A thin film plating apparatus

Abstract

The utility model discloses a kind of film electroplating devices, belong to electroplating device technical field, comprising: electroplating tank, one end inner wall of the electroplating tank is rotatably installed with three conductive rollers, the inner wall of one side of the electroplating tank is installed with titanium basket by hook, the top middle portion of the electroplating tank is fixedly installed with U-shaped frame, the U-shaped frame is equipped with the cleaning mechanism for cleaning conductive roller to improve electroplating effect, the cleaning mechanism includes driving assembly, cleaning assembly and transmission assembly. The triangular position of tripod corresponds three conductive rollers in electroplating tank, the annular brush of rotating drum inner wall can completely wrap the surface of conductive roller, the annular brush is connected with rotating drum by internal thread, external thread;Through transmission assembly, annular brush self-rotation and reciprocating movement composite cleaning mode can form friction and stripping effect to stubborn pollutants on the surface of conductive roller, clean the pollutants on the surface of conductive roller, avoid the problem of uneven plating layer and plating omission caused by local current loss.

Description

Technical Field

[0001] This utility model relates to a thin film electroplating device, belonging to the technical field of electroplating devices. Background Technology

[0002] With the rapid iteration and upgrading of the global new energy industry, lithium batteries, as core energy storage components in electric vehicles, energy storage power stations, and other fields, have seen their energy density, cycle life, and safety performance become key indicators of industry competition. Improving the performance of lithium batteries heavily relies on innovations in the fabrication processes of key internal functional materials. Among these, composite current collectors, especially composite copper foil, which serve as the current transport framework for lithium battery electrodes, have become a key breakthrough direction for optimizing the overall performance of lithium batteries due to their significant advantages such as lightweight, high safety, and low internal resistance.

[0003] The industrial-scale preparation process of composite copper foil involves three core technological steps, and the process stability of each step directly determines the quality of the final product: Base film pretreatment: Surface modification of polymer base films such as PET and PP is performed to enhance the adhesion between the base film and the metal coating; Sputtering copper seed layer: A nanoscale copper film is deposited on the surface of the pretreated base film using magnetron sputtering technology to form a conductive seed layer, providing a conductive foundation for subsequent electroplating thickening; Electroplating thickening: This is the core step that determines the conductivity and structural stability of the composite copper foil. A micron-scale copper coating is further deposited on the surface of the conductive seed layer using an electroplating device, ultimately forming a composite copper foil structure consisting of a base film, a seed layer, and a thickening layer.

[0004] The core components of existing electroplating equipment include an electroplating tank, which holds the electroplating solution, typically an acidic copper sulfate solution; conductive rollers, which support and transport the thin film and provide current to the conductive seed layer; an anode, typically electrolytic copper, placed in a titanium basket to prevent anode impurities from dissolving and contaminating the electroplating solution; and unwinding and rewinding rollers to achieve continuous rolling transport of the thin film. Its working principle is as follows: the sputtered magnetron sputtered film, with a conductive seed layer, acts as the cathode, forming an electric field with the anode. The Cu in the electroplating solution... 2+ Under the influence of an electric field, the coating migrates towards the cathode and deposits, thus increasing the coating thickness.

[0005] However, existing electroplating equipment suffers from a key technical challenge during long-term continuous production: contaminants easily remain on the surface of the conductive rollers, leading to electroplating quality defects. Specifically, during the electroplating process, Cu in the electroplating solution... 2+ Localized crystallization may occur on the surface of the conductive roller, increasing its surface roughness. When plating copper on the surface of the film, the presence of localized crystallization is highly likely to puncture the film, affecting the electroplating effect and ultimately resulting in defects in the composite copper foil plating layer.

[0006] In addition, the existing equipment has an auxiliary defect: after electroplating, the concentration distribution of the electroplating solution is uneven. The Cu in the electroplating tank... 2+ Cu will be continuously consumed due to cathode deposition, and the electroplating tank needs to be replenished before the next stage begins. 2+ If only natural diffusion is relied upon for replenishment, it can easily lead to Cu at the bottom of the electroplating tank. 2+ The low concentration further exacerbates the problem of uneven coating thickness, failing to meet the production requirements of high-precision coatings for composite copper foil. Utility Model Content

[0007] To solve the above-mentioned technical problems, this utility model provides a thin film electroplating device.

[0008] The technical solution adopted by this utility model to solve its technical problem is:

[0009] A thin-film electroplating apparatus includes: an electroplating tank, on which three conductive rollers are rotatably mounted in a triangular shape on the inner wall of one end; a titanium basket is mounted on the inner wall of one side of the electroplating tank via hooks; a U-shaped frame is fixedly mounted at the middle of the top of the electroplating tank; the U-shaped frame is provided with a cleaning mechanism for cleaning the conductive rollers to improve the electroplating effect; the cleaning mechanism includes a driving component, a cleaning component, and a transmission component; and a stirring mechanism is provided at the lower interior of the electroplating tank to further improve the electroplating effect.

[0010] Preferably, the drive assembly includes an electric cylinder, which is installed at the top center of the U-shaped frame. The output end of the electric cylinder is fixedly installed at the top center of the U-shaped plate. A lead screw is rotatably installed between the two ends of the U-shaped plate. One end of the lead screw is connected to the output end of the drive motor. A lead screw seat is provided on the outer wall of the lead screw through a thread.

[0011] Preferably, a guide rod is fixedly installed between the two ends of the U-shaped plate, and the guide rod is slidably connected to the screw seat.

[0012] Preferably, the cleaning component includes a tripod mounted at the bottom of the wire seat, with each of the three triangles of the tripod rotatably mounted with a rotating drum via bearings, and a ring brush detachably mounted on the inner wall of the rotating drum.

[0013] Preferably, the inner wall of the rotating drum is provided with internal threads, and the outer wall of the annular brush is provided with external threads.

[0014] Preferably, a rotary handle is installed at one end of the annular brush.

[0015] Preferably, the transmission assembly includes a transmission motor, which is mounted on the upper end of the tripod. The output end of the transmission motor is connected to a small gear, and a large gear that meshes with the small gear is installed on the outer side wall of the top rotating drum. The outer side walls of the top rotating drum and the outer side walls of the two bottom rotating drums are all connected by a synchronous pulley and a synchronous belt.

[0016] Preferably, the stirring mechanism includes two transverse stirring shafts, which are rotatably mounted below the electroplating tank on the side away from the titanium basket, and a plurality of transverse stirring rods are installed on the outer side wall of the transverse stirring shafts.

[0017] Preferably, one side of one of the transverse stirring shafts is connected to the output end of the stirring motor, and a sprocket is installed on one side of the transverse stirring shaft, and the two sprockets are driven by a chain.

[0018] Preferably, a plurality of longitudinal stirring shafts are rotatably mounted on the middle of the bottom inner wall of the electroplating tank via a bracket. The longitudinal stirring shafts are located between two transverse stirring shafts. A plurality of longitudinal stirring rods are mounted on the outer side wall of the longitudinal stirring shafts. A bevel gear meshing with the outer side wall of the transverse stirring shafts is mounted on one end of the longitudinal stirring shafts and the outer side wall of the transverse stirring shafts.

[0019] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0020] 1. The electric cylinder can drive the U-shaped plate to move up and down, flexibly adjusting the distance between the cleaning component and the conductive roller. During non-cleaning periods (i.e., electroplating periods), the cleaning component can be raised to avoid unnecessary wear. The drive motor rotates the lead screw, and combined with the limiting effect of the guide rod, the lead screw seat moves smoothly along the lead screw, thereby driving the cleaning component to reciprocate along the axial direction of the conductive roller, achieving thorough cleaning of the entire length of the conductive roller. The triangular position of the tripod corresponds to the three conductive rollers in the electroplating tank. The annular brush on the inner wall of the rotating drum can completely wrap around the surface of the conductive roller. The annular brush and the rotating drum are connected by internal and external threads, allowing for quick replacement of the annular brush simply by turning the handle. The transmission component enables the annular brush to rotate and reciprocate, creating a combined cleaning method that frictionally and peels off stubborn contaminants on the surface of the conductive roller, cleaning the contaminants and ensuring electrical contact between the conductive roller and the conductive seed layer of the magnetron film, avoiding uneven plating and missed plating problems caused by localized current loss.

[0021] 2. After electroplating is completed and before the next electroplating, the stirring motor drives two transverse stirring shafts to rotate synchronously via sprockets and chains. The transverse stirring rods on the shafts can push the electroplating solution to flow. Through the meshing of helical gears, the longitudinal stirring shaft rotates, driving the longitudinal stirring rods to rotate and stir the electroplating solution in different directions, further promoting the flow of the electroplating solution and preventing Cu from being trapped at the bottom of the electroplating tank. 2+ A lower concentration can reduce the concentration difference in the electroplating solution. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the main structure of this utility model;

[0024] Figure 2 This is a schematic diagram of the drive component structure of this utility model;

[0025] Figure 3 This is a schematic diagram of the cleaning component structure of this utility model;

[0026] Figure 4 This is a schematic diagram of the transmission component structure of this utility model;

[0027] Figure 5 This is a schematic diagram of the annular brush structure of this utility model;

[0028] Figure 6 This is a schematic diagram of the stirring mechanism of this utility model.

[0029] In the diagram: 1. Electroplating tank; 2. Conductive roller; 3. Titanium basket; 4. U-shaped frame; 5. Cleaning mechanism; 6. Stirring mechanism; 50. Drive assembly; 51. Cleaning assembly; 52. Transmission assembly; 501. Electric cylinder; 502. U-shaped plate; 503. Lead screw; 504. Drive motor; 505. Lead screw seat; 506. Guide rod; 511. Triangular frame; 512. Rotary drum; 513. Annular brush; 514. Internal thread; 515. External thread; 516. Throttle; 521. Transmission motor; 522. Pinion; 523. Gear; 524. Synchronous pulley; 525. Synchronous belt; 601. Transverse stirring shaft; 602. Transverse stirring rod; 603. Stirring motor; 604. Sprocket; 605. Chain; 606. Longitudinal stirring shaft; 607. Longitudinal stirring rod; 608. Helical gear. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see Figure 1This utility model provides a technical solution:

[0032] A thin-film electroplating apparatus includes: an electroplating tank 1, with three conductive rollers 2 rotatably mounted in a triangular shape on the inner wall of one end of the electroplating tank 1, a titanium basket 3 mounted on the inner wall of one side of the electroplating tank 1 via hooks, a U-shaped frame 4 fixedly mounted at the middle of the top of the electroplating tank 1, a cleaning mechanism 5 provided on the U-shaped frame 4 for cleaning the conductive rollers 2 to improve the electroplating effect, the cleaning mechanism 5 including a drive component 50, a cleaning component 51 and a transmission component 52, and a stirring mechanism 6 provided at the lower interior of the electroplating tank 1 to further improve the electroplating effect.

[0033] Furthermore, a PLC controller, model Delta DVP-ES3 series, is installed on the U-shaped frame 4. All parts in this application that come into contact with the electroplating solution in the electroplating tank 1 are made of 316 stainless steel.

[0034] Please see Figure 2 In this embodiment: the drive assembly 50 includes an electric cylinder 501, which is installed at the top middle of the U-shaped frame 4. The output end of the electric cylinder 501 is fixedly installed at the top middle of the U-shaped plate 502. A lead screw 503 is rotatably installed between the two ends of the U-shaped plate 502. One end of the lead screw 503 is connected to the output end of the drive motor 504. A lead screw seat 505 is provided on the outer side wall of the lead screw 503 through a thread.

[0035] Furthermore, the drive motor 504 is installed on one side of the U-shaped plate 502, the electric cylinder 501 is preferably a servo electric cylinder, and the drive motor 504 is a stepper motor, which can adjust the speed through the controller to achieve stepless speed regulation of the moving speed of the lead seat 505.

[0036] Please see Figure 2 In this embodiment: a guide rod 506 is fixedly installed between the two ends of the U-shaped plate 502, and the guide rod 506 and the screw seat 505 are slidably connected.

[0037] Furthermore, the guide rod 506 is made of 304 stainless steel and is polished, which can reduce the coefficient of sliding friction with the inner hole of the screw seat 505 and avoid jamming caused by friction and wear after long-term use.

[0038] Please see Figure 4 In this embodiment: the cleaning component 51 includes a tripod 511, which is installed at the bottom of the wire seat 505. Each of the triangles of the tripod 511 is rotatably mounted with a rotating drum 512 via bearings. An annular brush 513 is detachably mounted on the inner wall of the rotating drum 512.

[0039] Furthermore, the tripod 511 is integrally die-cast from aluminum alloy, making it lightweight and structurally strong. This reduces the load on the lead screw 503 during movement and prevents it from bending due to overload. The spacing between the vertices of the triangle perfectly matches the center distance of the three conductive rollers 2, ensuring that the coaxiality error between the axis of each rotating drum 512 and the axis of the corresponding conductive roller 2 is ≤0.2mm. This ensures that the annular brush 513 can completely wrap the surface of the conductive roller 2 360° without any cleaning dead angles. The rotating drum 512 is made of seamless stainless steel tubing with a smooth, burr-free inner wall. The bearings are corrosion-resistant deep groove ball bearings, which prevent electroplating solution from seeping into the bearing and causing rust and jamming, ensuring the long-term stable rotation of the rotating drum 512. The bristles of the annular brush 513 are made of a mixture of wear-resistant nylon filaments and ultra-fine carbon fiber. The nylon filaments are responsible for removing stubborn contaminants, while the carbon fiber can penetrate deep into the tiny crevices on the surface of the conductive roller for cleaning. At the same time, the conductivity of the carbon fiber helps to eliminate static electricity on the surface of the conductive roller, reducing dust adsorption.

[0040] Please see Figure 3 and 5 In this embodiment: the inner wall of the rotating drum 512 is provided with an internal thread 514, and the outer wall of the annular brush 513 is provided with an external thread 515.

[0041] Furthermore, the internal thread 514 on the inner wall of the rotating drum and the external thread 515 on the outer wall of the annular brush both adopt fine thread. The thread angle of the fine thread is 60°, which has the characteristics of good self-locking and excellent sealing performance. This not only prevents the electroplating solution from seeping into the gap between the rotating drum and the annular brush during the electroplating process, thus preventing the thread from rusting, but also prevents the annular brush from loosening due to vibration during self-rotation cleaning.

[0042] Please see Figure 5 In this embodiment: a throttle 516 is installed at one end of the annular brush 513.

[0043] Furthermore, the 516 throttle is injection molded from ABS engineering plastic and has a non-slip diamond pattern on the surface, which increases the friction between the hand and the throttle and prevents slipping when operating with gloves.

[0044] Please see Figure 3-4 In this embodiment: the transmission assembly 52 includes a transmission motor 521, which is mounted on the upper end of the tripod 511. The output end of the transmission motor 521 is connected to a pinion 522. A large gear 523 that meshes with the pinion 522 is installed on the outer wall of the top rotating drum 512. The outer walls of the top rotating drum 512 and the outer walls of the two bottom rotating drums 512 are connected by a synchronous pulley 524 and a synchronous belt 525.

[0045] Furthermore, both the pinion 522 and the gear 523 of the transmission assembly are made of 20CrMnTi alloy and undergo carburizing and quenching treatment, with the tooth surfaces precision ground to ensure smooth and shock-free transmission. The synchronous pulley 524 is made of aluminum alloy with H-shaped synchronous teeth, and the synchronous belt 525 is made of polyurethane, which is resistant to acid and alkali corrosion and has high tensile strength, ensuring that the rotation speed of the three drums is completely synchronized, thereby ensuring that the cleaning effect of the three conductive rollers is consistent and avoiding plating defects caused by inadequate cleaning of one conductive roller. The top drum 512 is equipped with two synchronous pulleys 524, and each of the two bottom drums 512 is equipped with one synchronous pulley 524. The two synchronous pulleys 524 on the top drum 512 are connected to the synchronous pulleys 524 on the two bottom drums 512 via the synchronous belt 525.

[0046] Please see Figure 6 In this embodiment: the stirring mechanism 6 includes two transverse stirring shafts 601, which are rotatably installed below the side of the electroplating tank 1 away from the titanium basket 3, and several transverse stirring rods 602 are installed on the outer side wall of the transverse stirring shafts 601.

[0047] Furthermore, a support frame is provided on the inner wall of the bottom of the electroplating tank 1. The horizontal stirring shaft 601 and the support frame are rotatably installed to provide support. Both the horizontal stirring shaft 601 and the stirring rod 602 are made of 316L stainless steel.

[0048] Please see Figure 6 In this embodiment: one side of a horizontal stirring shaft 601 is connected to the output end of a stirring motor 603. The stirring motor 603 is installed on the outer wall of the electroplating tank 1. A sprocket 604 is installed on one side of the horizontal stirring shaft 601. The two sprockets 604 are driven by a chain 605.

[0049] Furthermore, the stirring motor 603 is a variable frequency speed control motor, the sprocket 604 is made of steel quenching treatment, and the chain 605 is a stainless steel roller chain.

[0050] Please see Figure 6 In this embodiment: a plurality of longitudinal stirring shafts 606 are rotatably mounted on the middle of the bottom inner wall of the electroplating tank 1 via a bracket. The longitudinal stirring shafts 606 are located between two transverse stirring shafts 601. A plurality of longitudinal stirring rods 607 are mounted on the outer side wall of the longitudinal stirring shafts 606. A bevel gear 608 that meshes with the longitudinal stirring shafts 606 and the outer side wall of the transverse stirring shafts 601 is mounted on one end of the longitudinal stirring shafts 606 and the outer side wall of the transverse stirring shafts 601.

[0051] Furthermore, the longitudinal stirring shaft 606 and the longitudinal stirring rod 607 are also made of 316L stainless steel.

[0052] The workflow of this embodiment is as follows: Unwinding rollers and take-up rollers are respectively provided on both sides of the electroplating tank 1. The magnetron sputtering film is unwound by the unwinding rollers, then passes through three conductive rollers 2 and is taken up by the take-up rollers. The unwinding rollers and take-up rollers (not shown in the figure) are both located above the electroplating tank and at the front and rear ends respectively in the direction of the magnetron sputtering film's travel. An anode is placed on the titanium basket 3, and the sputtered magnetron sputtering film serves as the cathode. After the conductive rollers 2 are energized, the magnetron sputtering film undergoes electroplating as it moves within the electroplating tank 1. During non-electroplating processes, the stirring motor 603 drives the transverse stirring shaft 601 to rotate. Through the transmission of the sprocket 604 and chain 605, another transverse stirring shaft 601 rotates, causing the transverse stirring rod 602 to rotate and stir the electroplating solution in the electroplating tank 1, reducing the concentration difference of the electroplating solution. Through the meshing of the helical gear 608, the longitudinal stirring shaft 606 rotates, driving the longitudinal stirring rod 607 to rotate and stir the electroplating solution in different directions, further improving the electroplating effect. Specifically, during the electroplating process, polymeric impurities such as plating solution crystals or detached base film may remain on the surface of the conductive roller 2. These substances form an insulating layer, leading to poor contact between the conductive roller 2 and the conductive seed layer of the magnetron sputtering film, resulting in localized current loss and uneven plating thickness. During non-electroplating periods, the electric cylinder 501 can be activated to lower the U-shaped plate 502, causing the three annular brushes 513 to descend to a position parallel to the three conductive rollers 2. Then, the drive motor 504 drives the lead screw 503 to rotate, causing the lead screw seat 505 to move. The lead screw seat 505 then drives the tripod 511 to move, thus moving the annular brushes 513, thereby achieving the desired plating thickness. The conductive roller 2 is wiped. During the wiping process, the drive motor 521 is started, which drives the small gear 522 to rotate, causing the large gear 523 to rotate, which in turn causes the top tripod 511 to rotate. Through the transmission of the synchronous pulley 524 and the synchronous belt 525, the two bottom rotating drums 512 are rotated, which in turn causes the annular brush 513 to rotate. The annular brush 513 moves back and forth and rotates on its own, which can improve the cleaning effect on the conductive roller 2. When the annular brush 513 is worn and needs to be replaced, hold the handle 516 and rotate the annular brush 513. The annular brush 513 can be turned off the tripod 511 through the internal thread 514 and the external thread 515.

[0053] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A thin-film electroplating apparatus, characterized in that, include: An electroplating tank (1) has a conductive roller (2) mounted in a triangular shape on the inner wall of one end of the electroplating tank (1). A titanium basket (3) is mounted on the inner wall of one side of the electroplating tank (1) via a hook. A U-shaped frame (4) is fixedly installed at the middle of the top of the electroplating tank (1). A cleaning mechanism (5) is provided on the U-shaped frame (4) to clean the conductive roller (2) and improve the electroplating effect. The cleaning mechanism (5) includes a drive component (50), a cleaning component (51), and a transmission component (52). A stirring mechanism (6) to improve the electroplating effect is provided at the bottom of the interior of the electroplating tank (1).

2. The thin film electroplating apparatus according to claim 1, characterized in that, The drive assembly (50) includes an electric cylinder (501), which is installed at the top center of the U-shaped frame (4). The output end of the electric cylinder (501) is fixedly installed at the top center of the U-shaped plate (502). A lead screw (503) is rotatably installed between the two ends of the U-shaped plate (502). One end of the lead screw (503) is connected to the output end of the drive motor (504). A lead screw seat (505) is provided on the outer side wall of the lead screw (503) through a thread.

3. The thin film electroplating apparatus according to claim 2, characterized in that, A guide rod (506) is fixedly installed between the two ends of the U-shaped plate (502), and the guide rod (506) and the screw seat (505) are slidably connected.

4. The thin film electroplating apparatus according to claim 2, characterized in that, The cleaning component (51) includes a tripod (511) which is mounted on the bottom of the wire seat (505). Each of the three triangles of the tripod (511) is rotatably mounted with a rotating drum (512) via bearings. An annular brush (513) is detachably mounted on the inner wall of the rotating drum (512).

5. A thin film electroplating apparatus according to claim 4, characterized in that, The inner wall of the rotating drum (512) is provided with an internal thread (514), and the outer wall of the annular brush (513) is provided with an external thread (515).

6. A thin-film electroplating apparatus according to claim 4, characterized in that, A rotary handle (516) is installed at one end of the annular brush (513).

7. A thin film electroplating apparatus according to claim 4, characterized in that, The transmission assembly (52) includes a transmission motor (521), which is mounted on the upper end of the tripod (511). The output end of the transmission motor (521) is connected to a pinion (522). A large gear (523) that meshes with the pinion (522) is installed on the outer wall of the top rotating drum (512). The outer walls of the top rotating drum (512) and the two bottom rotating drums (512) are connected by a synchronous pulley (524) and a synchronous belt (525).

8. A thin film electroplating apparatus according to claim 1, characterized in that, The stirring mechanism (6) includes two transverse stirring shafts (601), which are rotatably mounted below the electroplating tank (1) on the side away from the titanium basket (3). Several transverse stirring rods (602) are installed on the outer side wall of the transverse stirring shafts (601).

9. A thin film electroplating apparatus according to claim 8, characterized in that, One side of the horizontal stirring shaft (601) is connected to the output end of the stirring motor (603), and a sprocket (604) is installed on one side of the horizontal stirring shaft (601). The two sprockets (604) are driven by a chain (605).

10. A thin film electroplating apparatus according to claim 8, characterized in that, Multiple longitudinal stirring shafts (606) are rotatably mounted on the middle of the bottom inner wall of the electroplating tank (1) via a bracket. The longitudinal stirring shafts (606) are located between two transverse stirring shafts (601). Several longitudinal stirring rods (607) are installed on the outer side wall of the longitudinal stirring shafts (606). Meshing helical gears (608) are installed on one end of the longitudinal stirring shafts (606) and the outer side wall of the transverse stirring shafts (601).

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