Anti-burst furnace tube

Abstract

The utility model relates to the field of semiconductor manufacturing, concretely is a kind of anti-bursting furnace tube, including furnace tube main body and boat body, the inside fixed welding of furnace tube main body has multiple boat foot supports, the bottom of boat body integrally formed has boat foot, and boat foot and boat foot support one-to-one correspondence, the top of boat foot support is equipped with the arc surface of adaptation with boat foot, every boat foot support towards boat body entering direction one end is evenly provided with buffer mechanism, by fixed welding multiple boat foot supports in furnace tube main body interior, and the arc surface of adaptation with boat foot is set up in boat foot support top, make the weight of boat body evenly dispersed to multiple boat foot supports by boat foot, greatly increase the contact area of boat body and furnace tube support structure, avoid the stress concentration problem caused by traditional boat foot direct contact furnace tube inner wall, reduce the load bearing burden of furnace tube inner wall, reduce the risk of hidden crack, burst due to long-term stress concentration of furnace tube from the root.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to an explosion-proof furnace tube. Background Technology

[0002] In the manufacturing process of TOPcon (tunneling oxide passivated contact) solar cells, boron diffusion is a crucial step in forming the semiconductor layer structure. This process requires the introduction of BCL3 gas under high temperature and low pressure conditions. Under high temperature conditions, BCL3 decomposes to generate boron atoms. These boron atoms further react with silicon on the silicon wafer surface to form intermediate products such as borosilicate compounds. Under continuous high temperature, these intermediate products promote the gradual diffusion of boron atoms into the silicon lattice, ultimately forming a p-type semiconductor layer on the surface or in specific areas of an n-type silicon substrate or other substrate, laying the foundation for the subsequent construction of core structures such as pn junctions.

[0003] During the boron diffusion process, silicon wafers are carried in a quartz boat and enter the furnace tube to complete the reaction. Since a large number of silicon wafers need to be processed in a single cycle, the overall weight of the fully loaded boat is typically between 80-120 kg, and the process lasts for up to 3 hours. During this time, the boat relies entirely on the furnace tube structure for support. In existing technologies, the boat's support mechanism involves the boat's bottom feet directly contacting the inner wall of the furnace tube. However, the boat feet are relatively small, resulting in a limited actual contact area between the boat feet and the inner wall of the furnace tube. Consequently, the entire weight of the boat is concentrated in the contact area between the boat feet and the inner wall of the furnace tube, creating a highly concentrated force.

[0004] Under continuous compression for 3 hours, micro-cracks (hidden cracks) are easily generated in the contact area of ​​the inner wall of the furnace tube. As the number of processes increases, the hidden cracks gradually expand, which will not only significantly shorten the service life of the furnace tube and increase production costs, but may also cause the furnace tube to suddenly burst during the process due to the expansion of the hidden cracks, causing process interruption, affecting production efficiency and product yield. At the same time, the bursting of the high-temperature furnace tube may also cause equipment damage or personnel safety hazards.

[0005] Therefore, this utility model provides an explosion-proof furnace tube to solve the above problems. Utility Model Content

[0006] In view of the above situation and to overcome the defects of the prior art, this utility model provides an anti-explosion furnace tube to solve the problem that existing furnace tubes are prone to exploding due to stress concentration and impact.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows: An explosion-proof furnace tube includes a furnace tube body and a boat body. Multiple boat feet are fixedly welded inside the furnace tube body. The bottom of the boat body is integrally formed with boat feet, and the boat feet correspond one-to-one with the boat feet. The top of the boat feet is provided with an arc-shaped surface adapted to the boat feet. Each boat feet is provided with a buffer mechanism at one end facing the direction of entry of the boat body.

[0008] Preferably, the buffer mechanism includes a buffer seat that is slidably disposed inside the furnace tube body, and the interior of the boat foot support is provided with a groove for the buffer seat to slide horizontally, and the end of the buffer seat away from the direction of entry of the boat body is slidably inserted into the interior of the groove.

[0009] Preferably, the top of the buffer seat is provided with an arc-shaped inlet that matches the arc surface, and the end of the buffer seat facing the direction of entry of the boat body is provided with a guide slope.

[0010] Preferably, the buffer mechanism further includes a movable plate, on the side of the movable plate near the boat foot support that is fixedly connected to a plug rod. The boat foot support has an insertion hole inside, and a buffer spring is fixedly connected inside the insertion hole. The end of the plug rod away from the movable plate is slidably inserted into the insertion hole and fixedly connected to one end of the buffer spring.

[0011] Preferably, the movable plate has an elongated groove inside, and a rotating shaft is rotatably installed inside the buffer seat. The other end of the rotating shaft is slidably inserted into the elongated groove and fixedly connected to an elongated plate. A U-shaped clamping plate is fixedly connected to the side of the movable plate away from the buffer seat. The left side of the elongated plate contacts the inner wall of the U-shaped clamping plate, and the right side contacts the side of the movable plate away from the buffer seat.

[0012] Preferably, the buffer seat has a circular hole inside, and an annular plate is rotatably installed inside the circular hole. The annular plate is fixedly connected to the outer surface of the rotating shaft. A torsion spring is fixedly connected to the side of the annular plate away from the moving plate, and the other end of the torsion spring is fixedly connected to the inner wall of the circular hole.

[0013] The beneficial effects of this utility model are as follows: 1. This device fixes and welds multiple boat feet inside the furnace tube body, and opens an arc-shaped surface on the top of the boat feet to match the boat feet. This allows the weight of the boat body to be evenly distributed to multiple boat feet through the boat feet, which greatly increases the contact area between the boat body and the furnace tube support structure. This avoids the stress concentration problem caused by the traditional boat feet directly contacting the inner wall of the furnace tube, reduces the load on the inner wall of the furnace tube, and fundamentally reduces the risk of the furnace tube developing hidden cracks or bursting due to long-term stress concentration.

[0014] 2. This device, by setting up a buffer mechanism, can effectively absorb the impact force when the boat foot comes into contact with the boat foot support. When the boat body is pushed into the furnace tube, the boat foot gradually contacts the boat foot support through the guide slope and arc-shaped inlet of the buffer seat. The buffer spring consumes the impact energy through elastic deformation, avoiding direct and violent impact between the boat foot and the boat foot support. This prevents the welding points of the boat foot support from loosening or falling off due to frequent impacts, and greatly improves the service life of the boat foot support.

[0015] 3. This device, through the cooperation of the long slot, rotating shaft, annular plate, torsion spring and long plate, can complete the linkage assembly of the buffer seat and boat foot support by simply rotating the long plate, which is convenient to operate and reduces the difficulty of equipment assembly and maintenance. Attached Figure Description

[0016] Figure 1 This is a side view of the present invention; Figure 2 This is a schematic diagram of the structure of the concealed furnace tube body and the boat body of this utility model; Figure 3 This is a cross-sectional view of the concealed furnace tube body and the boat body of this utility model; Figure 4 This is a schematic diagram of the structure of the boat foot support of this utility model; Figure 5 This is a schematic diagram of the buffer mechanism of this utility model.

[0017] In the diagram: 1. Furnace tube body; 2. Boat body; 3. Boat foot; 4. Boat foot support; 5. Arc-shaped surface; 6. Buffer seat; 7. Arc-shaped inlet; 8. Guide slope; 9. Moving plate; 10. Long groove; 11. Rotating shaft; 12. Annular plate; 13. Torsion spring; 14. Long plate; 15. Insert rod; 16. Buffer spring; 17. U-shaped clamping plate; 18. Slide groove; 19. Insertion hole. Detailed Implementation

[0018] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0019] As attached Figure 1-5As shown, an anti-explosion furnace tube includes a furnace tube body 1 and a boat body 2 for supporting silicon wafers. The furnace tube body 1 is made of high-temperature resistant material, and multiple boat feet 4 are fixedly welded to its interior along its length. The bottom of the boat body 2 is integrally formed with boat feet 3. The number and position of the boat feet 3 correspond one-to-one with the boat feet 4, ensuring that the boat body 2 can accurately land on the boat feet 4 after being placed into the furnace tube body 1. Each boat foot 4 has an arc-shaped surface 5 on its top that matches the outer contour of the boat foot 3. The design of the arc-shaped surface 5 can increase the contact area between the boat foot 3 and the boat foot 4, further dispersing the weight of the boat body 2. At the same time, each boat foot 4 is provided with a buffer mechanism at the end facing the boat body 2 to buffer the impact force when the boat foot 3 contacts the boat foot 4.

[0020] The buffer mechanism includes a buffer seat 6 that is slidably disposed inside the furnace tube body 1. In order to achieve directional sliding of the buffer seat 6, a groove 18 is provided inside the boat foot support 4 for the buffer seat 6 to slide horizontally. The length of the groove 18 is adapted to the sliding stroke of the buffer seat 6, and the end of the buffer seat 6 away from the direction of entry of the boat body 2 is slidably inserted into the inside of the groove 18, so that the buffer seat 6 can only move along the length direction of the groove 18, avoiding deviation during the sliding process.

[0021] To facilitate the smooth entry of the boat foot 3 into the buffer seat 6 and its connection with the arc-shaped surface 5, an arc-shaped inlet 7 adapted to the arc-shaped surface 5 is provided on the top of the buffer seat 6. When the buffer seat 6 is in the initial position, the arc-shaped inlet 7 and the arc-shaped surface 5 can form a continuous support surface, ensuring that the boat foot 3 is subjected to uniform force after contact. At the same time, a guide slope 8 is provided at the end of the buffer seat 6 facing the direction of entry of the boat body 2. The guide slope 8 can guide the boat foot 3 to slide into the arc-shaped inlet 7 gradually from the slope, avoiding the boat foot 3 directly hitting the end of the buffer seat 6 and further reducing the impact.

[0022] The buffer mechanism also includes a movable plate 9 for transmitting buffering force. At least two insert rods 15 are fixedly connected to the side of the movable plate 9 near the boat foot support 4. The insert rods 15 are made of rigid material. Correspondingly, the boat foot support 4 has a hole 19 that corresponds to the insert rod 15. A buffer spring 16 is fixedly connected inside the hole 19. The end of the insert rod 15 away from the movable plate 9 is slidably inserted into the hole 19 and fixedly connected to one end of the buffer spring 16. When the movable plate 9 moves toward the boat foot support 4, the insert rod 15 will compress the buffer spring 16, and the elastic deformation of the buffer spring 16 will absorb the impact force.

[0023] A long groove 10 is provided in the middle of the movable plate 9. A rotating shaft 11 is rotatably installed inside the buffer seat 6. The end of the rotating shaft 11 away from the buffer seat 6 is slidably inserted into the inside of the long groove 10 and fixedly connected to a long plate 14. The length of the long plate 14 is greater than the width of the long groove 10. At the same time, a U-shaped clamping plate 17 is fixedly connected to the side of the movable plate 9 away from the buffer seat 6. The opening of the U-shaped clamping plate 17 faces the long groove 10. The left side of the long plate 14 contacts the inner wall of the U-shaped clamping plate 17, and the right side contacts the side of the movable plate 9 away from the buffer seat 6. The U-shaped clamping plate 17 and the movable plate 9 cooperate to limit the long plate 14, so that the buffer seat 6 and the movable plate 9 can move synchronously.

[0024] The buffer seat 6 has a circular hole inside, and an annular plate 12 is rotatably installed inside the circular hole. The annular plate 12 is fixedly connected to the outer surface of the rotating shaft 11. A torsion spring 13 is fixedly connected to the side of the annular plate 12 away from the moving plate 9. The other end of the torsion spring 13 is fixedly connected to the inner wall of the circular hole. When the rotating shaft 11 drives the annular plate 12 to rotate, the torsion spring 13 will deform and store elastic potential energy. After the rotating shaft 11 is released, the elastic potential energy of the torsion spring 13 is released, which drives the annular plate 12 and the rotating shaft 11 to return to their original positions.

[0025] When installing the buffer mechanism, first manually rotate the rotating shaft 11 inside the buffer seat 6 to drive the long strip plate 14 to rotate until it is parallel to the long groove 10 on the moving plate 9. At this time, the annular plate 12 rotates synchronously, and the torsion spring 13 deforms and stores force. Then, the end of the rotating shaft 11 away from the buffer seat 6, along with the long strip plate 14, passes through the long groove 10. At this time, the end of the buffer seat 6 away from the moving plate 9 is inserted into the sliding groove 18. After that, release the rotating shaft 11, and the torsion spring 13 releases its elastic potential energy, causing the annular plate 12 and the rotating shaft 11 to reset, so that the long strip plate 14 rotates to a state perpendicular to the long groove 10. At this time, the long strip plate 14 is limited by the U-shaped clamping plate 17 and the moving plate 9, and the buffer seat 6 and the moving plate 9 are linked.

[0026] Working principle The operator pushes the boat 2, fully loaded with silicon wafers, into the furnace tube body 1. The boat foot 3 at the bottom of the boat 2 first contacts the guide slope 8 of the buffer seat 6. The guide slope 8 guides the boat foot 3 to slide gradually into the arc-shaped inlet 7 at the top of the buffer seat 6. As the boat 2 continues to be pushed in, the boat foot 3 will apply a pushing force to the buffer seat 6, pushing the buffer seat 6 to slide away from the boat 2 along the sliding groove 18 of the boat foot support 4. When the buffer seat 6 slides, it drives the moving plate 9 to move closer to the boat foot support 4. When the moving plate 9 moves, the insertion rod 15 on one side slides along the insertion hole 19 of the boat foot support 4 and applies pressure to the buffer spring 16 in the insertion hole 19, causing the buffer spring 16 to undergo elastic deformation. The elastic potential energy of the buffer spring 16 directly absorbs the impact force when the boat foot 3 contacts the buffer seat 6, avoiding the impact force from being directly transmitted to the welding point of the boat foot support 4.

[0027] When the boat foot 3 moves completely to align with the arc-shaped surface 5 of the boat foot support 4, the buffer spring 16 drives the buffer seat 6 to reset. At this time, the weight of the boat body 2 is evenly transferred to the arc-shaped surface 5 through the boat foot 3, and then distributed to the inner wall of the furnace tube body 1 through multiple boat foot supports 4, which greatly reduces the stress per unit area and prevents the furnace tube body 1 from developing hidden cracks due to stress concentration.

[0028] It should be noted that in the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," which indicate direction or positional relationships, are based on the direction or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. A shatterproof furnace tube, comprising a furnace tube body (1) and a boat body (2), characterized in that, The furnace tube body (1) is fixedly welded with multiple boat foot supports (4). The bottom of the boat body (2) is integrally formed with boat feet (3), and the boat feet (3) and boat foot supports (4) correspond one-to-one. The top of the boat foot support (4) is provided with an arc-shaped surface (5) that is adapted to the boat feet (3). Each boat foot support (4) is provided with a buffer mechanism at one end facing the boat body (2) in the direction of entry.

2. The explosion-proof furnace tube according to claim 1, characterized in that, The buffer mechanism includes a buffer seat (6) that is slidably disposed inside the furnace tube body (1). The boat foot support (4) has a groove (18) inside for the buffer seat (6) to slide horizontally, and the end of the buffer seat (6) away from the direction of entry of the boat body is slidably inserted into the inside of the groove (18).

3. The explosion-proof furnace tube according to claim 2, characterized in that, The top of the buffer seat (6) is provided with an arc-shaped inlet (7) that is compatible with the arc-shaped surface (5), and the end of the buffer seat (6) facing the direction of entry of the boat body is provided with a guide slope (8).

4. The explosion-proof furnace tube according to claim 2, characterized in that, The buffer mechanism also includes a movable plate (9), on which a plug rod (15) is fixedly connected. The side of the movable plate (9) near the boat foot support (4) is provided with a plug hole (19), and a buffer spring (16) is fixedly connected inside the plug hole (19). The end of the plug rod (15) away from the movable plate (9) is slidably inserted into the inside of the plug hole (19) and fixedly connected to one end of the buffer spring (16).

5. The explosion-proof furnace tube according to claim 4, characterized in that, The movable plate (9) has an elongated groove (10) inside. The buffer seat (6) has a rotating shaft (11) rotatably installed inside. The other end of the rotating shaft (11) is slidably inserted into the elongated groove (10) and fixedly connected to an elongated plate (14). A U-shaped clamping plate (17) is fixedly connected to the side of the movable plate (9) away from the buffer seat (6). The left side of the elongated plate (14) is in contact with the inner wall of the U-shaped clamping plate (17), and the right side is in contact with the side of the movable plate (9) away from the buffer seat (6).

6. The explosion-proof furnace tube according to claim 5, characterized in that, The buffer seat (6) has a circular hole inside, and an annular plate (12) is rotatably installed inside the circular hole. The annular plate (12) is fixedly connected to the outer surface of the rotating shaft (11). A torsion spring (13) is fixedly connected to the side of the annular plate (12) away from the moving plate (9). The other end of the torsion spring (13) is fixedly connected to the inner wall of the circular hole.

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