Gas supply device

Abstract

The utility model discloses a kind of gas supply devices, including cabinet, heating box, gas transmission subassembly and gas cylinder, heating box and gas cylinder are located in accommodating cavity, first heating cavity and second heating cavity are equipped in box body, the side plate of box body includes heating layer, gas transmission subassembly includes gas transmission module and gas transmission connector, gas transmission module is located in first heating cavity, gas transmission connector is located in second heating cavity.The heat released by heating layer enters the inner cavity of box body, so that the whole inside of box body is uniformly heated, the heat inside box body can cover any gas transmission pipeline, valve and pipeline connector in gas transmission subassembly, so that gas transmission subassembly can be uniformly heated as a whole, and there is no cold spot, the probability of condensate liquefaction at cold spot can be reduced, and the risk of pipeline blockage and gas cylinder explosion.

Description

Technical Field

[0001] This utility model relates to the field of special gas transportation technology, and in particular to a gas supply device. Background Technology

[0002] Specialty gas holders are primarily used to supply specialty gases, which are flammable, explosive, or highly toxic. The holder contains supply pipelines and various valves to control the flow direction and velocity of the specialty gases. These gases are stored in cylinders and transported to external equipment via the supply pipelines. To provide precisely heated gas to external equipment, the supply pipelines need to be heated and insulated. Current technologies use a method of winding the pipeline for heating. However, this method only covers the main body of the pipeline and cannot effectively heat valves, joints, and other structures, creating uneven temperature zones. The precursor gas condenses and liquefies at these zones, causing pipeline blockage and disrupting the gas supply to external equipment. Furthermore, when changing cylinders, the condensed residue is flammable and can ignite instantly upon exposure to air, leading to violent decomposition and posing a risk of explosion. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a gas supply device capable of providing full-area heating with high safety performance.

[0004] The gas supply device according to the embodiments of this utility model includes: The cabinet has an internal cavity for storage. A heating box is disposed within the receiving cavity. The heating box includes a box body and a first cover and a second cover sealing the box body. The box body has a first heating cavity and a second heating cavity. The first cover is used to open and close the first heating cavity, and the second cover is used to open and close the second heating cavity. The box body includes multiple side plates, which enclose the first heating cavity and the second heating cavity. Each side plate includes a first base layer and a heating layer. The first base layer is located outside the heating layer, and the heating layer is used to release heat to the first heating cavity and the second heating cavity. A gas delivery assembly includes a gas delivery module and a gas delivery connector. The gas delivery module includes multiple gas delivery pipelines, multiple valves, and multiple pipeline connectors. The valves and pipeline connectors are all connected to the gas delivery pipelines, and one end of one of the gas delivery pipelines is connected to the gas delivery connector. The gas delivery module is located in the first heating chamber, and the gas delivery connector is located in the second heating chamber. A gas cylinder is located inside the receiving cavity and below the heating box. The top of the gas cylinder is provided with a gas connection connector, which can be connected to the gas supply connector.

[0005] The gas supply device of this utility model embodiment has at least the following beneficial effects: The heat released by the heating layer enters the inner cavity of the housing, ensuring uniform heating throughout the entire interior. This internal heat covers all gas delivery lines, valves, and connectors within the gas delivery assembly, resulting in uniform overall heating without cold spots. This reduces the probability of condensation at cold points, as well as the risks of pipe blockage and cylinder explosions, ensuring the coating effect of external equipment and providing high safety performance for the gas supply device. Furthermore, the housing's inner cavity features double-layer insulation, effectively preventing heat leakage and improving the heating accuracy of the gas. When replacing a gas cylinder, simply opening the second cover allows for easy disassembly and assembly of the gas delivery connectors and gas line connectors. This simplifies cylinder replacement and reduces heat loss during the process, avoiding repeated heating of the gas delivery module after source replacement and improving overall heating efficiency.

[0006] According to some embodiments of the present invention, the cabinet is further provided with an opening communicating with the receiving cavity, and the air supply device further includes a door, which is closably connected to the cabinet to open or close the opening. The gas supply device also includes a guide rail, which is slidably connected to the bottom of the cabinet. The gas cylinder is connected to the guide rail and can move with the guide rail, entering and exiting the receiving cavity through the opening. The inner wall of the cabinet is provided with a limiting part, which is used to limit the gas cylinder along the sliding direction of the guide rail.

[0007] According to some embodiments of the present invention, the length of the guide rail along the first direction gradually decreases vertically, and the first direction is perpendicular to the sliding direction of the guide rail and parallel to the horizontal direction; Alternatively, the gas supply device may further include a base and a slide, the base being located at the bottom of the cabinet, the guide rail being slidably connected to the top of the base, the guide rail being connected to the slide, the length of the slide along a first direction gradually decreasing vertically, the first direction being perpendicular to the sliding direction of the guide rail and parallel to the horizontal direction, and part of the slide being embedded in the bottom of the gas cylinder; Alternatively, the gas supply device may further include a base and a slide. The base is located at the bottom of the cabinet and includes a bottom plate and two upright plates. The two upright plates are spaced apart and connected to the top of the bottom plate. Two guide rails are provided and installed on opposite sides of the two upright plates. The two ends of the slide are connected to the two guide rails respectively, and the gas cylinder is installed on the top of the slide. Alternatively, the gas supply device may further include a base, a slide, and a support. The base is located at the bottom of the cabinet and includes a bottom plate and two upright plates. The two upright plates are spaced apart and connected to the top of the bottom plate. Two guide rails are provided and installed on opposite sides of the two upright plates. The two ends of the slide are connected to the two guide rails, and the gas cylinder is installed on the top of the slide. The support is located between the two upright plates and connected to the top of the base. The bottom of the slide is slidably connected to the support.

[0008] According to some embodiments of the present invention, the side panel further includes a heat insulation layer, which is disposed between the first base layer and the heating layer; And / or, the side plate further includes a second base layer, which is disposed on the side of the heating layer opposite to the first base layer.

[0009] According to some embodiments of the present invention, the gas supply device further includes at least one partition, which is disposed in the receiving cavity to divide the receiving cavity into multiple receiving spaces. Multiple gas cylinders are provided, and at least one gas cylinder is provided in each receiving space. The cabinet is also provided with an opening communicating with the receiving space. The gas supply device further includes multiple doors, which are closable and connected to the cabinet to cover the corresponding openings.

[0010] According to some embodiments of the present utility model, a sealing element is provided on the side of the cabinet where the opening is provided. The sealing element is arranged around the opening. When the door covers the opening, the sealing element is clamped between the cabinet and the door. And / or, the box body is provided with a wire hole, the gas supply line passes through the wire hole, and a sealing structure is provided between the inner wall of the wire hole and the gas supply line.

[0011] According to some embodiments of the present invention, the gas supply device further includes a suction mechanism, the cabinet is provided with a suction port communicating with the receiving cavity, the suction mechanism communicates with the receiving cavity through the suction port, and is used to form a negative pressure in the receiving cavity.

[0012] According to some embodiments of the present invention, the gas supply device further includes a control module, the control module including at least a display, the control module being installed on one side of the cabinet along a first direction, the first direction being perpendicular to the moving direction of the guide rail and parallel to the horizontal direction; the control module being rotatably connected to the cabinet around a first axis and / or a second axis, the first axis being parallel to the vertical direction and the second axis being parallel to the first direction; And / or, the gas supply device further includes a control box, which is located at the back of the cabinet.

[0013] According to some embodiments of the present invention, the gas supply device further includes a temperature regulation module, which is electrically connected to the heating layer and is used to change the heat release of the heating layer.

[0014] According to some embodiments of the present invention, the gas supply device further includes a detection component, which is used to detect at least one of combustible gas, toxic gas, flame, smoke, and gas pressure in the receiving cavity. And / or, the gas supply device further includes a detection component and an alarm, the alarm being able to issue an alarm indication based on the detection result of the detection component.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of an embodiment of the gas supply device of the present invention, wherein the door is in the open state and the gas cylinder is in the pulled-out state; Figure 2 A front view of a later embodiment where the gas supply device is concealed by a door. Figure 3 This is a schematic diagram of one embodiment of the heating box, with parts of the first cover and the second cover hidden. Figure 4 A cross-sectional view of one embodiment of the side panel; Figure 5 This is a schematic diagram of another embodiment of the gas supply device; Figure 6 This is a schematic diagram of the guide rail engaging with a gas cylinder in one embodiment; Figure 7 for Figure 5 Enlarged view of point A in the middle; Figure 8 This is a schematic diagram showing the fit between the guide rail, slide, and base in one embodiment; Figure 9 This is a schematic diagram of another embodiment of the guide rail; Figure 10 This is a schematic diagram illustrating the fit of another embodiment of the guide rail, slide table, base, and support. Figure 11 A schematic diagram showing the installation of a partition in the cavity.

[0017] Figure label: Cabinet body 100, receiving cavity 110, receiving space 111, opening 120, sealing element 130, partition 140, limiting part 150; Heating box 200, first cover 210, second cover 220, box body 230, first heating chamber 231, second heating chamber 232, wire hole 233, support plate 240, side plate 250, first base layer 251, heating layer 252, heat insulation layer 253, second base layer 254. Gas transmission assembly 300, gas transmission module 310, gas transmission pipeline 311, valve 312, pipeline connector 313, gas transmission connector 320; Gas cylinder 400, gas line connector 410; Door body 500; Detection component 600; Alarm 700; Guide rail 800, base 810, base plate 811, upright plate 812, slide table 820, support base 830; Control module 900; Control box 1010. Detailed Implementation

[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0019] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0020] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0021] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0022] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0023] Specialty gas holders are primarily used to supply specialty gases, which are flammable, explosive, or highly toxic. The holder contains supply pipelines and various valves to control the flow direction and velocity of the specialty gases. These gases are stored in cylinders and transported to external equipment via the supply pipelines. To provide precisely heated gas to external equipment, the supply pipelines need to be heated and insulated. Current technologies use a method of winding the pipeline for heating. However, this method only covers the main body of the pipeline and cannot effectively heat valves, joints, and other structures, creating uneven temperature cold spots. The precursor gas condenses and liquefies at these cold spots, causing pipeline blockage and interrupting the gas supply to external equipment. Furthermore, when changing cylinders, the condensed residue is flammable (e.g., the spontaneous combustion of the flammable precursor TMA). Exposure to air (e.g., the violent decomposition caused by oxidizing substances like O3) leads to instantaneous combustion and violent decomposition, posing a risk of explosion and poor safety performance.

[0024] Based on this, an embodiment of the present invention provides a gas supply device, referring to... Figures 1 to 3 The gas supply device includes a cabinet 100, a heating box 200, a gas delivery component 300, and a gas cylinder 400. The cabinet 100 has an internal receiving cavity 110, into which the heating box 200, the gas delivery component 300, and the gas cylinder 400 can all be placed.

[0025] like Figure 3 As shown, the heating box 200 includes a box body 230 and a first cover 210 and a second cover 220 that are sealed on the box body 230. The box body 230 is provided with a first heating cavity 231 and a second heating cavity 232. The first heating cavity 231 is located above the second heating cavity 232. The first heating cavity 231 and the second heating cavity 232 can be configured to be in a connected state, or the first heating cavity 231 and the second heating cavity 232 can also be configured to be isolated from each other. The isolation between the first heating cavity 231 and the second heating cavity 232 can be achieved by providing a support plate 240 in the box body 230. The support plate 240 separates the inner cavity of the box body 230 and forms the first heating cavity 231 and the second heating cavity 232 that are independent of each other.

[0026] The first cover 210 is used to open and close the first heating chamber 231, and the second cover 220 is used to open and close the second heating chamber 232. The opening and closing actions of the first cover 210 and the second cover 220 do not affect each other, so that the first heating chamber 231 and the second heating chamber 232 can be opened or closed independently. The connection method between the first cover 210 and the box 230 and the connection method between the second cover 220 and the box 230 are similar. Taking the first cover 210 as an example, one side of the first cover 210 is rotatably connected to the box 230 or fastened to the box 230. The rotatable connection between the two is not limited to the setting of a hinge or hole shaft matching structure. The fastening between the two is not limited to the setting of a threaded connection, a snap, or a fastener. The other end of the first cover 210 is locked to the box 230 or unlocked relative to the box 230 through a snap, a fastener, or a threaded fastener.

[0027] The gas delivery assembly 300 includes a gas delivery module 310 and a gas delivery connector 320. The gas delivery module 310 is located in the first heating chamber 231, and the gas delivery connector 320 is located in the second heating chamber 232. The gas delivery module 310 includes multiple gas delivery pipelines 311, multiple valves 312, and multiple pipeline connectors 313. The valves 312 and pipeline connectors 313 are all connected to the gas delivery pipelines 311. The valves 312 can switch the on / off state of the gas delivery pipelines 311, change the flow direction of the fluid in the gas delivery pipelines 311, and change the flow rate of the fluid in the gas delivery pipelines 311. The pipeline connectors 313 are used to realize the docking and flow direction switching between different gas delivery pipelines 311. One end of one of the gas delivery pipelines 311 is connected to the gas delivery connector 320.

[0028] like Figure 1 As shown, the gas cylinder 400 is located below the heating box 200. A gas connector 410 is located on the top of the gas cylinder 400. Since the gas delivery connector 320 is located at the bottom of the gas delivery assembly 300, the gas connector 410 can be easily connected to the gas delivery connector 320, allowing the gas cylinder 400 to communicate with the gas delivery module 310. The gas inside the gas cylinder 400 can be delivered to the gas delivery module 310. After being heated in the heating box 200 and having its flow direction and velocity adjusted by the gas delivery module 310, the gas is then delivered to external equipment (such as an atomic layer deposition system). The gas connector 410 can be a VCR (Vacuum Coupling Radius Seal) connector. The connection between the gas connector 410 and the gas delivery connector 320 has reliable sealing strength, ensuring the purity of the fluid transmission. Furthermore, the gas connector 410 and the gas delivery connector 320 can be directly disassembled and sealed by screwing, facilitating the replacement of the gas cylinder 400.

[0029] The box body 230 also includes side panels 250, and multiple side panels 250 enclose an inner cavity of the box body 230, including a first heating cavity 231 and a second heating cavity 232; see reference. Figure 4The side panel 250 includes a first base layer 251 and a heating layer 252. The first base layer 251 is located outside the heating layer 252, that is, on the side of the heating layer 252 facing away from the inner cavity of the box 230. Since the first base layer 251 covers the outside of the heating layer 252, it isolates the heating layer 252 from the outside. On the one hand, it prevents the heat generated by the heating layer 252 from leaking out, and on the other hand, it reduces the impact of the external environment on the heating layer 252. The heat released by the heating layer 252 enters the inner cavity of the box 230, so that the entire interior of the box 230 is uniformly heated. The heat inside the box 230 can cover any gas pipeline 311, valve 312 and pipeline joint 313 in the gas delivery assembly 300, so that the gas delivery assembly 300 can be uniformly heated as a whole, and there are no cold spots. This reduces the probability of condensation and liquefaction at cold spots, as well as the risk of pipeline blockage and gas cylinder 400 explosion, ensuring the coating effect of external equipment and giving the gas supply device a high level of safety.

[0030] In addition, since the heating box 200 is located inside the cabinet 100, the cabinet 100 can shield the external environment, enabling the inner cavity of the box 230 to achieve double-layer heat insulation, effectively preventing heat leakage and improving the heating accuracy of the gas temperature. Furthermore, when the gas cylinder 400 needs to be replaced, the gas supply connector 320 and the gas line connector 410 can be disassembled and assembled simply by opening the second cover 220. On the one hand, this makes the replacement operation of the gas cylinder 400 more convenient, and on the other hand, it can reduce the heat loss during the replacement process of the gas cylinder 400, thereby avoiding the need to repeatedly heat the gas supply module 310 after replacing the source cylinder 400, and improving the overall heating efficiency.

[0031] In some embodiments, the heating layer 252 includes a ceramic heating element, a mica heating element, a heating rod, a heating wire, a silicone heating plate, a polyimide heating film, etc. The heating layer 252 generates heat when energized, and the heat is released into the interior of the housing 230. Furthermore, the side panel 250 also includes a heat insulation layer 253, which is disposed between the first base layer 251 and the heating layer 252. The heat insulation layer 253 serves to isolate the heating layer 252 from the first base layer 251, preventing heat from the heating layer 252 from escaping and reducing heat loss. The heat insulation layer 253 is not limited to being made of materials such as calcium carbonate, rock wool, composite silicate, silicone foam board, aerogel insulation cotton, or porous silicone insulation cotton.

[0032] The side panel 250 also includes a second base layer 254, which is located on the side of the heating layer 252 facing away from the first base layer 251. The second base layer 254 can be made of a material with a high thermal conductivity so that the heat generated by the heating layer 252 can be quickly released into the interior of the box 230 through the second base layer 254. In one embodiment, from the outside to the inside, the side panel 250 is provided with a first base layer 251, a heat insulation layer 253, a heating layer 252, and a second base layer 254 in sequence. The side panel 250 is set as a multi-layer structure, which can not only improve the structural strength of the side panel 250, but also achieve uniform heating of the entire area of ​​the box 230, and has the functions of heat insulation and preventing heat leakage.

[0033] In one embodiment, the heating box 200 includes five side plates 250, two of which are located at the top and bottom of the heating box 200 respectively, forming a top plate and a bottom plate respectively, and the remaining three side plates 250 are located between the top plate and the bottom plate. The three side plates 250 are connected in sequence, and adjacent side plates 250 are perpendicular to each other to form an open opening on the front side of the heating box 200. The first cover 210 and the second cover 220 can jointly cover the opening on the front side of the heating box 200.

[0034] The gas supply device also includes a temperature regulation module, which is electrically connected to the heating layer 252 and is used to change the heat release of the heating layer 252. For example, the temperature regulation module includes a temperature sensor, which can detect the temperature in the first heating chamber 231 and the second heating chamber 232. The temperature regulation module increases or decreases the power of the heating layer 252 according to the temperature detection value of the temperature sensor, so as to increase or decrease the heat release of the heating layer 252, thereby keeping the temperature in the first heating chamber 231 and the second heating chamber 232 within a preset range. On the one hand, it provides accurate high-temperature gas to the external device, and on the other hand, it can keep the entire heating box 200 within the preset temperature range to avoid cold spots.

[0035] like Figure 1As shown, the cabinet 100 is also provided with an opening 120 that connects to the receiving cavity 110. The opening 120 is located on the front side of the cabinet 100. The gas supply device also includes a door 500, which is closable and connected to the cabinet 100 to open or close the opening 120. When the door 500 closes the opening 120, the receiving cavity 110 of the cabinet 100 is closed, and the cabinet 100 is in a sealed state to prevent gas leakage inside the cabinet 100. When the door 500 opens the opening 120, the operator can perform maintenance on the gas supply device, such as replacing the gas cylinder 400 or performing repairs. In one embodiment, one side of the door 500 is rotatably connected to the cabinet 100, and the opposite side can be locked to the cabinet 100. When the door 500 rotates relative to the cabinet 100, it can open or close the opening 120. The rotatable connection between the door 500 and the cabinet 100 is not limited to the use of hinges or hole-shaft mating structures. The locking of the door 500 and the cabinet 100 is not limited to the use of snaps, latches, or sealing buckles. In addition, an electronic safety lock can be added between the door 500 and the cabinet 100 to lock the door 500 and the cabinet 100 and improve the safety performance of the gas supply device.

[0036] Because the special gas supplied by the gas supply device is flammable, explosive, and highly toxic, in order to prevent leakage of the gas delivery component 300 and the escape of dangerous gas outside the cabinet 100, which could pose a safety hazard, in one embodiment, a sealing element 130 is provided on the side of the cabinet 100 where the opening 120 is located. The sealing element 130 is arranged around the opening 120. When the door 500 covers the opening 120, the sealing element 130 is clamped between the cabinet 100 and the door 500. Due to the flexibility of the sealing element 130, it deforms under the clamping action and comes into close contact with the cabinet 100 and the door 500, thus achieving a complete seal of the gas supply device and preventing dangerous gas from leaking outwards. The sealing element 130 can be made of a polymer sealing material, such as perfluoroether rubber, fluororubber, nitrile rubber, silicone, etc.

[0037] In addition, such as Figure 3As shown, the housing 230 has a wiring hole 233 through which the gas supply pipe 311 passes for connection with the gas connector 410 and external equipment. A sealing structure is provided between the gas supply pipe 311 and the inner wall of the wiring hole 233 to prevent dangerous gases inside the housing 230 from leaking out. The sealing structure is not limited to sealant or sealing rings. In addition, a joint sealing component, such as a rubber sealing element or a metal sealing element, can be provided at the joint of the gas supply pipe 311, or a welded seal can be used to reduce the probability of gas leakage from the gas supply assembly 300. Understandably, a sealing element 130 can also be provided on the front side of the housing 230. The sealing element 130 is positioned around the openings of the front of the first heating chamber 231 and the second heating chamber 232. After the first cover 210 and the second cover 220 are closed, the first heating chamber 231 and the second heating chamber 232 are in a sealed state.

[0038] It should be noted that since the gas supply component 300 is located inside the housing 230, and the housing 230 is placed in the receiving cavity 110 of the cabinet 100, the gas supply device has dual gas leakage prevention measures, which can effectively reduce the probability of dangerous gas escaping outside the cabinet 100 and improve the safety performance of the gas supply device.

[0039] Some external devices require the gas supply device to deliver various specialty gases. In this case, the gas supply device can be equipped with multiple gas cylinders 400, each storing different types of specialty gases, and supplying these gases to the external devices via corresponding gas delivery components 300. For details, refer to... Figure 5 The receiving cavity 110 includes multiple receiving spaces 111, and multiple gas cylinders 400 are provided. Each receiving space 111 contains at least one gas cylinder 400. Each receiving space 111 has an opening 120 on its front side. The gas supply device also includes multiple doors 500, which are closable and connected to the cabinet 100 to cover the corresponding opening 120. Thus, the door 500 can independently open or close a certain opening 120 to independently open or close the corresponding receiving space 111, thereby allowing for the replacement of the gas cylinder 400 in that receiving space 111 or the maintenance of the gas delivery assembly 300 in that receiving space 111. Alternatively, refer to... Figure 11 The gas supply device also includes at least one partition 140, which is disposed within the receiving cavity 110 to divide the receiving cavity 110 into multiple receiving spaces 111. In one embodiment, the gas supply device further includes a gas extraction mechanism. The cabinet 100 is provided with a gas extraction port that communicates with the receiving cavity 110. The gas extraction mechanism communicates with the receiving cavity 110 through the gas extraction port. The gas extraction mechanism may be configured to include a vacuum pump. The gas extraction structure can extract the gas in the receiving cavity 110 through the gas extraction port. On the one hand, it can force the gas leaking in the cabinet 100 to be directionally transported to the exhaust gas treatment equipment for safe treatment. On the other hand, it can form a negative pressure in the receiving cavity 110, thereby forming a pressure difference with the external environment and preventing the gas leaking in the receiving cavity 110 from escaping out of the cabinet 100.

[0040] In addition, the gas supply device also includes a detection component 600, which is used to detect at least one of combustible gas, toxic gas, flame, smoke and gas pressure in the receiving cavity 110. In some possible implementations, the detection component 600 may include multiple sensors located in the cabinet 100, with different sensors used to detect combustible gas, toxic gas, flame, smoke and gas pressure respectively. For example, the detection component 600 includes a flame detector, which is used to detect whether sparks, flames, or fire occur inside the cabinet 100. If the flame detector detects a spark inside the cabinet 100, it can trigger an alarm mechanism. Alternatively, the detection component 600 includes a smoke detector, which can sense whether smoke occurs inside the cabinet 100. If the smoke detector detects smoke inside the cabinet 100, it can trigger an alarm mechanism. Alternatively, the detection component 600 includes a gas concentration sensor, which can detect the concentration of combustible or toxic gas inside the cabinet 100. If the gas concentration measured by the gas concentration sensor is higher than a preset value, it can trigger an alarm mechanism. Alternatively, the detection component 600 includes a pressure sensor, which is used to detect the air pressure inside the cabinet 100. Since the cabinet 100 is under a slightly negative pressure, if the pressure sensor measures an air pressure inside the cabinet 100 that is higher than a preset value, it can trigger an alarm mechanism.

[0041] The gas supply device also includes an alarm 700, which can issue an alarm indication based on the detection results of the detection component 600. The alarm method of the alarm 700 is not limited to buzzing or flashing alarm lights. The alarm 700 can be installed on the top of the cabinet 100, so that the alarm 700 is not easily obstructed by other equipment, making it convenient for staff to observe and locate the malfunctioning gas supply device. For example, if the detection component 600 detects smoke, flames, or toxic or flammable gases exceeding preset values ​​inside the cabinet 100, the alarm 700 will sound to alert staff to quickly investigate the fault and eliminate safety hazards.

[0042] Typically, gas cylinder 400 requires frequent disassembly and replacement. Operators must precisely position the gas cylinder 400 to the designated installation point to ensure accurate alignment with the connecting pipeline. However, the gas cylinder 400 is prone to displacement during disassembly and assembly, making precise positioning impossible. This leads to misalignment at the joint area between the gas cylinder 400 and the connecting pipeline, posing a risk of seal failure and hazardous gas leakage. Furthermore, the disassembly and assembly of the gas cylinder 400 is difficult, hindering rapid and safe replacement. Based on this, referring to... Figure 1 and Figure 6 In one embodiment of this utility model, the gas supply device further includes a guide rail 800, which is slidably connected to the bottom of the cabinet 100. A gas cylinder 400 is connected to the guide rail 800, and the gas cylinder 400 can follow the movement of the guide rail 800, entering and exiting the receiving cavity 110 through the opening 120. The sliding fit between the guide rail 800 and the bottom of the cabinet 100 provides guidance for the movement of the gas cylinder 400 during replacement, ensuring that the movement trajectory of the gas cylinder 400 is aligned with the gas supply connector 320. Additionally, as... Figure 7 The inner wall of the cabinet 100 is provided with a limiting part 150, which is used to limit the gas cylinder 400 along the sliding direction of the guide rail 800. After the gas cylinder 400 is pushed into the cabinet 100 and limited by the limiting part 150, the gas connector 410 and the gas supply connector 320 are automatically aligned, which improves the positioning accuracy of the gas cylinder 400 replacement and reduces the risk of sealing failure and gas leakage caused by alignment deviation. Under the guidance of the guide rail 800 and the limiting action of the limiting part 150, the gas cylinder 400 can be replaced by pushing it into the cabinet 100 and pulling it out of the cabinet 100. The operation is relatively convenient and the replacement efficiency is high.

[0043] It should be noted that the limiting part 150's limiting of the gas cylinder 400 is not limited to the limiting part 150 abutting against the gas cylinder 400 along the sliding direction of the guide rail 800, or the limiting part 150 abutting against the guide rail 800 along the sliding direction of the guide rail 800.

[0044] In one embodiment, the length of the guide rail 800 gradually decreases vertically along a first direction. The first direction is perpendicular to the sliding direction of the guide rail 800 and parallel to the horizontal direction, making the guide rail 800 wedge-shaped. The guide rail 800 cooperates with the wedge shape at the bottom of the cabinet 100, which can automatically center the gas cylinder 400 when it moves, eliminate the lateral displacement deviation of the gas cylinder 400, further improve the replacement accuracy of the gas cylinder 400, and reduce the risk of leakage caused by installation stress and damage to the sealing surface.

[0045] Alternatively, in another embodiment, such as Figure 8As shown, the gas supply device includes a base 810 and a slide 820. The base 810 is located at the bottom of the cabinet 100. A guide rail 800 is slidably connected to the top of the base 810 and to the bottom of the slide 820. The length of the slide 820 gradually decreases vertically along a first direction. The first direction is perpendicular to the sliding direction of the guide rail 800 and parallel to the horizontal direction. Part of the slide 820 is embedded in the bottom of the gas cylinder 400. When the gas cylinder 400 is placed on the slide 820, it can automatically center itself due to the guidance of the inclined surface of the slide 820. This eliminates the lateral positional deviation of the gas cylinder 400. When the slide table 820 moves relative to the base 810, the gas cylinder 400 moves synchronously with the slide table 820. The sliding engagement between the guide rail 800 and the base 810 provides guidance for the movement of the gas cylinder 400. Through the inclined engagement between the slide table 820 and the gas cylinder 400 and the guidance of the guide rail 800, the gas connector 410 and the gas delivery connector 320 can be automatically aligned, thereby improving the positioning accuracy of the gas cylinder 400 replacement and reducing the risk of sealing failure and gas leakage caused by alignment deviation.

[0046] Alternatively, in another embodiment, refer to Figure 9 The gas supply device also includes a base 810 and a slide 820. The base 810 is located at the bottom of the cabinet 100. The base 810 includes a base plate 811 and two upright plates 812. The two upright plates 812 are spaced apart and connected to the top of the base plate 811. Two guide rails 800 are provided and are respectively installed on the opposite side of the two upright plates 812. The guide rails 800 can be heavy-duty stainless steel silent slide rails. The two ends of the slide 820 are respectively connected to the two guide rails 800. The gas cylinder 400 is installed on the top of the slide 820. The two guide rails 800 are arranged side by side and together guide the movement of the gas cylinder 400, keeping the gas cylinder 400 balanced and moving along the sliding direction of the guide rails 800, thereby improving the alignment accuracy of the gas line connector 410 and the gas supply connector 320 after the gas cylinder 400 is replaced.

[0047] Alternatively, in another embodiment, refer to Figure 10The gas supply device also includes a base 810, a slide 820, and a support 830. The base 810 is located at the bottom of the cabinet 100. The base 810 includes a base plate 811 and two upright plates 812. The two upright plates 812 are spaced apart and are both connected to the top of the base plate 811. Two guide rails 800 are provided and are respectively installed on the opposite side of the two upright plates 812. The guide rails 800 can be heavy-duty stainless steel silent guide rails. The two ends of the slide 820 are respectively connected to the two guide rails 800, and the gas cylinder 400 is installed on the top of the slide 820. The support 830 is located between the two upright plates 812 and is connected to the top of the base 810. The bottom of the slide 820 is slidably connected to the support 830. Together, they guide the movement of the gas cylinder 400, keeping it balanced and moving along the sliding direction of the guide rail 800. The slide table 820 is supported by the support seat 830, enabling the slide table 820 to bear the heavy load of the gas cylinder 400 and improve the alignment accuracy of the gas line connector 410 and the gas delivery connector 320 after the gas cylinder 400 is replaced.

[0048] Understandably, handles can be installed on the guide rail 800, slide 820, or base 810 used to support the gas cylinder 400. These handles allow workers to grip the cylinder, facilitating its insertion and removal from the cabinet 100 and making cylinder replacement more convenient. Specifically, when replacing the gas cylinder 400, disconnect the gas line connector 410 from the gas delivery connector 320. Pull the cylinder 400 outwards along the guide rail 800 using the handle, removing it from the operating area of ​​the cabinet 100. Then, place the new gas cylinder 400 on the guide rail 800 or slide 820, push the cylinder 400 using the handle, and limit its movement to the position of the limiting part 150. Finally, reconnect the gas line connector 410 to the gas delivery connector 320. Figure 1 This refers to the state where gas cylinder 400 is pulled out to the outside of cabinet 100. Figure 2 This indicates that the gas cylinder 400 has been pushed into the cabinet 100.

[0049] Reference Figure 1 and Figure 5The gas supply device also includes a control module 900, which includes at least a display screen. The display screen allows operators to observe the operating status of the gas supply device and adjust operating parameters. Existing control modules 900 are located at the top of the cabinet 100. This position is too high, making it inconvenient to observe and requiring operators to use ladders, which is inefficient and poses safety hazards. In this embodiment, the control module 900 is installed on one side of the cabinet 100 along a first direction, which is perpendicular to the movement direction of the guide rail 800 and parallel to the horizontal direction. The control module 900 is rotatably connected to the cabinet 100 around a first axis and / or a second axis, where the first axis is parallel to the vertical direction and the second axis is parallel to the first direction. Because the control module 900 is located on the side of the cabinet 100, the height of the display screen is reduced, and the control module 900 can adjust its tilt angle by rotating relative to the cabinet 100, reducing glare for operators and optimizing the field of vision. Operators do not need to use ladders, making operation convenient and safe.

[0050] It should be noted that the rotational connection between the operating module and the cabinet 100 can be achieved using a large-angle damping positioning pivot or a multi-axis adjusting bracket. The height of the display screen can be set from 1.1m to 1.6m, allowing staff to clearly observe the display interface and interact with it from a standing or sitting position.

[0051] In addition, the gas supply device also includes a control box 1010, which typically houses electrical components. The control box 1010 is located at the rear of the cabinet 100 to reduce its height, thereby reducing the installation and maintenance height of the electrical components. Understandably, the rear of the cabinet 100 refers to the side facing away from the door 500.

[0052] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A gas supply device, characterized in that, include: The cabinet has an internal cavity for storage. A heating box is disposed within the receiving cavity. The heating box includes a box body and a first cover and a second cover sealing the box body. The box body has a first heating cavity and a second heating cavity. The first cover is used to open and close the first heating cavity, and the second cover is used to open and close the second heating cavity. The box body includes multiple side plates, which enclose the first heating cavity and the second heating cavity. Each side plate includes a first base layer and a heating layer. The first base layer is located outside the heating layer, and the heating layer is used to release heat to the first heating cavity and the second heating cavity. A gas delivery assembly includes a gas delivery module and a gas delivery connector. The gas delivery module includes multiple gas delivery pipelines, multiple valves, and multiple pipeline connectors. The valves and pipeline connectors are all connected to the gas delivery pipelines, and one end of one of the gas delivery pipelines is connected to the gas delivery connector. The gas delivery module is located in the first heating chamber, and the gas delivery connector is located in the second heating chamber. A gas cylinder is located inside the receiving cavity and below the heating box. The top of the gas cylinder is provided with a gas connection connector, which can be connected to the gas supply connector.

2. The gas supply device according to claim 1, characterized in that, The cabinet is also provided with an opening that connects to the receiving cavity, and the air supply device also includes a door that is closably connected to the cabinet to open or close the opening. The gas supply device also includes a guide rail, which is slidably connected to the bottom of the cabinet. The gas cylinder is connected to the guide rail and can move with the guide rail, entering and exiting the receiving cavity through the opening. The inner wall of the cabinet is provided with a limiting part, which is used to limit the gas cylinder along the sliding direction of the guide rail.

3. The gas supply device according to claim 2, characterized in that, The length of the guide rail gradually decreases vertically along the first direction, which is perpendicular to the sliding direction of the guide rail and parallel to the horizontal direction. Alternatively, the gas supply device may further include a base and a slide, the base being located at the bottom of the cabinet, the guide rail being slidably connected to the top of the base, the guide rail being connected to the slide, the length of the slide along a first direction gradually decreasing vertically, the first direction being perpendicular to the sliding direction of the guide rail and parallel to the horizontal direction, and part of the slide being embedded in the bottom of the gas cylinder; Alternatively, the gas supply device may further include a base and a slide. The base is located at the bottom of the cabinet and includes a bottom plate and two upright plates. The two upright plates are spaced apart and connected to the top of the bottom plate. Two guide rails are provided and installed on opposite sides of the two upright plates. The two ends of the slide are connected to the two guide rails respectively, and the gas cylinder is installed on the top of the slide. Alternatively, the gas supply device may further include a base, a slide, and a support. The base is located at the bottom of the cabinet and includes a bottom plate and two upright plates. The two upright plates are spaced apart and connected to the top of the bottom plate. Two guide rails are provided and installed on opposite sides of the two upright plates. The two ends of the slide are connected to the two guide rails, and the gas cylinder is installed on the top of the slide. The support is located between the two upright plates and connected to the top of the base. The bottom of the slide is slidably connected to the support.

4. The gas supply device according to claim 1, characterized in that, The side panel also includes a thermal insulation layer, which is disposed between the first base layer and the heating layer; And / or, the side plate further includes a second base layer, which is disposed on the side of the heating layer opposite to the first base layer.

5. The gas supply device according to claim 1, characterized in that, The gas supply device further includes at least one partition, which is disposed in the receiving cavity to divide the receiving cavity into multiple receiving spaces. Multiple gas cylinders are provided, and at least one gas cylinder is provided in each receiving space. The cabinet is also provided with an opening communicating with the receiving space. The gas supply device further includes multiple doors, which are closable and connected to the cabinet to cover the corresponding openings.

6. The gas supply device according to claim 5, characterized in that, A sealing element is provided on one side of the cabinet with the opening. The sealing element is arranged around the opening. When the door covers the opening, the sealing element is clamped between the cabinet and the door. And / or, the box body is provided with a wire hole, the gas supply line passes through the wire hole, and a sealing structure is provided between the inner wall of the wire hole and the gas supply line.

7. The gas supply device according to claim 1, characterized in that, The gas supply device also includes an air extraction mechanism. The cabinet is provided with an air extraction port that connects to the receiving cavity. The air extraction mechanism connects to the receiving cavity through the air extraction port and is used to create negative pressure in the receiving cavity.

8. The gas supply device according to claim 2, characterized in that, The gas supply device further includes a control module, which includes at least a display. The control module is installed on one side of the cabinet along a first direction, which is perpendicular to the movement direction of the guide rail and parallel to the horizontal direction. The control module is rotatably connected to the cabinet about a first axis and / or a second axis, where the first axis is parallel to the vertical direction and the second axis is parallel to the first direction. And / or, the gas supply device further includes a control box, which is located at the back of the cabinet.

9. The gas supply device according to claim 1, characterized in that, The gas supply device also includes a temperature regulation module, which is electrically connected to the heating layer and is used to change the amount of heat released by the heating layer.

10. The gas supply device according to claim 1, characterized in that, The gas supply device further includes a detection component, which is used to detect at least one of the combustible gas, toxic gas, flame, smoke, and gas pressure in the receiving cavity. And / or, the gas supply device further includes a detection component and an alarm, the alarm being able to issue an alarm indication based on the detection result of the detection component.

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