A feeding and discharging auxiliary mechanism for a coating device

CN224798970UActive Publication Date: 2026-09-25SUZHOU DENAI NANOTECHNOLOGY CO LTD
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Patent Information

Application Number
CN202522250510.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-24
Publication Date
2026-09-25
Estimated Expiration
2035-10-24

AI Technical Summary

Technical Problem

[0003]当前在真空镀膜过程中,工件装载在镀膜治具上后,通过行吊的方式,将镀膜治具装入镀膜装置中,实现对工件进行镀膜;这种行吊装载的方式,不仅存在装载效率低,而且在行吊过程中工件易发生晃动而导致工件碰撞,造成表面刮擦甚至损坏,进而影响镀膜质量

Benefits of technology

[0016]本实用新型的有益效果如下:本实用新型通过在剪刀式升降推车上设置导轨模组和抬升模组,实现了对镀膜治具高效上下操作的同时,实现了对镀膜治具的平稳输送,有效的避免了因输送过程中镀膜治具上工件晃动、碰撞的问题,进而提升了装载效率和稳定性。

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Abstract

The utility model discloses a kind of feeding and discharging auxiliary mechanisms for coating device, including a trolley, a pair of first guide rail module and a second guide rail module are provided on the trolley;A bearing plate for placing coating fixture is provided on a pair of the first guide rail module, and the bearing plate is connected with the second guide rail module, the bearing plate can move back and forth along a pair of the first guide rail module by the drive of the second guide rail module;Each group of the first guide rail module is also provided with a lifting module, the bearing plate can be driven to float up and down on a pair of the first guide rail module by the lifting module.The utility model realizes the efficient up and down operation of coating fixture, realizes the stable conveying of coating fixture, effectively avoids the problem that workpiece on coating fixture shakes, collides in conveying process, and then improves loading efficiency and stability.
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Description

Technical Field

[0001] This utility model belongs to the field of coating technology, and more specifically, it relates to a loading and unloading auxiliary mechanism for a coating device. Background Technology

[0002] Vacuum deposition is a technique for producing thin film materials. In a vacuum deposition chamber, atoms of the material are separated from a heating source and deposited onto the surface of the object to be coated. Vacuum deposition is an important aspect of vacuum applications. It is based on vacuum technology, utilizing physical or chemical methods, and incorporating a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, and magnetron sputtering to provide a new process for thin film preparation for scientific research and practical production. Simply put, vacuum deposition is the method of evaporating or sputtering a metal, alloy, or compound (called the substrate) in a vacuum, causing it to solidify and deposit on the object to be coated (called the substrate).

[0003] Currently, in the vacuum coating process, after the workpiece is loaded onto the coating fixture, the coating fixture is loaded into the coating device by a gantry crane to achieve coating of the workpiece. This gantry crane loading method not only has low loading efficiency, but also the workpiece is prone to shaking during the gantry crane process, which can lead to workpiece collision, causing surface scratches or even damage, thus affecting the coating quality. Utility Model Content

[0004] In order to solve the problems existing in the prior art, this utility model aims to provide a loading and unloading auxiliary mechanism for a coating device, so as to improve the workpiece loading efficiency and enhance the stability during the loading process.

[0005] To achieve the above-mentioned technical objectives and effects, this utility model is implemented through the following technical solution:

[0006] A loading and unloading auxiliary mechanism for a coating apparatus includes a trolley with a pair of first guide rail modules and a second guide rail module. A support plate for placing a coating fixture is provided on each pair of first guide rail modules, and the support plate is connected to the second guide rail module. The support plate can move back and forth along the pair of first guide rail modules via the drive of the second guide rail module. Each pair of first guide rail modules is also provided with a lifting module, which can drive the support plate to float up and down on the pair of first guide rail modules.

[0007] Furthermore, the trolley is a scissor-type lifting trolley.

[0008] Furthermore, each group of the first guide rail modules includes a pair of parallel rails, on which a slide assembly is provided. The slide assembly can slide back and forth on the rails, and a fixed plate is provided on the slide assembly.

[0009] Furthermore, the slide assembly includes a slide plate, the lower end of which is provided with rollers and connecting blocks connected to the track.

[0010] Furthermore, the second guide rail module includes a lead screw slide module A, which is connected to the support plate via a connecting plate.

[0011] Furthermore, the lower end face of the support plate is provided with a limiting block and a limiting rod, the limiting block limiting the downward movement of the support plate, and the limiting rod limiting the upward movement of the support plate; and a connecting hole and a receiving groove for placing a coating fixture are provided on the support plate.

[0012] Furthermore, the lifting module includes a lead screw slide module B, on which two sets of slider assemblies are provided.

[0013] Furthermore, the screws on both sides of the lead screw of the lead screw slide module B rotate in opposite directions, and the two sets of slider assemblies are respectively located on both sides of the lead screw.

[0014] Furthermore, the slider assembly includes a driving slider and a transfer slider; the upper end face of the driving slider is inclined, and a T-slot is formed on the inclined surface; the transfer slider is connected to the upper end face of the driving slider, and a T-block adapted to the T-slot is provided on the transfer slider.

[0015] Furthermore, the support plate is also provided with a pressing module that can limit the position of the coating fixture placed therein.

[0016] The beneficial effects of this utility model are as follows: By setting a guide rail module and a lifting module on the scissor-type lifting trolley, this utility model realizes efficient up-and-down operation of the coating fixture while achieving stable transportation of the coating fixture, effectively avoiding the problem of workpiece shaking and collision on the coating fixture during transportation, thereby improving loading efficiency and stability.

[0017] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it according to the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. The specific implementation methods of this utility model are given in detail in the following embodiments and their accompanying drawings. Attached Figure Description

[0018] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0019] Figure 1 This is a schematic diagram of the overall structure of the mechanism of this utility model;

[0020] Figure 2 This is a schematic diagram of the connection of the bearing plate of this utility model;

[0021] Figure 3 This is a schematic diagram of the first guide rail module structure of this utility model;

[0022] Figure 4 This utility model Figure 3 Enlarged view at point D;

[0023] Figure 5 This is a schematic diagram of the lifting module structure of this utility model;

[0024] Figure 6 This is an exploded view of the slider assembly of this utility model;

[0025] Figure 7 This is a schematic diagram of the installation of the lifting module of this utility model;

[0026] Figure 8 This is a schematic diagram of the coating fixture of this utility model to be conveyed;

[0027] Figure 9 This is a schematic diagram of the coating fixture being fed into the coating device according to this utility model.

[0028] The following are the labeling instructions in the diagram: 1. Trolley; 2. First guide rail module; 3. Second guide rail module; 4. Support plate; 5. Lifting module; 6. Pressing module; 21. Rail; 22. Slide assembly; 23. Fixing plate; 221. Slide plate; 222. Roller; 223. Connecting block; 31. Screw slide module A; 32. Connecting plate; 41. Limiting block; 42. Limiting rod; 43. Connecting hole; 44. Receiving groove; 51. Screw slide module B; 52. Slider assembly; 521. Drive slider; 522. Transfer slider; 5211. T-slot; 5221. T-block; 61. Electric cylinder; 62. Pressure block. Detailed Implementation

[0029] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0030] It should be noted that all directional indicators (such as up, down, left, right, front, back, upper end, lower end, top, bottom, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0031] See Figure 1-2As shown, a loading and unloading auxiliary mechanism for a coating apparatus includes a trolley 1, which is a scissor-type lifting trolley. The trolley 1 is equipped with a pair of first guide rail modules 2 and a second guide rail module 3. A support plate 4 for placing a coating fixture is provided on the pair of first guide rail modules 2, and the support plate 4 is connected to the second guide rail module 3. The support plate 4 can move back and forth along the pair of first guide rail modules 2 by being driven by the second guide rail module 3, thereby realizing the loading and unloading operation of the coating fixture. Each pair of first guide rail modules 2 is also equipped with a lifting module 5, which can drive the support plate 4 to float up and down on the pair of first guide rail modules 2.

[0032] Further, see Figure 3-4 As shown, in this embodiment, each group of first guide rail modules 2 includes a pair of parallel rails 21. The rails 21 are mounted on the trolley 1. A slide assembly 22 is mounted on the rails 21. A fixing plate 23 is mounted on the slide assembly 22. In this embodiment, the slide assembly 22 includes a slide plate 221. The lower end of the slide plate 221 is provided with a roller 222 and a connecting block 223 connected to the rails 21. The slide assembly 22 slides back and forth on the rails 21 through the cooperation of the roller 222 and the connecting block 223.

[0033] And see Figure 2 As shown, in this embodiment, the second guide rail module 3 includes a lead screw slide module A31, which is mounted on the trolley 1. A connecting plate 32 is mounted on the lead screw slide module A31, and the connecting plate 32 can move back and forth on the lead screw slide module A31 by driving it. In this embodiment, the connecting plate 32 is L-shaped, and its horizontal connecting plate is connected to the lead screw slide module A31.

[0034] See Figure 2As shown, in this embodiment, the lower end face of the support plate 4 is provided with a limiting block 41 and a limiting rod 42, and a connecting hole 43 and a receiving groove 44 for placing a coating fixture are provided on the support plate 4. During connection, the support plate 4 is connected to the fixed plate 23 through the limiting rod 42. At this time, the limiting block 41 limits the downward movement of the support plate 4, and the limiting rod 42 limits the upward movement of the support plate 4. At the same time, the limiting rod 42 guides the upward movement of the support plate 4, preventing the support plate 4 from deviating during the upward movement. The vertical connecting plate of the connecting plate 32 passes through the connecting hole 43. It should be noted that the height of the vertical connecting plate of the connecting plate 32 passing through the connecting hole 43 must meet the requirement that when the support plate 4 moves upward to the maximum height, the vertical connecting plate of the connecting plate 32 is not completely detached from the connecting hole 43.

[0035] Further, see Figure 5-7 As shown, in this embodiment, the lifting module 5 includes a lead screw slide module B51, which is disposed on the fixed plate 23. The screws on both sides of the lead screw of the lead screw slide module B51 rotate in opposite directions, and a slider assembly 52 is respectively disposed on each side. The slider assembly 52 includes a driving slider 521 and a transmission slider 522. The upper end surface of the driving slider 521 is inclined, and a T-slot 5211 is formed on the inclined surface. The transmission slider 522 is connected to the driving slider 521. On the upper surface of 21, a T-shaped block 5221 adapted to the T-slot 5211 is provided on the transfer slider 522; during installation, the drive slider 521 is connected to the lead screw slide module B51, and the transfer slider 522 is connected to the support plate 4; during loading and unloading, the drive sliders 521 of the two sets of slider assemblies 52 move closer or further away under the drive of the lead screw slide module B51, thereby driving the transfer slider 522 to move up or down, and thus driving the support plate 4 to move up or down.

[0036] Further, see Figure 2 As shown, in this embodiment, a pressing module 6 is also provided on the support plate 4. The pressing module 6 is used to limit the position of the coating fixture placed in the support plate 4. In this embodiment, the pressing module 6 includes an electric cylinder 61 and a pressing block 62 disposed on the electric cylinder 61. In use, the pressing block 62 is driven to move up and down by the electric cylinder 61 to press down or apply pressure to the bottom plate of the coating fixture. It should be noted that when the electric cylinder 61 drives the pressing block 62 to move to the highest position, the bottom plate of the coating fixture should not contact the bottom surface of the pressing block 62 when the support plate 4 moves upward to the maximum height.

[0037] The working principle of this utility model is as follows:

[0038] See Figure 8-9 As shown (in the figure, A represents the coating device; B represents the coating fixture; B represents this mechanism), during loading, the coating fixture is first placed in the receiving groove 44 in the support plate 4, and then the electric cylinder 61 drives the pressure block 62 to move downward, pressing down on the bottom plate of the coating fixture; then the workpiece to be coated is loaded onto the coating fixture; then the trolley 1 is pushed to the loading position in front of the coating device, and the trolley 1 is raised to the set height and pushed towards the coating device to align the track 21 with the track in the coating device; then the electric cylinder 61 drives... After the pressure block 62 moves upward and decompresses the base plate of the coating fixture, the lifting module 5 drives the support plate 4 to move upward. After it moves into place, the second guide rail module 3 drives the support plate 4 to move along the track 21 and the track in the coating device into the coating device. After it is in place, the lifting module 5 drives the support plate 4 to move downward and reset. At this time, the coating fixture is separated from the support plate 4 and the coating fixture is loaded into the coating device. Then the second guide rail module 3 pulls the support plate 4 to move back to the trolley 1 along the track in the coating device and the track 21, completing the loading operation.

[0039] During unloading, the carrier plate 4 is driven to the set position in the coating device and then lifted to separate the coating fixture from the coating device. The pressing module 6 presses down on the bottom plate of the coating fixture, and then the second guide rail module 3 pulls the carrier plate 4 to move onto the trolley 1 to complete the unloading. Finally, it should be noted that in order to ensure safety during the transfer process, the trolley 1 must remain in a retracted state during the transfer of the coating fixture.

[0040] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A loading and unloading auxiliary mechanism for a coating apparatus, comprising a trolley (1), characterized in that: The trolley (1) is provided with a pair of first guide rail modules (2) and a second guide rail module (3); a support plate (4) for placing a coating fixture is provided on the pair of first guide rail modules (2), and the support plate (4) is connected to the second guide rail module (3). The support plate (4) can move back and forth along the pair of first guide rail modules (2) by the drive of the second guide rail module (3); each pair of first guide rail modules (2) is also provided with a lifting module (5), and the support plate (4) can be driven to float up and down on the pair of first guide rail modules (2) by the lifting module (5).

2. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: The trolley (1) is a scissor-type lifting trolley.

3. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: Each first guide rail module (2) includes a pair of parallel rails (21), on which a slide assembly (22) is provided. The slide assembly (22) can slide back and forth on the rail (21), and a fixed plate (23) is provided on the slide assembly (22).

4. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 3, characterized in that: The slide assembly (22) includes a slide plate (221), and the lower end of the slide plate (221) is provided with a roller (222) and a connecting block (223) connected to the track (21).

5. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: The second guide rail module (3) includes a lead screw slide module A (31), which is connected to the bearing plate (4) through a connecting plate (32).

6. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: The lower end face of the support plate (4) is provided with a limiting block (41) and a limiting rod (42). The limiting block (41) limits the downward movement of the support plate (4) and the limiting rod (42) limits the upward movement of the support plate (4). A connecting hole (43) and a receiving groove (44) for placing a coating fixture are provided on the support plate (4).

7. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: The lifting module (5) includes a lead screw slide module B (51), on which two sets of slider assemblies (52) are provided.

8. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 7, characterized in that: The screws on both sides of the lead screw of the lead screw slide module B (51) rotate in opposite directions, while the two sets of slider assemblies (52) are located on both sides of the lead screw.

9. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 7 or 8, characterized in that: The slider assembly (52) includes a driving slider (521) and a transfer slider (522); the upper end face of the driving slider (521) is inclined, and a T-slot (5211) is formed on the inclined surface; the transfer slider (522) is connected to the upper end face of the driving slider (521), and a T-block (5221) adapted to the T-slot (5211) is provided on the transfer slider (522).

10. The loading and unloading auxiliary mechanism for the coating apparatus according to claim 1, characterized in that: The support plate (4) is also provided with a pressing module (6) that can limit the position of the coating fixture placed therein.