Gas supply cabinet and processing equipment

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a gas source cabinet and processing equipment, so as to avoid the problem of gas source cabinet failure caused by accidental contact with components of an air inlet assembly when components of an exhaust assembly are maintained. The gas source cabinet is configured to provide process gas and a pressure atmosphere for a process chamber of a furnace body, and comprises a cabinet body, an air inlet assembly and an exhaust assembly. The cabinet body is provided with a first chamber and a second chamber, and the second chamber is arranged on one side of the first chamber in a first direction. The air inlet assembly is arranged in the first chamber, and the exhaust assembly is arranged in the second chamber. The air inlet assembly and the exhaust assembly are arranged in different chambers, so as to avoid the problem of gas source cabinet failure caused by accidental contact with components of the air inlet assembly when components of the exhaust assembly are maintained.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a gas source cabinet and processing equipment. Background Technology

[0002] The gas supply cabinet is an important component of processing equipment. It not only provides precise, stable, and clean process gases to the processing chambers but also treats the exhaust gases emitted by the equipment. In related technologies, the internal component layout of the gas supply cabinet is often unreasonable. During maintenance, accidental contact with other components can easily cause malfunctions. Utility Model Content

[0003] In view of this, embodiments of this application provide an air source cabinet and processing equipment to avoid accidentally touching the components of the intake component when maintaining the components of the exhaust gas component, thereby avoiding the problem of air source cabinet failure caused by accidental contact with components.

[0004] In a first aspect, one embodiment of this application provides a gas source cabinet configured to provide process gas and a pressurized atmosphere to the process chamber of a furnace body. The furnace body includes an inlet and a tailpipe. The gas source cabinet includes: a cabinet body having a first chamber and a second chamber, wherein the second chamber is disposed on one side of the first chamber in a first direction; an inlet assembly disposed in the first chamber, the inlet assembly including a gas panel, the inlet end of the gas panel being connected to a gas source, and the outlet end of the gas panel being connected to the inlet; and a tail gas assembly disposed in the second chamber, the tail gas assembly including a filter and a vacuum pump, wherein the vacuum pump is disposed on the side of the filter away from the first chamber in a first direction, the inlet of the filter being connected to the tailpipe of the furnace body, the outlet of the filter being connected to the inlet of the vacuum pump, and the outlet of the vacuum pump being used to discharge waste gas.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the exhaust gas assembly further includes: a condenser bottle, which is disposed on the side of the vacuum pump near the first chamber in the first direction, with the inlet of the condenser bottle for connection to the tailpipe of the furnace body and the outlet of the condenser bottle for connection to the inlet of the filter; and an exhaust pipe, which is disposed on the side of the vacuum pump away from the first chamber in the first direction, with the outlet of the vacuum pump connected to the exhaust pipe and the exhaust pipe for discharging exhaust gas.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, multiple gas panels and exhaust gas components are provided. Multiple gas panels are arranged sequentially along the second direction, and multiple exhaust gas components are arranged sequentially along the second direction. Each exhaust gas component corresponds to a gas panel. The gas panels and the corresponding exhaust gas components are used to connect to the air inlet and tailpipe of the same furnace body. The second direction is perpendicular to the first direction.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the second chamber is provided with multiple mounting positions, which are arranged sequentially along the second direction. Each mounting position corresponds to an exhaust gas component, and each exhaust gas component is installed in the corresponding mounting position. Each mounting position is provided with a lifting frame and a support frame, which are arranged opposite to each other along the second direction. The filter is suspended on the lifting frame, and the vacuum pump is installed on the support frame. The second direction is parallel to the height direction of the cabinet.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, a portion of the orthographic projection of the filters of two adjacent exhaust gas assemblies in the second direction coincides, and the extension direction of one filter is parallel to the second direction, while the extension direction of the other filter intersects the second direction; and / or, the extension direction of the vacuum pump is parallel to the first direction.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the cabinet is provided with a third chamber, which is located on the side of the first chamber near the second chamber in the first direction; the gas source cabinet also includes a constant temperature tank, which is located in the third chamber, with the inlet of the constant temperature tank connected to the outlet end of the gas panel, and the outlet of the constant temperature tank used to connect to the gas inlet of the furnace body.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the second chamber includes a first part and a second part. In a first direction, the second part is disposed on the side of the first part away from the first chamber. In a third direction, a third chamber is disposed on the side of the second part. The orthographic projection of the second part in the first direction coincides with a portion of the orthographic projection of the first part in the first direction, and the orthographic projection of the third chamber in the first direction coincides with another portion of the orthographic projection of the first part in the first direction. The third direction is perpendicular to the first direction.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the cabinet is provided with a first cabinet door for opening or closing a first chamber, and the first cabinet door is located on the side of the first chamber away from the second chamber in a first direction; and / or, the filter is located in a first part, the vacuum pump is located in a second part, the cabinet is provided with a second cabinet door for opening or closing a second chamber, and the second cabinet door is located on the side of the second part away from the third chamber in a third direction; and / or, the cabinet is provided with a third cabinet door for opening or closing a third chamber, and the third cabinet door is located on the side of the third chamber away from the first chamber in a first direction.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the second chamber includes a third part and a fourth part. In the third direction, the third part is disposed on one side of the fourth part, wherein the third direction is perpendicular to the first direction; the orthographic projection of the third part in the first direction coincides with a portion of the orthographic projection of the first chamber in the first direction, and the orthographic projection of the fourth part in the first direction coincides with another portion of the orthographic projection of the first chamber in the first direction. The condenser bottle is disposed within the third part, and the fourth part forms a maintenance position. The cabinet includes a fourth cabinet door for opening or closing the second chamber. In the third direction, the fourth cabinet door is disposed on the side of the fourth part away from the third part to allow maintenance personnel to enter and exit the maintenance position.

[0013] Secondly, one embodiment of this application provides a processing device, which includes: a furnace body having a process chamber, the furnace body including an air inlet and a tailpipe, the air inlet communicating with the process chamber, and the first end of the tailpipe communicating with the process chamber; and an air source cabinet, which is any of the above-mentioned air source cabinets, the air outlet of the air panel being connected to the air inlet, and the inlet of the filter being connected to the second end of the tailpipe.

[0014] In this embodiment, the gas supply cabinet is used by connecting the inlet end of the gas panel to the gas source and the outlet end of the gas panel to the gas inlet of the furnace body to supply process gas into the furnace. The tailpipe of the furnace body is connected to the inlet of the filter, and the outlet of the vacuum pump is used to discharge waste gas, so that the tail gas in the furnace body is discharged through the tail gas assembly. By setting the inlet assembly and the tail gas assembly in the first chamber and the second chamber respectively, the inlet assembly and the tail gas assembly are arranged in different chambers, avoiding accidental contact with the components of the inlet assembly when maintaining the components of the tail gas assembly, thereby avoiding the problem of gas supply cabinet failure caused by accidental contact with components. Attached Figure Description

[0015] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application (the cabinet door and part of the sealing plate are not shown).

[0017] Figure 2 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application (the cabinet door and part of the sealing plate are not shown).

[0018] Figure 3 As shown Figure 2 A magnified view of a portion of the image.

[0019] Figure 4 The image shown is a front view of a gas source cabinet provided in an embodiment of this application (the cabinet door and part of the sealing plate are not shown).

[0020] Figure 5 The image shown is a top view of a gas source cabinet provided in an embodiment of this application (the cabinet door and part of the sealing plate are not shown).

[0021] Figure 6 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application.

[0022] Figure 7 The image shown is a perspective view of the gas source cabinet provided in one embodiment of this application.

[0023] Figure label: 100. Gas source cabinet; 1. Cabinet body; 11. First chamber; 12. Second chamber; 121. Mounting position; 1211. Lifting frame; 1212. Support frame; 122. First part; 123. Second part; 124. Third part; 125. Fourth part; 13. Third chamber; 14. First cabinet door; 15. Second cabinet door; 16. Third cabinet door; 17. Fourth cabinet door; 18. Frame; 19. Sealing plate; 2. Intake assembly; 21. Air intake panel; 22. Main intake; 3. Exhaust gas assembly; 31. Condenser bottle; 32. Filter; 33. Vacuum pump; 34. Exhaust pipe; 35. Connecting pipe; 4. Thermostatic bath. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Traditional gas source cabinets have their intake and exhaust gas components housed in the same chamber. During operation, these cabinets require frequent maintenance of the exhaust gas components, such as replacing filter cartridges and condenser bottles. When the intake and exhaust gas components are located in the same chamber, maintenance of the exhaust gas component can easily lead to accidental contact with the intake component, causing it to malfunction and consequently, the entire gas source cabinet. Furthermore, the layout of components within the cabinet makes maintenance inconvenient, resulting in poor overall maintenance efficiency.

[0026] Figure 1 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application (the cabinet door and part of the sealing plate are not shown). Figure 2 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application (the cabinet door and part of the sealing plate are not shown). Figure 3 As shown Figure 2 A magnified view of a portion of the image.

[0027] like Figures 1 to 3 As shown, the gas source cabinet 100 in this embodiment is configured to provide process gas and a pressurized atmosphere to the process chamber of the furnace body. The furnace body includes an inlet and an exhaust pipe. The gas source cabinet 100 includes a cabinet body 1, an inlet assembly 2, and an exhaust assembly 3. The cabinet body 1 has a first chamber 11 and a second chamber 12. The inlet assembly 2 is disposed in the first chamber 11, and the exhaust assembly 3 is disposed in the second chamber 12. In a first direction, the second chamber 12 is disposed on one side of the first chamber 11. The inlet assembly 2 includes a gas panel 21. The inlet end of the gas panel 21 is used to connect to the gas source, and the outlet end of the gas panel 21 is used to connect to the inlet. The exhaust assembly 3 includes a filter 32 and a vacuum pump 33. In a first direction, the vacuum pump 33 is disposed on the side of the filter 32 away from the first chamber 11. The inlet of the filter 32 is used to connect to the exhaust pipe, and the outlet of the filter 32 is connected to the inlet of the vacuum pump 33. The outlet of the vacuum pump 33 is used to discharge exhaust gas.

[0028] In this embodiment, the gas supply cabinet 100 is used by connecting the inlet end of the gas panel 21 to the gas source and the outlet end of the gas panel 21 to the gas inlet of the furnace body to supply process gas into the furnace body. The tailpipe of the furnace body is connected to the inlet of the filter 32, and the outlet of the vacuum pump is used to discharge waste gas, so that the tail gas in the furnace body is discharged through the tail gas assembly 3. By setting the inlet assembly 2 and the tail gas assembly 3 in the first chamber 11 and the second chamber 12 respectively, the inlet assembly 2 and the tail gas assembly 3 are arranged in different chambers, avoiding accidental contact with the components of the inlet assembly 2 when maintaining the components of the tail gas assembly 3, thereby avoiding the problem of gas supply cabinet 100 malfunctioning due to accidental contact with components.

[0029] It is understandable that the gas panel 21 is typically equipped with measuring instruments such as flow meters. The vacuum pump 33 vibrates during operation, which can affect the measurement accuracy of the flow meters. By positioning the vacuum pump 33 on the side of the filter 32 furthest from the first chamber 11 in the first direction, the distance between the vacuum pump 33 and the gas panel 21 is increased. This reduces the inaccuracy of flow meter measurements at the gas panel 21 caused by the vibration of the vacuum pump 33, thus improving the reliability of the gas source cabinet 100. Furthermore, the exhaust gas assembly 3 typically contains corrosive gases, such as acids. By placing the exhaust gas assembly 3 and the inlet assembly 2 in different chambers, the corrosive gases in the exhaust gas assembly 3 can be prevented from corroding the inlet assembly 2, further improving the reliability of the gas source cabinet 100.

[0030] For example, the furnace body is a boron diffusion furnace, and the process gas may include nitrogen, oxygen and boron trichloride.

[0031] For example, the outlet of vacuum pump 33 can be connected to an exhaust gas pipe to discharge exhaust gas. The exhaust gas pipe is a secondary waste gas distribution pipe in the plant, and the exhaust gas discharged through the exhaust gas pipe can undergo secondary treatment before being discharged into the external environment.

[0032] Figure 4 The image shown is a front view of a gas source cabinet provided in an embodiment of this application (the cabinet door and part of the sealing plate are not shown). Figure 5 The image shown is a top view of a gas source cabinet provided in an embodiment of this application (the cabinet door and part of the sealing plate are not shown).

[0033] In some embodiments, such as Figure 1 , Figure 4 and Figure 5 As shown, the exhaust gas assembly 3 also includes a condenser 31. The inlet of the condenser 31 is connected to the tailpipe of the furnace body, and the outlet of the condenser 31 is connected to the inlet of the filter 32. In the first direction, the condenser 31 is positioned on the side of the vacuum pump 33 near the first chamber 11.

[0034] When the gas source cabinet 100 is working, driven by the vacuum pump 33, the exhaust gas discharged from the tailpipe of the furnace body first enters the condenser bottle 31 through the inlet of the condenser. The exhaust gas is cooled in the condenser bottle 31 to form solids and / or liquids. The solids and / or liquids remain in the condenser bottle 31. The remaining exhaust gas enters the filter 32 through the outlet of the condenser bottle 31 and the inlet of the filter 32. After the solids in the exhaust gas are filtered in the filter 32, they enter the waste gas pipe through the outlet of the filter 32 and the vacuum pump 33.

[0035] By placing the condenser bottle 31 on the side of the vacuum pump 33 close to the first chamber 11 in the first direction, the condenser bottle 31 and the filter 32 are provided between the vacuum pump 33 and the gas panel 21, making the distance between the vacuum pump 33 and the gas panel 21 greater, further reducing the inaccuracy of the flow meter measurement at the gas panel 21 caused by the vibration of the vacuum pump 33, and improving the reliability of the gas source cabinet 100.

[0036] Optionally, in the first direction, the condenser bottle 31 is disposed between the filter 32 and the first chamber 11.

[0037] By placing the condenser bottle 31 between the filter 32 and the first chamber 11 in the first direction, the exhaust gas discharged from the tailpipe of the furnace body flows sequentially through the condenser bottle 31, the filter 32 and the vacuum pump 33 in the first direction. This makes the distances between the condenser bottle 31 and the filter 32, as well as between the filter 32 and the vacuum pump 33, closer. This shortens the length of the connecting pipe 35 connecting the condenser bottle 31 and the filter 32, as well as the connecting pipe 35 connecting the filter 32 and the vacuum pump 33, reducing the risk of the exhaust gas crystallizing and clogging the connecting pipe 35, and further improving the reliability of the gas source cabinet 100.

[0038] In other embodiments, the condenser bottle 31 and the filter 32 may be arranged side by side along a second direction, that is, the condenser bottle 31 is disposed on one side of the filter 32 in the second direction. The second direction is perpendicular to the first direction.

[0039] For example, the connecting pipe 35 is a corrugated pipe.

[0040] In some embodiments, such as Figures 1 to 5 As shown, the exhaust gas assembly 3 also includes an exhaust pipe 34, the outlet of the vacuum pump 33 is connected to the exhaust pipe 34, and the exhaust pipe 34 is used to discharge exhaust gas. In the first direction, the exhaust pipe 34 is located on the side of the vacuum pump 33 away from the first chamber 11.

[0041] When the gas source cabinet 100 is working, the solids in the exhaust gas are filtered in the filter 32 and then enter the exhaust pipe 34 through the outlet of the filter 32 and the vacuum pump 33, and then are discharged through the exhaust pipe 34.

[0042] By positioning the exhaust pipe 34 on the side of the vacuum pump 33 away from the filter 32 in the first direction, the exhaust gas discharged from the tailpipe of the furnace body flows sequentially through the condenser bottle 31, the filter 32, the vacuum pump 33, and the exhaust pipe 34 in the first direction. This makes the distance between the vacuum pump 33 and the exhaust pipe 34 closer, thereby shortening the length of the connecting pipe 35 that connects the vacuum pump 33 and the exhaust pipe 34, reducing the risk of the exhaust gas crystallizing and clogging the connecting pipe 35, and further improving the reliability of the gas source cabinet 100.

[0043] In some embodiments, such as Figures 1 to 5 As shown, multiple gas panels 21 and multiple exhaust gas components 3 are provided. The multiple gas panels 21 are arranged sequentially along the second direction, and the multiple exhaust gas components 3 are arranged sequentially along the second direction. Each exhaust gas component 3 corresponds to one gas panel 21, and the gas panel 21 and the corresponding exhaust gas component 3 are used to connect to the air inlet and tailpipe of the same furnace body. The second direction is perpendicular to the first direction.

[0044] By providing multiple gas panels 21 and exhaust gas components 3, the gas source cabinet 100 can supply process gases to multiple furnace bodies and discharge exhaust gases from multiple furnace bodies through corresponding exhaust gas components 3. Furthermore, each exhaust gas component 3 corresponds one-to-one with a gas panel 21, with multiple gas panels 21 arranged sequentially along the second direction, and multiple exhaust gas components 3 arranged sequentially along the second direction. This results in a relatively regular internal layout of the gas source cabinet 100, facilitating the connection of the gas panels 21 and exhaust gas components 3 to their respective furnace bodies.

[0045] To make the technical solution of this application easier to understand, the following description uses the example of the second direction being consistent with the up-down direction and the first direction being consistent with the left-right direction. The up-down direction and the left-right direction are shown in the figure.

[0046] For example, such as Figure 1 and Figure 2 As shown, the second chamber 12 is located to the right of the first chamber 11. Multiple exhaust panels are arranged sequentially in the vertical direction, and multiple exhaust gas components 3 are arranged sequentially in the vertical direction. In the vertical direction, the exhaust panel 21 and the corresponding exhaust gas component 3 are at the same height. The exhaust pipes 34 of the multiple exhaust gas components 3 are arranged sequentially in the vertical direction, and in two adjacent exhaust pipes 34, the lower end of the upper exhaust pipe 34 is connected to the upper end of the lower exhaust pipe 34, so that the exhaust pipes 34 of the multiple exhaust gas components 3 are connected to form a single exhaust manifold.

[0047] For example, two exhaust manifolds are provided, arranged side by side, with one manifold as a backup. When maintenance is required on one of the exhaust manifolds, the other exhaust manifold is connected to the vacuum pump 33 to achieve exhaust.

[0048] In some embodiments, such as Figures 2 to 5 As shown, the second chamber 12 has multiple mounting positions 121, which are arranged sequentially along the second direction. Each mounting position 121 corresponds to one of the exhaust gas components 3, and each exhaust gas component 3 is installed in its corresponding mounting position 121. Each mounting position 121 has a lifting frame 1211 and a support frame 1212, which are arranged opposite to each other along the second direction. The filter 32 is suspended from the lifting frame 1211, and the vacuum pump 33 is placed on the support frame 1212. The second direction is parallel to the height direction of the cabinet 1.

[0049] For example, there are six air panels 21 and six exhaust gas components 3, and six mounting positions 121. Each exhaust gas component 3 is installed in a corresponding mounting position 121, and the six mounting positions 121 are arranged sequentially in the vertical direction. The lifting frame 1211 of the same mounting position 121 is set on the upper side of the support frame 1212. The upper end of the filter 32 is connected to the lifting frame 1211, and the lower end of the vacuum pump 33 is connected to the support frame 1212.

[0050] By suspending the filter 32 on the lifting frame 1211 and placing the vacuum pump 33 on the support frame 1212, the layout compactness of the filter 32 and vacuum pump 33 can be improved, and the installation and fixation of the filter 32 and vacuum pump 33 can be achieved even with a small installation space 121.

[0051] For example, the hoisting frame 1211 is plate-shaped, and the support frame 1212 is plate-shaped.

[0052] In some embodiments, such as Figure 3 As shown, the orthographic projections of filters 32 of two adjacent exhaust gas assemblies 3 in the second direction partially overlap, and the extension direction of one filter 32 is parallel to the second direction, while the extension direction of the other filter 32 intersects the second direction.

[0053] For example, two adjacent filters 32 are arranged vertically. The upper filter 32 extends parallel to the vertical direction, while the lower filter 32 extends in a direction that intersects with the vertical direction. When maintenance is required on the upper filter 32, it is removed from the lifting frame 1211 in a downward direction. When maintenance is required on the lower filter 32, it is removed in a downward direction parallel to its extension direction, thus avoiding interference with adjacent filters 32 during removal.

[0054] By designing the positions of the filters 32 in two adjacent exhaust gas components 3 as described above, the distance between each filter 32 and the corresponding vacuum pump 33 is approximately the same. This ensures that the lengths of the connecting pipes 35 connecting the filters 32 and the vacuum pump 33 in different exhaust gas components 3 are the same, and that the lengths of the connecting pipes 35 connecting the condenser bottle 31 and the filters 32 in different exhaust gas components 3 are also the same. This eliminates the need to select connecting pipes 35 of different lengths on-site when assembling the gas source cabinet 100, which helps to improve the assembly efficiency of the gas source cabinet 100.

[0055] In some embodiments, such as Figures 1 to 5 As shown, the extension direction of the vacuum pump 33 is parallel to the first direction.

[0056] By setting the extension direction of the vacuum pump 33 to be parallel to the first direction, the installation height of the vacuum pump 33 can be reduced, allowing multiple vacuum pumps 33 to be arranged sequentially along the second direction without interference between adjacent vacuum pumps 33.

[0057] In some embodiments, such as Figure 2 As shown, the air intake assembly 2 also includes a main air intake 22, the inlet of which is used to connect to an air source, and the outlet of which is used to connect to the air intake end of the air panel 21.

[0058] When the gas source cabinet 100 is in use, the inlet of the main air inlet 22 is connected to the gas source, the inlet end of the gas panel 21 is connected to the outlet of the main air inlet 22, and the outlet end of the gas panel 21 is connected to the air inlet of the furnace body to provide process gas into the furnace body.

[0059] For example, there are six gas panels 21, with the inlet of each total air inlet 22 connected to the outlet of the six total air inlets 22, and the outlets of the six total air inlets 22 connected to the inlets of the six gas panels 21 respectively. The gas source is divided into six through the total air inlets 22, so that a gas source can be supplied to six furnace bodies through one gas source.

[0060] Figure 6 The image shown is a perspective view of a gas source cabinet provided in one embodiment of this application. Figure 7 The image shown is a perspective view of the gas source cabinet provided in one embodiment of this application.

[0061] In some embodiments, such as Figure 6 As shown, the cabinet 1 is provided with a first cabinet door 14, which is used to open or close the first chamber 11. The first cabinet door 14 is located on the side of the first chamber 11 away from the second chamber 12 in the first direction.

[0062] For example, the first chamber 11 is located on the right side of the second chamber 12, and the first cabinet door 14 is located on the right side of the first chamber 11. By opening the first cabinet door 14, the right side of the first chamber 11 is opened.

[0063] By setting the first cabinet door 14, the gas panel 21 can be exposed to the outside by opening the first cabinet door 14, so as to control the gas panel 21. When it is not necessary to control the gas panel 21, the first chamber 11 can be sealed by closing the first cabinet door 14, so as to prevent the gas panel 21 from being exposed to the outside, which is conducive to further improving the reliability of the gas source cabinet 100.

[0064] For example, such as Figure 6 and Figure 7As shown, the cabinet 1 includes a frame 18 and multiple sealing plates 19. The frame 18 is used to install the air intake assembly 2 and the exhaust assembly 3. The sealing plates 19 are connected to the frame 18, so that the cabinet 1 forms multiple different chambers. The first cabinet door 14 is connected to the frame 18, and the first cabinet door 14 together with the sealing plates 19 forms the first chamber 11.

[0065] In some embodiments, such as Figures 1 to 3 , Figure 5 As shown, the cabinet 1 is provided with a third chamber 13, which is located in the first direction on the side of the first chamber 11 near the second chamber 12. The gas source cabinet 100 also includes a constant temperature tank 4, which is located in the third chamber 13. The inlet of the constant temperature tank 4 is connected to the gas outlet of the gas panel 21, and the outlet of the constant temperature tank 4 is used to connect to the gas inlet of the furnace body.

[0066] For example, the constant temperature bath 4 is filled with water. When the process gas needs to carry water vapor, for example, when performing a water-oxygen process, the process gas oxygen needs to carry water vapor. Then, the oxygen discharged through the gas outlet of the gas panel 21 first enters the constant temperature bath 4 through the inlet of the constant temperature bath 4, and then flows out into the furnace through the outlet of the constant temperature bath 4, so that the oxygen flowing into the furnace carries water vapor.

[0067] It is understandable that the water inside the constant temperature bath 4 is prone to evaporation, forming water vapor, which can easily cause corrosion of components near the constant temperature bath 4.

[0068] By placing the constant temperature bath 4 inside the third chamber 13, the constant temperature bath 4 can be separated from the air intake assembly 2 and the exhaust assembly 3, thus preventing the water vapor generated by the constant temperature bath 4 from corroding the air intake assembly 2 and the exhaust assembly 3, which is beneficial to extending the service life of the air source cabinet 100.

[0069] In some embodiments, such as Figure 5 As shown, the second chamber 12 includes a first portion 122 and a second portion 123. In a first direction, the second portion 123 is disposed on the side of the first portion 122 away from the first chamber 11. In a third direction, a third chamber 13 is disposed on one side of the second portion 123. The orthographic projection of the second portion 123 in the first direction coincides with a portion of the orthographic projection of the first portion 122 in the first direction, and the orthographic projection of the third chamber 13 in the first direction coincides with another portion of the orthographic projection of the first portion 122 in the first direction. The third direction is perpendicular to the first direction.

[0070] For example, the third direction is consistent with the front-back direction, as shown in the figure. The second part 123 is located to the left of the first part 122, and the third chamber 13 is located behind the second part 123, that is, the third chamber 13 and the second part 123 are arranged side by side in the front-back direction. The orthographic projection of the second part 123 in the left-right direction coincides with a part of the orthographic projection of the first part 122 in the left-right direction, and the orthographic projection of the third chamber 13 in the left-right direction coincides with another part of the orthographic projection of the first part 122 in the left-right direction, so that the second part 123 is located in front of the first part 122, and the third chamber 13 is located in rear of the first part 122.

[0071] By designing the second chamber 12 and the third chamber 13 as described above, the local compactness of the gas source cabinet 100 is improved, which helps to reduce the volume of the gas source cabinet 100 and thus reduce the space occupied by the gas source cabinet 100.

[0072] In some embodiments, such as Figure 5 As shown, the filter 32 is disposed in the first part 122, the vacuum pump 33 is disposed in the second part 123, and the cabinet 1 is provided with a second cabinet door 15. The second cabinet door 15 is used to open or close the second chamber 12. The second cabinet door 15 is disposed on the side of the second part 123 away from the third chamber 13 in the third direction.

[0073] For example, the second cabinet door 15 is located on the front side of the second chamber 12. By opening the second cabinet door 15, the front side of the second part 123 is opened, exposing the vacuum pump 33 to the outside.

[0074] By providing a second cabinet door 15, the vacuum pump 33 can be exposed to the outside for maintenance, thus improving the ease of maintenance of the gas source cabinet 100. Furthermore, when maintenance of the vacuum pump 33 is not required, closing the second cabinet door 15 seals the second chamber 12, preventing the vacuum pump 33 from being exposed to the outside, which further enhances the reliability of the gas source cabinet 100.

[0075] In some embodiments, such as Figure 6 and Figure 7 As shown, the cabinet 1 is provided with a third cabinet door 16, which is used to open or close the third chamber 13. The third cabinet door 16 is located on the side of the third chamber 13 away from the first chamber 11 in the first direction.

[0076] For example, the third cabinet door 16 is located on the left side of the third chamber 13. By opening the third cabinet door 16, the left side of the third chamber 13 is opened, exposing the constant temperature bath 4 to the outside.

[0077] By providing a third cabinet door 16, the constant temperature bath 4 can be exposed to the outside for maintenance, thus improving the ease of maintenance of the gas source cabinet 100. Furthermore, when maintenance of the constant temperature bath 4 is not required, closing the third cabinet door 16 seals the third chamber 13, preventing moisture from the constant temperature bath 4 from leaking out and corroding other components, further enhancing the reliability of the gas source cabinet 100.

[0078] In some embodiments, such as Figure 5 As shown, the second chamber 12 includes a third part 124 and a fourth part 125. In the first direction, and in the third direction, the third part 124 is disposed on one side of the fourth part 125, wherein the third direction is perpendicular to the first direction. The orthographic projection of the third part 124 in the first direction coincides with a portion of the orthographic projection of the first chamber 11 in the first direction, and the orthographic projection of the fourth part 125 in the first direction coincides with another portion of the orthographic projection of the first chamber 11 in the first direction. The condenser bottle 31 is disposed within the third part 124, and the fourth part 125 forms a maintenance position. The cabinet 1 includes a fourth cabinet door 17, which is used to open or close the second chamber 12. In the third direction, the fourth cabinet door 17 is disposed on the side of the fourth part 125 away from the third part 124, so as to allow maintenance personnel to enter and exit the maintenance position.

[0079] For example, the third part 124 is located behind the fourth part 125, that is, the third part 124 and the fourth part 125 are arranged side by side in the front-back direction. The orthographic projection of the third part 124 in the left-right direction coincides with a portion of the orthographic projection of the first chamber 11 in the left-right direction, and the orthographic projection of the fourth part 125 in the left-right direction coincides with another portion of the orthographic projection of the first chamber 11 in the left-right direction, so that the third part 124 is located on the front side of the first chamber 11, and the fourth part 125 is located on the rear side of the first chamber 11. The fourth cabinet door 17 is located on the front side of the second chamber 12. By opening the fourth cabinet door 17, maintenance personnel can enter the maintenance position to perform maintenance on the condenser.

[0080] By designing the second chamber 12 as described above, maintenance personnel can easily maintain the condenser bottle 31, such as by replacing it, thus improving the ease of maintenance of the gas source cabinet 100. Furthermore, when maintenance of the condenser bottle 31 is not required, closing the fourth cabinet door 17 seals the second chamber 12, preventing the condenser bottle 31 from being exposed to the outside, which further enhances the reliability of the gas source cabinet 100.

[0081] The embodiments of the gas source cabinet 100 of this application have been described in detail above. The embodiments of the processing equipment of this application are described in detail below. It should be understood that the description of the embodiments of the gas source cabinet 100 corresponds to the description of the embodiments of the processing equipment. Therefore, for any parts not described in detail, please refer to the previous embodiments of the gas source cabinet 100.

[0082] The processing equipment in this embodiment includes a furnace body and a gas source cabinet 100. The furnace body has a process chamber and includes an air inlet and a tailpipe. The air inlet is connected to the process chamber, and the first end of the tailpipe is also connected to the process chamber. The air outlet of the gas panel 21 is connected to the air inlet, and the inlet of the filter 32 is connected to the second end of the tailpipe.

[0083] For example, the processing equipment can be a diffusion furnace, such as a boron diffusion furnace. The boron diffusion process is performed using this equipment to diffuse boron into the silicon wafer to form a pn junction, thereby enabling photoelectric conversion in the battery. The gas supply cabinet 100 is responsible for providing a precise, stable, and clean process gas environment to the process chamber of the boron diffusion furnace.

[0084] When the gas source cabinet 100 and processing equipment of this application are in use, the inlet of the main air inlet 22 is connected to the user's secondary process gas pipeline, realizing the connection between the main air inlet 22 and the gas source. The process gas enters the gas source cabinet 100 through the secondary process gas pipeline. The outlet of the main air inlet 22 is connected to the inlet end of the corresponding gas panel 21, and the outlet end of the gas panel 21 is connected to the gas inlet of the furnace body, so that the gas source can enter the process chamber of the furnace body through the gas source cabinet 100. Among them, the process gas is initially depressurized and filtered through the main air inlet 22, and the flow rate of the process gas, the ratio of different process gases, and the on / off sequence are controlled by the gas panel 21. When the process gas needs to carry water vapor, for example, in the case of water-oxygen process, the process oxygen gas first passes through the constant temperature bath 4 before entering the furnace body.

[0085] The inlet of condenser flask 31 is connected to the tailpipe of the furnace body, the outlet of condenser flask 31 is connected to the inlet of filter 32, the outlet of filter 32 is connected to the inlet of vacuum pump 33, and the outlet of vacuum pump 33 is connected to exhaust pipe 34. Condenser flask 31 is used for coarse filtration and cooling of the exhaust gas discharged from the tailpipe, and filter 32 is used for fine filtration and cooling of the exhaust gas discharged from the tailpipe. Vacuum pump 33 is used to create and maintain the controlled, clean negative pressure environment required within the furnace body during the process, and to ensure process safety. Exhaust pipe 34 is connected to the secondary waste distribution pipe of the plant for subsequent centralized secondary treatment of the exhaust gas.

[0086] The gas source cabinet 100 and processing equipment of this application place the air intake component 2 and the exhaust component 3 of the gas source cabinet 100 in different chambers, thus separating the air intake component 2 and the exhaust component 3 and reducing malfunctions caused by accidental contact with equipment components during maintenance. By designing the positions of the condenser bottle 31, filter 32, vacuum pump 33 and exhaust pipe 34 of the exhaust component 3, the distance between adjacent components can be shortened, reducing the risk of exhaust gas crystallization clogging the connecting pipe 35 and improving the reliability of the gas source cabinet 100. By distributing the components that require frequent maintenance on the periphery of the cabinet 1 and providing cabinet doors that can be opened and closed, the ease of maintenance of the gas source cabinet 100 can be improved.

[0087] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not restrict the application from being implemented using the specific details described above.

[0088] The block diagrams of components, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these components, devices, equipment, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0089] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0090] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0091] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A gas supply cabinet configured to provide process gas and a pressurized atmosphere to a process chamber of a furnace body, the furnace body including an inlet and an outlet pipe, characterized in that, include: The cabinet has a first chamber and a second chamber, and in a first direction, the second chamber is located on one side of the first chamber; An air intake assembly is disposed in the first chamber. The air intake assembly includes an air panel, the air intake end of which is used to connect to an air source, and the air outlet end of which is used to connect to the air inlet. An exhaust gas assembly is disposed within the second chamber. The exhaust gas assembly includes a filter and a vacuum pump. In the first direction, the vacuum pump is disposed on the side of the filter away from the first chamber. The inlet of the filter is connected to the exhaust pipe, and the outlet of the filter is connected to the inlet of the vacuum pump. The outlet of the vacuum pump is used to discharge exhaust gas.

2. The gas source cabinet according to claim 1, characterized in that, The exhaust gas assembly also includes: In the first direction, the condenser is disposed on the side of the vacuum pump near the first chamber, the inlet of the condenser is used to connect to the tailpipe of the furnace body, and the outlet of the condenser is connected to the inlet of the filter. An exhaust pipe is provided in the first direction on the side of the vacuum pump away from the first chamber, and the outlet of the vacuum pump is connected to the exhaust pipe, which is used to discharge exhaust gas.

3. The gas source cabinet according to claim 1, characterized in that, Multiple gas panels and multiple exhaust gas components are provided. The multiple gas panels are arranged sequentially along the second direction, and the multiple exhaust gas components are arranged sequentially along the second direction. Each exhaust gas component corresponds to a gas panel. The gas panels and the corresponding exhaust gas components are used to connect to the air inlet and tailpipe of the same furnace body. The second direction is perpendicular to the first direction.

4. The gas source cabinet according to claim 3, characterized in that, The second chamber is provided with multiple mounting positions, which are arranged sequentially along the second direction. Each mounting position corresponds to one of the exhaust gas components, and each exhaust gas component is installed in the corresponding mounting position. The installation position is provided with a hoisting frame and a support frame. The hoisting frame and the support frame are arranged opposite to each other along the second direction. The filter is hoisted on the hoisting frame, and the vacuum pump is placed and installed on the support frame. The second direction is parallel to the height direction of the cabinet.

5. The gas source cabinet according to claim 4, characterized in that, The orthographic projections of the filters of two adjacent exhaust gas assemblies in the second direction partially overlap, and the extension direction of one filter is parallel to the second direction, while the extension direction of the other filter intersects the second direction; and / or, The extension direction of the vacuum pump is parallel to the first direction.

6. The gas source cabinet according to claim 1, characterized in that, The cabinet is provided with a third chamber, which is located on the side of the first chamber near the second chamber in the first direction; The gas source cabinet also includes a constant temperature tank, which is located in the third chamber. The inlet of the constant temperature tank is connected to the gas outlet of the gas panel, and the outlet of the constant temperature tank is used to connect to the gas inlet of the furnace body.

7. The gas source cabinet according to claim 6, characterized in that, The second chamber includes a first part and a second part, wherein in the first direction, the second part is disposed on the side of the first part away from the first chamber; In the third direction, the third chamber is disposed on one side of the second part, the orthographic projection of the second part in the first direction coincides with a portion of the orthographic projection of the first part in the first direction, and the orthographic projection of the third chamber in the first direction coincides with another portion of the orthographic projection of the first part in the first direction, wherein the third direction is perpendicular to the first direction.

8. The gas source cabinet according to claim 7, characterized in that, The cabinet is provided with a first cabinet door, which is used to open or close the first chamber. The first cabinet door is located on the side of the first chamber away from the second chamber in the first direction; and / or, The filter is disposed within the first part, the vacuum pump is disposed within the second part, the cabinet is provided with a second cabinet door for opening or closing the second chamber, and the second cabinet door is disposed on the side of the second part away from the third chamber in a third-dimensional orientation; and / or, The cabinet is provided with a third cabinet door, which is used to open or close the third chamber. The third cabinet door is located on the side of the third chamber away from the first chamber in the first direction.

9. The gas source cabinet according to claim 2, characterized in that, The second chamber includes a third part and a fourth part. In the third direction, the third part is disposed on one side of the fourth part, wherein the third direction is perpendicular to the first direction. The orthographic projection of the third part in the first direction coincides with a portion of the orthographic projection of the first chamber in the first direction, and the orthographic projection of the fourth part in the first direction coincides with another portion of the orthographic projection of the first chamber in the first direction. The condenser bottle is disposed within the third part, and the fourth part forms a maintenance position. The cabinet includes a fourth cabinet door for opening or closing the second chamber. In the third direction, the fourth cabinet door is located on the side of the fourth part away from the third part, so that maintenance personnel can enter and exit the maintenance position.

10. A processing device, characterized in that, include: The furnace body has a process chamber, and the furnace body includes an air inlet and a tailpipe. The air inlet is connected to the process chamber, and the first end of the tailpipe is connected to the process chamber. The gas source cabinet is the gas source cabinet described in any one of claims 1-9 above, wherein the outlet end of the gas panel is connected to the inlet, and the inlet of the filter is connected to the second end of the tailpipe.

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