Liquid supply mechanism and sorting machine

Abstract

The utility model relates to the technical field of semiconductor testing equipment, specifically disclose a kind of liquid supply mechanism and sorting machine, the liquid supply mechanism includes main pipeline and at least two branch pipelines, wherein, the outlet of main pipeline is configured to communicate with the liquid inlet of sorting machine;The outlet of at least two branch pipelines is all communicated with the inlet of main pipeline;The inlet of each branch pipeline is communicated with the outlet of several liquid tanks one-to-one;Control valve and exhaust valve are all equipped on each branch pipeline, wherein, the exhaust valve on the same branch pipeline is located in the upstream of control valve.The above-mentioned setting is by setting exhaust valve and control valve on branch pipeline, when liquid nitrogen tank opens, the air in branch pipeline can be discharged by the way of closing control valve and opening exhaust valve, so that liquid enters sorting machine by main pipeline;Ensure precooling effect, improve cooling efficiency;In addition, when needing to replace liquid tank, it can avoid liquid supply interruption, it is favorable to ensure the temperature constant of sorting machine, improve test precision and efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a liquid supply mechanism and a sorting machine. Background Technology

[0002] In precision testing equipment such as semiconductor testing and sorting machines, liquid nitrogen is often used for cryogenic control to meet the specific low-temperature operating environment requirements of the equipment. In related technologies, the liquid nitrogen supply pipeline is typically a single line connecting the liquid nitrogen tank and the equipment. This approach has the following problems:

[0003] 1. Initial venting and pre-cooling difficulties: When liquid nitrogen is initially injected into the pipeline, the existing air and heat in the pipeline will cause the liquid nitrogen to boil violently and the pressure to fluctuate, affecting the cooling effect of the semiconductor testing and sorting machine.

[0004] 2. Liquid nitrogen supply interruption risk: When the old liquid nitrogen tank is depleted, the process of switching to a new liquid nitrogen tank will cause a liquid nitrogen supply interruption, resulting in internal temperature fluctuations in the semiconductor test sorting machine, affecting test accuracy and efficiency.

[0005] Therefore, it is urgent to study a liquid supply mechanism and a sorting machine to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a liquid supply mechanism and a sorting machine to solve the problems of poor initial precooling effect and temperature fluctuation when changing liquid nitrogen tanks in the prior art.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A liquid supply mechanism, comprising:

[0009] The main pipeline, the outlet of which is configured to communicate with the liquid inlet of the separator;

[0010] At least two branch pipelines, the outlets of at least two branch pipelines are connected to the inlet of the main pipeline; the inlet of each branch pipeline is connected to the outlet of a plurality of liquid tanks in a one-to-one correspondence; each branch pipeline is provided with a control valve and an exhaust valve, wherein the exhaust valve on the same branch pipeline is located upstream of the control valve.

[0011] As an optional technical solution for the liquid supply mechanism, each of the branch pipelines is a first branch pipeline and a second branch pipeline, and both the first branch pipeline and the second branch pipeline extend in a direction away from the main pipeline.

[0012] As an optional technical solution for the liquid supply mechanism, the vent valve on the first branch pipe is a first vent valve, and the outlet direction of the first vent valve is perpendicular to the extension direction of the first branch pipe; and / or;

[0013] The exhaust valve on the second branch pipe is a second exhaust valve, and the outlet direction of the second exhaust valve is perpendicular to the extension direction of the second branch pipe.

[0014] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism further includes a pressure regulating valve, which is located in the main pipeline and configured to regulate the pressure of the liquid flowing through the main pipeline.

[0015] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism further includes a pressure relief valve, which is located in the main pipeline and is configured to open when the liquid pressure in the main pipeline exceeds a preset value to discharge part of the liquid in the main pipeline.

[0016] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism further includes a pressure relief pipe, the inlet of which is connected to the main pipeline, and the inlet of the pressure relief valve is connected to the outlet of the pressure relief pipe.

[0017] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism also includes a pressure gauge, which is located on the pressure relief pipe and is configured to measure the pressure of the body fluid in the main pipeline.

[0018] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism further includes a pressure regulating valve, which is located on the main pipeline, and the inlet of the pressure relief pipe is located downstream of the pressure regulating valve.

[0019] As an optional technical solution for the liquid supply mechanism, the liquid supply mechanism also includes a bellows, which is connected between the branch pipeline and the liquid tank.

[0020] The sorting machine includes a machine base and a liquid supply mechanism as described in any of the above technical solutions, wherein the liquid inlet is located on the machine base.

[0021] This utility model has at least the following beneficial effects:

[0022] This utility model provides a liquid supply mechanism and a sorting machine. The liquid supply mechanism includes a main pipeline and at least two branch pipelines. The outlet of the main pipeline is configured to communicate with the liquid inlet of the sorting machine. The outlets of the at least two branch pipelines are all connected to the inlets of the main pipeline. The inlets of each branch pipeline are connected to the outlets of several liquid tanks in a one-to-one correspondence. Each branch pipeline is equipped with a control valve and an exhaust valve. The exhaust valve on the same branch pipeline is located upstream of the control valve.

[0023] By installing vent valves and control valves on the branch pipelines, when the liquid tank is opened, the air in the branch pipeline can be vented first by closing the control valve and opening the vent valve, thus pre-cooling the branch pipeline. When the liquid is discharged from the branch pipeline through the vent valve, the control valve is then opened, allowing the liquid to enter the separator through the main pipeline. This ensures the pre-cooling effect and improves cooling efficiency. In addition, by connecting two liquid tanks to at least two branch pipelines, and then supplying liquid to the separator through the main pipeline, when the liquid tank needs to be replaced, the other liquid tank can be opened before replacement, allowing both liquid tanks to supply liquid simultaneously for a preset time. Then, the liquid tank to be replaced can be closed to avoid interruption of liquid supply, which helps to ensure a constant temperature in the separator and improves testing accuracy and efficiency. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the liquid supply mechanism in an embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the sorting machine in an embodiment of the present invention.

[0027] In the picture:

[0028] 100. Main pipeline; 110. Pressure regulating valve; 120. Pressure gauge; 130. Pressure relief valve; 140. Pressure relief pipe;

[0029] 200, First branch pipe; 210, First exhaust valve; 220, First control valve;

[0030] 300, Second branch pipe; 310, Second exhaust valve; 320, Second control valve;

[0031] 10. Test chamber module; 20. Liquid nitrogen tank. Detailed Implementation

[0032] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0033] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0034] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0035] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0036] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0037] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0038] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0039] like Figures 1 to 2 As shown, this embodiment provides a liquid supply mechanism connected between a liquid tank and a separator, used to supply liquid to the separator. The liquid can be a coolant such as liquid nitrogen, and the liquid tank can be a liquid nitrogen tank 20. The liquid supply mechanism includes a main pipeline 100 and at least two branch pipelines. The outlet of the main pipeline 100 is configured to connect to the liquid inlet of the separator; the outlets of the at least two branch pipelines are both connected to the inlet of the main pipeline 100; the inlet of each branch pipeline is connected to the outlet of a plurality of liquid nitrogen tanks 20 in a one-to-one correspondence; each branch pipeline is equipped with a control valve and an exhaust valve, wherein the exhaust valve on the same branch pipeline is located upstream of the control valve.

[0040] By installing vent valves and control valves on the branch pipelines, when the liquid nitrogen tank 20 is opened, the air in the branch pipeline can be vented first by closing the control valve and opening the vent valve, thus pre-cooling the branch pipeline. When the liquid nitrogen is discharged from the branch pipeline through the vent valve, the control valve is then opened, allowing the liquid nitrogen to enter the separator through the main pipeline 100, ensuring the pre-cooling effect and improving cooling efficiency. In addition, by connecting two liquid nitrogen tanks 20 through at least two branch pipelines, and then supplying liquid nitrogen to the separator through the main pipeline 100, when it is necessary to replace the liquid nitrogen tank 20, the other liquid nitrogen tank 20 can be opened before replacement, allowing both liquid nitrogen tanks 20 to supply liquid simultaneously for a preset time. Then, the liquid nitrogen tank 20 to be replaced can be closed to avoid interruption of liquid supply, which helps to ensure the constant temperature of the separator and improves testing accuracy and efficiency.

[0041] In some embodiments, each branch pipeline is a first branch pipe 200 and a second branch pipe 300. Both the first branch pipe 200 and the second branch pipe 300 extend in a direction away from the main pipeline 100, so that the first branch pipe 200 and the second branch pipe 300 can be connected to the two liquid nitrogen tanks 20 respectively. At the same time, it helps to reduce the possibility of interference between the liquid nitrogen tanks 20 and the sorting machine.

[0042] The exhaust valve on the first branch pipe 200 is a first exhaust valve 210, and the outlet direction of the first exhaust valve 210 is perpendicular to the extension direction of the first branch pipe 200. The exhaust valve on the second branch pipe 300 is a second exhaust valve 310, and the outlet direction of the second exhaust valve 310 is perpendicular to the extension direction of the second branch pipe 300. The above arrangement can minimize the size of the main pipeline 100, thereby reducing the amount of air in the main pipeline 100 and reducing the error caused by the gas discharged from the main pipeline 100 to the temperature control of the sorting machine.

[0043] In some embodiments, the liquid supply mechanism further includes a pressure regulating valve 110, which is located in the main pipeline 100 and configured to regulate the pressure of liquid nitrogen flowing through the main pipeline 100 to ensure that the pressure and flow rate of liquid nitrogen flowing into the separator are controllable.

[0044] To ensure controllable flow of liquid nitrogen into the separator, the liquid supply mechanism further includes a pressure relief valve 130. The pressure relief valve 130 is located in the main pipeline 100 and is configured to open when the liquid nitrogen pressure in the main pipeline 100 exceeds a preset value to discharge a portion of the liquid nitrogen within the main pipeline 100. With the help of the pressure relief valve 130, when the pressure regulating valve 110 malfunctions, the liquid nitrogen tank 20 experiences abnormal pressure, a section of the pipeline is blocked, or other reasons cause the liquid nitrogen pressure in the main pipeline 100 to exceed the preset value, the pressure relief valve 130 can automatically open to discharge a portion of the liquid nitrogen. This ensures that the pressure and flow rate of the liquid nitrogen entering the separator from the main pipeline 100 are controllable, improving the reliability and safety of the liquid nitrogen supply.

[0045] To shorten the size of the main pipeline 100, in some embodiments, the liquid supply mechanism further includes a pressure relief pipe 140, the inlet of which is connected to the main pipeline 100, and the inlet of the pressure relief valve 130 is connected to the outlet of the pressure relief pipe 140. This arrangement also helps to improve the ease of installation of the pressure relief valve 130.

[0046] In some embodiments, the liquid supply mechanism further includes a pressure regulating valve 110, which is located in the main pipeline 100. The inlet of the pressure relief pipe 140 is located downstream of the pressure regulating valve 110, so as to ensure that the pressure relief valve 130 is located downstream of the pressure regulating valve 110, thereby ensuring that the pressure and flow rate of liquid nitrogen flowing into the separator from the main pipeline 100 are controllable, so as to ensure the temperature control effect of the separator.

[0047] To clearly determine the liquid nitrogen pressure within the main pipeline 100, in some embodiments, the liquid supply mechanism further includes a pressure gauge 120, which is mounted on the pressure relief pipe 140 to measure the pressure of the bodily fluid within the main pipeline 100. This configuration ensures monitoring of the liquid nitrogen pressure within the main pipeline 100, allowing for timely manual intervention in case of pressure abnormalities, thus reducing the probability of other risks.

[0048] In some embodiments, the liquid supply mechanism further includes a bellows connected between the branch pipeline and the liquid nitrogen tank 20, so that the position between the liquid nitrogen tank 20 and the sorting machine is not limited, and the placement of the liquid nitrogen tank 20 can be reasonably arranged according to the position of the sorting machine.

[0049] This embodiment also provides a sorting machine, including a machine base and a liquid supply mechanism as described in any of the above embodiments, with the liquid inlet located on the machine base. The machine base includes a feeding / receiving module, a conveying module, and a testing chamber module 10. The conveying module is used to transfer the carrier tray carrying the ICs between the modules. The feeding / receiving module is used to feed / unload materials onto the carrier tray. The testing chamber module 10 is used to create a preset high / low temperature testing environment (high / lower than ambient temperature) and isolate it from the external atmosphere.

[0050] In some embodiments, the machine tool includes at least a test chamber module 10, wherein the test chamber module 10 includes a preheating zone, a test zone and a reheating zone, and at least the preheating chamber and the test zone are provided with nozzles and connected to the liquid supply mechanism.

[0051] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A liquid supply mechanism, characterized in that, include: Main pipeline (100), the outlet of which is configured to communicate with the inlet of the sorting machine; At least two branch pipelines, the outlets of at least two of the branch pipelines are connected to the inlet of the main pipeline (100); the inlet of each of the branch pipelines is connected to the outlet of a plurality of liquid tanks (20) in a one-to-one correspondence; each of the branch pipelines is provided with a control valve and an exhaust valve, wherein the exhaust valve on the same branch pipeline is located upstream of the control valve.

2. The liquid supply mechanism according to claim 1, characterized in that, Each of the branch pipelines is a first branch pipeline (200) and a second branch pipeline (300), and both the first branch pipeline (200) and the second branch pipeline (300) extend in a direction away from the main pipeline (100).

3. The liquid supply mechanism according to claim 2, characterized in that, The exhaust valve on the first branch pipe (200) is a first exhaust valve (210), and the outlet direction of the first exhaust valve (210) is perpendicular to the extension direction of the first branch pipe (200); and / or; The exhaust valve on the second branch pipe (300) is the second exhaust valve (310), and the outlet direction of the second exhaust valve (310) is perpendicular to the extension direction of the second branch pipe (300).

4. The liquid supply mechanism according to claim 1, characterized in that, The liquid supply mechanism also includes a pressure regulating valve (110), which is located in the main pipeline (100) and configured to regulate the pressure of the liquid flowing through the main pipeline (100).

5. The liquid supply mechanism according to claim 1, characterized in that, The liquid supply mechanism also includes a pressure relief valve (130), which is located on the main pipeline (100) and is configured to open when the liquid pressure in the main pipeline (100) exceeds a preset value to discharge part of the liquid in the main pipeline (100).

6. The liquid supply mechanism according to claim 5, characterized in that, The liquid supply mechanism also includes a pressure relief pipe (140), the inlet of which is connected to the main pipeline (100), and the inlet of the pressure relief valve (130) is connected to the outlet of the pressure relief pipe (140).

7. The liquid supply mechanism according to claim 6, characterized in that, The fluid supply mechanism also includes a pressure gauge (120) which is located on the pressure relief pipe (140) and is configured to measure the pressure of the body fluid in the main pipeline (100).

8. The liquid supply mechanism according to claim 6, characterized in that, The liquid supply mechanism also includes a pressure regulating valve (110), which is located on the main pipeline (100), and the inlet of the pressure relief pipe (140) is located downstream of the pressure regulating valve (110).

9. The liquid supply mechanism according to any one of claims 1-8, characterized in that, The liquid supply mechanism also includes a bellows, which is connected between the branch pipeline and the liquid tank (20).

10. A sorting machine, characterized in that, It includes a machine base and a liquid supply mechanism as described in any one of claims 1-9, wherein the liquid inlet is located on the machine base.

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