A vacuum air exhauster set applied to a PVD coating equipment

Abstract

The utility model discloses a vacuum air extractor set applied to PVD film coating equipment relates to film coating equipment technical field, the utility model discloses a vacuumizing component is communicated with filter assembly to the air inlet of vacuumizing component, the air inlet fixedly connected with shock attenuation component of filter assembly, the other end of shock attenuation component is communicated with the air inlet pipe, the inner chamber fixedly connected with vacuum valve of air inlet pipe, the other end of air inlet pipe is communicated with the vacuum chamber of vacuum film coating equipment. The utility model discloses through placing filter core in filter jar, can carry out effective filtration to the airflow of entering vacuumizing component, intercepts the pollutant such as metal vapor condensation particle, target material sputtering microparticle produced in film coating technology, avoids its into vacuum pump cavity, thereby reduces the mechanical wear and tear in pump body, improves the air extraction efficiency, prolongs the service life of vacuum pump, reduces the hidden danger such as vacuum leakage caused by pollutant, improves the film coating quality and equipment reliability.

Description

Technical Field

[0001] This utility model belongs to the technical field of coating equipment, and in particular relates to a vacuum pumping unit used in PVD coating equipment. Background Technology

[0002] In the field of physical vapor deposition (PVD) coating technology, the vacuum pumping system, as a core component, directly determines the coating quality and equipment reliability. With the increasing demands for uniformity and density of nanoscale thin films in high-end fields such as optical devices, semiconductor chips, and precision molds, PVD coating equipment is facing higher standards regarding the stability of the vacuum environment, pumping efficiency, and long-term operational lifespan.

[0003] Traditional vacuum pumping systems typically employ a direct connection between the vacuum pump and piping. During high-frequency, long-term operation, contaminants such as condensed metal vapor particles and sputtered target particles generated during the coating process can enter the vacuum pump chamber with the airflow. This leads to increased internal mechanical wear, decreased pumping efficiency, and even safety hazards such as vacuum leaks. Furthermore, existing systems often use flanges or threads for piping connections, which are prone to loosening under the high-frequency vibration of the vacuum pump. Maintenance also requires complete disassembly, severely impacting production efficiency. Therefore, optimizing the particle filtration capacity of vacuum pumping systems, improving structural stability, and enhancing maintenance convenience have become key bottlenecks restricting the further development of PVD coating technology.

[0004] To address these issues, we provide a vacuum pumping unit for use in PVD coating equipment. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum pumping unit for PVD coating equipment. By combining the filter component and the shock absorption component, it solves the problems of poor particle filtration capacity, structural stability and ease of maintenance in the existing vacuum pumping system.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0007] This utility model relates to a vacuum pumping unit for PVD coating equipment, comprising a vacuum pumping assembly, an air inlet of which is connected to a filter assembly, an air inlet of which is fixedly connected to a shock-absorbing assembly, and an air inlet pipe at the other end of which is connected to an air inlet pipe. A vacuum valve is fixedly connected to the inner cavity of the air inlet pipe, and the other end of the air inlet pipe is connected to the vacuum chamber of the vacuum coating equipment. The filter assembly includes a filter canister and a buckle. A filter element is placed in the inner cavity of the filter canister. A cap is threadedly connected to the top of the filter canister, and the bottom of the filter canister is connected to the top of the vacuum pumping assembly via the buckle. The shock-absorbing assembly includes a lead screw, and a connecting piece is fixedly connected to the surface of the lead screw via a nut. A bellows is movably connected to the other side of the connecting piece via a nut and a buckle. The two ends of the bellows are respectively connected to the air inlet of the filter canister and the air inlet pipe.

[0008] This invention is further configured such that the vacuum assembly includes a vacuum pump A, a vacuum pump B, and a clamping ring. The top and rear ends of vacuum pumps A and B are respectively connected to vacuum tube A and vacuum tube B via the clamping ring. A second corrugated pipe is movably connected between vacuum tubes A and B via a clamping ring. The top and front ends of vacuum pumps A and B are connected to an outlet pipe via the clamping ring. A three-way exhaust pipe is connected between the two outlet pipes via the clamping ring. The vacuum assembly uses a combination of vacuum pumps A and B, connected by vacuum tubes A and B, the second corrugated pipe, and the three-way exhaust pipe, improving pumping efficiency and system flexibility. The second corrugated pipe can buffer vibration and ensure connection stability.

[0009] The present invention is further configured such that the bottom of both vacuum pump A and vacuum pump B are fixedly connected to a frame, the top of the frame is fixedly connected to the ground by bolts, and the bottom of vacuum pump A and vacuum pump B are fixedly connected to the frame. The frame is fixed to the ground by bolts, which enhances the stability of the vacuum pump, reduces vibration and displacement during operation, and helps to improve the pumping effect and the reliability of the equipment.

[0010] The present invention is further configured such that flanges are fixedly connected to the bottom of the filter tank and the top of the vacuum tube A, and high-temperature resistant fluororubber sealing rings are fitted between the two flanges and at the end where the air inlet pipe connects to the vacuum coating equipment. The flanges at the bottom of the filter tank and the top of the vacuum tube A, as well as the high-temperature resistant fluororubber sealing rings at each connection end, improve the sealing performance of the connection, prevent gas leakage, and ensure the stability of the vacuum system.

[0011] The present invention is further configured such that the buckle includes a receiving sleeve, and a clamping sleeve is fitted inside the cavity of the receiving sleeve. The end of the clamping sleeve located outside the receiving sleeve is locked and fixed by a nut. The buckle adopts the structure of a receiving sleeve and a clamping sleeve, and is locked and fixed by a nut. The connection is firm and easy to install and disassemble, which improves maintenance efficiency.

[0012] The present invention is further configured such that the fastening ring includes half-circle A and half-circle B, one end of half-circle A and half-circle B are movably connected by a pin, the other end of half-circle A is fixedly connected to a threaded tube, and the other end of half-circle B is provided with a locking bolt. The other end of the locking bolt is threadedly connected to the inner cavity of the threaded tube. The fastening ring is movably connected by half-circle A and half-circle B by a pin and locked by the threaded tube and the locking bolt. The connection method is flexible, convenient for installation and adjustment, and ensures the tightness of the connection.

[0013] The present invention is further configured such that the four buckles are arranged in a circumferential array at equal intervals, which makes the connection more uniform and stable, and enhances the strength and sealing of the connection part.

[0014] The present invention has the following beneficial effects.

[0015] 1. This utility model effectively filters the airflow entering the vacuum assembly by placing a filter element inside the filter tank, intercepting contaminants such as condensed metal vapor particles and sputtered target particles generated during the coating process, preventing them from entering the vacuum pump cavity, thereby reducing internal mechanical wear of the pump body, improving pumping efficiency, extending the service life of the vacuum pump, reducing safety hazards such as vacuum leakage caused by contaminants, and improving coating quality and equipment reliability.

[0016] 2. The bellows in the shock absorption assembly of this utility model can buffer the high-frequency vibration generated by the operation of the vacuum pump, reducing the risk of loose pipeline connections. At the same time, the connection methods such as snaps and fastening rings make the installation and disassembly of each component more convenient. No complete disassembly is required during maintenance, which greatly improves production efficiency and meets the needs of PVD coating equipment for long-term stable operation and efficient maintenance. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0018] Figure 1 This is a three-dimensional view of a vacuum pumping unit used in PVD coating equipment.

[0019] Figure 2 This is a rear view schematic diagram of a vacuum pumping unit used in PVD coating equipment.

[0020] Figure 3 This is a three-dimensional schematic diagram of a shock-absorbing component used in a vacuum pumping unit of a PVD coating equipment.

[0021] Figure 4 This is a three-dimensional schematic diagram of a clip used in a vacuum pumping unit of a PVD coating equipment.

[0022] Figure 5 This is a three-dimensional schematic diagram of a fastening ring used in a vacuum pumping unit of a PVD coating equipment.

[0023] In the attached diagram: 1. Vacuum assembly; 11. Vacuum pump A; 12. Vacuum pump B; 13. Hoop; 131. Half-circle A; 132. Half-circle B; 133. Locking bolt; 14. Vacuum tube A; 15. Vacuum tube B; 16. Bellows II; 17. Exhaust pipe; 18. Three-way exhaust pipe; 19. Frame; 2. Filter assembly; 21. Filter canister; 22. Buckle; 221. Receiving sleeve; 222. Clamping sleeve; 23. Cap; 24. High-temperature resistant fluororubber sealing ring; 3. Shock absorption assembly; 31. Lead screw; 32. Connecting piece; 33. Bellows I; 4. Inlet pipe; 5. Vacuum valve. Detailed Implementation

[0024] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] Example 1

[0026] Please see Figure 1-5 This utility model is a vacuum pumping unit applied to PVD coating equipment, including a vacuum pumping component 1. The air inlet of the vacuum pumping component 1 is connected to a filter component 2. The air inlet of the filter component 2 is fixedly connected to a shock-absorbing component 3. The other end of the shock-absorbing component 3 is connected to an air inlet pipe 4. The inner cavity of the air inlet pipe 4 is fixedly connected to a vacuum valve 5. The other end of the air inlet pipe 4 is connected to the vacuum chamber of the vacuum coating equipment. The filter component 2 includes a filter canister 21 and a buckle 22. The inner cavity of the filter canister 21 contains a filter element. The top of the filter canister 21 is threadedly connected to a cap 23. The bottom of the filter canister 21 is connected to the top of the vacuum pumping component 1 through the buckle 22. The shock-absorbing component 3 includes a lead screw 31. The surface of the lead screw 31 is fixedly connected to a connecting piece 32 by a nut. The other side of the connecting piece 32 is movably connected to a bellows 33 through a nut and the buckle 22. The two ends of the bellows 33 are respectively connected to the air inlet of the filter canister 21 and the air inlet pipe 4.

[0027] Specifically: The filter element placed inside the filter canister 21 is a vacuum micro-particle filter element, which can effectively filter the incoming gas. The top of the filter canister 21 is connected to a cap 23 by a thread, which makes it easy to open and replace the filter element. The bottom of the filter canister 21 is connected to the top of the vacuum tube A14 by a buckle 22 to ensure the sealing and stability of the connection. The two ends of the bellows 33 are connected to the air inlet of the filter canister 21 and the air inlet pipe 4, respectively. A vacuum valve 5 is fixedly installed in the inner cavity of the air inlet pipe 4 to control the flow of gas. The other end of the air inlet pipe 4 is connected to the vacuum chamber of the vacuum coating equipment, thereby connecting the vacuum chamber to the pumping unit to realize the pumping operation of the vacuum chamber.

[0028] Example 2

[0029] Please see Figure 1-5 Based on Embodiment 1, the vacuum assembly 1 includes a vacuum pump A11, a vacuum pump B12, and a clamping ring 13. The top and rear ends of vacuum pumps A11 and B12 are respectively connected to vacuum tubes A14 and B15 via the clamping ring 13. A corrugated pipe 16 is movably connected between vacuum tubes A14 and B15 via a fastening ring. The top and front ends of vacuum pumps A11 and B12 are connected to an exhaust pipe 17 via the clamping ring 13. A three-way exhaust pipe 18 is connected between the two exhaust pipes 17 via the clamping ring 13. A frame 19 is fixedly connected to the bottom of both vacuum pumps A11 and B12. The top of the frame 19 is fixedly connected to the ground via bolts. The bottom of the filter tank 21 and the top of the vacuum tube A14 are also connected. All are fixedly connected with flanges. High-temperature resistant fluororubber sealing rings 24 are fitted between the two flanges and at the end where the air inlet pipe 4 is connected to the vacuum coating equipment. The buckle 22 includes a receiving sleeve 221. A clamping sleeve 222 is fitted inside the receiving sleeve 221. The end of the clamping sleeve 222 located outside the receiving sleeve 221 is locked and fixed by a nut. The fastening ring includes half-circle A131 and half-circle B132. One end of half-circle A131 and half-circle B132 is movably connected by a pin. The other end of half-circle A131 is fixedly connected to a threaded pipe. The other end of half-circle B132 is provided with a locking bolt 133. The other end of the locking bolt 133 is threadedly connected to the inner cavity of the threaded pipe. The buckles 22 are arranged in groups of four and are arranged in a circumferential array at equal distances.

[0030] Specifically: The vacuum pumping assembly 1 uses a combination of vacuum pump A11 and vacuum pump B12, which are connected by vacuum tube A14, vacuum tube B15, corrugated pipe 16 and three-way exhaust pipe 18, thereby improving the pumping efficiency and system flexibility. The bellows 16 can buffer vibration and ensure connection stability. The bottom of vacuum pumps A11 and B12 is fixedly connected to the frame 19, which is fixed to the ground by bolts, enhancing the stability of the vacuum pumps and reducing vibration and displacement during operation. This is beneficial to improving the pumping effect and equipment reliability. The flanges at the bottom of the filter tank 21 and the top of the vacuum tube A14, as well as the high-temperature fluororubber sealing rings 24 at each connection end, improve the sealing performance of the connection, prevent gas leakage, and ensure the stability of the vacuum system. The buckle 22 adopts the structure of the receiving sleeve 221 and the clamping sleeve 222, which is locked by nuts. The connection is firm and easy to install and disassemble, improving maintenance efficiency. The fastening ring is connected by a pin between half a ring A131 and half a ring B132, and is locked by a threaded tube and locking bolt 133. The connection method is flexible, convenient for installation and adjustment, and ensures the tightness of the connection. The four buckles 22 are arranged in a circumferential array at equal intervals, making the connection more uniform and stable, and enhancing the strength and sealing performance of the connection.

[0031] The working principle of this utility model is as follows: First, the vacuum valve 5 in the air inlet pipe 4 is opened to connect the vacuum chamber of the vacuum coating equipment with the pumping unit. The gas enters the damping component 3 from the vacuum chamber through the air inlet pipe 4. The bellows 33 in the damping component 3 buffers the airflow and vibration. Then the gas enters the filter component 2. The filter element in the filter tank 21 filters out contaminants such as metal vapor condensation particles and target sputtering particles in the gas. The filtered gas enters the vacuum pumping component 1. The vacuum pump A11 and vacuum pump B12 work together to extract the gas and discharge it from the system through the vacuum pipe A14, vacuum pipe B15, bellows 16 and three-way exhaust pipe 18, thereby realizing the pumping operation of the vacuum chamber and providing a stable vacuum environment for the PVD coating equipment.

[0032] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. A vacuum pumping unit for use in PVD coating equipment, comprising a vacuum pumping component (1), characterized in that: The air inlet of the vacuum assembly (1) is connected to the filter assembly (2), the air inlet of the filter assembly (2) is fixedly connected to the shock absorption assembly (3), the other end of the shock absorption assembly (3) is connected to the air inlet pipe (4), the inner cavity of the air inlet pipe (4) is fixedly connected to the vacuum valve (5), and the other end of the air inlet pipe (4) is connected to the vacuum chamber of the vacuum coating equipment. The filter assembly (2) includes a filter canister (21) and a buckle (22). The filter canister (21) has a filter element placed inside its cavity. The top of the filter canister (21) is threaded with a cap (23). The bottom of the filter canister (21) is connected to the top of the vacuum assembly (1) through the buckle (22). The shock absorption assembly (3) includes a lead screw (31), and a connecting piece (32) is fixedly connected to the surface of the lead screw (31) by a nut. The other side of the connecting piece (32) is movably connected to a bellows (33) by a nut and a buckle (22). The two ends of the bellows (33) are respectively connected to the air inlet of the filter tank (21) and the air inlet pipe (4).

2. The vacuum pumping unit for PVD coating equipment according to claim 1, characterized in that: The vacuum assembly (1) includes a vacuum pump A (11), a vacuum pump B (12), and a clamping ring (13). The top and rear ends of the vacuum pump A (11) and the vacuum pump B (12) are respectively connected to a vacuum tube A (14) and a vacuum tube B (15) through the clamping ring (13). A corrugated pipe II (16) is movably connected between the vacuum tube A (14) and the vacuum tube B (15) through a fastening ring. The top and front ends of the vacuum pump A (11) and the vacuum pump B (12) are connected to an exhaust pipe (17) through the clamping ring (13). A three-way exhaust pipe (18) is connected between the two exhaust pipes (17) through the clamping ring (13).

3. A vacuum pumping unit for use in PVD coating equipment according to claim 2, characterized in that: The bottom of both vacuum pump A (11) and vacuum pump B (12) is fixedly connected to a frame (19), and the top of the frame (19) is fixedly connected to the ground by bolts.

4. A vacuum pumping unit for PVD coating equipment according to claim 1, characterized in that: Flanges are fixedly connected to the bottom of the filter tank (21) and the top of the vacuum tube A (14). High-temperature resistant fluororubber sealing rings (24) are fitted between the two flanges and at the end of the air inlet pipe (4) connected to the vacuum coating equipment.

5. A vacuum pumping unit for PVD coating equipment according to claim 1, characterized in that: The buckle (22) includes a receiving sleeve (221), and a locking sleeve (222) is provided in the inner cavity of the receiving sleeve (221). The end of the locking sleeve (222) located outside the receiving sleeve (221) is locked and fixed by a nut.

6. A vacuum pumping unit for use in PVD coating equipment according to claim 2, characterized in that: The fastening ring includes half-ring A (131) and half-ring B (132). One end of half-ring A (131) and half-ring B (132) is movably connected by a pin. The other end of half-ring A (131) is fixedly connected to a threaded tube. The other end of half-ring B (132) is provided with a locking bolt (133). The other end of the locking bolt (133) is threadedly connected to the inner cavity of the threaded tube.

7. A vacuum pumping unit for PVD coating equipment according to claim 1, characterized in that: The buckles (22) are arranged in groups of four, and are arranged in a circular array at equal intervals.

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