A self-pressurized sulfur dioxide filling device

Abstract

The utility model belongs to a kind of self-pressurization type sulfur dioxide filling device;Including product liquid outlet pipeline, product liquid outlet pipeline and sulfur dioxide product tank, sulfur dioxide product tank is connected with cylinder by filling pump and busbar, and nitrogen replacement pipeline with valve is equipped between filling pump and busbar, and vacuum extraction pipeline with valve and vent pipeline with valve are also connected on busbar;The sulfur dioxide product tank is equipped with the first heat exchanger for the reheating realization self-pressurization in sulfur dioxide product tank;It has the advantages of reasonable process design, improving the recovery rate of sulfur dioxide on the basis of energy saving and environmental protection, reducing the treatment load of sulfur dioxide tail gas treatment system, and meeting the filling demand of sulfur dioxide system.

Description

Technical Field

[0001] This utility model belongs to the field of sulfur dioxide filling technology, specifically a self-pressurized sulfur dioxide filling device. Background Technology

[0002] Sulfur dioxide is a sulfur oxide compound with the chemical formula SO2 and a molecular weight of 64.0638. At room temperature and pressure, it is a colorless, transparent gas with a pungent odor. Physically, sulfur dioxide has a melting point of -75.5℃ and a boiling point of -10℃, and is readily soluble in water, ethanol, and ether. Chemically, sulfur dioxide exhibits both reducing and oxidizing properties, but its oxidizing properties are generally less pronounced than its reducing properties. It also dissolves in water to form sulfurous acid (H2SO3), a bleaching dibasic medium-strong acid. Industrially, sulfur dioxide is typically purified by distillation to obtain high-purity sulfur dioxide for use in semiconductor etching. During the sulfur dioxide filling process, high pump resistance can affect the filling efficiency. Utility Model Content

[0003] To overcome the above deficiencies, this utility model provides a self-pressurized sulfur dioxide filling device to solve the technical problems existing in the prior art.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A self-pressurizing sulfur dioxide filling device includes a product liquid outlet pipe, a product liquid outlet pipe connected to a sulfur dioxide product tank, a sulfur dioxide product tank connected to a steel cylinder via a filling pump and a manifold, a nitrogen replacement pipe with a valve between the filling pump and the manifold, and a vacuum pipe with a valve and a vent pipe with a valve connected to the manifold; the sulfur dioxide product tank is equipped with a first heat exchanger for reheating the sulfur dioxide inside the tank to achieve self-pressurization.

[0006] Preferably, the outlet of the first heat exchanger is connected to the inlet of the first heat exchanger via a second heat exchanger and a vaporizer; the second heat exchanger is installed in the recovery tank of the sulfur dioxide production system.

[0007] Preferably, the liquid phase outlet pipe of the heavy distillation column, the gas phase pipe of the light distillation column, and the sampling port pipe of the sulfur dioxide production system are all connected to the inlet of the recovery tank.

[0008] Preferably, the vent pipe is connected to the inlet of the recovery tank.

[0009] Preferably, the top of the recovery tank is provided with a non-condensable gas outlet pipe, which is connected to the sulfur dioxide tail gas treatment system; the bottom liquid phase outlet of the recovery tank is connected to the 3N grade sulfur dioxide product storage tank.

[0010] Preferably, the heat exchange medium inlet of the vaporizer is connected to a circulating water supply pipe with a valve, and the heat exchange medium outlet of the vaporizer is connected to a circulating water return pipe with a valve.

[0011] Preferably, the vaporizer is equipped with a temperature sensor.

[0012] Preferably, a first tee is provided between the outlet of the first heat exchanger and the second heat exchanger, and a liquid ammonia storage tank with a first valve is provided at the third end of the first tee.

[0013] Preferably, a second valve is provided between the first tee and the second heat exchanger, and a third valve is provided between the outlet of the first heat exchanger and the first tee; the first heat exchanger and the second heat exchanger are finned heat exchangers.

[0014] Preferably, a second three-way valve and a fourth valve are provided between the sulfur dioxide product tank and the filling pump, and the third end of the second three-way valve is connected to the upper part of the sulfur dioxide product tank through a fifth valve and an electric heating cable pipe.

[0015] A self-pressurizing sulfur dioxide filling device manufactured according to the above scheme is provided. A first heat exchanger is installed inside the sulfur dioxide product tank for reheating and self-pressurization. This allows for the reheating and vaporization of a portion of the liquid-phase sulfur dioxide within the tank, achieving self-pressurization and thus meeting the filling requirements for liquid-phase sulfur dioxide. Furthermore, this invention constructs a circulating heat exchange system using the first heat exchanger, a second heat exchanger, and a vaporizer. This system liquefies the gas phase in the recovery tank, enabling the recovery of sulfur dioxide from the sulfur dioxide production system and simultaneously achieving self-pressurization of the sulfur dioxide product tank. The device boasts advantages such as a reasonable process design, improved sulfur dioxide recovery rate while being energy-efficient and environmentally friendly, reduced processing load on the sulfur dioxide tail gas treatment system, and meeting the filling requirements of the sulfur dioxide system. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of this utility model.

[0018] In the diagram: 1. Product liquid outlet pipeline; 2. Sulfur dioxide product tank; 3. Filling pump; 4. Manifold; 5. Gas cylinder; 6. Nitrogen replacement pipeline; 7. Vacuuming pipeline; 8. Venting pipeline; 9. First heat exchanger; 10. Second heat exchanger; 11. Vaporizer; 12. Recovery tank; 13. Liquid phase outlet pipeline of the bottom of the heavy removal distillation column; 14. Gas phase pipeline of the top of the light removal distillation column; 15. Sampling port pipeline; 16. Sulfur dioxide tail gas treatment system; 17. 3N grade sulfur dioxide product storage tank; 18. Circulating water supply pipeline; 19. Circulating water return pipeline; 20. Temperature sensor; 21. First tee; 22. Second tee; 23. Liquid ammonia storage tank; 24. First valve; 25. Second regulating valve; 26. Third regulating valve; 27. Fourth regulating valve; 28. Fifth regulating valve; 29. ​​Electric heating tape pipeline. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0020] The following is in conjunction with the appendix Figure 1 This application provides a further detailed description of a self-pressurizing sulfur dioxide filling device, comprising a product liquid outlet pipe 1, which is connected to a sulfur dioxide product tank 2. The sulfur dioxide product tank 2 is connected to a steel cylinder 5 via a filling pump 3 and a manifold 4. A nitrogen replacement pipe 6 with a valve is provided between the filling pump 3 and the manifold 4. The manifold 4 is also connected to a vacuum pipe 7 with a valve and a vent pipe 8 with a valve. The sulfur dioxide product tank 2 is equipped with a first heat exchanger 9 for reheating the liquid phase sulfur dioxide within the tank to achieve self-pressurization. In this invention, the first heat exchanger 9 inside the sulfur dioxide product tank 2 is used to vaporize the liquid phase sulfur dioxide to achieve self-pressurization, ensuring filling efficiency. Simultaneously, the heat exchange medium in the first heat exchanger 9 can be waste heat from the sulfur dioxide production system, circulating water, or other low-grade waste gas heat sources capable of reheating the liquid phase sulfur dioxide.

[0021] Furthermore, the outlet of the first heat exchanger 9 is connected to the inlet of the first heat exchanger 9 via the second heat exchanger 10 and the vaporizer 11; the second heat exchanger 10 is installed in the recovery tank 12 of the sulfur dioxide production system. As is well known, sulfur dioxide is toxic, and direct emission will pollute the air; while the waste liquid and tail gas in the sulfur dioxide production system need to be treated urgently before being discharged. The above-mentioned traditional methods not only increase operating costs but also pose a threat to the environment; while this utility model uses the first heat exchanger 9 as the basis to construct a circulating heat exchange system for recovering waste liquid and tail gas in the sulfur dioxide production system, so as to improve the sulfur dioxide yield and reduce the treatment load of the sulfur dioxide tail gas treatment system 16. Specifically, the circulating heat exchange system can condense the waste liquid and tail gas in the sulfur dioxide production system while ensuring the self-pressurization inside the sulfur dioxide product tank 2, and reduce the treatment load of the sulfur dioxide tail gas treatment system 16 while recovering its liquid phase.

[0022] Furthermore, the liquid phase outlet pipe 13 of the heavy distillation column, the vapor phase pipe 14 of the light distillation column, and the sampling port pipe 15 of the sulfur dioxide production system are all connected to the inlet of the recovery tank 12. This invention primarily targets the treatment of the liquid at the bottom of the heavy distillation column, the vapor phase in the light distillation column, and the product in the sampling port pipe 15 within the sulfur dioxide production system, thereby increasing the sulfur dioxide yield and reducing the processing load of the sulfur dioxide tail gas treatment system 16.

[0023] Furthermore, the vent pipe 8 is connected to the inlet of the recovery tank 12. The recovery tank 12 in this invention can not only be used to recover waste liquid and tail gas in the sulfur dioxide production system, but also to recover vented air in the vent pipe 8 of the filling system.

[0024] Furthermore, the top of the recovery tank 12 is equipped with a non-condensable gas outlet pipe, which is connected to the sulfur dioxide tail gas treatment system 16; the bottom liquid phase outlet of the recovery tank 12 is connected to the 3N-grade sulfur dioxide product storage tank 17. The liquid phase condensed by the second heat exchanger 10 in the recovery tank 12 can be sold as a 3N-grade sulfur dioxide product in the 3N-grade sulfur dioxide product storage tank 17. The condensed non-condensable gas can be treated in the sulfur dioxide tail gas treatment system 16 to meet emission standards. The sulfur dioxide tail gas treatment system 16 is a commonly used sulfur dioxide tail gas treatment equipment and process in the prior art, and since it is not the focus of this application, it will not be described in detail. The second heat exchanger 10 in this utility model preferably contains liquid ammonia. The liquid ammonia is used to condense and recover the waste liquid and waste gas from the sulfur dioxide production system and the sulfur dioxide filling system, and then fills them to sell as 3N products, thereby generating profits and increasing revenue, and reducing the environmental pollution caused by direct emissions.

[0025] Furthermore, the heat exchange medium inlet of the vaporizer 11 is connected to the circulating water supply pipe 18 with a valve, and the heat exchange medium outlet of the vaporizer 11 is connected to the circulating water return pipe 19 with a valve. The vaporizer 11 described in this invention can be a water bath vaporizer. After entering the water bath vaporizer, the ammonia undergoes sufficient reheating and vaporization. The water bath vaporizer exchanges heat through circulating water. The circulating water in the circulating water supply pipe 18 enters the vaporizer 11 through corresponding valves, and the heat-exchanged circulating water enters the circulating water return pipe 19 through corresponding valves. This method enables sufficient vaporization of the ammonia and temperature stability, thereby avoiding poor heat exchange due to temperature fluctuations, which would affect the self-pressurization in the subsequent sulfur dioxide product tank 2. Furthermore, the above configuration can effectively reduce energy consumption and improve the overall system operating efficiency.

[0026] Furthermore, a temperature sensor 20 is provided on the vaporizer 11. By setting the temperature sensor 20, the temperature of the vaporizer 11 can be detected in real time, preventing large temperature fluctuations that could affect heat exchange efficiency and cause difficulties in heat recovery.

[0027] Furthermore, a first tee 21 is provided between the outlet of the first heat exchanger 9 and the second heat exchanger 10, and a liquid ammonia storage tank 23 with a first valve 24 is provided at the third end of the first tee 21. This invention uses the liquid ammonia storage tank 23 with the first valve 24 to replenish liquid ammonia to the aforementioned circulating heat exchange system.

[0028] Furthermore, a second valve 25 is provided between the first three-way valve 21 and the second heat exchanger 10, and a third valve 26 is provided between the outlet of the first heat exchanger 9 and the first three-way valve 21; the first heat exchanger 9 and the second heat exchanger 10 are finned heat exchangers. By setting finned heat exchangers, it is beneficial to increase the heat exchange area and improve the heat exchange efficiency, which not only allows the tail gas in the recovery tank 12 to be fully condensed, but also enables the vaporization of liquid sulfur dioxide in the sulfur dioxide product tank 2 to achieve the purpose of self-pressurization.

[0029] Furthermore, a second three-way valve 22 and a fourth valve 27 are provided between the sulfur dioxide product tank 2 and the filling pump 3. The third end of the second three-way valve 22 is connected to the upper part of the sulfur dioxide product tank 2 through a fifth valve 28 and an electric heating cable pipe 29.

[0030] The working principle of this utility model is as follows: When the sulfur dioxide production system is operating normally and the sulfur dioxide product tank 2 needs pressurization, the liquid ammonia in the liquid ammonia storage tank 23 enters the circulating heat exchange system through the first valve 24. The bottom liquid of the heavy distillation column, the tail gas of the light distillation column, the sample in the sampling pipe 15, and the venting air in the venting pipe 8 of the sulfur dioxide filling system enter the recovery tank 12. The liquid ammonia enters the second heat exchanger 10 and exchanges heat with the material in the recovery tank 12, causing some of the material to condense. The condensed liquid phase enters the 3N-grade sulfur dioxide product storage tank 17 for sale. The non-condensable gas enters the sulfur dioxide tail gas treatment system 16 through the non-condensable gas outlet pipe for treatment, achieving standard emission. The liquid ammonia that has been heat-exchanged in the second heat exchanger 10 is partially vaporized, becoming a gas-liquid mixture. The gas-liquid mixture enters the vaporizer 11 and exchanges heat with the circulating gas. The circulating water in the ring water supply pipe 18 undergoes heat exchange, and its temperature is detected by the temperature sensor 20 to ensure full vaporization and temperature stability. The fully vaporized ammonia gas enters the first heat exchanger 9 to exchange heat with the liquid sulfur dioxide in the sulfur dioxide product tank 2, so that the pressure in the sulfur dioxide product tank 2 is 0.2-0.55 MPa. When the first heat exchanger 9 cannot keep the pressure in the sulfur dioxide product tank 2 at the above threshold, or when the aforementioned circulating heat exchange system is shut down, the fifth valve 28 can be opened to allow the liquid sulfur dioxide in the sulfur dioxide product tank 2 to be heated and vaporized through the electric heating cable pipe 29 and then return to the sulfur dioxide product tank 2. Controllable pressure increase is achieved through temperature rise to ensure stable output pressure. When the pressure in the sulfur dioxide product tank 2 is at the above threshold, the liquid sulfur dioxide inside it enters the steel cylinder 5 for filling through the filling pump 3 and the manifold 4. The nitrogen replacement pipeline 6 described in this invention is used to replace the gas in the pipeline before filling; the vacuum pipeline 7 with a valve is used to vacuum the cylinder 5; and the venting pipeline 8 with a valve is used to vent the cylinder 5. The nitrogen replacement pipeline 6, vacuum pipeline 7, and venting pipeline 8 are conventional installations, so their usage will not be described in detail. This invention enables the sulfur dioxide product tank 2 to self-pressurize to ensure the filling effect of sulfur dioxide. Based on this, this invention constructs a circulating heat exchange system using liquid ammonia as the medium. This circulating heat exchange system not only enables the sulfur dioxide product tank 2 to self-pressurize, but also effectively recovers waste liquid and waste gas from the sulfur dioxide production system and filling system, and reduces the processing load of the sulfur dioxide tail gas treatment system 16, thereby improving the sulfur dioxide yield, reducing operating costs, increasing enterprise profits, and reducing environmental pollution risks.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A self-pressurized sulfur dioxide filling device, comprising a product liquid outlet pipe (1), a product liquid outlet pipe (1) and a sulfur dioxide product tank (2), characterized in that: The sulfur dioxide product tank (2) is connected to the steel cylinder (5) via a filling pump (3) and a manifold (4). A nitrogen replacement pipe (6) with a valve is provided between the filling pump (3) and the manifold (4). A vacuum pipe (7) with a valve and a vent pipe (8) with a valve are also provided on the manifold (4). The sulfur dioxide product tank (2) is equipped with a first heat exchanger (9) for self-pressurization through reheating inside the sulfur dioxide product tank (2).

2. The self-pressurized sulfur dioxide filling device according to claim 1, characterized in that: The outlet of the first heat exchanger (9) is connected to the inlet of the first heat exchanger (9) through the second heat exchanger (10) and the vaporizer (11); The second heat exchanger (10) is installed in the recovery tank (12) of the sulfur dioxide production system.

3. The self-pressurized sulfur dioxide filling device according to claim 2, characterized in that: The liquid phase outlet pipe (13) of the heavy distillation column, the gas phase pipe (14) of the light distillation column, and the sampling port pipe (15) of the sulfur dioxide production system are respectively connected to the inlet of the recovery tank (12).

4. The self-pressurized sulfur dioxide filling device according to claim 3, characterized in that: The vent pipe (8) is connected to the inlet of the recovery tank (12).

5. A self-pressurized sulfur dioxide filling device according to claim 2, 3, or 4, characterized in that: The top of the recovery tank (12) is provided with a non-condensable gas outlet pipe, which is connected to the sulfur dioxide tail gas treatment system (16); the bottom liquid phase outlet of the recovery tank (12) is connected to the 3N grade sulfur dioxide product storage tank (17).

6. The self-pressurized sulfur dioxide filling device according to claim 2, characterized in that: The heat exchange medium inlet of the vaporizer (11) is connected to the circulating water supply pipe (18) with a valve, and the heat exchange medium outlet of the vaporizer (11) is connected to the circulating water return pipe (19) with a valve.

7. The self-pressurized sulfur dioxide filling device according to claim 2, characterized in that: The vaporizer (11) is equipped with a temperature sensor (20).

8. The self-pressurized sulfur dioxide filling device according to claim 2, characterized in that: A first tee (21) is provided between the outlet of the first heat exchanger (9) and the second heat exchanger (10), and a liquid ammonia storage tank (23) with a first valve (24) is provided at the third end of the first tee (21).

9. A self-pressurized sulfur dioxide filling device according to claim 8, characterized in that: A second valve (25) is provided between the first tee (21) and the second heat exchanger (10), and a third valve (26) is provided between the outlet of the first heat exchanger (9) and the first tee (21); The first heat exchanger (9) and the second heat exchanger (10) are finned heat exchangers.

10. A self-pressurized sulfur dioxide filling device according to claim 1, characterized in that: A second tee (22) and a fourth valve (27) are provided between the sulfur dioxide product tank (2) and the filling pump (3). The third end of the second tee (22) is connected to the upper part of the sulfur dioxide product tank (2) through a fifth valve (28) and an electric heating tape pipe (29).

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