Molecular pump test stand

Abstract

The utility model discloses molecular pump test stand relates to molecular pump test technical field. Including test stand bottom plate, the bottom fixed mounting of test stand bottom plate has drive motor, the output fixed mounting of drive motor has drive link, the fixed mounting of drive link has lower gear on, the upper end surface fixed mounting of test stand bottom plate has electric push rod, the output shaft fixed mounting of electric push rod has jacking plate, be provided with positioning assembly on jacking plate, the fixed mounting of test stand bottom plate has support rod, the fixed mounting of support rod has test stand top plate. The utility model discloses the cooperation of positioning assembly and test component is used, ensures that molecular pump is stable and is fixed in the testing process and keeps the optimum distance with detection component, thereby improves test accuracy and reliability, strengthens the comprehensive detection ability to molecular pump test stand each test area simultaneously with rotatable test head, effectively promotes test effect.

Description

Technical Field

[0001] This utility model relates to the field of molecular pump testing technology, specifically to a molecular pump testing fixture. Background Technology

[0002] A molecular pump is a device that uses a high-speed rotating rotor or turbine blade to transfer gas molecules from the pump inlet to the outlet through momentum transfer, thereby generating a high or ultra-high vacuum in a vacuum system. It is typically used in applications requiring extremely low gas pressure, such as semiconductor manufacturing, particle accelerators, and surface science experiments.

[0003] In existing technologies, the fixation of molecular pumps often relies on manual operation or simple mechanical fixation, which can easily lead to inaccurate positioning or insecure fixation, thus affecting the stability of the testing process and the accuracy of the data. At the same time, existing technologies may not be flexible enough when adjusting the distance between the molecular pump and the detection component, and are easily limited by human factors or equipment precision, resulting in inaccurate adjustment or inability to adjust quickly. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a molecular pump test fixture, which solves the problems mentioned in the background section.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A molecular pump test fixture includes a test fixture base plate, a drive motor is fixedly installed at the bottom end of the test fixture base plate, a drive rod is fixedly installed at the output end of the drive motor, a lower gear is fixedly installed on the drive rod, an electric push rod is fixedly installed on the upper end face of the test fixture base plate, a lifting plate is fixedly installed on the output shaft of the electric push rod, and a positioning component is provided on the lifting plate;

[0007] A support rod is fixedly installed on the base plate of the test frame, and a test frame top plate is fixedly installed on the support rod. Test components are provided on the test frame top plate.

[0008] Preferably, the positioning component includes multiple bearings fixedly mounted, each bearing having a positioning shaft fixedly mounted on it, a positioning gear fixedly mounted on the positioning shaft, a drive disc fixedly mounted at the top of the positioning shaft, and a connecting rod rotatably mounted on the drive disc.

[0009] Preferably, an installation block is fixedly installed on the upper end face of the lifting plate, a placement plate is fixedly installed on the installation block, a sliding groove is provided on the placement plate, a clamping plate is slidably installed inside the sliding groove, and a connecting rod is rotatably installed at the bottom end of the clamping plate.

[0010] Preferably, the positioning gear is located outside the lower gear, the positioning gear meshes with the lower gear, and the end of the connecting rod away from the drive disc is rotatably mounted to the connecting rod.

[0011] Preferably, the test assembly includes an upper gear fixedly mounted on a drive rod, a test shaft rotatably mounted on the top plate of the test frame, and a test gear fixedly mounted on the test shaft.

[0012] Preferably, a test frame plate is fixedly installed at the end of the test gear away from the top plate of the test frame, and a test head is fixedly installed on the lower end face of the test frame plate.

[0013] Preferably, the lifting plate has a circular hole, and the end of the drive rod away from the drive motor passes through the circular hole and is rotatably mounted on the top plate of the test frame.

[0014] Preferably, a support rod is fixedly installed on the lower end face of the test frame base plate, and the number of support rods is multiple and evenly distributed.

[0015] This invention provides a molecular pump test fixture. Compared with the prior art, it has the following advantages:

[0016] 1. This utility model places the molecular pump to be tested on a placement plate, and then drives the drive rod to rotate through the drive motor. When the drive rod rotates, it drives the lower gear to rotate. The lower gear meshes with the positioning gear. When the positioning gear rotates, it drives the drive disk to rotate through the positioning shaft. When the drive disk rotates, multiple clamping plates on the placement plate move inward simultaneously through the cooperation of the connecting rod and the connecting rod, the cooperation of the connecting rod and the clamping plate, and the limiting sliding of the clamping plate and the sliding groove. The molecular pump is fixed in position by multiple clamping plates. Then, the lifting plate is raised by the electric push rod to adjust the distance between the molecular pump and the detection component. This fixing method and distance adjustment can effectively ensure the stability of the molecular pump during the test, thereby ensuring the accuracy and reliability of the test data.

[0017] 2. In this utility model, when the lower gear and the positioning gear are not meshed, and after the position of the lifting plate is adjusted, the drive motor drives the upper gear on the drive rod to rotate. The upper gear meshes with the test gear, and when the test gear rotates, it drives the test head on the test frame plate to rotate through the test shaft. The rotatable test head can be used to quickly adjust the position of the test head. Usually, the test head contacts different positions of the molecular pump, which effectively improves the test effect of the molecular pump. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2This is a cross-sectional view of the test rack base plate in this utility model;

[0020] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0021] Figure 4 This is a schematic diagram of the structure of the placement plate in this utility model;

[0022] Figure 5 This is a schematic diagram of the upper gear in this utility model.

[0023] In the diagram: 1. Test frame base plate; 2. Drive motor; 3. Drive rod; 4. Lower gear; 5. Electric push rod; 6. Lifting plate; 7. Support rod; 8. Test frame top plate; 9. Bearing; 10. Positioning shaft; 11. Positioning gear; 12. Drive disc; 13. Linkage rod; 14. Mounting block; 15. Placement plate; 16. Sliding groove; 17. Clamping plate; 18. Connecting rod; 19. Upper gear; 20. Test shaft; 21. Test gear; 22. Test frame plate; 23. Test head; 24. Circular hole; 25. Support rod. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-5 This utility model is a molecular pump test frame, including a test frame base plate 1. A drive motor 2 is fixedly installed at the bottom end of the test frame base plate 1. A drive rod 3 is fixedly installed at the output end of the drive motor 2. A lower gear 4 is fixedly installed on the drive rod 3. An electric push rod 5 is fixedly installed on the upper end surface of the test frame base plate 1. A lifting plate 6 is fixedly installed on the output shaft of the electric push rod 5. A positioning component is provided on the lifting plate 6. A support rod 7 is fixedly installed on the test frame base plate 1. A test frame top plate 8 is fixedly installed on the support rod 7. A test component is provided on the test frame top plate 8. A support rod 25 is fixedly installed on the lower end surface of the test frame base plate 1. There are multiple support rods 25, which are evenly distributed. Multiple support rods 25 are used to ensure the stability of the test frame base plate 1 and ensure the accuracy of the molecular pump during testing.

[0026] The positioning assembly includes multiple bearings 9 fixedly mounted, each bearing 9 having a fixedly mounted positioning shaft 10. A positioning gear 11 is fixedly mounted on each positioning shaft 10. A drive disc 12 is fixedly mounted at the top of the positioning shaft 10, and a connecting rod 13 is rotatably mounted on the drive disc 12. A mounting block 14 is fixedly mounted on the upper surface of the lifting plate 6, and a placement plate 15 is fixedly mounted on the mounting block 14. A sliding groove 16 is formed on the placement plate 15, and a clamping plate 17 is slidably mounted inside the sliding groove 16. A connecting rod 18 is rotatably mounted at the bottom end of the device. The positioning gear 11 is located outside the lower gear 4 and meshes with the lower gear 4. The end of the connecting rod 13 away from the drive plate 12 is rotatably mounted with the connecting rod 18. The lower gear 4 is located between the lifting plate 6 and the test frame base plate 1, and the lower gear 4 and the positioning gear 11 are on the same horizontal plane. When the lifting plate 6 is raised, the lower gear 4 and the positioning gear 11 do not mesh. When the lower gear 4 rotates, it will not affect the clamping plate 17 on the lifting plate 6.

[0027] In this embodiment, during use, the molecular pump to be tested is placed on the placement plate 15, and then the drive motor 2 drives the drive rod 3 to rotate. When the drive rod 3 rotates, it drives the lower gear 4 to rotate. The lower gear 4 meshes with the positioning gear 11. When the positioning gear 11 rotates, it drives the drive disk 12 to rotate through the positioning shaft 10. When the drive disk 12 rotates, it utilizes the cooperation between the connecting rod 13 and the connecting rod 18, the cooperation between the connecting rod 13 and the clamping plate 17, and the limiting sliding of the clamping plate 17 and the sliding groove 16. Multiple clamping plates 17 on the placement plate 15 will move inward at the same time, using multiple clamping plates 17 to fix the position of the molecular pump. Then, the electric push rod 5 drives the lifting plate 6 to rise, adjusting the distance between the molecular pump and the detection component. This fixing method and distance adjustment can effectively ensure the stability of the molecular pump during the testing process, thereby ensuring the accuracy and reliability of the test data.

[0028] The test assembly includes an upper gear 19 fixedly mounted on the drive rod 3, a test shaft 20 rotatably mounted on the test frame top plate 8, a test gear 21 fixedly mounted on the test shaft 20, a test frame plate 22 fixedly mounted on the end of the test gear 21 away from the test frame top plate 8, a test head 23 fixedly mounted on the lower end face of the test frame plate 22, and a circular hole 24 opened on the lifting plate 6. The end of the drive rod 3 away from the drive motor 2 passes through the circular hole 24 and is rotatably mounted on the test frame top plate 8. The circular hole 24 is used to ensure that the lifting plate 6 will not affect the drive rod 3 when it is raised. The structure and principle of the test head 23 and the molecular pump are technologies well known to those skilled in the art and will not be described in detail here.

[0029] In this embodiment, when the lower gear 4 and the positioning gear 11 are not meshed, and the position of the lifting plate 6 is adjusted, the drive motor 2 drives the upper gear 19 on the drive rod 3 to rotate. The upper gear 19 meshes with the test gear 21. When the test gear 21 rotates, it drives the test head 23 on the test frame plate 22 to rotate through the test shaft 20. The position of the test head 23 can be quickly adjusted by using the rotatable test head 23. The test head 23 is usually in contact with different positions of the molecular pump, which effectively improves the test effect of the molecular pump.

[0030] Working principle: In use, the molecular pump to be tested is placed on the placement plate 15. Then, the drive motor 2 drives the drive rod 3 to rotate. When the drive rod 3 rotates, it drives the lower gear 4 to rotate. The lower gear 4 meshes with the positioning gear 11. When the positioning gear 11 rotates, it drives the drive disk 12 to rotate through the positioning shaft 10. When the drive disk 12 rotates, it utilizes the cooperation between the connecting rod 13 and the connecting rod 18, the cooperation between the connecting rod 13 and the clamping plate 17, and the limiting sliding of the clamping plate 17 and the sliding groove 16. The multiple clamping plates 17 on the placement plate 15 will move inward at the same time, using the multiple clamping plates 17 to fix the position of the molecular pump. Then, the electric push rod 5 drives the pump to be lifted. When plate 6 is raised, the distance between the molecular pump and the detection component is adjusted. This fixing method and distance adjustment can effectively ensure the stability of the molecular pump during the testing process. When the lower gear 4 and the positioning gear 11 are not meshed, and the position of the lifting plate 6 is adjusted, the drive motor 2 drives the upper gear 19 on the drive rod 3 to rotate. The upper gear 19 meshes with the test gear 21. When the test gear 21 rotates, it will drive the test head 23 on the test frame plate 22 to rotate through the test shaft 20. The position of the test head 23 can be quickly adjusted using the rotatable test head 23. Usually, the test head 23 contacts the molecular pump at different positions, which effectively improves the testing effect of the molecular pump.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0032] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A molecular pump test fixture, including a test fixture base plate (1), characterized in that: A drive motor (2) is fixedly installed at the bottom end of the test frame base plate (1). A drive rod (3) is fixedly installed at the output end of the drive motor (2). A lower gear (4) is fixedly installed on the drive rod (3). An electric push rod (5) is fixedly installed on the upper end face of the test frame base plate (1). A lifting plate (6) is fixedly installed on the output shaft of the electric push rod (5). A positioning component is provided on the lifting plate (6). A support rod (7) is fixedly installed on the base plate (1) of the test frame, and a test frame top plate (8) is fixedly installed on the support rod (7). Test components are provided on the test frame top plate (8).

2. The molecular pump test fixture according to claim 1, characterized in that: The positioning assembly includes multiple bearings (9) fixedly installed, each bearing (9) having a positioning shaft (10) fixedly installed on it, a positioning gear (11) fixedly installed on the positioning shaft (10), a drive disc (12) fixedly installed at the top of the positioning shaft (10), and a connecting rod (13) rotatably installed on the drive disc (12).

3. The molecular pump test fixture according to claim 2, characterized in that: An installation block (14) is fixedly installed on the upper end face of the lifting plate (6). A placement plate (15) is fixedly installed on the installation block (14). A sliding groove (16) is provided on the placement plate (15). A clamping plate (17) is slidably installed inside the sliding groove (16). A connecting rod (18) is rotatably installed at the bottom end of the clamping plate (17).

4. The molecular pump test fixture according to claim 3, characterized in that: The positioning gear (11) is located outside the lower gear (4), and the positioning gear (11) meshes with the lower gear (4). The end of the connecting rod (13) away from the drive disc (12) is rotatably mounted with the connecting rod (18).

5. The molecular pump test fixture according to claim 1, characterized in that: The test assembly includes an upper gear (19) fixedly mounted on a drive rod (3), a test shaft (20) rotatably mounted on the top plate (8) of the test frame, and a test gear (21) fixedly mounted on the test shaft (20).

6. The molecular pump test fixture according to claim 5, characterized in that: The test gear (21) is fixedly mounted on a test frame plate (22) at one end away from the test frame top plate (8), and a test head (23) is fixedly mounted on the lower end face of the test frame plate (22).

7. The molecular pump test fixture according to claim 1, characterized in that: The lifting plate (6) has a circular hole (24), and the end of the drive rod (3) away from the drive motor (2) passes through the circular hole (24) and is rotatably mounted on the top plate (8) of the test frame.

8. The molecular pump test fixture according to claim 1, characterized in that: The lower end face of the test frame base plate (1) is fixedly installed with a support rod (25), and there are multiple support rods (25) evenly distributed.

Images