Anti-adhesion structure of inner wall of traction wheel of turbomolecular pump and turbomolecular pump

Abstract

The utility model provides a kind of turbine molecular pump traction wheel inner wall's anti-adhesion structure and turbine molecular pump, including coating substrate and anti-adhesion coating;The coating substrate is fixedly attached to the inner wall of traction wheel, and the anti-adhesion coating is attached to the inner surface of coating substrate.The utility model is by attaching coating substrate in turbine traction wheel inner wall, and the structure of anti-adhesion coating is coated on the inner surface of coating substrate, solve the problem that reaction product and particulate pollutant adhere to the inner wall of traction wheel, and without turbine elevated temperature gasification reaction product, also without high temperature coating process to turbine to make its material phase change, reduce the loss of stoppage of work caused by occasional factor, further still can extend the maintenance cycle of molecular pump, to reduce the loss of stoppage of work caused by regular maintenance while reducing maintenance cost.

Description

Technical Field

[0001] This utility model relates to the field of molecular pump technology, specifically to an anti-adhesion structure for the inner wall of a turbomolecular pump traction wheel and a turbomolecular pump, and more particularly to a structure and turbomolecular pump suitable for preventing the adhesion of reaction products and particulate pollutants to the inner wall of a turbomolecular pump traction wheel. Background Technology

[0002] When molecular pumps are applied to processes such as etching, CVD (chemical vapor deposition), and MOCVD (metal-organic chemical vapor deposition) in fields such as semiconductors, display panels, and LED / OLED, reaction products and particulate contaminants are easily attached to the inner wall of the traction wheel under centrifugal force, forming a hard and thick adhesion layer under vacuum conditions. The direct consequences include: 1. When the molecular pump needs to be shut down for maintenance or malfunction, the turbine rotor (including the traction wheel) expands and contracts under centrifugal force, causing some of the deposited layer to crack and fall off, accumulating inside the pump body. This can easily scratch the traction wheel upon restarting. 2. More seriously, because the deposited layer (attachment) is only partially detached, it disrupts the original dynamic balance of the turbine, increases turbine vibration, and reduces the stability and reliability of the molecular pump, easily causing the turbine rotor to become unstable, fall, or be damaged by impact. 3. It disrupts the factory's internal molecular pump maintenance cycle. Since this situation is highly unpredictable, if it occurs prematurely, the molecular pump must be taken off the machine for replacement and maintenance, disrupting the original maintenance plan and causing downtime and production losses. 4. Because the products and particulate pollutants are mostly dry, hard, and firmly attached, maintaining the molecular pump will cause significant trouble for cleaning operations and environmental pressure.

[0003] For many years, this problem has remained unresolved for the following reasons: 1. Turbines are made of aluminum alloy, and the temperature cannot be further increased to remove reaction products through vaporization, otherwise they will be destroyed by centrifugal force due to decreased strength; 2. Current mainstream anti-adhesion coating processes often involve high temperatures. Forcibly coating the turbine will cause the aluminum alloy material used to make the turbine to undergo a phase change, resulting in a decrease in its mechanical properties and rendering it unusable; For example, a turbomolecular pump disclosed in patent document CN106246563A raises the temperature of the rotor cylinder through a heater, making it less likely for reaction products to accumulate. However, this method has the aforementioned problem of decreasing the mechanical properties of the turbine, posing a significant safety hazard. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an anti-adhesion structure for the inner wall of a turbomolecular pump traction wheel and a turbomolecular pump.

[0005] The anti-adhesion structure of the inner wall of the traction wheel of the turbomolecular pump provided by this utility model includes a coating substrate and an anti-adhesion coating. The coating substrate is fixedly attached to the inner wall of the traction wheel, and the anti-adhesion coating is attached to the inner surface of the coating substrate.

[0006] Preferably, the coated substrate has a cylindrical structure, and its outer diameter is the same as the inner diameter of the traction wheel.

[0007] Preferably, the coating substrate comprises a stainless steel substrate or an aluminum alloy substrate, and the wall thickness of the coating substrate is 0.4-0.9 mm.

[0008] Preferably, the outer wall of the coated substrate is fixedly adhered to the inner wall of the traction wheel using an adhesive.

[0009] Preferably, the adhesive comprises epoxy resin.

[0010] Preferably, the anti-adhesion coating includes one of Teflon coating, silicone resin coating, and graphene coating.

[0011] According to the turbomolecular pump provided by this utility model, the inner wall of the traction wheel of the turbomolecular pump is fixedly fitted with the anti-adhesion structure of the inner wall of the traction wheel of the turbomolecular pump.

[0012] Compared with the prior art, the present invention has the following beneficial effects: This invention solves the problem of reaction products and particulate contaminants adhering to the inner wall of the traction wheel by attaching a coated substrate to the inner wall of the turbine traction wheel and coating the inner surface of the substrate with an anti-adhesion coating. It also eliminates the need to raise the turbine temperature to vaporize the reaction products or to perform a high-temperature coating process on the turbine to cause a phase change in its material. This reduces losses from downtime caused by unforeseen factors and extends the maintenance cycle of the molecular pump, thereby reducing maintenance costs and minimizing downtime losses caused by regular maintenance. Attached Figure Description

[0013] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0014] The diagram shows: Detailed Implementation

[0015] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0016] This utility model discloses an anti-adhesion structure for the inner wall of a turbomolecular pump traction wheel and a turbomolecular pump. By attaching a coated substrate to the inner wall of the turbomolecular pump traction wheel and coating an anti-adhesion coating on the inner surface of the coated substrate, the problem of reaction products and particulate pollutants adhering to the inner wall of the traction wheel is solved. Moreover, it eliminates the need to raise the temperature of the turbomolecular pump to vaporize the reaction products and eliminates the need to perform a high-temperature coating process on the turbomolecular pump to cause a phase change in its material.

[0017] According to the anti-adhesion structure of the inner wall of the traction wheel of the turbomolecular pump provided by this utility model, such as Figure 1 As shown, the system includes a coated substrate 2 and an anti-adhesion coating 3. The coated substrate 2 is fixedly attached to the inner wall of the traction wheel 1, and the anti-adhesion coating 3 is attached to the inner surface of the coated substrate 2. When the turbine (including the traction wheel) operates at high speed, centrifugal force causes the coated substrate 2 and the anti-adhesion coating 3 to adhere tightly to the inner wall of the traction wheel 1, preventing them from detaching. Due to the anti-adhesion effect of the anti-adhesion coating 3, the reaction products of the etching process will not adhere to the inner wall of the traction wheel 1. This avoids the series of problems mentioned above.

[0018] This invention involves attaching a coated substrate 2 to the inner wall of the traction wheel 1, with an anti-adhesion coating 3 applied to the surface of the substrate 2. This simple process perfectly solves a series of problems caused by the adhesion of reaction products: it eliminates the need to raise the turbine temperature to vaporize the reaction products, and it also eliminates the need for a high-temperature coating process to cause a phase change in the turbine material. Since the reaction products no longer adhere to the inner wall of the traction wheel, equipment maintenance can be performed according to schedule, reducing losses from downtime caused by unforeseen factors. A greater advantage is that this method can significantly extend the maintenance cycle of the molecular pump, not only reducing maintenance costs for users but also further minimizing downtime losses due to scheduled maintenance. It is simple, effective, and inexpensive.

[0019] In a preferred embodiment, the coated substrate 2 has a cylindrical structure, with its outer diameter being the same as the inner diameter of the traction wheel 1. The material of the coated substrate 2 is aluminum alloy or stainless steel. Before mounting, the coated substrate 2 is a flat structure, which is bent into a cylindrical structure during mounting. Its wall thickness is mostly only a few tenths of a millimeter, which is sufficient to meet the requirements. There is no need to emphasize its strength and lightweight, because it is mounted on the inner wall and its centrifugal force is borne by the traction wheel, so there is no high strength requirement.

[0020] In a preferred embodiment, the outer wall of the coated substrate 2 is fixedly adhered to the inner wall of the traction wheel 1 by an adhesive, the adhesive including epoxy resin.

[0021] In a preferred embodiment, the anti-adhesion coating 3 includes one of a Teflon coating, a silicone resin coating, and a graphene coating.

[0022] According to the turbomolecular pump provided by this utility model, the inner wall of the traction wheel 1 of the turbomolecular pump is fixedly fitted with the anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel.

[0023] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0024] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. An anti-adhesion structure for the inner wall of a turbomolecular pump traction wheel, characterized in that, Includes a coated substrate (2) and an anti-adhesion coating (3); The outer surface of the coating substrate (2) is fixedly attached to the inner wall of the traction wheel (1), and the anti-adhesion coating (3) is applied to the inner surface of the coating substrate (2).

2. The anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel according to claim 1, characterized in that, The coated substrate (2) has a cylindrical structure, and its outer diameter is the same as the inner diameter of the traction wheel (1).

3. The anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel according to claim 2, characterized in that, The coated substrate (2) includes a stainless steel substrate or an aluminum alloy substrate, and the wall thickness of the coated substrate (2) is 0.4-0.9 mm.

4. The anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel according to claim 1, characterized in that, The outer wall of the coated substrate (2) is fixedly attached to the inner wall of the traction wheel (1) by adhesive.

5. The anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel according to claim 4, characterized in that, The adhesive includes epoxy resin.

6. The anti-adhesion structure of the inner wall of the turbomolecular pump traction wheel according to claim 1, characterized in that, The anti-adhesion coating (3) includes one of Teflon coating, silicone resin coating and graphene coating.

7. A turbomolecular pump, characterized in that, The inner wall of the traction wheel (1) of the turbomolecular pump is fixedly fitted with an anti-adhesion structure for the inner wall of the turbomolecular pump traction wheel as described in any one of claims 1-6.

Images