Semiconductor cleaning machine frame structure

Abstract

The utility model relates to frame technical field, concretely relates to a semiconductor cleaning machine frame structure, including the bottom plate, the both sides of bottom plate are equipped with movable plate, are equipped with first sliding slot on movable plate, and the both ends of bottom plate are located in two first sliding slots respectively, the both sides of movable plate are equipped with second sliding slot respectively, and the second sliding slot is connected with the sliding plate of sliding, and the sliding plate is fixedly connected with the locating strip on, and the locating groove is equipped with on locating strip, and the bottom of bottom plate and movable plate all are fixedly connected with a plurality of support seat, the inner wall bottom of first sliding slot and second sliding slot is equipped with first rectangular hole respectively, and the bottom of bottom plate and sliding plate all are fixedly connected with the connecting plate, and the connecting plate penetrates the first rectangular hole of corresponding, and the bottom of connecting plate is fixedly connected with the support plate, can provide four accurate positioning angles for different specifications cleaning tank in a plane range, greatly expanded the application scene of frame.

Description

Technical Field

[0001] This utility model relates to the field of frame technology, and in particular to a frame structure for a semiconductor cleaning machine. Background Technology

[0002] In semiconductor manufacturing, cleaning machines are used to remove contaminants. The performance and stability of the cleaning machine directly affect the final product yield. The cleaning tank is a container that holds chemicals and performs core processes such as cleaning, rinsing, and drying. The accuracy of its positioning and the stability of its installation are crucial to the process effect.

[0003] However, it is worth considering that in existing technologies, the cleaning machine frame is usually a fixed structure, or can only be adapted to a few standard sizes of cleaning tanks. When a factory needs to change processes, process wafers of different sizes (such as from 8 inches to 12 inches), or use tanks of different capacities, it cannot adapt to non-standard or new specifications of tanks that may appear in the future.

[0004] Therefore, in order to solve the above problems, a more suitable facility that meets the needs of users is needed. Utility Model Content

[0005] In view of this, the purpose of this utility model is to propose a frame structure for a semiconductor cleaning machine to solve the problem of being unable to adapt to non-standard or new specification tanks that may appear in the future.

[0006] To achieve the above objectives, this utility model provides a semiconductor cleaning machine frame structure, including a base plate, with movable plates on both sides of the base plate, a first sliding groove on the movable plate, and the two ends of the base plate located in the two first sliding grooves respectively. A second sliding groove is provided on both sides of the movable plate, and a sliding plate is slidably connected in the second sliding groove. A positioning strip is fixedly connected to the sliding plate, and a positioning groove is provided on the positioning strip. Several support seats are fixedly connected to the bottom of both the base plate and the movable plate.

[0007] The bottom of the inner wall of the first slide and the second slide are respectively provided with a first rectangular hole, and the bottom of the base plate and the slide plate are fixedly connected with a connecting plate. The connecting plate passes through the corresponding first rectangular hole, and the bottom of the connecting plate is fixedly connected with a support plate. The bottom of the movable plate is fixedly connected with a pressing component for pressing the support plate.

[0008] Preferably, the pressing assembly includes a pressing plate disposed below the movable plate, the pressing plate having a plurality of second rectangular holes that cooperate with the connecting plate, the connecting plate passing through the corresponding second rectangular holes, a support plate located below the pressing plate, and a controller that cooperates with the pressing plate mounted on the movable plate.

[0009] Preferably, the controller includes several lead screws fixedly installed at the bottom of the movable plate, the lead screws passing through the pressing plate, and nuts located above the pressing plate are sleeved on the outside of the lead screws.

[0010] Preferably, the bottom of the movable plate is fixedly connected to several guide plates, and the guide plates pass through the pressing plate.

[0011] Preferably, a plurality of limiting plates are provided between the pressing plate and the movable plate. The limiting plates are provided with limiting grooves that cooperate with nuts. A fixed frame is slidably sleeved on the outside of the limiting plates. The fixed frame is fixedly connected to the bottom of the movable plate. A positioner that cooperates with the limiting plates is installed on the fixed frame.

[0012] Preferably, the positioner includes a support portion disposed below the fixed frame, the support portion and the fixed frame are connected by several tension springs, an insert plate passes through the fixed frame, the support portion and the insert plate are fixedly connected, and the limiting plate has an insertion hole that mates with the insert plate.

[0013] The beneficial effects of this utility model are as follows: The operator drives the movable plate to move relative to the base plate, and the first slide groove slides relative to the base plate, changing the distance between the two movable plates. The operator drives the two adjacent slide plates to slide relative to the second slide groove, thereby changing the position of the four positioning strips. When the base plate and the slide plates move relative to the movable plates, the connecting plate slides relative to the first rectangular hole. The support plate is pressed by the pressing component to fix the support plate and the connecting plate relative to the movable plate, thus fixing the slide plates, movable plates, and base plate to each other and completing the adjustment of the position of each positioning strip. The four corners of the cleaning tank slide into the four positioning grooves respectively. The four positioning strips can be used to position and install cleaning tanks of different specifications. Within a plane range, four precise positioning angles can be provided for cleaning tanks of different specifications, greatly expanding the application scenarios of the frame. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the base plate and movable plate after assembly in an embodiment of this utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the bottom of the movable plate in an embodiment of the present invention;

[0018] Figure 4 This is a schematic diagram of the structure of the skateboard according to an embodiment of the present utility model;

[0019] Figure 5 This is a schematic diagram of the pressing plate in an embodiment of the present utility model;

[0020] Figure 6 This is a structural diagram showing the disassembled limiting plate, fixing frame, and insert plate of an embodiment of this utility model.

[0021] The diagram is marked as follows:

[0022] 1. Base plate; 2. Movable plate; 3. Support base; 4. First slide groove; 5. Second slide groove; 6. Slide plate; 7. First rectangular hole; 8. Connecting plate; 9. Support plate; 10. Pressing plate; 11. Guide plate; 12. Lead screw; 13. Nut; 14. Limiting plate; 15. Fixing frame; 16. Limiting groove; 17. Insert plate; 18. Support part; 19. Tension spring; 20. Insertion hole; 21. Positioning strip; 22. Positioning groove; 23. Second rectangular hole. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0024] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0025] This specification provides one or more embodiments of a semiconductor cleaning machine frame structure, such as... Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, it includes a base plate 1, with movable plates 2 on both sides of the base plate 1. The movable plates 2 have first sliding grooves 4, and the two ends of the base plate 1 are respectively located in the two first sliding grooves 4. The movable plates 2 have second sliding grooves 5 on both sides, and a sliding plate 6 is slidably connected in the second sliding grooves 5. A positioning strip 21 is fixedly connected to the sliding plate 6, and a positioning groove 22 is opened on the positioning strip 21. Several support seats 3 are fixedly connected to the bottom of both the base plate 1 and the movable plates 2.

[0026] The bottom of the inner walls of the first slide 4 and the second slide 5 are respectively provided with first rectangular holes 7, and the bottom of the base plate 1 and the slide plate 6 are both fixedly connected with connecting plates 8, which pass through the corresponding first rectangular holes 7. The bottom of the connecting plates 8 is fixedly connected with a support plate 9, and the bottom of the movable plate 2 is fixedly connected with a pressing component for pressing the support plate 9. The operator drives the movable plate 2 to move relative to the base plate 1, and the first slide 4 slides relative to the base plate 1, changing the distance between the two movable plates 2. The operator drives the two adjacent slide plates 6 to slide relative to the second slide 5, thereby changing the position of the four positioning strips 21. When the plate 6 moves relative to the movable plate 2, the connecting plate 8 slides relative to the first rectangular hole 7. The supporting plate 9 is pressed by the pressing component to fix the supporting plate 9 and the connecting plate 8 relative to the movable plate 2. This fixes the sliding plate 6, the movable plate 2 and the base plate 1 together, and completes the adjustment of the position of each positioning strip 21. The four corners of the cleaning tank slide into the four positioning slots 22 respectively. The four positioning strips 21 can be used to position and install cleaning tanks of different specifications. Within a plane, four precise positioning angles can be provided for cleaning tanks of different specifications, which greatly expands the application scenarios of the frame.

[0027] In embodiments of this utility model, such as Figure 1 , Figure 2 and Figure 5As shown, the pressing assembly includes a pressing plate 10 disposed below the movable plate 2. The pressing plate 10 has several second rectangular holes 23 that mate with the connecting plate 8. The connecting plate 8 passes through the corresponding second rectangular holes 23. A support plate 9 is located below the pressing plate 10. A controller that mates with the pressing plate 10 is mounted on the movable plate 2. The controller includes several lead screws 12 fixedly installed at the bottom of the movable plate 2. The lead screws 12 pass through the pressing plate 10, and nuts 13 located above the pressing plate 10 are sleeved on the outside of the lead screws 12. Several guide plates 11 are fixedly connected to the bottom of the movable plate 2, and the guide plates... Plate 11 passes through the pressing plate 10; when the connecting plate 8 slides relative to the second rectangular hole 23, the connecting plate 8 drives the support plate 9 to slide below the pressing plate 10. When the pressing plate 10 needs to be pressed, the operator drives the nut 13 to rotate. The nut 13 moves down relative to the lead screw 12 and the movable plate 2. The bottom of the nut 13 presses the pressing plate 10, and the bottom of the pressing plate 10 presses the support plate 9. This fixes the connecting plate 8 and the support plate 9 relative to the pressing plate 10. The position of the pressing plate 10 is limited by the guide plate 11 to prevent the pressing plate 10 from rotating and shaking horizontally relative to the movable plate 2.

[0028] In embodiments of this utility model, such as Figure 5 and Figure 6 As shown, several limiting plates 14 are provided between the pressing plate 10 and the movable plate 2. Each limiting plate 14 has a limiting groove 16 that mates with the nut 13. A fixed frame 15 is slidably fitted onto the outside of the limiting plate 14. The fixed frame 15 is fixedly connected to the bottom of the movable plate 2. A positioner that mates with the limiting plate 14 is installed on the fixed frame 15. The positioner includes a support part 18 located below the fixed frame 15. The support part 18 and the fixed frame 15 are connected by several tension springs 19. An insert plate 17 passes through the fixed frame 15. The support part 18 and the insert plate 17 are fixedly connected. An insertion hole 20 that mates with the insert plate 17 is provided on the limiting plate 14. After the nut 13 has rotated, the tension spring 19... When 9 is in a stretched state, the tension spring 19 applies an upward pulling force to the support 18 and the insert plate 17 so that the top of the insert plate 17 and the bottom of the limiting plate 14 come into contact. The operator drives the limiting plate 14 to slide relative to the fixed frame 15, and the limiting groove 16 moves toward the nut 13. Finally, the nut 13 slides into the limiting groove 16, and at this time the insertion hole 20 moves above the insert plate 17. The tension spring 19 drives the support 18 and the insert plate 17 to move upward, and the top of the insert plate 17 slides into the insertion hole 20. The limiting plate 14 is fixed relative to the fixed frame 15 and the movable plate 2. The position of the nut 13 is limited by the limiting plate 14 and the limiting groove 16 to prevent the nut 13 from rotating and shaking relative to the lead screw 12 due to non-human factors.

[0029] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

[0030] This utility model is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A frame structure for a semiconductor cleaning machine, comprising a base plate (1), characterized in that, The base plate (1) is provided with movable plates (2) on both sides. The movable plates (2) are provided with first sliding grooves (4), and the two ends of the base plate (1) are respectively located in the two first sliding grooves (4). The movable plates (2) are provided with second sliding grooves (5) on both sides. The sliding plates (5) are slidably connected to the sliding plates (6). The sliding plates (6) are fixedly connected to the positioning strips (21). The positioning strips (21) are provided with positioning grooves (22). The bottom of the base plate (1) and the movable plates (2) are both fixedly connected to several support seats (3). The bottom of the inner wall of the first slide (4) and the second slide (5) are respectively provided with a first rectangular hole (7), and the bottom of the base plate (1) and the slide plate (6) are fixedly connected with a connecting plate (8). The connecting plate (8) passes through the corresponding first rectangular hole (7). The bottom of the connecting plate (8) is fixedly connected with a support plate (9), and the bottom of the movable plate (2) is fixedly connected with a pressing component for pressing the support plate (9).

2. The semiconductor cleaning machine frame structure according to claim 1, characterized in that, The pressing assembly includes a pressing plate (10) disposed below the movable plate (2). The pressing plate (10) has several second rectangular holes (23) that cooperate with the connecting plate (8). The connecting plate (8) passes through the corresponding second rectangular holes (23). The support plate (9) is located below the pressing plate (10). The movable plate (2) is equipped with a controller that cooperates with the pressing plate (10).

3. The semiconductor cleaning machine frame structure according to claim 2, characterized in that, The controller includes several lead screws (12) fixedly installed at the bottom of the movable plate (2), the lead screws (12) passing through the pressing plate (10), and the outside of the lead screws (12) is fitted with nuts (13) located above the pressing plate (10).

4. The semiconductor cleaning machine frame structure according to claim 2, characterized in that, The bottom of the movable plate (2) is fixedly connected to several guide plates (11), and the guide plates (11) penetrate the pressing plate (10).

5. The semiconductor cleaning machine frame structure according to claim 3, characterized in that, Several limiting plates (14) are provided between the pressing plate (10) and the movable plate (2). The limiting plate (14) has a limiting groove (16) that cooperates with the nut (13). A fixed frame (15) is slidably sleeved on the outside of the limiting plate (14). The fixed frame (15) is fixedly connected to the bottom of the movable plate (2). A positioner that cooperates with the limiting plate (14) is installed on the fixed frame (15).

6. The semiconductor cleaning machine frame structure according to claim 5, characterized in that, The positioner includes a support (18) located below the fixed frame (15). The support (18) and the fixed frame (15) are connected by several tension springs (19). A plug plate (17) passes through the fixed frame (15). The support (18) and the plug plate (17) are fixedly connected. A socket (20) that mates with the plug plate (17) is provided on the limiting plate (14).

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