A developing apparatus liquid supply system

Abstract

The application discloses a developing equipment liquid supply system and belongs to the technical field of semiconductor manufacturing. The developing equipment liquid supply system comprises a liquid storage tank, a developing equipment, a liquid supply pipeline for connecting the liquid storage tank and the developing equipment, a direct-current variable frequency pump arranged on the liquid supply pipeline, and a programmable logic controller connected with the direct-current variable frequency pump through an analog output module. The developing equipment liquid supply system of the application does not need nitrogen and pressurization when supplying liquid to the developing equipment, does not need to stop and depressurize when adding developing liquid to the liquid storage tank, and can add developing liquid to the liquid storage tank when the developing equipment liquid supply system normally operates, so that the production process is not interrupted, and the production efficiency is remarkably improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a liquid supply system for a developing equipment. Background Technology

[0002] In semiconductor manufacturing, photoresist developing equipment is a critical process component. Its main function is to develop the wafer surface by spraying a developer solution containing organic solvents onto the wafer surface. Currently, photoresist developing equipment typically uses nitrogen pressurization for liquid supply. This method has the following problems: First, under prolonged high-pressure nitrogen conditions, nitrogen dissolves in the organic solvent used as the developer, resulting in air bubbles in the developer solution on the wafer surface. These bubbles can cause residual developer on the wafer surface, severely affecting product quality and potentially leading to wafer scrap. Second, adding developer to the storage tank requires stopping the machine and depressurizing before adding developer. Stopping the machine to add developer to the storage tank causes production interruptions, impacting production efficiency. Utility Model Content

[0003] To address the problem of production interruption caused by adding developer to the storage tank, this application provides a liquid supply system for a developing equipment, comprising: a storage tank, a developing equipment, a liquid supply pipeline for connecting the storage tank and the developing equipment, and a DC inverter pump installed on the liquid supply pipeline, the DC inverter pump being connected to a programmable logic controller via an analog output module.

[0004] The liquid supply system for developing equipment provided in this application does not require nitrogen or pressurization when supplying liquid to the developing equipment, and does not require stopping the machine or depressurizing when adding developing solution to the storage tank. The developing equipment liquid supply system can add developing solution to the storage tank while the developing equipment is running normally, and the production process will not be interrupted, which significantly improves production efficiency. Attached Figure Description

[0005] Figure 1 A schematic diagram of a developing equipment liquid supply system provided for an embodiment of this application. Figure 1 .

[0006] Figure 2 A schematic diagram of a developing equipment liquid supply system provided for an embodiment of this application. Figure 2 .

[0007] Figure 3 A schematic diagram of a developing equipment liquid supply system provided for an embodiment of this application. Figure 3 .

[0008] Figure 4 A schematic diagram of a developing equipment liquid supply system provided for an embodiment of this application. Figure 4 .

[0009] Figure 5A sleeve structure provided for embodiments of this application to maintain the temperature of the developer within a specific temperature range. Detailed Implementation

[0010] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0011] In the description of this application, it should be noted that the terms "upper", "lower", "inner", "outer", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0012] In the description of this application, it should be noted that relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0013] In the description of this application, it should be noted that "multiple" means "at least two".

[0014] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed," "equipped with," "sleeved," "connected," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can also refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0015] like Figure 1As shown, the first liquid supply system for a developing equipment provided in the embodiments of this application includes: a liquid storage tank and a developing equipment, a liquid supply pipeline for connecting the liquid storage tank and the developing equipment, a DC inverter pump installed on the liquid supply pipeline, and the DC inverter pump connected to a PLC (Programmable Logic Controller) through an analog output module.

[0016] The specific connection method between the storage tank and the supply pipeline can adopt existing technology, which will not be elaborated here.

[0017] The specific connection method between the developing equipment and the liquid supply pipeline can use existing technology, which will not be elaborated here.

[0018] The specific connection method between the DC inverter pump and the liquid supply pipeline can adopt existing technology, which will not be elaborated here.

[0019] Under the control of a programmable logic controller, the DC inverter pump pumps the developer solution from the storage tank to the developing equipment through the supply pipeline.

[0020] In one embodiment of this application, the DC inverter pump is model CT3001FC, the analog output module is model 04DA-E2, and the programmable logic controller is model DVP80ES2 40DI / 40DO.

[0021] like Figure 2 As shown, the second liquid supply system for a developing device provided in the embodiments of this application, based on the first liquid supply system for a developing device provided in the embodiments of this application, further includes a digital flow meter on the liquid supply pipeline, and the digital flow meter is connected to a programmable logic controller.

[0022] The specific connection method between the digital flow meter and the liquid supply pipeline can adopt existing technology, which will not be elaborated here.

[0023] The programmable logic controller (PLC) continuously reads the developer flow rate in the supply line, detected by the digital flow meter. When the actual developer flow rate detected by the digital flow meter deviates from the preset ideal flow rate, the PLC adjusts the analog output module to regulate the speed of the gear motor of the DC inverter pump, thereby adjusting the actual developer flow rate in the supply line. This ensures that the actual developer flow rate remains stable and consistent with the preset ideal flow rate. This improves production quality because an unstable developer flow rate is detrimental to the wafer development process.

[0024] The liquid supply system of the developing equipment may also include an alarm module, which is connected to a programmable logic controller.

[0025] The alarm module can use existing audio-visual speakers, which will not be elaborated here.

[0026] When the actual flow rate of the developer in the supply line detected by the digital flow meter read by the programmable logic controller (PLC) is less than the preset ideal supply flow rate first value for a first time, or when the actual flow rate of the developer in the supply line detected by the digital flow meter read by the PLC is greater than the preset ideal supply flow rate second value for a first time, the PLC can control the alarm module to issue a first alarm signal to remind the operator that the actual flow rate of the developer in the supply line is abnormal.

[0027] Ideal fluid supply flow rate, first value, second value, and first duration can be set according to actual needs.

[0028] In one embodiment of this application, the digital flow meter is an electronic gear flow meter.

[0029] In one embodiment of this application, the electronic gear flow meter is model GF02-F1-11.

[0030] like Figure 3 As shown, the third liquid supply system for developing equipment provided in the embodiments of this application, based on the second liquid supply system for developing equipment provided in the embodiments of this application, further includes a float flow meter on the liquid supply pipeline.

[0031] The specific connection method between the float flow meter and the liquid supply pipeline can adopt existing technology, which will not be elaborated here.

[0032] The flow rate of developer in the supply line detected by the float flow meter can be compared with the flow rate of developer in the supply line detected by the digital flow meter to determine whether the flow rate of developer in the supply line detected by the digital flow meter is accurate.

[0033] The float flow meter can be any existing float flow meter, which will not be elaborated here.

[0034] like Figure 4 As shown, the fourth liquid supply system for developing equipment provided in the embodiments of this application, based on the third liquid supply system for developing equipment provided in the embodiments of this application, further includes a pneumatic diaphragm valve on the liquid supply pipeline.

[0035] The specific connection method between the pneumatic diaphragm valve and the liquid supply line can adopt existing technology, which will not be elaborated here.

[0036] Pneumatic diaphragm valves can be used to control the opening and closing of liquid supply lines.

[0037] The pneumatic diaphragm valve can be any existing pneumatic diaphragm valve, which will not be elaborated here.

[0038] The fifth liquid supply system for a developing device provided in the embodiments of this application, based on the second liquid supply system for a developing device provided in the embodiments of this application, further includes an HMI (Human Machine Interface), which is connected to a programmable logic controller.

[0039] In one embodiment of this application, the human-machine interface is model DOP-107WV.

[0040] The human-machine interface can display the flow rate of the developer in the liquid supply line, which is detected by the digital flow meter and read by the programmable logic controller.

[0041] Operators can use the human-machine interface (HMI) to set the ideal fluid supply flow rate. Operators can also use the HMI to set a first and second value. Operators can also use the HMI to set a first duration.

[0042] The programmable logic controller can accumulate the flow rate of the developer in the supply line detected by the digital flow meter.

[0043] The flow rate of the developer in the supply line is accumulated by the digital flow meter detected by the programmable logic controller, and the human-machine interface can display the remaining amount of developer in the storage tank.

[0044] When the flow rate of developer in the supply line detected by the digital flow meter and accumulated by the programmable logic controller reaches the preset cumulative flow rate, it indicates that there is not much developer left in the storage tank. The programmable logic controller can control the alarm module to issue a second alarm signal to remind the operator to add developer to the storage tank.

[0045] A dispensing machine can be used to add developer to the storage tank. The dispensing machine can be any existing technology, and will not be described in detail here. The dispensing machine is connected to the storage tank. The specific connection method between the dispensing machine and the storage tank can use existing technology, and will not be described in detail here. The dispensing machine can be connected to a programmable logic controller (PLC). When the flow rate of developer in the supply line detected by the digital flow meter, accumulated by the PLC, reaches a preset cumulative supply flow rate, the PLC can control the dispensing machine to add developer to the storage tank. When the time for the dispensing machine to add developer to the storage tank exceeds a preset second time limit, the PLC can control the alarm module to issue a third alarm signal, reminding the operator that the dispensing machine may be malfunctioning; it can also control the dispensing machine to stop adding developer.

[0046] The preset cumulative liquid supply flow rate and second duration can be set according to actual needs.

[0047] Operators can use the human-machine interface to set a second duration.

[0048] The sixth liquid supply system for a developing device provided in the embodiments of this application, based on the fifth liquid supply system for a developing device provided in the embodiments of this application, further includes a temperature detection module and a temperature sensor. The programmable logic controller is connected to the temperature detection module, and the temperature detection module is connected to the temperature sensor.

[0049] The temperature sensor can be installed on the outer wall of the supply line near the outlet end. For example, the temperature sensor can be attached to the outer wall of the supply line near the outlet end.

[0050] When the programmable logic controller (PLC) detects, via its temperature detection module and temperature sensor, that the temperature of the developer solution in the supply line near the outlet is lower than the preset ideal developer temperature (third value) for more than a third time interval, or when the PLC detects, via its temperature detection module and temperature sensor, that the temperature of the developer solution in the supply line near the outlet is higher than the preset ideal developer temperature (fourth value) for more than a third time interval, the PLC can control the alarm module to issue a fourth alarm signal, alerting the operator to the abnormal developer temperature. To avoid batch-wide product quality issues caused by abnormal developer temperature, production can be temporarily interrupted until the developer temperature returns to normal before resuming production.

[0051] The ideal temperature, third value, fourth value, and third duration of the developer solution can be set according to actual needs.

[0052] Operators can use the HMI to set the ideal developer temperature. Operators can also use the HMI to set a third value. Operators can also use the HMI to set a fourth value. Operators can also use the HMI to set a third duration.

[0053] The developer equipment's liquid supply system may also include a sleeve structure to maintain the developer temperature within a specific temperature range. This sleeve structure can be located at the end of the supply line near the outlet. For example... Figure 5 As shown, the inner layer of the sleeve structure, which maintains the developer temperature within a specific temperature range, is the supply line 11, and the outer layer is the thermostatic liquid line 12. The thermostatic liquid in the thermostatic liquid line 12 keeps the temperature of the developer in the supply line 11 within a specific temperature range. This specific temperature range can be set according to actual needs. A temperature sensor 13 can be inserted into the thermostatic liquid line 12 in the outer layer of the sleeve to measure the temperature of the developer.

[0054] In one embodiment of this application, the temperature of the thermostatic liquid in the thermostatic liquid pipeline 12 is 30±2℃.

[0055] In one embodiment of this application, the temperature detection module is model 04TC-E2.

[0056] The temperature sensor can be any existing temperature sensor, which will not be elaborated here.

[0057] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Those skilled in the art can still make various modifications and variations to the technical solutions described in the foregoing embodiments without departing from the spirit and scope of the embodiments of this application. If these modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include these modifications and variations.

Claims

1. A liquid supply system for a developing equipment, characterized in that, include: The liquid storage tank and developing equipment are connected by a liquid supply pipeline. A DC inverter pump is installed on the liquid supply pipeline, and the DC inverter pump is connected to a programmable logic controller through an analog output module.

2. The liquid supply system for the developing equipment according to claim 1, characterized in that, The liquid supply system of the developing equipment also includes a digital flow meter installed on the liquid supply pipeline, which is connected to a programmable logic controller.

3. The liquid supply system for the developing equipment according to claim 2, characterized in that, The liquid supply system of the developing equipment also includes an alarm module, which is connected to a programmable logic controller.

4. The liquid supply system for the developing equipment according to claim 3, characterized in that, The liquid supply system of the developing equipment also includes a human-machine interface, which is connected to a programmable logic controller.

5. The liquid supply system for the developing equipment according to claim 2, characterized in that, The liquid supply system of the developing equipment also includes a liquid dispenser, which is connected to a storage tank and a programmable logic controller.

6. The liquid supply system for the developing equipment according to claim 2, characterized in that, The liquid supply system of the developing equipment also includes a float flow meter installed on the liquid supply pipeline.

7. The liquid supply system for the developing equipment according to claim 2, characterized in that, The liquid supply system of the developing equipment also includes a pneumatic diaphragm valve installed on the liquid supply pipeline.

8. The liquid supply system for the developing equipment according to any one of claims 1-7, characterized in that, The liquid supply system of the developing equipment also includes a temperature detection module and a temperature sensor. The programmable logic controller is connected to the temperature detection module, and the temperature detection module is connected to the temperature sensor. The temperature sensor is located on the outer wall of the liquid supply pipeline near the liquid outlet end.

9. The liquid supply system for the developing equipment according to any one of claims 1-7, characterized in that, The liquid supply system of the developing equipment also includes a sleeve structure that maintains the temperature of the developing solution within a specific temperature range; the inner layer of the sleeve structure that maintains the temperature of the developing solution within a specific temperature range is a liquid supply pipeline, and the outer layer of the sleeve structure is a constant temperature liquid pipeline, wherein the constant temperature liquid in the constant temperature liquid pipeline maintains the temperature of the developing solution in the liquid supply pipeline within a specific temperature range.

10. The liquid supply system for the developing equipment according to claim 9, characterized in that, The liquid supply system of the developing equipment also includes a temperature detection module and a temperature sensor. The programmable logic controller is connected to the temperature detection module, and the temperature detection module is connected to the temperature sensor. The temperature sensor is inserted into the constant temperature liquid pipeline of the outer layer of the sleeve.

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