Vacuum check device

Abstract

The utility model provides a kind of vacuum check device, the first accommodating cavity of vacuum check device is provided with first interface component for with outside communication;Second accommodating cavity is provided with second interface component, second interface component has second interface for with outside communication, second interface is set in second accommodating cavity and is set along gravity direction downward;Sealing liquid is contained in first accommodating cavity and / or second accommodating cavity;First pipeline has first pipe orifice and second pipe orifice, first pipe orifice is communicated first accommodating cavity, second pipe orifice is communicated second accommodating cavity, second pipe orifice is lower than second interface;Floating sealing assembly includes floating element, floating element is floated based on liquid level height under the buoyancy of sealing liquid, floating element at least partially opposite with second interface.This utility model discloses check device only needs trace liquid level change to realize the switching between sealing and opening of second interface, with higher response speed, and smaller size.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment, and in particular relates to a vacuum check device. Background Technology

[0002] In existing vacuum systems, when the vacuum pump stops working, the pressure difference between the inside and outside of the system can cause external air to backflow into the vacuum system through the vacuum pump, resulting in a decrease in vacuum level, media contamination, and even equipment damage. A vacuum check device is used to prevent air backflow when the vacuum pump stops.

[0003] Currently used vacuum check devices are generally mechanical check systems and liquid-sealed tanks. However, mechanical check systems have poor micro-pressure sealing performance and slow response speed, while liquid-sealed tanks are large in volume and generally require a liquid column height of more than 1.5 meters. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to provide a vacuum check device, comprising:

[0005] The first receiving cavity is provided with a first interface component for communicating with the outside;

[0006] The second receiving cavity is provided with a second interface component, the second interface component having a second interface for communicating with the outside, the second interface being disposed inside the second receiving cavity and facing downward along the direction of gravity;

[0007] A sealing fluid is contained in the first receiving cavity and / or the second receiving cavity;

[0008] The first pipeline has a first port and a second port, the first port being connected to the first receiving cavity, the second port being connected to the second receiving cavity, and the second port being lower than the second interface.

[0009] A floating sealing assembly includes a floating element that floats based on the liquid level under the buoyancy of the sealing fluid, and the floating element is at least partially opposite to the second interface;

[0010] The sealing fluid flows into the first receiving cavity through the first pipeline, and the first pipe opening is immersed in the sealing fluid, and the floating component detaches from the second interface;

[0011] The sealing fluid flows back to the second receiving cavity through the first pipeline, and the second pipe opening is immersed in the sealing fluid. The floating component floats up to abut against the second interface and seals.

[0012] In some embodiments, the floating sealing assembly includes a connector, one end of which is connected to the floating member and the other end of which is connected to the second receiving cavity, the connector being used to determine the floating trajectory of the floating member.

[0013] In some embodiments, the connector is a rigid connecting rod, which is rotatably connected to the second receiving cavity, and the rotation trajectory of the rigid connecting rod is located in a vertical plane along the direction of gravity.

[0014] In some embodiments, the floating element is a float, and the ratio of the float diameter d to the diameter of the third port D is 1 ≤ d : D ≤ 1.2.

[0015] In some embodiments, the first interface component includes a third receiving cavity, the third receiving cavity having a first interface for communicating with the outside, the third receiving cavity communicating with the first receiving cavity, and the communication position being higher than the highest liquid level in the first receiving cavity.

[0016] In some embodiments, the first interface component further includes a second conduit, through which the first receiving cavity and the third receiving cavity are connected. One end of the second conduit is close to the inner bottom wall of the third receiving cavity, and the other end is connected to the first receiving cavity. The end of the second conduit located in the first receiving cavity is higher than the highest liquid level in the first receiving cavity.

[0017] In some embodiments, the area of ​​the first receiving cavity along the horizontal plane is greater than the area of ​​the second receiving cavity along the horizontal plane.

[0018] In some embodiments, the second interface component further includes:

[0019] A fourth receiving cavity, wherein the fourth receiving cavity is provided with a third interface for communicating with the outside;

[0020] The third conduit has a third port and a fourth port, the third port being connected to the second receiving cavity to form a second interface, and the fourth port being connected to the fourth receiving cavity.

[0021] In some embodiments, the fourth port is close to the inner bottom wall of the fourth receiving cavity.

[0022] In some embodiments, the vacuum check device further includes a level gauge for monitoring the liquid level in the first and / or second accommodating cavities.

[0023] In some embodiments, the level gauge is a magnetic float level gauge disposed in the first receiving cavity, used to monitor the liquid level height in the first receiving cavity.

[0024] Beneficial effects:

[0025] The vacuum check device provided by this utility model has a first receiving cavity and a second receiving cavity connected by a first pipeline. The first receiving cavity is connected to a vacuum pump through a first interface assembly, and the second receiving cavity is connected to a vacuum system through a second interface assembly. When the vacuum pump operates to evacuate the vacuum system, part of the sealing liquid in the second receiving cavity is drawn into the first receiving cavity, causing the liquid level in the second receiving cavity to drop. The floating element disengages from the second interface, and the gas in the vacuum system is extracted by the vacuum pump through the entire vacuum check device. When the vacuum pump stops operating, under the action of external air pressure, the external gas flows back from the first interface assembly to the first receiving cavity. The sealing liquid in the first receiving cavity is forced into the second receiving cavity through the first pipe opening, causing the liquid level in the second receiving cavity to rise. This causes the floating element to float up and abut against the second interface for sealing, cutting off the airflow passage in the vacuum check device and preventing gas backflow, thus achieving the check function. The vacuum check device of this disclosure requires only a small amount of liquid flow to achieve the check effect, has a fast response speed, good sealing effect under low pressure, and a smaller volume compared to a liquid-sealed tank. Attached Figure Description

[0026] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0027] Figure 1 This is a schematic diagram of the vacuum check device of this utility model;

[0028] Figure 2 This is another schematic diagram of the vacuum check device of this utility model;

[0029] Figure 3 This is another schematic diagram of the vacuum check device of this utility model;

[0030] Figure 4 This is another schematic diagram of the vacuum check device of this utility model;

[0031] Figure 5 This is another schematic diagram of the vacuum check device of this utility model;

[0032] Figure 6 This is another schematic diagram of the vacuum check device of this utility model;

[0033] Figure 7 This is another schematic diagram of the vacuum check device of this utility model;

[0034] Figure 8 This is another schematic diagram of the vacuum check device of this utility model;

[0035] Figure 9 This is a schematic diagram of the vacuum check device of this utility model;

[0036] Figure 10 This is a schematic diagram of the second receiving cavity structure of the vacuum check device of this utility model;

[0037] Figure 11 This is a schematic diagram of the second receiving cavity structure of the vacuum check device of this utility model;

[0038] Figure label:

[0039] 1. First receiving cavity; 11. First interface assembly; 111. Third receiving cavity; 112. First interface; 112. Second pipeline; 2. Second receiving cavity; 21. Second interface assembly; 211. Second interface; 212. Fourth receiving cavity; 213. Third interface; 214. Third pipeline; 215. Third port; 216. Fourth port; 3. Sealing fluid; 4. First pipeline; 41. First port; 42. Second port; 5. Floating sealing assembly; 51. Floating component; 52. Connector; 6. Level gauge. Detailed Implementation

[0040] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model are within the protection scope of the present utility model.

[0041] A vacuum check valve is a device used to prevent air backflow when a vacuum pump stops. When a vacuum pump is used to evacuate a vacuum system, if the pump stops working, external gas will flow back into the vacuum system due to the pressure difference between the inside and outside of the system. A vacuum check valve can prevent this backflow.

[0042] Existing vacuum check devices generally use mechanical check structures or liquid-sealed tanks. However, mechanical check structures have poor hydraulic sealing and slow response speed, while liquid-sealed tanks are large in volume and generally require the liquid column height to be more than 1.5 meters.

[0043] To solve the above-mentioned technical problems, this disclosure proposes a vacuum check device.

[0044] Figure 1 This is a schematic diagram of a vacuum check device of this utility model, as shown below. Figure 1As shown, the vacuum check device includes a first receiving cavity 1, a second receiving cavity 2, a sealing fluid 3, a first pipeline 4, and a floating sealing assembly 5. The first receiving cavity 1 is provided with a first interface assembly 11 for communication with the outside; the second receiving cavity 2 is provided with a second interface assembly 21, which has a second interface 211 for communication with the outside. The second interface 211 is located within the second receiving cavity 2 and is positioned downwards along the direction of gravity. The sealing fluid 3 is contained within the first receiving cavity 1; the first pipeline 4 has a first port 41 and a second port 42. The first port 41 connects to the first receiving cavity 1, and the second port 42 connects to the second receiving cavity 2. The second port 42 is lower than the first receiving cavity 1. The second interface 211; the floating sealing assembly 5 includes a floating element 51, which floats based on the liquid level under the buoyancy of the sealing liquid 3. The floating element 51 is at least partially opposite to the second interface 211. When the sealing liquid 3 flows to the first receiving cavity 1 through the first pipe 4, the first pipe opening 41 is immersed in the sealing liquid 3, and the floating element 51 is separated from the second interface 211. When the sealing liquid 3 flows back to the second receiving cavity 2 through the first pipe 4, the second pipe opening 42 is immersed in the sealing liquid 3, and the floating element 51 floats up to abut against the second interface 211 for sealing.

[0045] In some embodiments of this disclosure, the vacuum check assembly includes a first receiving cavity 1 and a second receiving cavity 2 connected by a first pipe 4. A sealing liquid 3 and a floating element 51 are disposed in the second receiving cavity 2. When the vacuum check device of this disclosure is connected between a vacuum pump and a vacuum system, when the vacuum pump is turned on, the sealing liquid 3 in the second receiving cavity 2 is drawn into the first receiving cavity 1 through the first pipe 4, causing the liquid level in the second receiving cavity 2 to drop. The floating element 51 in the second receiving cavity 2 then drops and detaches from the second interface 211, allowing gas in the vacuum system to be extracted by the vacuum pump through the vacuum check device. When the vacuum pump stops working, external gas flows back into the vacuum check device under the action of the internal and external pressure difference. The sealing liquid 3 in the first receiving cavity 1 flows back into the second receiving cavity 2 through the first pipe 41 under the action of gas pressure, causing the liquid level in the second receiving cavity 2 to rise. The floating element 51 then floats up until it abuts against the second interface 211, sealing and blocking the backflow of gas in the vacuum check device, thus achieving the check effect.

[0046] In some embodiments of this disclosure, only a small amount of sealing fluid 3 needs to flow back from the first receiving cavity 1 to the second receiving cavity 2 to cause the floating member 51 to float and seal the second interface 211, achieving a check valve effect. Compared to traditional mechanical check valve structures, this method offers a faster response speed and better performance under low pressure. Compared to liquid-sealed tanks that require a height of over 1.5 meters, the liquid level of the vacuum check valve in this disclosure is independent of atmospheric pressure, allowing for a smaller volume (especially in height). Because the vacuum check valve in this disclosure does not require overcoming the pressure of the sealing fluid 3 itself during vacuuming, a higher vacuum rate can be achieved when the vacuum pump uses the vacuum check valve in this disclosure to evacuate the vacuum system.

[0047] In some embodiments of this disclosure, the sealing liquid 3 may also be contained in the second receiving cavity 2, or the sealing liquid 3 may be contained in both the first receiving cavity 1 and the second receiving cavity 2.

[0048] In some embodiments of this disclosure, the descriptions such as "the sealing fluid 3 is contained in the first receiving cavity 1" and "the sealing fluid 3 is contained in the second receiving cavity 2" are merely descriptions of the initial state of the vacuum check device of this disclosure. Regardless of whether the sealing fluid 3 is contained in the first receiving cavity 1, the second receiving cavity 2, or both in the first receiving cavity 1 and the second receiving cavity 2 in the initial state, the sealing fluid 3 can flow between the first receiving cavity 1 and the second receiving cavity 2 during the process of evacuating and stopping the evacuation.

[0049] In some embodiments of this disclosure, the composition and material of the sealing liquid 3 and the floating component 51 can be selected according to actual needs, as long as the overall density of the floating component 51 is less than that of the sealing liquid 3, allowing the floating component 51 to float up and down with the liquid level. The overall density of the floating component 51 does not refer to the material density of the floating component 51, but rather to the ratio of the total weight of the floating component 51 to its overall volume. By setting a hollow structure, floating components 51 made of the same material can have different densities. For example, the floating component 51 can be made of stainless steel, and the overall density of the floating component 51 can be reduced to 0.8 g / cm³ through a hollow structure. 3 And select those with a density greater than 0.8 g / cm³. 3 The sealing fluid 3 is used in conjunction with it.

[0050] In some embodiments of this disclosure, in order to achieve a better floating effect for the floating component 51, the ratio of the overall density of the floating component 51 to the density of the sealing liquid 3 can be limited. For example, the overall density ρ of the floating component 51 can be set as follows: 浮 With sealing fluid 3 density ρ 液 The ratio is set to 0.7 ≤ ρ 浮 / ρ 液 ≤0.9.

[0051] In some embodiments of this disclosure, such as Figure 1 As shown, the floating sealing assembly 5 includes a connector 52, one end of which is connected to the floating member 51 and the other end is connected to the second receiving cavity 2. The connector 52 is used to determine the floating trajectory of the floating member 51.

[0052] In some embodiments of this disclosure, the floating trajectory of the floating member 51 is restricted by the connection member 52 so that the floating member 51 can be accurately aligned with and sealed to the second interface 211 after it floats up.

[0053] In some embodiments of this disclosure, other structures may be used instead of connector 52. For example, a guide tube may be provided below the second interface 211 to guide the upward floating direction of the floating member 51; another example is that a guide rod may be provided below the second interface 211, and the floating member 51 may be sleeved on the guide rod and float up and down along the guide rod.

[0054] In some embodiments of this disclosure, such as Figure 1 As shown, the connector 52 is a rigid connecting rod, and the rigid connecting rod and the second receiving cavity 2 are configured to be rotatably connected. The rotation trajectory of the rigid connecting rod is located in a vertical plane along the direction of gravity.

[0055] In some embodiments of this disclosure, a rigid connecting rod is used to limit the floating component 51, which can accurately constrain the floating trajectory of the floating component 51 without causing wear to the floating component 51, thereby improving the accuracy and effectiveness of the sealing of the second port 42 by the floating component 51.

[0056] In some embodiments of this disclosure, one end of the rigid connecting rod is connected to the floating member 51, and the other end is connected to the inner wall of the second receiving cavity 2. Preferably, when the rigid connecting rod is in a horizontal state (i.e., the rigid connecting rod is perpendicular to the orientation of the second interface 211), the floating member 51 and the second interface 211 abut and seal. This arrangement ensures that when the floating member 51 abuts against the second interface 211, its movement direction is vertical, that is, directly opposite to the orientation of the second interface 211, which makes the abutment between the floating member 51 and the second interface 211 more stable and avoids local edge collisions between the floating member 51 and the second interface 211.

[0057] In some embodiments of this disclosure, the connector 52 may also be a flexible connector 52, and the connection position between the flexible connector 52 and the second receiving cavity 2 may be directly below the second interface 211.

[0058] In some embodiments of this disclosure, the floating element 51 is a float, and the ratio of the float diameter d to the diameter of the third port 215D is 1≤d:D≤1.2.

[0059] In some embodiments of this disclosure, the floating element 51 is configured as a float, the edge of which can more evenly and tightly seal with the second interface 211. The diameter ratio of the float and the second interface 211 is set to 1 to 1.2, which can both seal the second interface 211 and avoid the float occupying too much space.

[0060] In some embodiments of this disclosure, the floating member 51 may also be configured in other forms, such as plate-shaped, block-shaped, etc., as long as it can effectively block the second interface 211.

[0061] Figure 2 Another schematic diagram of the vacuum check device of this utility model is shown below. Figure 2 As shown, the first interface component 11 includes a third receiving cavity 111. The third receiving cavity 111 has a first interface 112 for communicating with the outside. The third receiving cavity 111 is connected to the first receiving cavity 1, and the connection position is higher than the highest liquid level in the first receiving cavity 1.

[0062] In some embodiments of this disclosure, by providing a third receiving cavity 111 in the first interface component 11, the first receiving cavity 1 is not directly connected to the outside, which reduces the rate of evaporation and loss of the sealing liquid 3 in the first receiving cavity 1, eliminating the need for frequent addition of the sealing liquid 3 and reducing the maintenance burden.

[0063] In some embodiments of this disclosure, the highest liquid level in the first receiving cavity 1 can refer to the highest liquid level that can be reached in the first receiving cavity 1 when the sealing liquid 3 in the second receiving cavity 2 flows into the first receiving cavity 1 and the liquid surface in the second receiving cavity 2 separates from the second pipe opening 42.

[0064] Accordingly, the highest liquid level in the second receiving cavity 2 can refer to the highest liquid level that can be reached in the second receiving cavity 2 when the sealing liquid 3 in the first receiving cavity 1 flows into the second receiving cavity 2 until the liquid surface in the first receiving cavity 1 separates from the first pipe opening 41.

[0065] In some embodiments of this disclosure, the liquid level in the first receiving cavity 1 can be maintained at a reference level of 10 mm. In some embodiments of this disclosure, the liquid level can have an error of 0.5 mm, that is, the liquid level can be maintained at 10 ± 0.5 mm.

[0066] Figure 3 This is another schematic diagram of the vacuum check device of this utility model, as shown below. Figure 3 As shown, the first interface component 11 also includes a second pipe 112. The first receiving cavity 1 and the third receiving cavity 111 are connected through the second pipe 112. One end of the second pipe 112 is close to the inner bottom wall of the third receiving cavity 111, and the other end is connected to the first receiving cavity 1. The end of the second pipe 112 located in the first receiving cavity 1 is higher than the highest liquid level in the first receiving cavity 1.

[0067] In some embodiments of this disclosure, one end of the second pipe 112 is close to the inner bottom wall of the third receiving cavity 111, making it easier for the sealing liquid 3 evaporated in the first receiving cavity 1 to be reliquefied in the third receiving cavity 111 after entering the third receiving cavity 111 with the airflow during vacuuming. Furthermore, the reliquefied sealing liquid 3 can be re-pressed into the first receiving cavity 1 through the second pipe 112 under external air pressure after vacuuming stops. Therefore, the vacuum check device of this disclosure can return the sealing liquid 3 that has evaporated and leaked from the first receiving cavity 1, extending its service life and further reducing maintenance burden.

[0068] In some embodiments of this disclosure, the area of ​​the second receiving cavity 2 along the horizontal plane is smaller than the area of ​​the first receiving cavity 1 along the horizontal plane.

[0069] In some embodiments of this disclosure, the smaller the area along the horizontal plane, the greater the change in liquid level height when the same volume of sealing fluid 3 is injected or discharged. By setting the area along the horizontal plane of the second receiving cavity 2 to be smaller than that of the first receiving cavity 1, the sealing fluid 3 in the first receiving cavity 1 only needs to drop slightly to raise the liquid level in the second receiving cavity 2 to the point where the floating member 51 abuts against the second interface 211. This allows the first receiving cavity 1 to serve as a storage space for the sealing fluid 3, thus meeting the requirements for liquid level changes in the second receiving cavity 2.

[0070] Figure 4 This is another schematic diagram of the vacuum check device of this utility model, as shown below. Figure 4 As shown, the second interface assembly 21 also includes a fourth receiving cavity 212 and a third conduit 214. The fourth receiving cavity 212 has a third interface 213 for communicating with the outside. The third conduit 214 has a third port 215 and a fourth port 216. The third port 215 is connected to the second receiving cavity 2 to form a second interface 211, and the fourth port 216 is connected to the fourth receiving cavity 212.

[0071] In some embodiments of this disclosure, a fourth receiving cavity 212 is provided in the second interface component 21 so that the second receiving cavity 2 is not directly connected to the outside, thereby reducing the evaporation and loss of the sealing liquid 3 in the second receiving cavity 2.

[0072] In some embodiments of this disclosure, the third interface 213 may be connected to a vacuum system using a flange structure.

[0073] Figure 5 This is another schematic diagram of the vacuum check device of this utility model, as shown below. Figure 5 As shown, the fourth port 216 is close to the inner bottom wall of the fourth receiving cavity 212.

[0074] In some embodiments of this disclosure, the fourth port 216 is positioned close to the inner bottom wall of the fourth receiving cavity 212. After the sealing liquid 3 in the second receiving cavity 2 evaporates, it enters the fourth receiving cavity 212 through the third pipe 214. After liquefaction, it can be drawn back into the second receiving cavity 2 by the fourth port 216 of the third pipe 214, thereby reducing the loss of sealing liquid 3 in the vacuum check device and reducing the frequency of liquid addition.

[0075] Figure 6 This is another schematic diagram of the vacuum check device of this utility model, as shown below. Figure 6 As shown, the vacuum check device also includes a level gauge 6, which is used to monitor the liquid level in the first receiving cavity 1.

[0076] In some embodiments of this disclosure, a level gauge 6 is installed in the vacuum check device to monitor the liquid level in the first receiving cavity 1. This allows for real-time monitoring of the liquid level in the first receiving cavity 1, thereby determining whether the sealing fluid 3 in the first receiving cavity 1 is sufficient to achieve vacuum check. Furthermore, if the bottom area (or horizontal area) of the first receiving cavity 1 is larger than the bottom area (or horizontal area) of the second receiving cavity 2, monitoring the liquid level in the first receiving cavity 1 allows for a more accurate determination of the total amount of remaining sealing fluid 3 in the vacuum check device. This enables the timely addition of sealing fluid 3 as needed.

[0077] In some embodiments of this disclosure, the level gauge 6 can also be used to monitor the liquid level in the second receiving cavity 2.

[0078] In some embodiments of this disclosure, a level gauge is used to monitor the liquid level in the second receiving cavity 2. The liquid level in the second receiving cavity 2 can be monitored in real time, and it can be determined whether the liquid level in the second receiving cavity 2 is sufficient to allow the floating member 51 to abut and seal with the second interface 211 when the vacuuming stops, so as to avoid insufficient sealing due to insufficient sealing liquid 3.

[0079] In some embodiments of this disclosure, a level gauge can also be used to simultaneously monitor the liquid levels in the first receiving cavity 1 and the second receiving cavity 2, so as to obtain the liquid level information of the first receiving cavity 1 and the second receiving cavity 2 more accurately and to grasp the working status of the vacuum check device.

[0080] In some embodiments of this disclosure, a magnetic float level gauge can be used. The magnetic float level gauge can accurately and promptly reflect changes in the liquid level within the vacuum check device. It can not only monitor the remaining amount of sealing fluid 3, but also monitor the flow process of the sealing fluid 3 between the first receiving cavity 1 and the second receiving cavity 2, thereby monitoring the vacuuming and check process.

[0081] Of course, other types of level gauges can also be used to monitor the liquid level in the first receiving cavity 1 and the second receiving cavity 2, and this disclosure does not limit this.

[0082] In some embodiments of this disclosure, the level gauge can be used in conjunction with a level indicator line to indicate the lowest or highest liquid level.

[0083] In some embodiments of this disclosure, the level gauge in the vacuum check device of this disclosure needs to acquire high-precision level data, with the accuracy controlled within ±0.1 mm.

[0084] It should be noted that, Figure 6 The appearance and installation position of the liquid level gauge in the figure are only illustrative. The installation and use of the liquid level gauge are well known to those skilled in the art, and this disclosure will not elaborate on them.

[0085] In some embodiments of this disclosure, the vacuum check device is further provided with a liquid replenishment device, which has a high accuracy, for example, within ±1 ml. The liquid replenishment device can be automatic or manual, as long as it can perform the liquid replenishment function and meet the accuracy requirements.

[0086] In some embodiments of this disclosure, the inner diameters of the first pipe 4, the second pipe 112, and the third pipe 214 should meet certain requirements, for example, the inner diameter can be set to be greater than or equal to 5 mm.

[0087] Figure 7 This is another schematic diagram of the vacuum check device of this utility model. Figure 8 This is another schematic diagram of the vacuum check device of this utility model, as shown below. Figure 7 , Figure 8 As shown, the check valve includes a third receiving cavity 111, a first receiving cavity 1, a second receiving cavity 2 and a fourth receiving cavity 212 connected in sequence. The third receiving cavity 111 and the first receiving cavity 1 are connected by a second pipe 112, the first receiving cavity 1 and the second receiving cavity 2 are connected by a first pipe 4, and the second receiving cavity 2 and the fourth receiving cavity 212 are connected by a third pipe 214. The floating sealing assembly 5 is disposed in the second receiving cavity 2.

[0088] In some embodiments of this disclosure, such as Figure 7 As shown, when the vacuum system is activated, the airflow in the vacuum system enters the vacuum check device through the third port 213, and then flows through the fourth receiving chamber 212, the third pipeline 214, the second receiving chamber 2, the first pipeline 4, the first receiving chamber 1, the second pipeline 112, the third receiving chamber 111, and the first port 112 to the vacuum pump, thus achieving vacuuming. During this process, the sealing liquid 3 in the second receiving chamber 2 is drawn into the first receiving chamber 1 until the second port 42 separates from the liquid surface in the second receiving chamber 2.

[0089] In some embodiments of this disclosure, such as Figure 8As shown, when the vacuum pump stops, the air pressure in the direction of the vacuum pump is relatively large. The airflow enters the vacuum check device from the vacuum pump through the first interface 112, and then enters the first receiving chamber 1 through the third receiving chamber 111 and the second pipeline 112. This forces part of the sealing liquid 3 in the first receiving chamber 1 back to the second receiving chamber 2 through the first pipeline 4, causing the floating part 51 to rise and seal the third pipe opening 215, thus achieving the check effect.

[0090] Figure 9 This is a schematic diagram of the vacuum check device of this utility model, as shown below. Figure 6 As shown, the structural principle of the vacuum check device disclosed herein can be realized through various structures. For example, a closed outer shell can be set as the first receiving cavity 1, and independent spaces can be divided inside the first receiving cavity 1 to serve as the second receiving cavity 2, the third receiving cavity 111, and the fourth receiving cavity 212.

[0091] In some embodiments of this disclosure, the second receiving cavity 2, the third receiving cavity 111 and the fourth receiving cavity 212 are disposed inside the first receiving cavity 1, which can make the appearance and structure of the vacuum check device simpler.

[0092] In some embodiments of this disclosure, such as Figure 9 As shown, the first receiving cavity 1, the second receiving cavity 2, the third receiving cavity 111, and the fourth receiving cavity 212 can be configured as cylinders. Of course, the first receiving cavity 1, the second receiving cavity 2, the third receiving cavity 111, and the fourth receiving cavity 212 can also be configured as other shapes.

[0093] In some embodiments of this disclosure, the first receiving cavity 1, the second receiving cavity 2, the third receiving cavity 111, and the fourth receiving cavity 212 may be configured with the same shape or with different shapes.

[0094] Figure 10 This is a schematic diagram of the second receiving cavity structure of the vacuum check device of this utility model. Figure 11 This is a schematic diagram of the second receiving cavity structure of the vacuum check device of this utility model, as shown below. Figure 10 As shown, during vacuuming, part of the sealing fluid 3 in the second receiving cavity 2 is drawn into the first receiving cavity 1, causing the liquid level in the second receiving cavity 2 to drop, the floating element 51 to descend, and the second interface 211 to open. After vacuuming stops, external air pressure forces the sealing fluid 3 in the first receiving cavity 1 into the second receiving cavity 2, causing the liquid level in the second receiving cavity 2 to rise, as shown... Figure 11 As shown, the floating component 51 rises to abut and seal with the second interface 211.

[0095] In some embodiments of this disclosure, the vacuum check device has been significantly improved in various aspects. Specifically, in terms of performance, the leakage rate is reduced to 10%. -6Pa·L / s, system pressure drop less than 100Pa, pressure drop less than 50Pa with gas flow, response time 0.25 seconds to 0.3 seconds; in terms of structure, the volume can be reduced by 80% compared with traditional liquid seal tanks, and because there are almost no mechanical wear parts, the service life can reach more than five years; in terms of cost, energy consumption can be reduced by more than 40%, and the annual loss of sealing fluid can be less than 5%.

[0096] In some embodiments of this disclosure, the material of the vacuum check device can be selected as needed to give the vacuum check device of this disclosure different characteristics.

[0097] For example, for commonly used vacuum check devices (which can be called standard vacuum check devices), the outer casing dimensions can be controlled to a diameter of 150 mm and a height of 300 mm, using a flange interface with a nominal diameter of 50 mm. Each receiving cavity can be made of 316L stainless steel, with an inner surface roughness of less than 0.4 μm, and the sealing fluid can be perfluoropolyether oil with a vapor pressure of less than 10. -8 Pa. Its applicable vacuum level can reach 10. -1 Pa to 10 -5 The operating temperature can reach -20℃ to 120℃, and the maximum air flow rate can reach 15L / s. This vacuum check device needs to be installed vertically (the vertical deviation needs to be less than 1°) and requires liquid level calibration to ensure that the liquid level is 10±0.5 mm.

[0098] For example, for vacuum check devices requiring corrosion resistance (which can be called corrosion-resistant vacuum check devices), the main material (such as the first, second, third, and fourth receiving cavities) can be Hastelloy C-276, with the surface subjected to electrolytic polishing and passivation treatment, and the sealing fluid can be fluorinated liquid FC-72. The corrosion-resistant vacuum check device disclosed herein can be applied to highly corrosive environments, such as semiconductor etching equipment, corrosive gas treatment in the chemical industry, and aseptic production lines in the pharmaceutical industry, but is not limited to these applications.

[0099] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A vacuum check device, characterized in that, include: The first receiving cavity is provided with a first interface component for communicating with the outside; The second receiving cavity is provided with a second interface component, the second interface component having a second interface for communicating with the outside, the second interface being disposed inside the second receiving cavity and facing downward along the direction of gravity; A sealing fluid is contained in the first receiving cavity and / or the second receiving cavity; The first pipeline has a first port and a second port, the first port being connected to the first receiving cavity, the second port being connected to the second receiving cavity, and the second port being lower than the second interface. A floating sealing assembly includes a floating element that floats based on the liquid level under the buoyancy of the sealing fluid, and the floating element is at least partially opposite to the second interface; The sealing fluid flows into the first receiving cavity through the first pipeline, and the first pipe opening is immersed in the sealing fluid, and the floating component detaches from the second interface; The sealing fluid flows back to the second receiving cavity through the first pipeline, and the second pipe opening is immersed in the sealing fluid. The floating component floats up to abut against the second interface and seals.

2. The vacuum check device according to claim 1, characterized in that, The floating sealing assembly includes a connector, one end of which is connected to the floating member and the other end of which is connected to the second receiving cavity. The connector is used to determine the floating trajectory of the floating member.

3. The vacuum check device according to claim 2, characterized in that, The connector is a rigid connecting rod, which is rotatably connected to the second receiving cavity. The rotation trajectory of the rigid connecting rod is located in a vertical plane along the direction of gravity.

4. The vacuum check device according to claim 3, characterized in that, The floating component is a float, and the ratio of the float diameter d to the diameter of the third pipe opening D is 1 ≤ d : D ≤ 1.

2.

5. The vacuum check device according to any one of claims 1-4, characterized in that, The first interface component includes a third receiving cavity, the third receiving cavity having a first interface for communicating with the outside, the third receiving cavity communicating with the first receiving cavity, and the communicating position being higher than the highest liquid level in the first receiving cavity.

6. The vacuum check device according to claim 5, characterized in that, The first interface component further includes a second conduit, through which the first receiving cavity and the third receiving cavity are connected. One end of the second conduit is close to the inner bottom wall of the third receiving cavity, and the other end is connected to the first receiving cavity. The end of the second conduit located in the first receiving cavity is higher than the highest liquid level in the first receiving cavity.

7. The vacuum check device according to any one of claims 1-4, characterized in that, The area of ​​the second receiving cavity along the horizontal plane is smaller than the area of ​​the first receiving cavity along the horizontal plane.

8. The vacuum check device according to any one of claims 1-4, characterized in that, The second interface component also includes: A fourth receiving cavity, wherein the fourth receiving cavity is provided with a third interface for communicating with the outside; The third conduit has a third port and a fourth port, the third port being connected to the second receiving cavity to form a second interface, and the fourth port being connected to the fourth receiving cavity.

9. The vacuum check device according to claim 8, characterized in that, The fourth port is close to the inner bottom wall of the fourth receiving cavity.

10. The vacuum check device according to any one of claims 1-4, characterized in that, The vacuum check device also includes a level gauge for monitoring the liquid level in the first and / or second accommodating cavities.

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