Spraying device and coating apparatus

Abstract

The application provides a spraying device and a coating equipment, and relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of low coating efficiency of a silicon wafer with two sections. The spraying device comprises: an air inlet assembly configured to receive special gas; and at least two spraying plates arranged in sequence and at intervals along a second direction, wherein the second direction intersects the first direction, the spraying plates are vertically arranged and in communication with the air inlet assembly, and opposite surfaces of the at least two spraying plates are provided with a plurality of air outlets arranged in sequence along the first direction. The spraying plates can receive the special gas delivered by the air inlet assembly and spray the special gas out of the air outlets, so that at least one coating surface of a product can be coated with at least one passivation film when a carrier moves along the first direction between the at least two spraying plates. Since the opposite surfaces of the at least two spraying plates can simultaneously coat two coating surfaces of the product, the production capacity is greatly improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a spraying device and a coating equipment. Background Technology

[0002] In the production process of tunnel oxide passivated contact solar cells (TOPcon solar cells) in the photovoltaic industry, silicon wafers are usually cut. After the silicon wafer is cut, the exposed cross-section will reduce the photovoltaic conversion efficiency of the silicon wafer. Therefore, after the silicon wafer is cut, a passivation layer needs to be deposited on the exposed cross-section to repair the efficiency loss caused by the cutting.

[0003] Currently, multi-wafer processing (the process of cutting a large silicon wafer into multiple smaller silicon wafers) has gradually become the mainstream process for silicon wafer manufacturing. Silicon wafers cut in this way have two cross-sections. If passivation films are deposited on the two cross-sections of the silicon wafer separately, it will take a long time and the production efficiency will be low. Therefore, how to efficiently deposit passivation films on all cross-sections of multi-wafer silicon wafers has become an urgent problem to be solved. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a spraying device and a coating equipment.

[0005] In a first aspect, one embodiment of this application provides a spraying device applied to a coating equipment. The coating equipment includes a transport device configured to drive a carrier to move along a first direction. The carrier is configured to carry a product and expose at least one surface of the product to be coated. The spraying device includes: an air inlet assembly configured to receive a special gas; at least two spray plates arranged sequentially at intervals along a second direction, the second direction intersecting the first direction, the spray plates being vertically arranged and communicating with the air inlet assembly; the opposing surfaces of the at least two spray plates are provided with a plurality of air outlets arranged sequentially along the first direction; the spray plates are capable of receiving the special gas delivered by the air inlet assembly and spraying the special gas from the plurality of air outlets, so that when the carrier moves along the first direction between the at least two spray plates, at least one passivation film can be deposited on at least one surface of the product to be coated.

[0006] In some embodiments, the air intake assembly is configured to receive multiple special gases, and the transport device is configured to drive the carrier to reciprocate along a first direction. The multiple special gases include a first special gas and a second special gas, which can form a passivation film on the surface to be coated. The air outlet includes: at least one first air outlet, the number of which is N, and the first air outlet is configured to eject the first special gas, where N is a positive integer; and at least one second air outlet, the number of which is N+1, the second air outlet and the first air outlet are alternately arranged along the first direction, and the second air outlet is configured to eject the second special gas.

[0007] In some embodiments, the multiple special gases further include an isolation gas for isolating adjacent first special gases and second special gases; wherein the outlet further includes at least one third outlet, the third outlet being disposed between adjacent first outlets and second outlets, and the third outlet being configured to eject the isolation gas.

[0008] In some embodiments, the Mth spray plate and the (M+1)th spray plate in the second direction form a spray plate combination, where M is an odd number. The opposing surfaces of the two spray plates in each spray plate combination are provided with air outlets, and the air outlets of the spray plates in each spray plate combination are configured to spray special gas onto the coating surface of a product carried by a carrier.

[0009] In some embodiments, the air intake assembly includes: a plurality of air intake connectors configured to introduce a plurality of special gases; and a flow equalization assembly connected to the air intake connectors and the spray plate, configured to receive the plurality of special gases delivered by the air intake connectors, equalize the flow of each special gas, and enable the equalized plurality of special gases to enter the spray plate.

[0010] In some embodiments, the spray plate has multiple spray channels that communicate with air outlets; wherein, the flow equalization component includes: an air inlet plate, horizontally arranged, having multiple air inlet channels that communicate with an air inlet connector, configured to receive various special gases delivered by the air inlet connector; a flow equalization plate, horizontally arranged below the air inlet plate, having multiple flow equalization channels that communicate with the air inlet channels, configured to receive various special gases from the air inlet channels; and at least two air distribution plates, vertically arranged below the flow equalization plate, having air distribution channels that communicate with the flow equalization channels and the spray channels, configured to receive various special gases from the flow equalization channels and enable the various special gases to enter the spray channels.

[0011] In some embodiments, the Mth spray plate and the (M+1)th spray plate in the second direction form a spray plate combination, where M is an odd number. Air outlets are provided on the opposite faces of the two spray plates in each spray plate combination. The air outlets of the spray plates in each spray plate combination are configured to spray various special gases onto the coating surface of a product carried by a carrier. The spray plate along the second direction includes a first spray plate, a last spray plate, and at least one intermediate spray plate located between the first and last spray plates. The air distribution plate includes: two first air distribution plates, one of which has an air distribution channel connected to the spray channel of the first spray plate, and the other of which has an air distribution channel connected to the spray channel of the last spray plate; and at least one second air distribution plate, whose air distribution channel is connected to the spray channels of two adjacent intermediate spray plates.

[0012] In some embodiments, the coating apparatus further includes a cavity, an air inlet plate and a flow equalization plate disposed outside the cavity; wherein the flow equalization assembly further includes a seal disposed between the air inlet plate and the flow equalization plate, configured to seal the gap between the air inlet channel and the flow equalization channel.

[0013] Secondly, one embodiment of this application provides a coating apparatus, comprising: a cavity; a spraying device according to any of the first aspects above, at least partially disposed within the cavity, configured to spray a variety of special gases onto the surface of the product to be coated; and a transport device, at least partially disposed within the cavity, configured to drive a carrier to move along a first direction between the opposing surfaces of at least two spray plates of the spraying device, so as to coat at least one passivation film onto at least one surface of the product to be coated.

[0014] In some embodiments, the product has a first surface and a second surface disposed opposite to each other, and at least one side connecting the first surface and the second surface; wherein the two oppositely disposed sides of the product are two surfaces to be coated, and a carrier is configured to carry the product and expose the two surfaces to be coated of the product such that one surface to be coated faces the air outlet of a spray plate, and the other surface to be coated faces the air outlet of another spray plate; or, the first surface or the second surface of the product is the surface to be coated, and the carrier is configured to carry two products arranged along a second direction and expose one surface to be coated of each of the two products such that one surface to be coated faces the air outlet of a spray plate, and the other surface to be coated faces the air outlet of another spray plate.

[0015] The spraying device and coating equipment proposed in this application embodiment can simultaneously coat two surfaces of a product with coating on the opposite surfaces of at least two spray plates, instead of coating the two surfaces of the product separately in sequence. This reduces the number of clamping operations, significantly increases production capacity, and ensures the consistency of coating effect on the two surfaces of the product. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of the structure of a spray device provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a schematic diagram of the structure of a spray plate provided in an exemplary embodiment of this application.

[0019] Figure 3 The image shown is a front view of a spray device provided in an exemplary embodiment of this application.

[0020] Figure 4 The diagram shown is a structural schematic of a product provided in an exemplary embodiment of this application.

[0021] Figure 5 The diagram shown is a structural schematic of a coating apparatus provided in an exemplary embodiment of this application.

[0022] Figure label: 100. Spraying device; 110. Air inlet assembly; 111. Air inlet connector; 1111. First connector; 1112. Second connector; 1113. Third connector; 112. Flow equalization assembly; 1121. Air inlet plate; 1122. Flow equalization plate; 1123. Air distribution plate; 11231. First air distribution plate; 11232. Second air distribution plate; 1124. Seal; 120. Spray plate; 121. Air outlet; 1211. First air outlet; 1212. Second air outlet; 1213. Third air outlet; 130. Spray plate assembly; 200. Coating equipment; 210. Transport device; 220. Carrier; 230. Air pump; 240. Cavity; 300. Product; 310. First surface; 320. Second surface; 330. Side. Detailed Implementation

[0023] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0024] Atomic layer deposition (ALD) equipment is effective at repairing cross-sections of silicon wafers. In related technologies, coatings are typically applied to both cross-sections of the silicon wafer simultaneously using the following methods.

[0025] The first method uses a time-based ALD (Alternating Current Deposition) device and a wafer holder that exposes both sides of the wafer to simultaneously deposit coatings on both sides. However, because the time-based ALD device requires sequentially injecting different specialty gases into the process chamber, the process is time-consuming and has low throughput.

[0026] The second method employs a rotary spatial ALD (Alternating Current Deposition) device, using a cassette that exposes both cross-sections of the silicon wafer to simultaneously deposit coatings on both surfaces. Specifically, the cassette needs to be placed horizontally (meaning the two openings of the cassette are horizontally opposite each other). As the rotary table moves the cassette through the spray area, the special gas diffuses to the openings of the cassette and contacts the cross-sections of the silicon wafer, thus depositing coatings on those surfaces. However, the rotation of the cassette by the rotary table causes airflow disturbances, which can lead to incomplete deposition and uneven coating thickness, affecting the passivation effect.

[0027] In view of this, this application proposes a spraying device and a coating equipment, which have the following advantages. First, the opposing surfaces of at least two spray plates can simultaneously coat two surfaces of the product to be coated, without needing to coat the two surfaces separately, reducing the number of clamping operations, significantly increasing production capacity, and ensuring the consistency of the coating effect on the two surfaces of the product. Second, during the process, by moving the carrier between at least two spray plates along a first direction to the spraying area of ​​each air outlet for coating, the passivation film on the surface of the product to be coated can be deposited quickly, which can significantly increase production capacity compared to time-based ALD equipment. Third, the transport device drives the carrier to move along the first direction, which has less impact on airflow disturbance compared to the rotary table driving the material box to rotate in a rotary spatial ALD equipment, improving coating uniformity, reducing the phenomenon of missed coating and circumferential coating, thereby improving the passivation effect.

[0028] Figure 1 The diagram shown is a schematic representation of the structure of a spraying device provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic representation of the structure of a spray plate provided in an exemplary embodiment of this application. Figure 3 The image shown is a front view of a spraying device provided in an exemplary embodiment of this application. Figure 4 The diagram shown is a structural schematic of a product provided in an exemplary embodiment of this application. Figure 3Arrows extending to the left or right on each spray plate 120 indicate the flow direction of the special gas sprayed from the air outlet 121 of each spray plate 120, and arrows extending downward indicate the flow direction of the special gas drawn by the air pump 230.

[0029] like Figures 1-4 As shown, this application embodiment provides a spraying device 100 applied to a coating equipment 200. The coating equipment 200 includes a transport device 210, which is configured to drive a carrier 220 to move along a first direction (as shown by the X direction in the figure). The carrier 220 is configured to carry a product 300 and expose at least one surface of the product 300 to be coated. The spraying device 100 includes an air inlet assembly 110 and at least two spray plates 120. The air inlet assembly 110 is configured to receive a special gas. At least two spray plates 120 are arranged sequentially at intervals along a second direction (Y direction in the figure). The second direction intersects the first direction. The spray plates 120 are arranged vertically and are connected to the air intake assembly 110. The opposite surfaces of the at least two spray plates 120 are provided with a plurality of air outlets 121 arranged sequentially along the first direction. The spray plates 120 can receive the special gas delivered by the air intake assembly 110 and spray the special gas out from the plurality of air outlets 121 so that when the carrier 220 moves between the at least two spray plates 120 along the first direction, at least one passivation film can be deposited on at least one surface of the product 300 to be coated.

[0030] The opposing surfaces of the two spray plates 120 refer to the surfaces of the two spray plates 120 that face each other in the second direction, such as... Figure 3 As shown, from left to right, the right side of the first spray plate 120 and the left side of the second spray plate 120 are opposite sides, and the right side of the third spray plate 120 and the left side of the fourth spray plate 120 are opposite sides.

[0031] For example, product 300 has a first surface 310 and a second surface 320 disposed opposite to each other, and at least one side 330 connecting the first surface 310 and the second surface 320. Figure 4 As shown, product 300 has a first surface 310 and a second surface 320 disposed opposite to each other, and four sides 330 connecting the first surface 310 and the second surface 320.

[0032] For example, product 300 is a silicon wafer, glass substrate, solar cell, or crystal wafer.

[0033] For example, the surface of product 300 to be coated can be a cross section of product 300, such as at least one side 330 of product 300, or the surface of product 300 to be coated can be the sunlit side and / or the backlit side of product 300, such as the first surface 310 and / or the second surface 320 of product 300.

[0034] For example, the first direction is a horizontal direction, the second direction is another horizontal direction, and the first direction is perpendicular to the second direction.

[0035] For example, the carrier 220 carries a plurality of horizontally placed products 300 stacked in a vertical direction, or the carrier 220 carries products 300 arranged vertically along a first direction and a second direction.

[0036] For example, the carrier 220 has at least one opening. For a product 300 with one surface to be coated, a carrier 220 with one opening can be used to expose the surface to be coated. For a product 300 with two surfaces to be coated, a carrier 220 with two openings can be used to expose the two surfaces to be coated respectively. Alternatively, the carrier 220 can fix the product 300 and expose the surface to be coated in other ways, such as by including a fixing plate to which the product 300 can be fixed.

[0037] For example, the vehicle 220 has two openings that are arranged opposite each other along a second direction.

[0038] For example, the special gas may include water vapor (H2O), nitrogen (N2), trimethylamine (TMA), etc.

[0039] For example, the number of spray panels 120 may be two, three, four, or five, etc.

[0040] For example, the spray plate 120 has air outlets 121 on both sides in the second direction, or the spray plate 120 has an air outlet 121 on only one side in the second direction.

[0041] For example, the shape of the air outlet 121 is a strip extending in the vertical direction.

[0042] In practical applications, if two surfaces of product 300 to be coated are to be coated simultaneously, each surface can be positioned so that it faces the air outlet 121 of a spray plate 120 that is close to that surface. If only one surface of product 300 to be coated is to be coated, the two products 300 can be arranged opposite each other along the second direction, with the surface of each product 300 facing the air outlet 121 of a spray plate 120 that is close to that surface, thus coating one surface of two products 300 simultaneously. If multiple sets of two products 300 arranged in the above manner are arranged sequentially along the first direction, one surface of multiple products 300 can be coated simultaneously.

[0043] The spraying device 100 provided in the above embodiments has the following advantages. First, the opposing surfaces of at least two spray plates 120 can simultaneously coat the two surfaces of the product 300 to be coated, without having to coat the two surfaces of the product 300 separately, reducing the number of clamping operations, significantly increasing production capacity, and ensuring the consistency of the coating effect on the two surfaces of the product 300. Second, during the process, by moving the carrier 220 between at least two spray plates 120 along the first direction to the spraying area of ​​each air outlet 121 for coating, the passivation film on the surfaces of the product 300 to be coated can be quickly coated, which can significantly increase production capacity compared to time-based ALD equipment. Third, the transport device 210 drives the carrier 220 to move along the first direction, which has less impact on airflow disturbance compared to the rotary table driving the material box to rotate in a rotary spatial ALD equipment, improving coating uniformity, reducing the phenomenon of missed coating and circumferential coating, thereby improving the passivation effect.

[0044] In some embodiments, such as Figure 2 As shown, the air intake assembly 110 is configured to receive various special gases, and the transport device 210 is configured to drive the carrier 220 to reciprocate along a first direction. The various special gases include a first special gas and a second special gas, which can form a passivation film on the surface to be coated. The air outlet 121 includes at least one first air outlet 1211 and at least one second air outlet 1212. There are N first air outlets 1211, configured to eject the first special gas, where N is a positive integer. There are N+1 second air outlets 1212, which are alternately arranged with the first air outlets 1211 along the first direction, and are configured to eject the second special gas.

[0045] The alternating arrangement of the second air outlet 1212 and the first air outlet 1211 along the first direction means that the first air outlet 1211 is set after the second air outlet 1212 along the first direction, the second air outlet 1212 is set after the first air outlet 1211, and so on, with all the first air outlets 1211 and second air outlets 1212 set.

[0046] For example, the first special gas is TMA and the second special gas is H2O. Each time the carrier 220 passes through the spray area of ​​the second air outlet 1212 and the spray area of ​​the first air outlet 1211 in sequence, a passivation film is deposited on the surface to be coated.

[0047] For example, there is one first air outlet 1211 and two second air outlets 1212. The opposite surfaces of the spray plate 120 have a second air outlet 1212, a first air outlet 1211, and a second air outlet 1212 in sequence along the first direction. The carrier 220 reciprocates once along the first direction, and two passivation films can be deposited on the surface to be coated.

[0048] For example, there are two first air outlets 1211 and three second air outlets 1212. The opposite surfaces of the spray plate 120 have a second air outlet 1212, a first air outlet 1211, a second air outlet 1212, a first air outlet 1211, and a second air outlet 1212 in sequence along the first direction. The carrier 220 can deposit four layers of passivation film on the surface to be coated by reciprocating once along the first direction.

[0049] In the above embodiments, by causing the transport device 210 to drive the carrier 220 to reciprocate along the first direction, fewer air outlets 121 can be set so that the surface to be coated can be coated with multiple layers of passivation film; by setting multiple first air outlets 1211 and multiple second air outlets 1212, the number of coating layers on the surface to be coated can be increased.

[0050] In some embodiments, such as Figure 2 As shown, the various special gases also include an isolation gas, which is used to isolate adjacent first special gases from second special gases. The outlet 121 further includes at least one third outlet 1213. The third outlet 1213 is disposed between adjacent first outlets 1211 and second outlets 1212, and is configured to eject the isolation gas.

[0051] The isolation gas does not react with the first special gas, the second special gas, or the surface to be coated. The isolation gas is also used to purge the first or second special gas on the surface of the product 300.

[0052] For example, the isolation gas is N2.

[0053] For example, the third air outlet 1213 is also disposed on the side of the first second air outlet 1212 in the first direction away from the last second air outlet 1212 in the first direction, and / or, the third air outlet 1213 is also disposed on the side of the last second air outlet 1212 in the first direction away from the first second air outlet 1212 in the first direction.

[0054] For example, one or more third air outlets 1213 may be provided between adjacent first air outlets 1211 and second air outlets 1212.

[0055] In the above embodiment, by setting a third air outlet 1213 to spray isolation gas, the residual special gas on the product 300 can be removed, preventing the residual special gas on the product 300 from reacting with the special gas sprayed from the next passing air outlet 121 to produce dust and contaminate the product 300 through a chemical vapor deposition (CVD) reaction. It can also isolate the first and second special gases sprayed from adjacent first air outlets 1211 and second air outlets 1212, so as to prevent the first and second special gases sprayed from adjacent first air outlets 1211 and second air outlets 1212 from directly undergoing a CVD reaction.

[0056] In some embodiments, such as Figure 3 As shown, the Mth spray plate 120 and the M+1th spray plate 120 in the second direction form a spray plate combination 130, where M is an odd number. Each spray plate combination 130 has an air outlet 121 on the opposite side of the two spray plates 120. The air outlet 121 of the spray plate 120 in each spray plate combination 130 is configured to spray special gas onto the surface of the product 300 to be coated, which is carried by a carrier 220.

[0057] For example, if M is 4, then the first spray plate 120 and the second spray plate 120 in the second direction form a spray plate combination 130, and the third spray plate 120 and the fourth spray plate 120 in the second direction form a spray plate combination 130.

[0058] In the above embodiments, this structure enables two spray plates 120 to form a spray plate combination 130 to coat the surface of the product 300 to be coated, which is carried by a carrier 200.

[0059] In some embodiments, such as Figure 1 and Figure 3 As shown, the air intake assembly 110 includes a plurality of air intake connectors 111 and a flow equalization assembly 112. The plurality of air intake connectors 111 are configured to introduce a variety of special gases. The flow equalization assembly 112 is connected to the air intake connectors 111 and the spray plate 120 respectively, and is configured to receive the various special gases delivered by the air intake connectors 111, equalize the flow of each special gas, and enable the equalized special gases to enter the spray plate 120.

[0060] For example, each special gas can be introduced through one or more air inlet connectors 111.

[0061] In the above embodiments, by setting the flow equalization component 112, each special gas can be fully flowed evenly, improving the uniformity of the special gas and thus improving the passivation effect.

[0062] In some embodiments, such as Figure 1 and Figure 3As shown, the spray plate 120 has multiple spray channels, which are connected to the air outlet 121. The flow equalization assembly 112 includes an air inlet plate 1121, a flow equalization plate 1122, and at least two air distribution plates 1123. The air inlet plate 1121 is horizontally positioned and has multiple air inlet channels connected to an air inlet connector 111, configured to receive various special gases supplied by the air inlet connector 111. The flow equalization plate 1122 is horizontally positioned below the air inlet plate 1121 and has multiple flow equalization channels connected to the air inlet channels, configured to receive various special gases from the air inlet channels. At least two air distribution plates 1123 are vertically positioned below the flow equalization plate 1122 and have air distribution channels connected to the flow equalization channels and the spray channels, configured to receive various special gases from the flow equalization channels and allow these special gases to enter the spray channels.

[0063] Among them, the air intake plate 1121 can perform the first flow equalization of various special gases, the flow equalization plate 1122 can perform the second flow equalization of various special gases after the first flow equalization, the air distribution plate 1123 can perform the third flow equalization of various special gases after the second flow equalization, and the spray plate 120 can also have the function of equalization, so as to perform the fourth flow equalization of various special gases after the third flow equalization.

[0064] For example, the air intake connector 111 is welded to the air intake plate 1121.

[0065] For example, such as Figure 1 As shown, the air inlet connector 111 includes a first connector 1111, a second connector 1112, and a third connector 1113. The first connector 1111 is used to introduce a first special gas, the second connector 1112 is used to introduce a second special gas, and the third connector 1113 is used to introduce an isolation gas.

[0066] In the above embodiments, by setting the air inlet plate 1121, the flow equalization plate 1122 and the air distribution plate 1123 to perform multiple flow equalization of the special gas, the uniformity of the special gas can be greatly improved, thereby improving the uniformity of the coating of product 300 and improving the passivation effect.

[0067] In some embodiments, such as Figure 3As shown, the Mth spray plate 120 and the (M+1)th spray plate 120 in the second direction form a spray plate assembly 130, where M is an odd number. Each spray plate assembly 130 has air outlets 121 on the opposite faces of the two spray plates 120. The air outlets 121 of the spray plates 120 in each assembly 130 are configured to spray various special gases onto the coating surface of the product 300 carried by a carrier 220. Along the second direction, the spray plate 120 includes a first spray plate 120, a last spray plate 120, and at least one intermediate spray plate 120 located between the first and last spray plates 120. The air distribution plate 1123 includes two first air distribution plates 11231 and at least one second air distribution plate 11232. The air distribution channel of one first air distribution plate 11231 is connected to the spray channel of the first spray plate 120, and the air distribution channel of another first air distribution plate 11231 is connected to the spray channel of the last spray plate 120. The air distribution channel of the second air distribution plate 11232 is connected to the spray channels of the two adjacent intermediate spray plates 120.

[0068] In the above embodiments, by setting the first air distribution plate 11231 and the second air distribution plate 11232, the various special gases after the second uniform flow can be uniformly flowed for the third time. Since the air distribution channel of the second air distribution plate 11232 can provide the various special gases after the third uniform flow to the spray channels of the two adjacent intermediate spray plates 120, the number of air distribution plates 1123 can be reduced, thereby saving costs.

[0069] In some embodiments, the coating apparatus 200 further includes a cavity 240, with an air inlet plate 1121 and a flow equalization plate 1122 disposed outside the cavity 240. The flow equalization assembly 112 further includes a seal 1124. The seal 1124 is disposed between the air inlet plate 1121 and the flow equalization plate 1122, and is configured to seal the gap between the air inlet channel and the flow equalization channel.

[0070] For example, the material of the seal 1124 is fluororubber. Fluororubber has the advantage of high temperature resistance, so it can adapt to high temperature process environment. Fluororubber is also relatively soft and can be deformed under the compression of the air inlet plate 1121 and the flow equalization plate 1122 to fully fit the air inlet plate 1121 and the flow equalization plate 1122, so as to avoid air leakage at the connection between the air inlet channel and the flow equalization channel.

[0071] Since the air intake plate 1121 and the flow equalization plate 1122 are located outside the cavity 240, it is necessary to ensure that the air intake channel and the flow equalization channel are sealed to avoid the danger caused by the leakage of special gas. In the above embodiment, the air intake channel and the flow equalization channel can be sealed by setting the sealing element 1124 to avoid the leakage of special gas.

[0072] For example, the air distribution plate 1123 and the spray plate 120 are disposed inside the cavity 240, so there is no need to seal the connection between the air distribution channel and the spray channel.

[0073] Figure 5 The diagram shown is a structural schematic of a coating apparatus provided in an exemplary embodiment of this application.

[0074] Based on the same concept, such as Figure 5 As shown in the illustration, this application also provides a coating apparatus 200, which includes a cavity 240, a spraying device 100 as described in the above embodiments, and a transport device 210. The spraying device 100 is at least partially disposed within the cavity 240 and is configured to spray various specialty gases onto the surface of the product 300 to be coated. The transport device 210 is at least partially disposed within the cavity 240 and is configured to drive a carrier 220 to move along a first direction between the opposing surfaces of at least two spray plates 120 of the spraying device 100, so that at least one passivation film is deposited on at least one surface of the product 300 to be coated.

[0075] In some embodiments, such as Figure 4 As shown, product 300 has a first surface 310 and a second surface 320 disposed opposite to each other, and at least one side 330 connecting the first surface 310 and the second surface 320. Specifically, the surface of product 300 to be coated can be coated in the following two ways.

[0076] In the first method, the two oppositely arranged sides 330 of the product 300 are two surfaces to be coated. The carrier 220 is configured to carry the product 300 and expose the two surfaces to be coated, such that one surface to be coated faces the air outlet 121 of a spray plate 120, and the other surface to be coated faces the air outlet 121 of another spray plate 120.

[0077] The second method involves using either the first surface 310 or the second surface 320 of product 300 as the surface to be coated. The carrier 220 is configured to support two products 300 arranged along a second direction, exposing one surface to be coated on each of the two products 300. This is achieved by positioning the surface to be coated of one product 300 towards the air outlet 121 of a spray plate 120, and positioning the surface to be coated of the other product 300 towards the air outlet 121 of another spray plate 120. If multiple sets of two products 300 arranged in this second method are sequentially arranged along the first direction, coating can be applied to one surface of multiple products 300 simultaneously.

[0078] In the above embodiments, the first structure allows for simultaneous coating of two oppositely arranged sides 330 of each product 300, while the second structure allows for coating of either the first surface 310 or the second surface 320 of each product 300. Furthermore, in related technologies, the special gas in the process chamber of a time-type ALD device contacts the silicon wafer cross-section via dispersion. To increase throughput, the process chamber is typically large to accommodate more silicon wafers, leading to uneven distribution of the special gas within the process chamber during processing, resulting in poor coating uniformity and affecting passivation. In rotary spatial ALD devices, the special gas also contacts the silicon wafer cross-section via dispersion, causing uneven contact. However, in the above embodiments, since each surface to be coated faces the outlet 121, the special gas ejected from the outlet 121 can be directly blown onto the surface to be coated. Figure 3 The arrows extending to the left or right on each spray plate 120 indicate the flow direction of the special gas ejected from the air outlet 121 of each spray plate 120. Compared with time-type ALD equipment and rotary spatial ALD equipment in related technologies, the special gas can contact the surface to be coated more evenly, thereby improving the coating uniformity, reducing the phenomenon of missed coating and circumferential coating, and improving the passivation effect.

[0079] In some embodiments, such as Figure 5 As shown, the coating equipment 200 also includes a vacuum pump 230, which is connected to the interior of the cavity 240. The vacuum pump 230 is configured to extract a special gas from the cavity 240.

[0080] For example, the vacuum pump 230 is connected to the bottom of the cavity 240, and the vacuum pump 230 can quickly extract the special gas from the cavity 240 from below. Figure 3 The arrow extending downwards in the middle indicates the flow direction of the special gas drawn by the air pump 230.

[0081] Since the coating equipment 200 includes the spray device 100, all the technical features and effects of the coating equipment 200 including the spray device 100 will not be described in detail here.

[0082] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0083] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0084] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0085] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0086] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A spraying device, characterized in that, The coating equipment includes a transport device configured to move a carrier in a first direction, the carrier being configured to carry a product and expose at least one surface of the product to be coated. The spraying device includes: An air intake assembly configured to receive a special gas; At least two spray plates are arranged at intervals along a second direction, which intersects the first direction. The spray plates are vertically arranged and connected to the air intake assembly. The opposing surfaces of the at least two spray plates are provided with a plurality of air outlets arranged in sequence along the first direction. The spray plates are capable of receiving the special gas delivered by the air intake assembly and spraying the special gas out from the plurality of air outlets, so that when the carrier moves between the at least two spray plates along the first direction, at least one passivation film can be deposited on at least one surface of the product to be coated.

2. The spraying device according to claim 1, characterized in that, The air intake assembly is configured to receive a variety of the special gases, and the transport device is configured to drive the carrier to reciprocate along the first direction. The variety of special gases includes a first special gas and a second special gas, and the first special gas and the second special gas can form the passivation film on the surface to be coated. The air outlet includes: At least one first air outlet, and the number of first air outlets is N, wherein the first air outlet is configured to spray a first special gas, and N is a positive integer; At least one second air outlet, the number of which is N+1, the second air outlets are alternately arranged with the first air outlet along the first direction, and the second air outlets are configured to spray a second special gas.

3. The spraying device according to claim 2, characterized in that, The various special gases also include an isolation gas, which is used to isolate adjacent first special gases from second special gases; The air outlet further includes: At least one third air outlet is disposed between an adjacent first air outlet and a second air outlet, and the third air outlet is configured to eject the isolation gas.

4. The spraying device according to any one of claims 1 to 3, characterized in that, The Mth spray plate and the (M+1)th spray plate in the second direction form a spray plate combination, where M is an odd number. The air outlets are provided on the opposite faces of the two spray plates in each spray plate combination. The air outlets of the spray plates in each spray plate combination are configured to spray the special gas onto the coating surface of the product carried by a carrier.

5. The spraying device according to claim 1 or 2, characterized in that, The air intake assembly includes: Multiple air inlet connectors, wherein the multiple air inlet connectors are configured to allow the introduction of a variety of the special gases; The flow equalization component is connected to the air inlet connector and the spray plate respectively, and is configured to receive the various special gases delivered by the air inlet connector, equalize the flow of each special gas, and enable the equalized special gases to enter the spray plate.

6. The spraying device according to claim 5, characterized in that, The spray plate has multiple spray channels, and the spray channels are connected to the air outlet; The flow equalization component includes: An air intake plate is horizontally arranged and has multiple air intake channels. The air intake channels are connected to the air intake connector and are configured to receive various special gases delivered by the air intake connector. A flow equalizer is horizontally disposed below the air intake plate. The flow equalizer has multiple flow equalization channels, which are connected to the air intake channel and are configured to receive various special gases from the air intake channel. At least two air distribution plates are vertically arranged below the flow equalization plate. Each air distribution plate has an air distribution channel that is connected to the flow equalization channel and the spray channel. The air distribution channel is configured to receive multiple types of the special gases from the flow equalization channel and enable the multiple types of the special gases to enter the spray channel.

7. The spraying device according to claim 6, characterized in that, The Mth spray plate and the (M+1)th spray plate in the second direction form a spray plate combination, where M is an odd number. The opposite faces of the two spray plates in each spray plate combination are provided with air outlets. The air outlets of the spray plates in each spray plate combination are configured to spray a variety of special gases onto the coating surface of the product carried by a carrier. The spray plate along the second direction includes a first spray plate, a last spray plate, and at least one intermediate spray plate located between the first spray plate and the last spray plate. The air distribution plate includes: Two first air distribution plates, one of which has an air distribution channel connected to the spray channel of the first spray plate, and the other of which has an air distribution channel connected to the spray channel of the last spray plate; At least one second air distribution plate, wherein the air distribution channel of the second air distribution plate is connected to the spray channel of two adjacent intermediate spray plates.

8. The spraying device according to claim 6, characterized in that, The coating equipment also includes a cavity, and the air inlet plate and the flow equalization plate are disposed outside the cavity; The flow equalization component further includes: A seal is disposed between the air intake plate and the flow equalization plate, and is configured to seal the gap between the air intake channel and the flow equalization channel.

9. A coating apparatus, characterized in that, include: cavity; The spraying device according to any one of claims 1 to 8 is at least partially disposed in the cavity and configured to spray a variety of special gases onto the surface of the product to be coated; A transport device, at least partially disposed within the cavity, is configured to move a carrier between the opposing surfaces of at least two spray plates of the spraying device in a first direction, so as to deposit at least one passivation film on at least one of the surfaces of the product to be coated.

10. The coating equipment according to claim 9, characterized in that, The product has a first surface and a second surface disposed opposite to each other, and at least one side connecting the first surface and the second surface; Wherein, the two oppositely arranged sides of the product are the two surfaces to be coated, the carrier is configured to carry the product and expose the two surfaces to be coated of the product, such that one surface to be coated faces the air outlet of one spray plate, and the other surface to be coated faces the air outlet of another spray plate; Alternatively, the first or second surface of the product is the surface to be coated, and the carrier is configured to carry two products arranged along a second direction and expose one of the surfaces to be coated of each of the two products, such that the surface to be coated of one product faces the air outlet of one of the spray plates, and the surface to be coated of the other product faces the air outlet of the other spray plate.

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