A single crystal furnace tube capable of effectively reducing oxide buildup

Abstract

The utility model relates to single crystal furnace technical field discloses a kind of single crystal furnace pipeline capable of effectively reducing oxide accumulation, comprising: main pipeline, the both sides of main pipeline outer wall are equipped with inclined pipe, the top of inclined pipe is equipped with vertical pipeline, the top of vertical pipeline is used for the exhaust pipeline of single crystal furnace, the bottom of vertical pipeline is equipped with sedimentation pipeline, the bottom of sedimentation pipeline is equipped with cover plate, the side of main pipeline middle part is equipped with vacuum pump connecting pipe, inclined pipe and main pipeline between are equipped with chain type hoop, the utility model is shortened by being set up half-section type cooling heat-insulating pipe sleeve, relative to existing cooling jacket, while retaining minimum cooling effect, oxide deposition caused by rapid cooling is reduced as far as possible, by vertical pipeline connection single crystal furnace's exhaust pipeline, into inclined pipe, by the design of inclined pipe, it can help to help oxide move in pipeline.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, specifically a single crystal furnace pipe that can effectively reduce oxide accumulation. Background Technology

[0002] In the production of crystalline materials such as monocrystalline silicon, the monocrystalline furnace is a core piece of equipment, and the stability of its internal environment has a crucial impact on the crystal growth quality and production efficiency.

[0003] However, during the operation of a single crystal furnace, the materials inside the furnace undergo an oxidation reaction at high temperatures, generating oxides. If these oxides are not removed in time, they will gradually accumulate inside the furnace, affecting the temperature distribution and gas flow, leading to decreased temperature stability, a deteriorated single crystal growth environment, and ultimately reduced single crystal production efficiency and potentially impacting product quality.

[0004] Currently, there are some single crystal furnace exhaust systems on the market, which mainly involve connecting pipes below the exhaust port of the single crystal furnace and using a vacuum pump to extract the oxides inside the furnace.

[0005] However, as crystal pulling time increases, oxides accumulate inside the pipes, especially near the water-cooling area. Due to the rapid temperature drop, oxides are more prone to deposition, leading to pipe blockage, affecting exhaust efficiency, and consequently interfering with the normal operation of the single crystal furnace. Existing pipe designs often use right-angle bends, resulting in multiple oxide dead zones inside the pipes that are difficult to clean thoroughly. Over time, this not only affects exhaust performance but may also cause corrosion of the pipes, shortening the equipment's lifespan. Therefore, this paper proposes a single crystal furnace pipe design that effectively reduces oxide accumulation. Utility Model Content

[0006] The purpose of this invention is to provide a single crystal furnace pipe that can effectively reduce oxide accumulation, thereby solving the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a single crystal furnace pipe that can effectively reduce oxide accumulation, comprising: a main pipe, inclined pipes on both sides of the outer wall of the main pipe, a vertical pipe at the top of the inclined pipe, the top of the vertical pipe serving as an exhaust pipe for the single crystal furnace, a precipitation pipe at the bottom of the vertical pipe, a cover plate at the bottom of the precipitation pipe, a vacuum pump connecting pipe on one side of the middle of the main pipe, a chain clamp between the inclined pipe and the main pipe, the inclined pipe communicating with the vertical pipe, and a half-section cooling and insulation sleeve on the upper half of the outer wall of the vertical pipe.

[0008] Furthermore, the upper half of the half-section cooling and insulation pipe sleeve is provided with a water inlet connector on one side, and the lower half is provided with a water outlet connector on one side.

[0009] Furthermore, the sedimentation pipe is connected to the vertical pipe, and the cover plate and the bottom end of the sedimentation pipe are also connected by a chain clamp.

[0010] Furthermore, a cleaning pipe is provided at the top of the middle section of the main pipeline, and a cover plate is also provided at the top of the cleaning pipe. The cleaning pipe and the cover plate are also connected by a chain clamp.

[0011] Furthermore, cover plates are also provided at both ends of the main pipeline, and the two ends of the main pipeline and the cover plates are connected by chain clamps.

[0012] Furthermore, a gap is left between the inner wall of the semi-segmented cooling insulation pipe sleeve and the outer wall of the vertical pipe for the flow of cooling water.

[0013] Furthermore, flanges are provided at both ends of the main pipe where it connects to the chain clamp, and flanges are also provided at the connection between the inclined pipe and the chain clamp.

[0014] Furthermore, the angle between the inclined tube and the horizontal plane is 40-70 degrees.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This invention utilizes a semi-segmented cooling and insulation sleeve, which is shorter than existing cooling sleeves. While maintaining a minimum cooling effect, it minimizes oxide deposition caused by rapid cooling during single-crystal furnace production. A vertical pipe connects to the furnace's exhaust pipe, and a vacuum pump is connected via a connecting pipe to generate suction, promptly extracting oxides from the furnace. The oxides are cooled by the semi-segmented cooling and insulation sleeve and enter an inclined tube. The inclined tube design facilitates the movement of the oxides within the pipe, allowing for smooth discharge. Subsequently, the oxides are drawn into the main pipe for discharge. During the oxide discharge process... In this system, a sedimentation pipe is installed at the bottom of the vertical pipe to store the oxides accumulated in the pipe, reducing pipe blockage. In addition, the main pipe, inclined pipe, cleaning pipe, and sedimentation pipe are all connected by chain clamps. The chain clamps can be bent at a certain angle, which facilitates disassembly and assembly in narrow parts. When it is necessary to clean oxides, the chain clamps can be released to remove most of the oxides. In addition, if the single crystal furnace leaks or the vacuum pump stops or fails, a large amount of oxides will be generated. At this time, it is necessary to clean the oxides through this system. The cleaning pipe can be opened to clean the oxides in time and prevent oxide accumulation.

[0017] The parts of the device not covered herein are the same as or can be implemented using existing technologies. Attached Figure Description

[0018] Figure 1 This is a perspective view of a single crystal furnace pipe that can effectively reduce oxide accumulation according to the present invention.

[0019] Figure 2 This is a perspective view of a single crystal furnace pipe that can effectively reduce oxide accumulation according to this utility model.

[0020] Figure 3 This is a front view of a single crystal furnace pipe that can effectively reduce oxide accumulation according to this utility model;

[0021] Figure 4 This is a right view of a single crystal furnace pipe that can effectively reduce oxide accumulation according to the present invention.

[0022] Figure 5 This is a top view of a single crystal furnace pipe that can effectively reduce oxide accumulation according to this utility model.

[0023] In the diagram: 1. Vertical pipe; 2. Half-section cooling and insulation pipe sleeve; 3. Water inlet connector; 4. Water outlet connector; 5. Sedimentation pipe; 6. Inclined pipe; 7. Chain clamp; 8. Main pipe; 9. Vacuum pump connection pipe; 10. Cleaning pipe; 11. Cover plate. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0025] Please see Figures 1-5 This utility model provides a technical solution: a single crystal furnace pipe that can effectively reduce oxide accumulation, comprising: a main pipe 8, which guides the oxides and gases generated in the single crystal furnace to subsequent processing stages, reducing the risk of oxide accumulation in the furnace. Inclined pipes 6 are provided on both sides of the outer wall of the main pipe 8, and a vertical pipe 1 is provided at the top of the inclined pipes 6. The top of the vertical pipe 1 serves as the exhaust pipe for the single crystal furnace. The inclined pipes 6 utilize gravity, allowing the oxides coming down from the vertical pipe 1 to slide more smoothly into the main pipe 8, reducing the residence time of oxides in the pipe and further reducing the possibility of blockage.

[0026] A sedimentation pipe 5 is provided at the bottom of the vertical pipe 1. The sedimentation pipe 5 is designed to provide a dedicated storage space for oxides that may deposit at the bottom of the vertical pipe 1, effectively preventing oxides from flowing back into the main pipe 8 and reducing the risk of pipe blockage. A cover plate 11 is provided at the bottom of the sedimentation pipe 5. The cover plate 11 makes the sedimentation pipe 5 a closed space, which can be easily opened when cleaning is needed to remove oxides, while preventing external impurities from entering the pipeline system.

[0027] A vacuum pump connection pipe 9 is installed on one side of the middle section of the main pipe 8. This connection pipe effectively introduces the suction force of the vacuum pump into the main pipe 8, accelerating the extraction speed of gas and oxides from the furnace, improving production efficiency, and ensuring stable furnace pressure. A chain clamp 7 is installed between the inclined pipe 6 and the main pipe 8. The design of the chain clamp 7 makes the connection between the inclined pipe 6 and the main pipe 8 more flexible and secure, facilitating disassembly and assembly operations in confined spaces and improving system maintainability. The inclined pipe 6 is connected to the vertical pipe 1, and a semi-section cooling and insulation sleeve 2 is installed on the outer wall of the upper half of the vertical pipe 1. This connection ensures that oxides can smoothly enter the inclined pipe 6 from the vertical pipe 1 and then slide into the main pipe 8, forming a complete exhaust path. The semi-section cooling and insulation sleeve 2 provides moderate cooling to the upper half of the vertical pipe 1, preventing damage to the pipe from high-temperature oxides and reducing oxide deposition on the inner wall of the pipe caused by rapid cooling.

[0028] The upper half of the semi-section cooling insulation sleeve 2 is equipped with a water inlet connector 3, and the lower half is equipped with a water outlet connector 4. The water inlet connector 3 and the water outlet connector 4 enable cooling water to flow smoothly into and out of the semi-section cooling insulation sleeve 2, forming an effective cooling cycle and ensuring the continuity and stability of the cooling effect.

[0029] The sedimentation pipe 5 is connected to the vertical pipe 1, and the cover plate 11 is also connected to the bottom end of the sedimentation pipe 5 by a chain clamp 7. The connection between the sedimentation pipe 5 and the vertical pipe 1 allows oxides that may be deposited at the bottom of the vertical pipe 1 to smoothly enter the sedimentation pipe 5, facilitating subsequent cleaning. The use of the chain clamp 7 makes the connection between the cover plate 11 and the bottom end of the sedimentation pipe 5 more flexible, allowing the cover plate 11 to be opened for oxide removal when necessary.

[0030] A cleaning pipe 10 is installed at the top of the middle section of the main pipeline 8, and a cover plate 11 is also installed at the top of the cleaning pipe 10. The cleaning pipe 10 and the cover plate 11 are connected by a chain clamp 7. The design of the cleaning pipe 10 provides a convenient passage for oxide cleaning in emergency situations. The cover plate 11 connected by the chain clamp 7 can be easily opened and closed, improving the emergency response capability of the system.

[0031] Cover plates 11 are also installed at both ends of the main pipe 8, and the two ends of the main pipe 8 and the cover plates 11 are connected by chain clamps 7. The design of the cover plates 11 at both ends of the main pipe 8 allows for a comprehensive inspection and cleaning of the main pipe 8 when needed, while the use of chain clamps 7 improves the convenience of disassembly and assembly.

[0032] A gap is left between the inner wall of the semi-segmented cooling insulation sleeve 2 and the outer wall of the vertical pipe 1 to allow for the flow of cooling water. The design of the cooling water flow gap ensures that the cooling water can fully contact the outer wall of the vertical pipe 1, thus guaranteeing the cooling effect.

[0033] Flanges are installed at both ends of the main pipe 8 where it connects to the chain clamp 7, and flanges are also installed at the connection between the inclined pipe 6 and the chain clamp 7. The flanges enhance the connection strength between the chain clamp 7 and the main pipe 8 and the inclined pipe 6, thereby improving the stability and safety of the system.

[0034] The angle between the inclined pipe 6 and the horizontal plane is 40-70 degrees. The angle design of the inclined pipe 6 and the horizontal plane optimizes the flow path of the oxide, allowing the oxide to slide into the main pipe 8 more smoothly, reducing the risk of blockage and improving exhaust efficiency.

[0035] This invention utilizes a semi-segmented cooling and insulation sleeve 2, which is shorter than existing cooling sleeves. While maintaining a minimum cooling effect, it minimizes oxide deposition caused by rapid cooling during single-crystal furnace production. A vertical pipe 1 connects to the furnace's exhaust pipe, and a vacuum pump is connected via a vacuum pump connection pipe 9 to generate suction, promptly extracting oxides from the furnace. The oxides are cooled by the semi-segmented cooling and insulation sleeve 2 and enter the inclined pipe 6. The inclined pipe 6's design facilitates the movement of the oxides within the pipe, allowing for smooth discharge. Subsequently, the oxides are drawn into the main pipe 8 for discharge. During the oxide discharge process... By setting a sedimentation pipe 5 at the bottom of the vertical pipe 1, the oxides accumulated in the pipe can be stored, reducing pipe blockage. In addition, the main pipe 8, inclined pipe 6, cleaning pipe 10, and sedimentation pipe 5 are all connected by chain clamps 7. The chain clamps 7 can be bent at a certain angle, which facilitates disassembly and assembly in narrow parts. When it is necessary to clean oxides, the chain clamps 7 can be released to remove most of the oxides. In addition, once the single crystal furnace leaks or the vacuum pump stops and fails, a large amount of oxides will be generated. At this time, it is necessary to clean the oxides through this point. The cleaning pipe 10 can be opened to clean the oxides in time and avoid oxide accumulation.

[0036] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

Claims

1. A single crystal furnace pipe that can effectively reduce oxide accumulation, comprising: The main pipe (8) is characterized in that: inclined pipes (6) are provided on both sides of the outer wall of the main pipe (8), a vertical pipe (1) is provided at the top of the inclined pipe (6), the top of the vertical pipe (1) is used as the exhaust pipe of the single crystal furnace, a precipitation pipe (5) is provided at the bottom of the vertical pipe (1), a cover plate (11) is provided at the bottom of the precipitation pipe (5), a vacuum pump connecting pipe (9) is provided on one side of the middle part of the main pipe (8), a chain clamp (7) is provided between the inclined pipe (6) and the main pipe (8), the inclined pipe (6) is connected to the vertical pipe (1), and a half-section cooling and heat preservation sleeve (2) is provided on the upper half of the outer wall of the vertical pipe (1).

2. The single crystal furnace pipe that can effectively reduce oxide accumulation according to claim 1, characterized in that: The upper half of the half-section cooling and insulation sleeve (2) is provided with a water inlet connector (3), and the lower half is provided with a water outlet connector (4).

3. The single crystal furnace pipe according to claim 1, characterized in that: The sedimentation pipe (5) is connected to the vertical pipe (1), and the cover plate (11) and the bottom end of the sedimentation pipe (5) are also connected by a chain clamp (7).

4. The single crystal furnace pipe that can effectively reduce oxide accumulation according to claim 1, characterized in that: The main pipe (8) has a cleaning pipe (10) at the top of its middle section. The cleaning pipe (10) also has a cover plate (11) at its top. The cleaning pipe (10) and the cover plate (11) are connected by a chain clamp (7).

5. A single crystal furnace pipe that can effectively reduce oxide accumulation according to claim 1, characterized in that: The main pipe (8) is also equipped with cover plates (11) at both ends, and the main pipe (8) and the cover plates (11) are connected by chain clamps (7).

6. The single crystal furnace pipe according to claim 1, characterized in that: A gap is left between the inner wall of the semi-segmented cooling and insulation sleeve (2) and the outer wall of the vertical pipe (1) for the flow of cooling water.

7. A single crystal furnace pipe that can effectively reduce oxide accumulation according to claim 5, characterized in that: Flanges are provided at both ends of the main pipe (8) where it connects to the chain clamp (7), and flanges are also provided at the connection between the inclined pipe (6) and the chain clamp (7).

8. A single crystal furnace pipe that can effectively reduce oxide accumulation according to claim 1, characterized in that: The angle between the inclined tube (6) and the horizontal plane is 40-70 degrees.

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