of the observation tube 1, and a mounting flange 42 is fixedly connected to the rear side of the sealing tube 41. The front side of the mounting flange 42 is fixedly connected to the observation tube 1. A water cavity interlayer 43 is disposed between the observation tube 1 and the sealing tube 41. Both sides of the observation tube 1 are connected to... The cooling water interface 44 and the strong magnetic flip-blocking assembly 5 include a positioning tube 51. The bottom of the positioning tube 51 extends into the inner cavity of the sealing tube 41. A rotating tube 52 is fixedly connected to the inner wall of the positioning tube 51. The top of the rotating tube 52 extends to the outside of the positioning tube 51 and is rotatably connected to a mounting base 53. Rotating strong magnets 54 are fixedly connected to both sides of the inner cavity of the mounting base 53. A rotating sleeve 55 is fixedly connected to the surface of the mounting base 53. A passive strong magnet 56 is provided in the inner cavity of the rotating tube 52. A rotating shaft 57 is fixedly connected to the bottom of the passive strong magnet 56. A rotating baffle 58 is fixedly connected to the bottom of the rotating shaft 57.

[0027] Specifically: the sealing mechanism 2 can seal and fix the high-temperature resistant quartz glass 3, making it stably installed on the front side of the observation tube 1. The high-temperature resistant quartz glass 3 allows the staff to easily observe the coating in the vacuum chamber. The sealing tube 41 can cooperate with the observation tube 1, so that the water cavity interlayer 43 formed between the two can transport cooling water. The cooling water interface 44 allows the cooling water to flow continuously inside the water cavity interlayer 43, enabling it to work stably in a high-temperature environment. The positioning tube 51 facilitates the installation of the rotating tube 52. The surface of the rotating tube 52 is connected to the positioning tube 51 by welding. The mounting base 53 can rotate on the top of the rotating tube 52. Simultaneously, the rotating sleeve 55 controls the mounting base 53 and the two rotating strong magnets 54 to rotate, causing the passive strong magnet 56 located inside the rotating tube 52 to rotate as well. The rotating passive strong magnet 56 controls the rotation of the rotating shaft 57 and the rotating baffle 58, controlling the rotating baffle 58 to close and open the opening of the observation tube 1. When observation is not required, it shields the high-temperature resistant quartz glass 3, preventing contamination of the high-temperature resistant quartz glass 3 during the PVD coating process and preventing unclear images during observation, which would affect the observation effect. At the same time, the rotation of the rotating baffle 58 is indirectly controlled by magnetic adsorption, rather than directly controlled, reducing potential leaks in the vacuum seal.

[0028] Example 2

[0029] Please see Figure 1-5 Based on Embodiment 1, the sealing mechanism 2 includes a glass clamping flange 21, the rear side of which is fitted with a high-temperature resistant quartz glass 3. An annular positioning groove 22 is provided on the inner wall of the observation tube 1, and a bracket 23 is provided on the inner wall of the annular positioning groove 22. The rear side of the glass clamping flange 21 is fixedly connected to the observation tube 1 by bolts. A sealing ring 24 is provided on the front side of the high-temperature resistant quartz glass 3, and a sealing rubber ring 25 is provided on the rear side of the high-temperature resistant quartz glass 3. The inner wall of the rotating tube 52 is slidably connected to the surface of the rotating shaft 57. The left side of the rotating shaft 57 is fixedly connected to the rotating baffle 58 by screws. A mounting hole is provided on the top of the passive strong magnet 56, and a screw is provided in the inner cavity of the mounting hole. The bottom of the screw is threadedly connected to the rotating shaft 57. A sealing gasket 6 is provided on the rear side of the mounting flange 42, and a fixing ring groove that cooperates with the sealing gasket 6 is provided on the rear side of the mounting flange 42. An anti-slip ring is fixedly connected to the surface of the rotating sleeve 55, and a positioning groove is provided on the front side of the observation tube 1.

[0030] Specifically: the glass clamping flange 21 can stably install and fix the high-temperature quartz glass 3, while the bracket 23 inside the annular positioning groove 22 can limit the high-temperature quartz glass 3 to prevent displacement and affect the sealing performance. The sealing ring 24 and sealing rubber ring 25 can increase the sealing effect after the high-temperature quartz glass 3 is installed and fixed, preventing it from affecting the sealing effect of the vacuum chamber. The rotating shaft 57 can rotate stably in the inner wall of the rotating tube 52. The screw can facilitate the installation and removal of the rotating baffle 58. The mounting hole can facilitate the installation and fixing of the passive strong magnet 56 by the screw, so that the passive strong magnet 56 can be quickly installed on the top of the rotating shaft 57. The sealing gasket 6 is used to increase the sealing effect between the mounting flange 42 and the vacuum chamber. The fixing ring groove can limit the sealing gasket 6. The anti-slip ring can increase the anti-slip effect of the rotating sleeve 55. The positioning groove can improve the stability of the high-temperature quartz glass 3 installation and fixing.

[0031] The working principle of this utility model is as follows: The mounting flange 42 is fixedly connected to the vacuum chamber wall by bolts. The sealing gasket 6 is deformed under pressure to fill the gap of the fixing ring groove, ensuring the vacuum sealing of the chamber. When the vacuum coating process is started, the operator rotates the rotating sleeve 55, which drives the mounting base 53 and the rotating strong magnet 54 to rotate around the axis of the rotating tube 52. Through magnetic coupling, the passive strong magnet 56 is driven to rotate synchronously, causing the rotating shaft 57 to drive the rotating baffle 58 to flip in the inner cavity of the sealing tube 41, thereby adjusting the closed state of the observation tube 1 opening and preventing coating vapor from contacting the high-temperature resistant quartz glass 3. When it is necessary to observe the working condition of the chamber, the rotation is reversed. The rotating sleeve 55 opens the rotating baffle 58, and at the same time the cooling water interface 44 is connected to the external circulation system. The cooling medium continuously flows through the water chamber interlayer 43, dissipating the heat accumulated in the area of ​​the high-temperature resistant quartz glass 3 and maintaining the surface temperature of the high-temperature resistant quartz glass 3. The glass clamping flange 21 clamps the sealing ring 24 and the sealing rubber ring 25 with bolts, forming a triple sealing structure with the bracket 23 in the annular positioning groove 22 to prevent vacuum leakage. The magnetic coupling transmission does not require penetration of the rotating tube 52, effectively reducing the potential leakage risk of the sealing structure, reducing equipment downtime caused by repeated cleaning or replacement of the observation window, and improving process continuity and observation stability.

[0032] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. An observation window structure for use in a vacuum environment, comprising an observation tube (1), a strong magnetic flip-blocking assembly (5), and a water-cooling assembly (4), characterized in that: A sealing mechanism (2) is installed on the front side of the observation tube (1), and a high-temperature resistant quartz glass (3) is provided between the sealing mechanism (2) and the observation tube (1); The water-cooling assembly (4) includes a sealing tube (41), the front side of which is fixedly connected to the inner wall of the observation tube (1), and a mounting flange (42) is fixedly connected to the rear side of the sealing tube (41). The front side of the mounting flange (42) is fixedly connected to the observation tube (1). A water cavity interlayer (43) is provided between the observation tube (1) and the sealing tube (41). Cooling water inlets (44) are connected to both sides of the observation tube (1). The strong magnetic flip-blocking assembly (5) includes a positioning tube (51), the bottom of which extends through the inner cavity of the sealing tube (41). A rotating tube (52) is fixedly connected to the inner wall of the positioning tube (51). The top of the rotating tube (52) extends to the outside of the positioning tube (51) and is rotatably connected to a mounting base (53). Rotating strong magnets (54) are fixedly connected to both sides of the inner cavity of the mounting base (53). A rotating sleeve (55) is fixedly connected to the surface of the mounting base (53). A passive strong magnet (56) is provided in the inner cavity of the rotating tube (52). A rotating shaft (57) is fixedly connected to the bottom of the passive strong magnet (56). A rotating baffle (58) is fixedly connected to the bottom of the rotating shaft (57).

2. The observation window structure for use in a vacuum environment according to claim 1, characterized in that: The sealing mechanism (2) includes a glass clamping flange (21), the rear side of which is in contact with high-temperature resistant quartz glass (3), the inner wall of the observation tube (1) is provided with an annular positioning groove (22), the inner wall of the annular positioning groove (22) is provided with a bracket (23), and the rear side of the glass clamping flange (21) is fixedly connected to the observation tube (1) by bolts.

3. The observation window structure for use in a vacuum environment according to claim 2, characterized in that: A sealing ring (24) is provided on the front side of the high-temperature resistant quartz glass (3), and a sealing rubber ring (25) is provided on the rear side of the high-temperature resistant quartz glass (3).

4. The observation window structure for use in a vacuum environment according to claim 1, characterized in that: The inner wall of the rotating tube (52) is slidably connected to the surface of the rotating shaft (57), and the left side of the rotating shaft (57) is fixedly connected to the rotating baffle (58) by screws.

5. The observation window structure for use in a vacuum environment according to claim 1, characterized in that: The passive strong magnet (56) has a mounting hole at its top, and a screw is provided in the inner cavity of the mounting hole. The bottom of the screw is threadedly connected to the rotating shaft (57).

6. The observation window structure for use in a vacuum environment according to claim 1, characterized in that: A sealing gasket (6) is provided on the rear side of the mounting flange (42), and a fixing ring groove for cooperating with the sealing gasket (6) is provided on the rear side of the mounting flange (42).

7. The observation window structure for use in a vacuum environment according to claim 1, characterized in that: The surface of the rotating sleeve (55) is fixedly connected with an anti-slip ring, and the front side of the observation tube (1) is provided with a positioning groove.

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