Electrostatic chuck rapid exhaust structure

Abstract

The utility model discloses a kind of electrostatic chuck quick exhaust structure, it includes: vacuum bin, vacuum bin includes electrostatic chuck, and the position of electrostatic chuck is located inside vacuum bin, the lower surface of vacuum bin is fixedly connected with exhaust structure main body, the central position of exhaust structure main body is fixedly connected with motor, the output end of motor is fixedly connected with rotating rod, the lower end of rotating rod is fixedly connected with bevel gear one, the outer surface of bevel gear one is engaged with bevel gear two, by setting three vacuum pumps, and by pipeline directly with built-in electrostatic chuck's vacuum bin connection, increase the exhaust speed of vacuum bin, simultaneously by the drive of motor, three vacuum pumps can be moved out exhaust structure main body, it is convenient to maintain vacuum pump;By rotating screw rod two, the led spotlight position outside vacuum pump can be adjusted, can be targeted to illuminate the pipeline interface, motor wiring and other key parts of vacuum pump.

Description

Technical Field

[0001] This utility model relates to the field of exhaust structure technology, and in particular to an electrostatic chuck rapid exhaust structure. Background Technology

[0002] When an electrostatic chuck approaches another object without static electricity, due to electrostatic induction, the side of the object without static electricity closest to the charged object will accumulate charges of opposite polarity. Since opposite charges attract each other, this phenomenon of "electrostatic adsorption" occurs. Existing rapid exhaust structures for electrostatic chucks require the removal of inert gas from the connecting pipe to achieve pressure differential balance between the top and bottom of the disc in the vacuum chamber. However, this process takes a long time to remove residual inert gas, resulting in increased time efficiency. Utility Model Content

[0003] The purpose of this invention is to at least solve one of the technical problems existing in the prior art, and to provide an electrostatic chuck rapid exhaust structure that solves the problem of the long time required to remove residual inert gas.

[0004] This utility model also provides a rapid exhaust structure with an electrostatic chuck, comprising: a vacuum chamber, the vacuum chamber including an electrostatic chuck located inside the vacuum chamber; an exhaust structure body fixedly connected to the lower surface of the vacuum chamber; a motor fixedly connected to the center of the exhaust structure body; a rotating rod fixedly connected to the output end of the motor; a bevel gear one fixedly connected to the lower end of the rotating rod; a bevel gear two meshing with the outer surface of the bevel gear one; a lead screw one fixedly connected to the inner wall of the bevel gear two; a movable seat threadedly connected to the outer surface of the lead screw one; a mounting base fixedly connected to the inner side of the movable base; a vacuum pump mounted on the inner side of the mounting base; the vacuum pumps fixedly connected to the vacuum chamber via pipes; three vacuum pumps evenly distributed within the exhaust structure body; a lead screw two rotatably connected to the center of the mounting base; a movable frame threadedly connected to the outer surface of the lead screw two; and an LED spotlight fixedly connected to the upper end of the movable frame, the LED spotlight located outside the vacuum pump.

[0005] Preferably, a handle is fixedly connected to the upper end of the second lead screw, and the handle is located below the vacuum pump.

[0006] Preferably, a fixing plate is fixedly connected inside the main body of the exhaust structure, the outer surface of the lead screw is rotatably connected to the fixing plate, and the end of the lead screw away from the bevel gear is rotatably connected to the main body of the exhaust structure.

[0007] Preferably, an identification box is fixedly connected to the outer surface of the vacuum chamber, and an identification plate is placed inside the identification box.

[0008] Preferably, a base is fixedly connected to the lower surface of the exhaust structure body, and the lower end of the rotating rod is rotatably connected to the base.

[0009] Preferably, the mounting base is provided with a sliding groove, and the outer surface of the movable frame is slidably connected to the sliding groove.

[0010] Preferably, the exhaust structure body is provided with a second sliding groove, and the outer surface of the movable seat is slidably connected to the second sliding groove.

[0011] Preferably, the outer surface of the movable seat is provided with a vent, and the vent is located outside the vacuum pump, while the first bevel gear, the second bevel gear, and the first lead screw are located inside the exhaust structure body.

[0012] Beneficial effects:

[0013] The electrostatic chuck rapid exhaust structure of this technical solution increases the exhaust speed of the vacuum chamber by setting up three vacuum pumps and connecting them directly to the vacuum chamber with built-in electrostatic chucks through pipes. At the same time, the three vacuum pumps can be moved out of the main body of the exhaust structure by the motor drive, which facilitates the maintenance of the vacuum pumps. By rotating the second lead screw, the position of the LED spotlight on the outside of the vacuum pump can be adjusted, which can specifically illuminate the key parts of the vacuum pump such as the pipe interface and motor wiring. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0015] Figure 1 This is an overall structural diagram of the electrostatic chuck rapid exhaust structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the motor connection for the electrostatic chuck rapid exhaust structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the rotating rod connection of the electrostatic chuck rapid exhaust structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the mounting base connection for the electrostatic chuck rapid exhaust structure of this utility model.

[0019] Legend:

[0020] 1. Vacuum chamber; 2. Main body of exhaust structure; 3. Motor; 4. Rotating rod; 5. Bevel gear one; 6. Bevel gear two; 7. Lead screw one; 8. Moving seat; 9. Mounting seat; 10. Vacuum pump; 11. Lead screw two; 12. Moving frame; 13. LED spotlight; 14. Handle; 15. Fixing plate; 16. Identification box; 17. Base; 18. Slide one; 19. Slide two. Detailed Implementation

[0021] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0022] Reference Figure 1-4This utility model discloses a rapid exhaust structure for an electrostatic chuck, comprising: a vacuum chamber 1, providing a closed space to accommodate the electrostatic chuck and the workpiece to be adsorbed, providing a basic environment for electrostatic adsorption and exhaust; an exhaust structure removes internal air to form a vacuum environment suitable for the process, ensuring stable electrostatic force; the vacuum chamber 1 is evacuated internally by a vacuum pump 10 to form a low-pressure area; the electrostatic chuck uses electrostatic force to adsorb the surface of the object, commonly used for reliable clamping of workpieces with high flatness and no sensitive particulate contamination; it also includes an inert gas control and delivery module, which is an existing structure; the vacuum chamber 1 includes the electrostatic chuck, and the electrostatic chuck is located inside the vacuum chamber 1; an exhaust structure body 2 is fixedly connected to the lower surface of the vacuum chamber 1, integrating transmission and exhaust components. The vacuum pump 10 is driven to work and move through its internal structure. A motor 3 is fixedly connected to the center of the exhaust structure body 2, providing power to rotate the rotating rod 4, which in turn triggers subsequent transmission links. The output end of the motor 3 is fixedly connected to the rotating rod 4, which, as the motor 3 rotates, drives the first bevel gear 5 to rotate, transmitting power to the second bevel gear 6. The lower end of the rotating rod 4 is fixedly connected to the first bevel gear 5, which, as the rotating rod 4 rotates, drives the second bevel gear 6 to rotate through gear meshing, achieving power steering. The outer surface of the first bevel gear 5 is meshed with the second bevel gear 6, which, driven by the first bevel gear 5, rotates synchronously, driving the lead screw 7 to rotate, transmitting power to the lead screw 7. The inner wall of the second bevel gear 6 is fixedly connected to the lead screw 7, converting rotational motion into linear motion. During rotation... The movable seat 8 moves along the axis of the lead screw 7 via a threaded drive. The movable seat 8 is threadedly connected to the outer surface of the lead screw 7 and slides along the slide groove 19 as the lead screw 7 rotates, driving the vacuum pump 10 to enter and exit the exhaust structure body 2. The inner side of the movable seat 8 is fixedly connected to the mounting seat 9, providing a mounting point for the vacuum pump 10. At the same time, the movable frame 12 is guided to move via the slide groove 18. The vacuum pump 10 is installed inside the mounting seat 9, which removes air from the vacuum chamber 1 to achieve rapid exhaust. After starting, it generates negative pressure and draws air from the vacuum chamber 1 through the pipeline to reduce the air pressure inside the chamber. It mainly consists of a pump body, impeller assembly, and chamber. The pump captures and discharges gas through the interface (valve, pipeline, seal) with the chamber, thereby maintaining a low-pressure state. This is the existing structure. Vacuum pump 10 is fixedly connected to vacuum chamber 1 via a pipe. Three vacuum pumps 10 are provided and evenly distributed in the exhaust structure body 2. A lead screw 11 is rotatably connected to the center of mounting base 9. When rotated, the moving frame 12 moves up and down along the axis of lead screw 11 through threaded transmission, changing the position of LED spotlight 13. The moving frame 12 is threadedly connected to the outer surface of lead screw 11, carrying the LED spotlight 13 and realizing the adjustment of the spotlight position. The upper end of the moving frame 12 is fixedly connected to the LED spotlight 13, providing efficient and stable light for illuminating details in the area. It mainly consists of LED chip, electrical interface and driving circuit, etc. When the external voltage drives the LED chip to generate electron-hole recombination through the PN junction, photons are released to form visible light.The LED spotlight 13 is located outside the vacuum pump 10.

[0023] A handle 14 is fixedly connected to the upper end of the lead screw 11. The handle 14 is located below the vacuum pump 10, providing a convenient force point for rotating the lead screw 11. The position of the LED spotlight 13 can be manually adjusted without the need for additional tools, making the operation labor-saving and flexible.

[0024] The exhaust structure body 2 is internally fixedly connected to a fixed plate 15. The outer surface of the lead screw 7 is rotatably connected to the fixed plate 15. The end of the lead screw 7 away from the bevel gear 6 is rotatably connected to the exhaust structure body 2. The fixed plate 15 and the exhaust structure body 2 cooperate to support the lead screw 7, limit its radial sway during transmission, and ensure that the lead screw 7 drives the moving seat 8 to move smoothly.

[0025] A label box 16 is fixedly connected to the outer surface of the vacuum chamber 1. The label box 16 contains a label plate, which can clearly mark the parameters of the vacuum chamber 1 (such as the size of the workpiece to be used and the target vacuum level), so that the operator can quickly obtain key information.

[0026] A base 17 is fixedly connected to the lower surface of the exhaust structure body 2. The lower end of the rotating rod 4 is rotatably connected to the base 17. The base 17 supports the exhaust structure body 2 and provides lower end positioning for the rotating rod 4, reducing vibration when the motor 3 drives the rotating rod 4.

[0027] The mounting base 9 is provided with a slide groove 18. The outer surface of the movable frame 12 is slidably connected to the slide groove 18. The slide groove 18 guides the movable frame 12 to slide along the mounting base 9 in a directional manner, restricts the offset of the movable frame 12, and ensures that when adjusting the screw 11, the LED spotlight 13 can move accurately along the preset trajectory.

[0028] The exhaust structure body 2 is provided with a second slide groove 19. The outer surface of the movable seat 8 is slidably connected to the second slide groove 19. The second slide groove 19 provides a directional sliding path for the movable seat 8, ensuring that when the lead screw 7 drives the movable seat 8, the vacuum pump 10 can smoothly enter and exit the exhaust structure body 2.

[0029] The outer surface of the movable base 8 is provided with a vent, and the vent is located outside the vacuum pump 10. The bevel gear 5, bevel gear 6 and lead screw 7 are located inside the exhaust structure body 2. The vent is located outside the vacuum pump 10, which can quickly dissipate the heat of the vacuum pump 10 and prevent overheating damage. The transmission components are built-in to avoid dust pollution, reduce wear, and protect the operator from accidental injury from the transmission components.

[0030] Working principle: During use, three vacuum pumps 10 are connected to the vacuum chamber 1 through pipes. After generating negative pressure, they quickly extract the air in the vacuum chamber 1, eliminating air pressure interference in the gap and ensuring the stability of the electrostatic chuck adsorption. When maintenance is required on the vacuum pump 10, the output end of the motor 3 drives the rotating rod 4 to rotate. The bevel gear 5 at the lower end of the rotating rod 4 rotates synchronously. The bevel gear 5 drives the bevel gear 6 to rotate through meshing transmission. The lead screw 7, which is fixed to the inner wall of the bevel gear 6, rotates accordingly. The lead screw 7 drives the moving seat 8 and the mounting seat 9 to move through the threaded transmission, finally moving the vacuum pump 10 outside the exhaust structure body 2 for easy maintenance. Then, the handle 14 fixed to the upper end of the lead screw 11 is rotated, driving the lead screw 11 to rotate. The lead screw 11 drives the moving frame 12 and the LED spotlight 13 to adjust the height through the threaded transmission, accurately illuminating the maintenance area of ​​the vacuum pump 10 and solving the problem of insufficient light.

[0031] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A rapid exhaust structure for an electrostatic chuck, characterized in that, include: A vacuum chamber (1) includes an electrostatic chuck, which is located inside the vacuum chamber (1). An exhaust structure body (2) is fixedly connected to the lower surface of the vacuum chamber (1). A motor (3) is fixedly connected to the center of the exhaust structure body (2). A rotating rod (4) is fixedly connected to the output end of the motor (3). A bevel gear (5) is fixedly connected to the lower end of the rotating rod (4). A bevel gear (6) is meshed with the outer surface of the bevel gear (5). A lead screw (7) is fixedly connected to the inner wall of the bevel gear (6). A movable screw is threaded onto the outer surface of the lead screw (7). The movable seat (8) is fixedly connected to the inner side of the movable seat (8), and a vacuum pump (10) is installed on the inner side of the mounting seat (9). The vacuum pump (10) is fixedly connected to the vacuum chamber (1) through a pipe. There are three vacuum pumps (10), which are evenly distributed in the exhaust structure body (2). The center position of the mounting seat (9) is rotatably connected to the second lead screw (11). The outer surface of the second lead screw (11) is threadedly connected to the movable frame (12). The upper end of the movable frame (12) is fixedly connected to the LED spotlight (13). The LED spotlight (13) is located outside the vacuum pump (10).

2. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, A handle (14) is fixedly connected to the upper end of the second lead screw (11), and the handle (14) is located below the vacuum pump (10).

3. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, The exhaust structure body (2) is internally fixedly connected to a fixing plate (15), the outer surface of the lead screw (7) is rotatably connected to the fixing plate (15), and the end of the lead screw (7) away from the bevel gear (6) is rotatably connected to the exhaust structure body (2).

4. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, A label box (16) is fixedly connected to the outer surface of the vacuum chamber (1), and a label is placed inside the label box (16).

5. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, The lower surface of the exhaust structure body (2) is fixedly connected to a base (17), and the lower end of the rotating rod (4) is rotatably connected to the base (17).

6. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, The mounting base (9) is provided with a sliding groove (18), and the outer surface of the movable frame (12) is slidably connected to the sliding groove (18).

7. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, The exhaust structure body (2) is provided with a second sliding groove (19), and the outer surface of the movable seat (8) is slidably connected to the second sliding groove (19).

8. The electrostatic chuck rapid exhaust structure according to claim 1, characterized in that, The outer surface of the movable seat (8) is provided with a vent, and the vent is located outside the vacuum pump (10). The bevel gear one (5), bevel gear two (6) and lead screw one (7) are located inside the exhaust structure body (2).

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