A cabinet door structure for a magnetron sputtering apparatus

Abstract

The utility model relates to a coating equipment technical field, concretely relates to a cabinet door structure for magnetron sputtering equipment, including vacuum cavity, the vacuum cavity lateral wall is opened and is placed with the mouth, the vacuum cavity outside wall is rotated and is connected with the cabinet door for closing the mouth through the hinge and is placed, the vacuum cavity outside wall is closed and is placed and is equipped with the annular groove with the mouth, the annular groove is closed and is equipped with the connecting ring, the one end of connecting ring away from the vacuum cavity is equipped with the circular groove, the groove wall of the circular groove around the annular groove in connecting ring is equipped with the through cavity, the top outside wall and the bottom outside wall of connecting ring are equipped with the liquid outlet pipe and the liquid inlet pipe respectively with the through cavity intercommunication, the liquid outlet pipe and the liquid inlet pipe embed through the vacuum cavity lateral wall, and the water cooling system is connected, the inside of cabinet door is equipped with the annular air bag, when using, the cooling water is transported in the liquid inlet pipe through the water cooling system, and the cooling water flows into the through cavity, and the connecting ring is cooled, avoids the high temperature that the vacuum cavity inside work produces and conducts to the annular air bag.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, specifically to a cabinet door structure for a magnetron sputtering equipment. Background Technology

[0002] Magnetron sputtering equipment is a precision coating device that uses plasma controlled by a magnetic field to bombard a solid target material in a vacuum environment, causing its atoms or molecules to be sputtered out and deposited on the surface of a substrate, thereby forming the desired thin film.

[0003] Magnetron sputtering equipment consists of a vacuum chamber, a pumping system, a gas control system, a target and power supply, a substrate holder and a heating / cooling system, and a control system. The vacuum chamber has a placement port on its side wall, and a cabinet door on the corresponding outer side wall of the vacuum chamber for closing the placement port. In the prior art, sealing strips are usually used in conjunction with the cabinet door to seal and close the placement port to ensure the airtightness of the vacuum chamber. However, because the magnetron sputtering equipment operates at high temperatures, the high temperature can easily cause the sealing strip to age, harden, and permanently deform, resulting in a loss of elasticity and causing vacuum leakage, which affects the quality of the coating. Utility Model Content

[0004] The purpose of this invention is to provide a cabinet door structure for magnetron sputtering equipment, which solves the problem that the high temperature during operation of magnetron sputtering equipment in the prior art easily leads to aging, hardening and permanent deformation of the sealing strip, causing it to lose its elasticity, thereby causing vacuum leakage and affecting the quality of the coating.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: A cabinet door structure for a magnetron sputtering device includes a vacuum chamber with a placement opening on its side wall. A cabinet door for closing the placement opening is rotatably connected to the outer side wall of the vacuum chamber via a hinge. An annular groove is formed on the outer side wall of the vacuum chamber surrounding the placement opening, and a connecting ring is formed within the annular groove. The end of the connecting ring away from the vacuum chamber has a circular groove. A flow cavity is formed in the groove wall surrounding the circular groove inside the connecting ring. An outlet pipe and an inlet pipe, respectively, are provided on the top and bottom outer walls of the connecting ring and are connected to the flow cavity. The outlet pipe and the inlet pipe are embedded through the side wall of the vacuum chamber and connected to a water cooling system. An annular air bladder is provided inside the cabinet door, and the size of the annular air bladder matches the size of the circular groove.

[0006] A further technical solution is that an installation ring groove is provided on the inner side of the cabinet door, one end of the annular airbag is fixed in the installation ring groove, and a vent pipe connected to the inside of the installation ring groove is provided on the outer side of the installation ring groove. The vent pipe is embedded through the cabinet door and connected to an air pump, which is located on the outer side of the cabinet door.

[0007] A further technical solution is that the walls of the mounting ring groove are provided with a heat insulation layer, and the annular airbag is placed inside the mounting ring groove with one end fixedly connected to the heat insulation layer.

[0008] A further technical solution is that an inner rubber ring is provided around the inner ring side wall of the annular groove, and an outer rubber ring is provided around the outer ring side wall of the annular groove.

[0009] A further technical solution is to have an observation window in the middle of the cabinet door.

[0010] Compared with the prior art, the beneficial effects of this utility model are: When it is necessary to seal the placement port, rotate the cabinet door to fit against the outside of the placement port. At this time, the annular airbag is placed in the annular groove and fits tightly against the groove wall. Then, cooling water is supplied through the liquid inlet pipe of the water cooling system. The cooling water flows into the flow chamber to dissipate heat from the connecting ring, preventing the high temperature generated inside the vacuum chamber from being conducted to the connecting ring. The connecting ring conducts the high temperature to the annular airbag, preventing the annular airbag from aging, hardening, and permanently deforming due to high temperature, causing it to lose its elasticity, thereby causing vacuum leakage and affecting the quality of the coating. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the cabinet door structure for a magnetron sputtering device according to this utility model.

[0012] Figure 2 This is a schematic diagram showing another state of the cabinet door structure for a magnetron sputtering device according to this utility model.

[0013] Figure 3 This is a schematic diagram of the connecting ring structure of this utility model.

[0014] Figure 4 This is a cross-sectional view of the cabinet door structure of this utility model.

[0015] Figure 5 This utility model Figure 4 Enlarged structural diagram at point A in the middle.

[0016] Icons: 1-Vacuum chamber, 2-Placement port, 3-Cabinet door, 4-Annular groove, 5-Connecting ring, 6-Circular groove, 7-Flow chamber, 8-Liquid outlet pipe, 9-Liquid inlet pipe, 10-Annular airbag, 11-Mounting ring groove, 12-Ventilation pipe, 13-Air pump, 14-Insulation layer, 15-Inner rubber ring, 16-Outer rubber ring, 17-Observation window. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0018] All electrical components involved in this application are prior art. Those skilled in the art understand their connection methods. With the help of those skilled in the art, all electrical components in this application and their compatible power supplies can be connected by wires. According to the actual situation, a suitable controller can be selected to meet the control requirements. For specific connections and control sequences, please refer to the description below. The electrical connection between each electrical component is completed in the order of operation. The detailed connection methods are well known in the art. The following mainly introduces the working principle and process, and will not describe the electrical control.

[0019] Example 1 Reference Figures 1 to 5 This utility model discloses a cabinet door structure for a magnetron sputtering device, comprising a vacuum chamber 1, a placement opening 2 on the side wall of the vacuum chamber 1, and a cabinet door 3 for closing the placement opening 2, which is rotatably connected to the outer wall of the vacuum chamber 1 via a hinge. A door lock mechanism for locking the cabinet door 3 is provided at the end away from the hinge. The door lock mechanism and the vacuum chamber 1 are compatible with the corresponding pumping system, gas control system, target material and power supply, substrate holder and heating / cooling system, and control system. These are common technical knowledge for those skilled in the art, and the corresponding installation relationships and structures can be directly obtained from common knowledge; therefore, they will not be elaborated further here. The placement opening 2 is enclosed on the outer wall of the vacuum chamber 1. An annular groove 4 is provided, and a connecting ring 5 is enclosed within the annular groove 4. The end of the connecting ring 5 away from the vacuum chamber 1 is provided with a circular groove 6. A flow cavity 7 is provided around the groove wall of the circular groove 6 inside the connecting ring 5. The cross-section of the flow cavity 7 is U-shaped. The circular groove 6 is placed in the U-shaped opening. The top outer wall and bottom outer wall of the connecting ring 5 are respectively provided with an outlet pipe 8 and an inlet pipe 9 that are connected to the flow cavity 7. The outlet pipe 8 and the inlet pipe 9 are embedded through the side wall of the vacuum chamber 1 and are connected to a water cooling system. An annular airbag 10 is provided inside the cabinet door 3. The annular airbag 10 is a high-temperature resistant airbag fabric made of nylon 66 coated with silicone. The size of the annular airbag 10 matches the size of the circular groove 6.

[0020] In this embodiment, when it is necessary to seal the placement port 2, the rotating cabinet door 3 is placed against the outside of the placement port 2. At this time, the annular airbag 10 is placed in the annular groove 6 and is tightly fitted with the groove wall of the annular groove 6. Then, cooling water is delivered through the liquid inlet pipe 9 of the water cooling system. The cooling water flows into the flow chamber 7 to dissipate heat from the connecting ring 5, preventing the high temperature generated inside the vacuum chamber 1 from being conducted to the connecting ring 5. The connecting ring 5 conducts the high temperature to the annular airbag 10, preventing the annular airbag 10 from aging, hardening and permanently deforming due to high temperature, causing it to lose its elasticity, thereby causing vacuum leakage and affecting the quality of the coating.

[0021] The water cooling system includes a chiller, a water pump, and a heat exchanger. In use, the water pump delivers cooling water to the flow chamber 7 through the inlet pipe 9. The high-temperature cooling water in the flow chamber 7 absorbs heat and flows into the heat exchanger through the outlet pipe 8. After being cooled by the chiller, it flows back into the flow chamber 7 through the heat inlet pipe, thus achieving a cooling effect through this cycle. The relevant structural diagrams of the cooling system are not shown.

[0022] Example 2 Based on Example 1, referring to Figures 1 to 5 The cabinet door 3 has an installation groove 11 on the inside. One end of the annular airbag 10 is fixed in the installation groove 11. The outside of the installation groove 11 is provided with a vent pipe 12 that communicates with the inside. The vent pipe 12 is embedded through the cabinet door 3 and is connected to an air pump 13. The air pump 13 is located on the outside of the cabinet door 3.

[0023] In this embodiment, when it is necessary to seal the placement port 2, the cabinet door 3 is rotated and placed against the outside of the placement port 2. At this time, the mounting annular groove 11 is aligned with the circular annular groove 6. Then, the air pump 13 is controlled to work and inflate the annular airbag 10 through the air pipe 12, so that the annular airbag 10 inflates and is placed in the circular annular groove 6, and abuts against the groove wall of the circular annular groove 6, thereby achieving a seal on the placement port 2. This avoids the poor sealing performance of the vacuum cavity 1 caused by the aging and deformation of the sealing strip in the prior art. After the coating is completed, the air pump 13... The gas in the annular airbag 10 is extracted, and then the annular airbag 10 contracts and is placed in the mounting annular groove 11, so that the cabinet door 3 can be opened; by setting an air pump 13, the air pump 13 can inflate or deflate the annular airbag 10 through the air pipe 12, so that the annular airbag 10 inflates or contracts under the operation of the air pump 13, thereby ensuring the smooth sliding of the annular airbag 10 into or out of the annular groove 6. At the same time, the inflation of the annular airbag 10 can ensure the tight fit between the annular airbag 10 and the annular groove 6.

[0024] As a preferred implementation method, refer to Figures 1 to 5Each of the mounting ring grooves 11 has a heat insulation layer 14 on its groove wall. The annular airbag 10 is placed in the mounting ring groove 11 and its end is fixedly connected to the heat insulation layer 14. The heat insulation layer 14 can be made of materials such as graphite felt / hard felt.

[0025] Specifically, by setting up the heat insulation layer 14, the high temperature generated inside the vacuum chamber 1 during operation can be prevented from being conducted to the annular airbag 10 through the cabinet door 3.

[0026] As a preferred implementation method, refer to Figures 1 to 5 An inner rubber ring 15 is provided around the inner ring side wall of the annular groove 6, and an outer rubber ring 16 is provided around the outer ring side wall of the annular groove 6.

[0027] Specifically, by setting an outer rubber ring 16 and an inner rubber ring 15, the inner ring side of the annular airbag 10 is tightly fitted with the outer ring side of the inner rubber ring 15, and the outer ring side of the annular airbag 10 is tightly fitted with the inner ring side of the outer rubber ring 16, thereby improving its sealing performance.

[0028] Example 3 Based on Example 1, referring to Figures 1 to 5 An observation window 17 is provided in the middle of the cabinet door 3. By setting the observation window 17, it is easy to observe the internal condition of the vacuum chamber 1.

[0029] Although the present invention has been described herein with reference to several illustrative embodiments, it should be understood that many other modifications and implementations can be devised by those skilled in the art, which will fall within the scope and spirit of the principles disclosed herein. More specifically, various variations and modifications can be made to the components and / or layout of the subject matter combination within the scope of the disclosure, drawings, and claims. Besides variations and modifications to the components and / or layout, other uses will be apparent to those skilled in the art.

Claims

1. A cabinet door structure for a magnetron sputtering device, comprising a vacuum chamber (1), wherein a placement opening (2) is provided on the side wall of the vacuum chamber (1), and a cabinet door (3) for closing the placement opening (2) is rotatably connected to the outer side wall of the vacuum chamber (1) via a hinge, characterized in that: An annular groove (4) is provided on the outer wall of the vacuum chamber (1) to surround the placement opening (2). A connecting ring (5) is provided inside the annular groove (4). A circular groove (6) is provided at one end of the connecting ring (5) away from the vacuum chamber (1). A flow cavity (7) is provided around the groove wall of the circular groove (6) inside the connecting ring (5). An outlet pipe (8) and an inlet pipe (9) connected to the flow cavity (7) are respectively provided on the top and bottom outer walls of the connecting ring (5). The outlet pipe (8) and the inlet pipe (9) are embedded through the side wall of the vacuum chamber (1) and are connected to a water cooling system. An annular airbag (10) is provided inside the cabinet door (3). The size of the annular airbag (10) matches the size of the circular groove (6).

2. The cabinet door structure for a magnetron sputtering equipment according to claim 1, characterized in that: The cabinet door (3) has an installation ring groove (11) on its inner side. One end of the annular airbag (10) is fixed in the installation ring groove (11). The outer side of the installation ring groove (11) is provided with a ventilation pipe (12) that communicates with its interior. The ventilation pipe (12) is embedded through the cabinet door (3) and is connected to an air pump (13). The air pump (13) is located on the outer side of the cabinet door (3).

3. The cabinet door structure for a magnetron sputtering equipment according to claim 2, characterized in that: The mounting ring groove (11) is provided with a heat insulation layer (14) on its groove wall. The annular airbag (10) is placed in the mounting ring groove (11) and its end is fixedly connected to the heat insulation layer (14).

4. The cabinet door structure for a magnetron sputtering equipment according to claim 3, characterized in that: An inner rubber ring (15) is provided around the inner ring side wall of the annular groove (6), and an outer rubber ring (16) is provided around the outer side wall of the annular groove (6).

5. The cabinet door structure for a magnetron sputtering equipment according to claim 1, characterized in that: The cabinet door (3) has an observation window (17) in the middle.

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