A single crystal furnace support device

Abstract

The utility model belongs to single crystal support technical field, concretely speaking is a single crystal furnace support device, including four groups of support leg and set up on the single crystal furnace of support leg top, the top surface of support leg is provided with the support backing plate that clings to the bottom surface of single crystal furnace, the butt joint between support leg and support backing plate is provided with hollow groove no.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal support technology, specifically a single crystal furnace support device. Background Technology

[0002] Silicon single crystals have a specific melting (or solidification) temperature. Above this temperature, the solid begins to melt, and below this temperature, the melt begins to solidify and crystallize. When the solid melts, it needs to absorb heat, and conversely, when the melt solidifies, it releases heat, which is called the latent heat of fusion. During crystal growth, the temperature at any point on the solid-liquid interface must be maintained at the solidification temperature.

[0003] A patent with publication number CN206616295U discloses a silicon single crystal pulling furnace, which includes a crucible, a heater, and a rotating support assembly. The crucible contains molten silicon, and is equipped with a heater for heating it. The rotating support assembly is connected to the crucible to provide support and rotation drive. The rotation direction of the crucible is opposite to the rotation direction of the silicon single crystal rod. A cold spot is located at the center of the bottom of the crucible, and a cooling device is installed at the cold spot. This silicon single crystal pulling furnace has a cold spot at the center of the crucible bottom, which exchanges heat with the reverse convection at the center of the molten silicon to cool the solid-liquid interface.

[0004] In current technologies, the existing single crystal furnace support devices directly transfer the high temperature of up to 2300°C inside the single crystal furnace to the surface of the support legs during use. While a single high temperature event may not cause deformation of the support legs, after repeated use, the support legs of the single crystal furnace will "shrink." Moreover, under high temperature and heavy load, they are prone to creep and sinking, causing the support legs to bend. Furthermore, rigid connections can lead to thermal stress cracking and vibration amplification without radial restraint, which can cause crucible displacement and overturning. After overturning, the single crystal inside the furnace, which reaches a high temperature of up to 2300°C, will be directly discharged, causing burns to employees.

[0005] Therefore, a single crystal furnace support device is proposed to address the above problems. Utility Model Content

[0006] To overcome the shortcomings of existing technologies and solve the above-mentioned problems, a single crystal furnace support device is proposed.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: A single crystal furnace support device of this utility model includes four sets of support legs and a single crystal furnace set on the top of the support legs. A support pad is provided on the top surface of the support legs and attached to the bottom surface of the single crystal furnace. A hollow groove is provided at the joint between the support legs and the support pad. A baffle is fixedly connected to the bottom inner wall of the hollow groove and located in the middle position. Auxiliary support columns are fixedly connected to the inner wall of the hollow groove and located at the two side edges of the baffle. A water pump and a filter water tank are respectively provided on the two side surfaces of the support legs. A water guide pipe is provided on the output end of the water pump and the filter water tank. A dividing strip is fixedly connected to the inner wall of the water guide pipe.

[0008] Preferably, a filter screen is fixedly installed on the inner wall of the filter tank, and the two ends of the filter screen are respectively located at the connection between the water guide pipe and the filter tank.

[0009] Preferably, two sets of snap-fit ​​rings are fixedly connected to the outer surfaces of the water pump and the filter tank, and the inner wall of the snap-fit ​​rings is attached to the outer surface of the support leg.

[0010] Preferably, a grounding base plate is fixedly connected to the bottom surface of the support leg, and four sets of outward support arms are fixedly connected to the outer surface of the grounding base plate and located at one edge of the support leg.

[0011] Preferably, a hollow groove 2 is formed on the top surface of the outward support arm, and an overlapping sleeve is fixedly connected to the inner wall of the top of the hollow groove 2. A shim support strip is provided on the inner wall of the overlapping sleeve, and a push column that slides onto the inner wall of the shim support strip is provided on the inner wall of the overlapping sleeve.

[0012] Preferably, a slot is provided on the bottom surface of the overlapping sleeve, and a swing arm plate is oscillatingly connected to the inner wall of the slot.

[0013] Preferably, a barb is fixedly connected to one end of the swing arm plate, and a limiting docking groove is provided on the top surface of the push column, which is movably sleeved on the inner wall of the hook.

[0014] Preferably, the bottom surface of the push column is provided with a reverse hook groove that is movably sleeved on the outer surface of the barb, and an elastic wire that is fixedly connected to one end of the push column is fixedly connected to the inner wall of the overlapping sleeve.

[0015] The beneficial effects of this utility model are: This utility model provides a single crystal furnace support device. When the high temperature inside the single crystal furnace is transferred to the surface of the support leg, a water pump is used to draw water from the filter water tank, and the cooling water inside the filter water tank is quickly guided into the hollow groove. The baffle is used to block the water, so that the water overflows the height of the baffle and spreads to the other side of the baffle. The water circulates and flows rapidly inside the hollow groove. The flowing water will take away the temperature at the contact point between the support pad and the single crystal furnace, so that the temperature transferred by the single crystal furnace can be kept at a low temperature. This utility model provides a single crystal furnace support device. When the water pump circulates and cools the water inside the hollow tank, the auxiliary support column inside the hollow tank provides auxiliary support for the height between the support pad and the support leg. The water that has absorbed heat will pass through the inside of the water guide pipe, and the water will be separated multiple times by the dividing strip inside the water guide pipe. The repeated stirring and mixing of the water will allow the water guide pipe to perform simple heat dissipation treatment on the heat source inside the water. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a three-dimensional cross-sectional view of the support leg and the outward support arm in this utility model; Figure 3 This is a cross-sectional perspective view of the three-dimensional structure of the outward support arm in this utility model; Figure 4 This is a partial cross-sectional three-dimensional structural diagram of the support leg in this utility model; Figure 5 This is a cross-sectional three-dimensional structural diagram of the filter water tank in this utility model.

[0017] Legend: 11. Grounding base plate; 12. Support leg; 121. Snap-fit ​​collar; 122. Hollow groove one; 123. Support pad; 124. Auxiliary support column; 125. Baffle; 126. Water pump; 127. Filter water tank; 128. Water guide pipe; 129. Dividing strip; 1210. Filter screen; 13. Single crystal furnace; 14. Outward support arm; 141. Hollow groove two; 142. Overlapping sleeve; 143. Elevating support strip; 144. Hook; 145. Slotted opening; 146. Swing arm plate; 147. Barb; 148. Elastic wire; 149. Push column; 1410. Limiting docking groove; 1411. Reverse hook groove. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0019] Specific implementation examples are given below.

[0020] Please see Figure 1 - Figure 2 and Figure 4 - Figure 5 This utility model provides a single crystal furnace support device, including four sets of support legs 12 and a single crystal furnace 13 disposed on the top of the support legs 12. A support pad 123 is disposed on the top surface of the support legs 12 and adheres to the bottom surface of the single crystal furnace 13. A hollow groove 122 is provided at the joint between the support legs 12 and the support pad 123. A baffle 125 is fixedly connected to the bottom inner wall of the hollow groove 122 at its middle position. Auxiliary support columns 124 are fixedly connected to the inner wall of the hollow groove 122 at the two side edges of the baffle 125. The two sides of the support legs 12... A water pump 126 and a filter tank 127 are respectively provided on the upper part. A water guide pipe 128 is provided on the output end of the water pump 126 and the filter tank 127 respectively. A dividing strip 129 is fixedly connected to the inner wall of the water guide pipe 128. A filter screen 1210 is fixedly installed on the inner wall of the filter tank 127. The two ends of the filter screen 1210 are respectively set at the connection between the water guide pipe 128 and the filter tank 127. Two sets of snap-fit ​​collars 121 are fixedly connected to the outer surface of the water pump 126 and the filter tank 127. The inner wall of the snap-fit ​​collar 121 is attached to the outer surface of the support leg 12. During operation, when the high temperature inside the single crystal furnace 13 is transferred to the surface of the support leg 12, the water pump 126 draws water from the filter water tank 127, and the cooling water inside the filter water tank 127 is quickly guided into the hollow groove 122. With the obstruction of the baffle 125, the water overflows the height of the baffle 125 and spreads to the other side of the baffle 125, and the water circulates rapidly inside the hollow groove 122. The flowing water will carry away the temperature at the contact point between the support pad 123 and the single crystal furnace 13, so that the temperature transferred by the single crystal furnace 13 can be kept at a low temperature. When the water pump 126 circulates and cools the water inside the hollow tank 122, the auxiliary support column 124 inside the hollow tank 122 provides auxiliary support for the height between the support pad 123 and the support leg 12. The water that has absorbed heat will pass through the interior of the water guide pipe 128, and the water will be separated multiple times by the dividing strip 129 inside the water guide pipe 128. The repeated stirring and mixing of the water will allow the water guide pipe 128 to perform simple heat dissipation treatment on the heat source inside the water.

[0021] Furthermore, such as Figures 1 to 5 As shown, a grounding base plate 11 is fixedly connected to the bottom surface of the support leg 12. Four sets of outward support arms 14 are fixedly connected to the outer surface of the grounding base plate 11 and to one side edge of the support leg 12. A slot 145 is opened on the bottom surface of the overlapping sleeve 142. A swing arm plate 146 is swayed and connected to the inner wall of the slot 145. A barb 147 is fixedly connected to one end of the swing arm plate 146. A limiting docking groove 1410 is opened on the top surface of the push column 149 and is movably sleeved on the inner wall of the hook 144.

[0022] During operation, when there is no heat dissipation between the traditional support leg 12 and the single crystal furnace 13, and under the corrosive effect of 2300°C high temperature, the support leg 12 and the single crystal furnace 13 bend due to the high temperature. This causes the single crystal furnace 13 to press and impact the surface of the push column 149, causing the push column 149 to slide on the inner wall of the overlapping sleeve 142. This causes the barb 147 on one end of the swing arm plate 146 to peel off from the inner wall of the reverse hook groove 1411. The swing arm plate 146 will swing downward under its own weight. Without obstruction, the push column 149 will be pushed back by the elasticity of the elastic wire 148 to prevent the single crystal furnace 13 from bending continuously. If the reverse elasticity of the elastic wire 148 cannot effectively prevent the single crystal furnace 13 from bending continuously, the position of the single crystal furnace 13 can be limited and blocked by the overlapping sleeve 142 on one end of the outward support arm 14.

[0023] Furthermore, such as Figures 1 to 3 As shown, a hollow groove 141 is provided on the top surface of the outward support arm 14. An overlapping sleeve 142 is fixedly connected to the inner wall of the top of the hollow groove 141. A raised support strip 143 is provided on the inner wall of the overlapping sleeve 142. A push column 149 is provided on the inner wall of the overlapping sleeve 142 and slides onto the inner wall of the raised support strip 143. A reverse hook groove 1411 is provided on the bottom surface of the push column 149 and is movably sleeved on the outer surface of the barb 147. An elastic wire 148 is fixedly connected to one end of the push column 149 on the inner wall of the overlapping sleeve 142.

[0024] During operation, if the reverse thrust of the elastic wire 148 can effectively prevent the single crystal furnace 13 from tipping over and restore the single crystal furnace 13 in the reverse direction, the hook 144 on the inner side wall of the top of the overlapping sleeve 142 slides on the inner side wall of the limiting docking groove 1410. When the pushing column 149 continues to push, the hook 144 will press against one side surface of the limiting docking groove 1410, which can limit the extension length of the pushing column 149 and prevent the reverse extension pushing force of the pushing column 149 from being too long, which would cause the single crystal furnace 13 to tilt too much in the other direction.

[0025] Working principle: When the high temperature inside the single crystal furnace 13 is transferred to the surface of the support leg 12, the water pump 126 draws water from the filter water tank 127, and the cooling water inside the filter water tank 127 is quickly guided into the hollow groove 122. With the obstruction of the baffle 125, the water overflows the height of the baffle 125 and spreads to the other side of the baffle 125, so that the water circulates rapidly inside the hollow groove 122. The flowing water will carry away the temperature at the contact point between the support pad 123 and the single crystal furnace 13, so that the temperature transferred by the single crystal furnace 13 can be kept at a low temperature. When the water pump 126 circulates and cools the water inside the hollow tank 122, the auxiliary support column 124 inside the hollow tank 122 provides auxiliary support for the height between the support pad 123 and the support leg 12. The water that has absorbed heat will pass through the interior of the water guide pipe 128, and the water will be separated multiple times by the dividing strip 129 inside the water guide pipe 128. The repeated stirring and mixing of the water will allow the water guide pipe 128 to perform simple heat dissipation treatment on the heat source inside the water.

[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A single crystal furnace support device, comprising four sets of support legs (12) and a single crystal furnace (13) disposed on the top of the support legs (12), characterized in that: A support pad (123) is provided on the top surface of the support leg (12) and attached to the bottom surface of the single crystal furnace (13). A hollow groove (122) is provided at the joint between the support leg (12) and the support pad (123). A baffle (125) is fixedly connected to the bottom inner wall of the hollow groove (122) at the middle position. An auxiliary support column (124) is fixedly connected to the inner wall of the hollow groove (122) at the two sides of the baffle (125). A water pump (126) and a filter water tank (127) are respectively provided on the two sides of the support leg (12). A water guide pipe (128) is provided on the output end of the water pump (126) and the filter water tank (127). A dividing strip (129) is fixedly connected to the inner wall of the water guide pipe (128).

2. The single crystal furnace support device according to claim 1, characterized in that: A filter screen (1210) is fixedly installed on the inner wall of the filter tank (127), and the two ends of the filter screen (1210) are respectively set at the connection between the water pipe (128) and the filter tank (127).

3. The single crystal furnace support device according to claim 2, characterized in that: Two sets of snap-fit ​​collars (121) are fixedly connected to the outer surfaces of the water pump (126) and the filter tank (127), and the inner wall of the snap-fit ​​collar (121) is attached to the outer surface of the support leg (12).

4. The single crystal furnace support device according to claim 3, characterized in that: A grounding base plate (11) is fixedly connected to the bottom surface of the support leg (12), and four sets of outward support arms (14) are fixedly connected to the outer surface of the grounding base plate (11) and at one side edge of the support leg (12).

5. A single crystal furnace support device according to claim 4, characterized in that: The top surface of the outward support arm (14) is provided with a hollow groove (141), and an overlapping sleeve (142) is fixedly connected to the inner wall of the top of the hollow groove (141). A raised support strip (143) is provided on the inner wall of the overlapping sleeve (142), and a push column (149) is provided on the inner wall of the overlapping sleeve (142) and slides on the inner wall of the raised support strip (143).

6. A single crystal furnace support device according to claim 5, characterized in that: The bottom surface of the overlapping sleeve (142) is provided with a slot (145), and a swing arm plate (146) is swayingly connected to the inner wall of the slot (145).

7. A single crystal furnace support device according to claim 6, characterized in that: A barb (147) is fixedly connected to one end of the swing arm plate (146), and a limiting docking groove (1410) is provided on the top surface of the push column (149) and is movably sleeved on the inner wall of the hook (144).

8. A single crystal furnace support device according to claim 7, characterized in that: The bottom surface of the push column (149) is provided with a reverse hook groove (1411) that is movably sleeved on the outer surface of the barb (147), and an elastic wire (148) that is fixedly connected to one end of the push column (149) is fixedly connected to the inner wall of the overlapping sleeve (142).

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