An integrated drive structure for a vacuum coating apparatus

Abstract

The utility model discloses an integrated drive structure for vacuum coating equipment relates to vacuum coating equipment technical field. The utility model discloses a fixed shaft shell, the inner wall fixed connection of fixed shaft shell has magnetic liquid sealing mechanism, the inner chamber rotation of fixed shaft shell is connected with the pivot, and the bottom extension of pivot reaches the outside of fixed shaft shell and is fixedly connected with transmission gear. The utility model discloses a magnetic liquid sealing mechanism and the cooperation of fixed shaft shell, in the rotation process of pivot utilizes the magnetic field and forms the non - contact type annular sealing interface, effectively insulates the inside and outside environment in vacuum chamber, avoids the wear gap problem that traditional mechanical seal led to because of physical friction, has improved the vacuum environment stability significantly, fills the sealing gap through the flowability of magnetic liquid, still can maintain sealing performance under the long -term high -speed operation condition, solves the influence that vacuum degree fluctuation had to the uniformity of coating, reduces the frequency of replacement and maintenance cost of sealing part simultaneously.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating equipment technology, and in particular relates to an integrated drive structure applied to vacuum coating equipment. Background Technology

[0002] The drive structure of a vacuum coating equipment is a mechanical drive component used to precisely control the deposition process of coating materials in a vacuum environment. Its core is to achieve stable movement and energy input of the target material or evaporation source through the coordinated work of the motor, transmission device and control system. Especially in the PVD coating process, the drive structure needs to ensure the precise guidance of the particle beam and the control of the deposition rate during the physical vapor deposition process in order to form a uniform and dense thin film layer.

[0003] During the operation of vacuum coating equipment, the drive mechanism needs to achieve stable transmission of rotating parts in the vacuum chamber. Existing drive structures generally adopt mechanical seal or contact seal design. Under long-term high-speed operation, the sealing interface is prone to small gaps due to frictional wear, which leads to the gradual deterioration of the sealing performance of the vacuum environment, resulting in vacuum fluctuations, affecting the uniformity of the coating process and the bonding strength of the film layer. At the same time, frequent replacement and maintenance of seals directly affect the operating efficiency of the equipment and increase the operating cost, which is not conducive to use.

[0004] To address these issues, we provide an integrated drive structure for use in vacuum coating equipment. Utility Model Content

[0005] The purpose of this invention is to provide an integrated drive structure for vacuum coating equipment. By combining a magnetic fluid sealing mechanism and a conductive carbon brush component, it solves the problem that existing vacuum coating equipment drive structures, which use mechanical seals and contact seals, are prone to developing gaps due to wear after long-term operation, affecting the sealing performance of the vacuum environment and causing fluctuations in vacuum level and coating uniformity.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0007] This utility model relates to an integrated drive structure for vacuum coating equipment, comprising a fixed-axis housing, a magnetic fluid sealing mechanism fixedly connected to the inner wall of the fixed-axis housing, a rotating shaft rotatably connected to the inner cavity of the fixed-axis housing, the bottom of the rotating shaft extending to the outside of the fixed-axis housing and fixedly connected to a transmission gear, a servo motor fixedly connected to the left side of the bottom of the fixed-axis housing, a drive gear fixedly connected to the bottom of the output end of the servo motor, a carbon brush fixing plate fixedly connected to the bottom of the fixed-axis housing, an insulating support sleeve fixedly connected to the right side of the top of the carbon brush fixing plate, a conductive carbon brush component sleeved on the surface of the insulating support sleeve, a bias terminal fixedly connected to the right side of the conductive carbon brush component, and a rotation status monitoring mechanism fixedly connected to the left side of the top of the carbon brush fixing plate.

[0008] The present invention is further configured such that the rotation state monitoring mechanism includes a position detection sensor, the bottom of which is fixedly connected to the carbon brush fixing plate, the detection end of which extends through to the bottom of the carbon brush fixing plate, and a position detection sensing plate is fixedly connected to the left side of the top of the transmission gear. The position detection sensor is fixed to the bottom of the carbon brush fixing plate and can cooperate with the position detection sensing plate mounted on the transmission gear. When the transmission gear rotates, the position detection sensing plate is controlled to pass through the bottom of the position detection sensor, and the rotation speed is detected by the position detection sensor.

[0009] The present invention is further configured such that both sides of the bottom of the position detection sensor are fixedly connected to the carbon brush fixing plate by screws, and the position detection sensing plate is mounted on the top of the transmission gear by bolt fixing seat. The screw-mounted position detection sensor facilitates quick disassembly and maintenance by the staff, and the bolt-fixed position detection sensing plate can also be installed and disassembled quickly.

[0010] The present invention is further configured such that the transmission gear and the rotating shaft are fixedly connected by an insulating connecting plate, and the top of the carbon brush fixing plate is fixedly connected to the fixed shaft housing by bolts. The insulating connecting plate is used to insulate the transmission gear and prevent it from working with electricity, and the bolts can stably install the carbon brush fixing plate at the bottom of the fixed shaft housing.

[0011] The present invention is further configured such that the insulating support sleeve includes an insulating fixing sleeve, the surface of the insulating fixing sleeve is in close contact with the conductive carbon brush component, and an insulating ring is provided on the surface of the insulating fixing sleeve and at the bottom of the conductive carbon brush component. The insulating fixing sleeve can position and install the conductive carbon brush component and the insulating ring, thereby improving the insulation effect on the conductive carbon brush component and preventing multiple conductive carbon brush components from contacting each other and conducting electricity.

[0012] The present invention is further configured such that the inner cavity of the insulating fixing sleeve is provided with a screw, the bottom of the screw is threadedly connected to the carbon brush fixing plate, and the screw is used to stably install and fix the insulating fixing sleeve and the conductive carbon brush component, so that they are fixed on the top of the carbon brush fixing plate.

[0013] The present invention is further configured such that the conductive carbon brush component is Y-shaped, and the bottom of the servo motor is fixedly connected to the fixed shaft housing through a connecting bracket. The Y-shaped conductive carbon brush component can fit against both sides of the rotating shaft surface, and the connecting bracket can increase the stability of the servo motor installation.

[0014] The present invention has the following beneficial effects.

[0015] 1. This utility model utilizes the cooperation between the magnetic fluid sealing mechanism and the fixed shaft housing to form a non-contact annular sealing interface during the rotation of the shaft. This effectively isolates the indoor and outdoor environments of the vacuum chamber, avoids the wear gap problem caused by physical friction in traditional mechanical seals, and significantly improves the stability of the vacuum environment. By filling the sealing gap with the fluidity of the magnetic fluid, the sealing performance can still be maintained under long-term high-speed operation conditions. This solves the problem of the impact of vacuum fluctuations on the uniformity of coating, while reducing the replacement frequency and maintenance cost of sealing components. It is especially suitable for the high reliability requirements of the target material transmission system in PVD coating process.

[0016] 2. This utility model achieves high voltage conduction while ensuring electrical insulation safety through the coordinated design of conductive carbon brush components and insulating support sleeves. The Y-shaped conductive carbon brush components enhance the conductivity stability with the rotating shaft through multi-point contact mode. Combined with the rotational state monitoring mechanism to detect the speed of the transmission gear in real time, it can accurately control process parameters in a vacuum environment and promptly report abnormal transmission states, effectively preventing uneven film thickness caused by speed deviation and improving the yield of coating production. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0018] Figure 1 A perspective view of an integrated drive structure used in vacuum coating equipment;

[0019] Figure 2 A bottom view of an integrated drive structure used in a vacuum coating equipment;

[0020] Figure 3 This is a partial schematic diagram of an integrated drive structure used in a vacuum coating equipment.

[0021] Figure 4This is a schematic diagram of a transmission gear, carbon brush fixing plate, insulating support sleeve, and wire carbon brush components in an integrated drive structure used in vacuum coating equipment.

[0022] In the attached diagram: 1. Fixed shaft housing; 2. Magnetic fluid sealing mechanism; 3. Rotating shaft; 4. Transmission gear; 5. Servo motor; 6. Drive gear; 7. Carbon brush fixing plate; 8. Insulating support sleeve; 9. Conductive carbon brush component; 10. Bias terminal; 11. Rotation status monitoring mechanism; 111. Position detection sensor; 112. Position detection sensing plate; 12. Insulating connecting plate; 81. Insulating fixing sleeve; 82. Insulating ring; 83. Screw; 13. Connecting frame. Detailed Implementation

[0023] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0024] Example 1

[0025] Please see Figure 1-4 This utility model is an integrated drive structure for vacuum coating equipment, including a fixed shaft housing 1, a magnetic fluid sealing mechanism 2 fixedly connected to the inner wall of the fixed shaft housing 1, a rotating shaft 3 rotatably connected to the inner cavity of the fixed shaft housing 1, the bottom of the rotating shaft 3 extending to the outside of the fixed shaft housing 1 and fixedly connected to a transmission gear 4, a servo motor 5 fixedly connected to the left side of the bottom of the fixed shaft housing 1, a drive gear 6 fixedly connected to the bottom of the output end of the servo motor 5, a carbon brush fixing plate 7 fixedly connected to the bottom of the fixed shaft housing 1, an insulating support sleeve 8 fixedly connected to the right side of the top of the carbon brush fixing plate 7, a conductive carbon brush component 9 sleeved on the surface of the insulating support sleeve 8, a bias terminal 10 fixedly connected to the right side of the conductive carbon brush component 9, and a rotation status monitoring mechanism 11 fixedly connected to the left side of the top of the carbon brush fixing plate 7.

[0026] Specifically: the fixed shaft housing 1 is used to install the magnetic fluid sealing mechanism 2 and the rotating shaft 3. The magnetic fluid sealing mechanism 2 can form an annular sealing ring inside the fixed shaft housing 1 using a magnetic field, and limit it using a magnetic field. The annular sealing ring formed by the magnetic fluid can seal the gap at the connection between the fixed shaft housing 1 and the rotating shaft 3, without the friction and wear of traditional sealing rings, with a long service life and stable operation in a vacuum environment. The rotating shaft 3 can rotate in conjunction with the transmission gear 4. The servo motor 5 is used to control the rotation of the drive gear 6 and the transmission gear 4 to realize the adjustment and control of different speeds of the rotating shaft 3. The carbon brush fixing plate 7 and the insulating support sleeve 8 are used for the installation and fixing of the conductive carbon brush component 9. The bias terminal 10 is used for high voltage connection. The rotation status monitoring mechanism 11 is used to detect the operating status of the rotating shaft 3.

[0027] Example 2

[0028] Please see Figure 1-4 Based on Embodiment 1, the rotational state monitoring mechanism 11 includes a position detection sensor 111. The bottom of the position detection sensor 111 is fixedly connected to the carbon brush fixing plate 7, and the detection end of the bottom of the position detection sensor 111 extends through to the bottom of the carbon brush fixing plate 7. A position detection sensing plate 112 is fixedly connected to the left side of the top of the transmission gear 4. Both sides of the bottom of the position detection sensor 111 are fixedly connected to the carbon brush fixing plate 7 by screws. The position detection sensing plate 112 is mounted on the top of the transmission gear 4 by bolt fixing seats. The transmission gear 4 and the rotating shaft 3 are connected by... The carbon brush fixing plate 7 is fixedly connected to the fixed shaft housing 1 by bolts through the insulating connecting plate 12. The insulating support sleeve 8 includes an insulating fixing sleeve 81. The surface of the insulating fixing sleeve 81 is in close contact with the conductive carbon brush component 9. An insulating ring 82 is provided on the surface of the insulating fixing sleeve 81 and at the bottom of the conductive carbon brush component 9. A screw 83 is provided in the inner cavity of the insulating fixing sleeve 81. The bottom of the screw 83 is threadedly connected to the carbon brush fixing plate 7. The conductive carbon brush component 9 is Y-shaped. The bottom of the servo motor 5 is fixedly connected to the fixed shaft housing 1 by the connecting bracket 13.

[0029] Specifically: The position detection sensor 111 is fixed to the bottom of the carbon brush fixing plate 7 and can cooperate with the position detection sensor 112 mounted on the transmission gear 4. When the transmission gear 4 rotates, the position detection sensor 112 passes under the position detection sensor 111, and the position detection sensor 111 detects its rotation speed. The screw-mounted position detection sensor 111 facilitates quick disassembly and maintenance by operators. The position detection sensor 112, mounted using a bolt fixing seat, can also be quickly installed and removed. The insulating connecting plate 12 is used to insulate the transmission gear 4 to prevent it from carrying... In electrical operation, bolts can stably install the carbon brush fixing plate 7 at the bottom of the fixed shaft housing 1. The insulating fixing sleeve 81 can position and install the conductive carbon brush component 9 and the insulating ring 82. The insulating fixing sleeve 81 and the insulating ring 82 improve the insulation effect of the conductive carbon brush component 9 and prevent multiple conductive carbon brush components 9 from contacting each other and conducting electricity. The screw 83 is used to stably install and fix the insulating fixing sleeve 81 and the conductive carbon brush component 9, fixing them to the top of the carbon brush fixing plate 7. The Y-shaped conductive carbon brush component 9 can fit against both sides of the surface of the rotating shaft 3. The connecting bracket 13 can increase the stability of the servo motor 5 installation and fixation.

[0030] The working principle of this utility model is as follows: After the servo motor 5 is fixed to the fixed shaft housing 1 through the connecting frame 13, the servo motor 5 drives the active gear 6 to mesh with the transmission gear 4. The transmission gear 4 drives the rotating shaft 3 to rotate in the inner cavity of the fixed shaft housing 1. The conductive carbon brush component 9 is in contact with the surface of the rotating shaft 3 at multiple points through the Y-shaped contact end, and the high voltage input by the bias terminal 10 is stably transmitted to the rotating shaft 3. The magnetic fluid sealing mechanism 2 forms a magnetically constrained liquid sealing layer at the gap between the fixed shaft housing 1 and the rotating shaft 3, avoiding physical contact friction between the fixed shaft housing 1 and the rotating shaft 3, and maintaining the sealing integrity of the vacuum chamber. The insulating support sleeve 8 is insulated from the insulating ring 82 through the insulating fixing sleeve 81, preventing short-circuit discharge between the conductive carbon brush components 9. The rotation state monitoring mechanism 11 captures the rotation signal of the position detection sensor 112 on the transmission gear 4 through the position detection sensor 111, and feeds back the rotation speed data of the rotating shaft 3 to the control system in real time. Through the synergistic effect of non-contact sealing and precise transmission, the stability of the vacuum environment is improved, while reducing the replacement frequency and maintenance cost of sealing components.

[0031] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. An integrated drive structure for use in vacuum coating equipment, comprising a fixed-axis housing (1), characterized in that: A magnetic fluid sealing mechanism (2) is fixedly connected to the inner wall of the fixed shaft housing (1). A rotating shaft (3) is rotatably connected to the inner cavity of the fixed shaft housing (1). The bottom of the rotating shaft (3) extends to the outside of the fixed shaft housing (1) and is fixedly connected to a transmission gear (4). A servo motor (5) is fixedly connected to the left side of the bottom of the fixed shaft housing (1). A drive gear (6) is fixedly connected to the bottom of the output end of the servo motor (5). A carbon brush fixing plate (7) is fixedly connected to the bottom of the fixed-axis housing (1). An insulating support sleeve (8) is fixedly connected to the right side of the top of the carbon brush fixing plate (7). A conductive carbon brush component (9) is sleeved on the surface of the insulating support sleeve (8). A bias terminal (10) is fixedly connected to the right side of the conductive carbon brush component (9). A rotation state monitoring mechanism (11) is fixedly connected to the left side of the top of the carbon brush fixing plate (7).

2. The integrated drive structure for use in vacuum coating equipment according to claim 1, characterized in that: The rotational state monitoring mechanism (11) includes a position detection sensor (111). The bottom of the position detection sensor (111) is fixedly connected to the carbon brush fixing plate (7). The detection end of the bottom of the position detection sensor (111) extends through to the bottom of the carbon brush fixing plate (7). A position detection sensor plate (112) is fixedly connected to the left side of the top of the transmission gear (4).

3. The integrated drive structure for use in vacuum coating equipment according to claim 2, characterized in that: The bottom sides of the position detection sensor (111) are fixedly connected to the carbon brush fixing plate (7) by screws, and the position detection sensing plate (112) is installed on the top of the transmission gear (4) by bolt fixing seat.

4. The integrated drive structure for use in vacuum coating equipment according to claim 1, characterized in that: The transmission gear (4) and the rotating shaft (3) are fixedly connected by an insulating connecting plate (12), and the top of the carbon brush fixing plate (7) is fixedly connected to the fixed shaft housing (1) by bolts.

5. The integrated drive structure for use in vacuum coating equipment according to claim 1, characterized in that: The insulating support sleeve (8) includes an insulating fixing sleeve (81), the surface of which is in close contact with the conductive carbon brush component (9), and an insulating ring (82) is provided on the surface of the insulating fixing sleeve (81) and at the bottom of the conductive carbon brush component (9).

6. The integrated drive structure for use in vacuum coating equipment according to claim 5, characterized in that: The inner cavity of the insulating fixing sleeve (81) is provided with a screw (83), and the bottom of the screw (83) is threadedly connected to the carbon brush fixing plate (7).

7. The integrated drive structure for use in vacuum coating equipment according to claim 1, characterized in that: The conductive carbon brush component (9) is Y-shaped, and the bottom of the servo motor (5) is fixedly connected to the fixed shaft housing (1) through a connecting bracket (13).

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