A cavity emptying auxiliary gas supply pipeline

Abstract

The utility model relates to a technical field of semiconductor equipment especially a cavity breaks empty auxiliary gas supply pipeline, include: for conveying main pipeline of breaking empty gas, on the main pipeline communication has control pipeline, the other end of control pipeline is connected with a plurality of branch pipeline, branch pipeline is communicated to the chamber, wherein, install pressure regulating valve on control pipeline, all install the reverse filtration mechanism on each branch pipeline, the utility model discloses through the additional auxiliary gas supply pipeline, to effectively solved the technical problem of cavity breaking empty interruption, specific, by the newly connected main pipeline connection to control pipeline branch out a plurality of independent branch pipeline, each branch pipeline can individually for a chamber supply gas breaks empty, this design ingeniously bypassed the original cavity self -break empty air path's pressure monitoring and interlock protection mechanism, fundamentally put an end to the phenomenon of automatic cut -off gas source because of pressure overload, thereby guaranteed the stability of breaking empty process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a cavity venting auxiliary gas supply pipeline. Background Technology

[0002] In modern semiconductor manufacturing, vacuum process chambers are core equipment for performing critical processes such as etching and thin film deposition. After the process is completed, the chamber needs to be restored from a vacuum state to atmospheric pressure; this process is called "vacuum breaking." To ensure process cleanliness, vacuum breaking is usually accomplished by slowly filling the chamber with a high-purity inert gas (such as nitrogen).

[0003] However, existing equipment generally suffers from a technical bottleneck. Taking Applied Materials' P5000 platform as an example, its built-in venting air path is directly linked to a pressure monitoring and interlocking protection system. This system has a limited vacuum measurement range (typically only 10 Torr). When using the built-in gas source for venting, if the chamber pressure exceeds this range, the interlocking protection mechanism is triggered, automatically cutting off the inert gas supply and forcing the venting process to stop.

[0004] To address this issue, the commonly used temporary solution is to open the isolation valve between the cavity and the conveying module, using the air source from the conveying module for air aeration. However, this solution has significant drawbacks: firstly, the operation must be performed with the entire machine simultaneously stopped, severely impacting equipment efficiency; secondly, particulate contaminants within the cavity can easily enter the highly clean conveying module with the airflow, causing cross-contamination and posing a significant quality hazard.

[0005] Therefore, how to stably and reliably complete cavity breaking without affecting the transmission module is a technical problem that urgently needs to be solved in this field. Utility Model Content

[0006] The purpose of this utility model is to solve the above-mentioned shortcomings in the existing technology and to propose a cavity-breaking auxiliary air supply pipeline.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: Design a cavity-breaking auxiliary air supply pipeline, including: Main pipeline used for conveying air-bursting gas; A control pipe is connected to the main pipe, and multiple branch pipes are connected to the other end of the control pipe, which are connected to the chamber. A pressure regulating valve is installed on the control pipeline, and a backflow preventer filter is installed on each of the branch pipelines.

[0008] Furthermore, the backflow preventer filter includes:

[0009] The housing connected to the outside of the branch pipe;

[0010] The housing has an inlet end, an outlet end, and a mounting end;

[0011] The mounting end is inclined and connected between the inlet end and the outlet end, and a filter assembly is installed inside the mounting end.

[0012] Furthermore, the filtering component includes;

[0013] A detachable cover is attached to the mounting end;

[0014] A connecting sleeve is fixedly installed at the upper end of the cover, and a filter basket is installed inside the connecting sleeve. A support part is provided inside the housing, and a through hole adapted to the filter basket is provided in the middle of the support part.

[0015] Furthermore, the connecting sleeve and the mounting end are threaded together, and a washer is also fitted on the outside of the connecting sleeve.

[0016] Furthermore, a stepped column is fixedly installed at the bottom of the filter basket;

[0017] A support ring is fixedly installed on the inner side of the connecting sleeve;

[0018] The bottom of the stepped column is provided with clearance openings on both sides, and the inner side of the support ring has a limiting protrusion that is inserted into the clearance opening.

[0019] Furthermore, a compression spring is installed on the inner bottom of the connecting sleeve, and a stop pad is provided at the upper end of the compression spring, the stop pad abutting against the bottom of the stepped column.

[0020] Furthermore, the backflow preventer filter mechanism also includes;

[0021] A detachable support plate is connected to the inlet end;

[0022] The bearing plate has multiple air holes on its end face, and an air intake filter plate is installed inside the bearing plate. The air intake filter plate and the bearing plate are detachably connected.

[0023] Furthermore, the intake filter plate has two claws formed on both ends, and the end face of the bearing plate has through holes that can be inserted into the claws.

[0024] Furthermore, a tool groove is provided on the front end face of the carrier plate, and the carrier plate and the inlet end are threadedly connected.

[0025] Furthermore, manual valves are installed on the control pipeline and multiple branch pipelines.

[0026] The beneficial effects of the cavity cavitation auxiliary gas supply pipeline proposed in this utility model are as follows: This utility model effectively solves the technical problem of cavity cavitation interruption by adding an auxiliary gas supply pipeline; specifically, after the newly connected main pipeline is connected to the control pipeline, multiple independent branch pipelines branch out, and each branch pipeline can supply gas to a single cavity for cavitation. This design cleverly bypasses the pressure monitoring and interlock protection mechanism of the original cavity's built-in cavitation air circuit, fundamentally eliminating the phenomenon of automatic gas supply cut-off due to pressure overload, thereby ensuring the stability of the cavitation process; secondly, this solution realizes individual gas supply to the cavity, which is not only flexible in operation and does not require the entire machine to be shut down, but also completely avoids the risk of particulate contamination that may be caused by using a conveyor module for cavitation. Attached Figure Description

[0027] Figure 1 This is a perspective view of the present utility model; Figure 2 This is a top view of the present invention; Figure 3 This is a schematic diagram of the anti-reverse flow filter mechanism of this utility model; Figure 4 This is a cross-sectional view of the anti-reverse flow filter mechanism of this utility model; Figure 5 This is an exploded view of the anti-reverse flow filter mechanism of this utility model.

[0028] In the diagram: 1. Main pipe; 2. Control pipe; 3. Branch pipe; 4. Pressure regulating valve; 5. Check valve filter mechanism; 51. Housing; 510. Inlet end; 511. Outlet end; 512. Mounting end; 52. Filter assembly; 521. Cover; 522. Connecting sleeve; 523. Filter basket; 524. Stepped column; 525. Support ring; 526. Clearance opening; 527. Limiting protrusion; 528. Compression spring; 529. Stop pad; 53. Support part; 54. Washer; 55. Bearing plate; 551. Air hole; 552. Inlet filter plate; 553. Claw; 554. Through hole; 555. Tool slot; 6. Hand valve. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0030] Reference Figure 1-5As one embodiment of this utility model, a cavity-breaking auxiliary air supply pipeline is disclosed. Specifically, the air supply pipeline includes a main pipe 1 for conveying the breaking air gas. Of course, the breaking air gas mentioned in this utility model is an inert gas. Inert gases are not chemically reactive and will not chemically react with the materials or residues in the cavity, thus avoiding corrosion or the generation of new impurities.

[0031] A control pipe 2 is connected to the main pipe 1, and multiple branch pipes 3 are connected to the other end of the control pipe 2. The branch pipes 3 are connected to the chamber.

[0032] A pressure regulating valve 4 is installed on the control pipe 2, and a backflow preventer filter 5 is installed on each of the branch pipes 3. Of course, the pressure regulating valve 4 mentioned in this utility model is used to regulate the gas inlet pressure. Its specific structure and principle are conventional methods for those skilled in the art, and will not be elaborated here.

[0033] In other words, this utility model effectively solves the technical problem of interrupted air purging in the cavity by adding an auxiliary air supply pipeline. Specifically, after the newly connected main pipeline 1 is connected to the control pipeline 2, multiple independent branch pipelines 3 branch out. Each branch pipeline 3 can supply gas to a single cavity for air purging. This design cleverly bypasses the pressure monitoring and interlocking protection mechanism of the original cavity's built-in air purging circuit, fundamentally eliminating the phenomenon of automatic gas supply cut-off due to pressure overload, thereby ensuring the stability of the air purging process. Secondly, this solution realizes individual gas supply to the cavity, which is not only flexible in operation and does not require the entire machine to be shut down, but also completely avoids the risk of particulate contamination that may be caused by using a conveyor module for air purging.

[0034] In some embodiments, the anti-reverse flow filter mechanism 5 of this invention includes;

[0035] The housing 51 is connected to the outside of the branch pipe 3;

[0036] The housing 51 has an inlet end 510, an outlet end 511, and a mounting end 512;

[0037] The mounting end 512 is obliquely connected between the inlet end 510 and the outlet end 511, and a filter assembly 52 is installed inside the mounting end 512.

[0038] Of course, the inlet end 510 and the outlet end 511 of this utility model are detachably threaded and connected to the branch pipe 3. The filter component 52 is used to prevent impurities in the chamber from entering the main pipe 1 along the branch pipe 3 or moving in multiple branch pipes 3, causing multiple chamber contamination. Furthermore, the filter assembly 52 described in this utility model includes: A cover 521 is detachably connected to the mounting end 512; A connecting sleeve 522 is fixedly installed on the upper end of the cover 521. A filter basket 523 is installed inside the connecting sleeve 522. A support part 53 is provided inside the housing 51. The middle part of the support part 53 has a through hole adapted to the filter basket 523. That is, when the filter basket 523 is inserted, its end will be inserted into the through hole, so as to achieve stable filtration operation with the help of the through hole.

[0039] Specifically, the filter basket 523 described in this utility model is configured as a circular cylindrical structure with multiple filter holes on its outer wall. In this embodiment, the opening of the filter basket 523 faces the outlet end 511. Thus, when impurities enter the branch pipe 3, they will enter the filter basket 523 in sequence, thereby preventing the impurities from moving further into the main pipe 1.

[0040] In an optional embodiment, the connecting sleeve 522 and the mounting end 512 are threaded together. A washer 54 is also provided on the outside of the connecting sleeve 522. The threaded connection allows for easy disassembly of the entire cover 521. At the same time, the washer 54 is used to improve the sealing between the cover 521 and the mounting end 512 to avoid gas leakage.

[0041] Based on the above embodiments, the bottom of the filter basket 523 in this utility model is fixedly installed with a stepped column 524. Specifically, the stepped column 524 includes an upper column and a column plate fixed at the lower end of the upper column;

[0042] A support ring 525 is fixedly installed on the inner side of the connecting sleeve 522, and the bottom of the filter basket 523 abuts against the upper part of the support ring 525;

[0043] The bottom of the stepped column 524 is provided with clearance openings 526 on both sides, and the inner side of the support ring 525 has a limiting protrusion 527 that is inserted into the clearance openings 526.

[0044] In other words, by using the insertion of the limiting protrusion 527 and the clearance opening 526 in this utility model, when installing the filter basket 523, the filter basket 523 is first inserted into the inside of the connecting sleeve 522 until the clearance opening 526 and the limiting protrusion 527 are inserted through. Then the filter basket 523 is rotated. When the limiting protrusion 527 and the clearance opening 526 are misaligned, the filter basket 523 can be installed and positioned.

[0045] Optionally, in this utility model, a compression spring 528 is installed on the inner bottom of the connecting sleeve 522, and a stop pad 529 is provided at the upper end of the compression spring 528, and the stop pad 529 abuts against the bottom of the step column 524.

[0046] In this invention, a compression spring 528 is used to abut the bottom of the stepped column 524. This design is to enhance the fit stability and damping force between the stepped column 524 and the support ring 525, so as to prevent the filter basket 523 from rotating freely inside the connecting sleeve 522.

[0047] In some embodiments, the backflow prevention filter mechanism 5 further includes;

[0048] A detachable support plate 55 is connected to the inlet end 510.

[0049] The bearing plate 55 has multiple air holes 551 on its end face, and an air intake filter plate 552 is installed inside the bearing plate 55. The air intake filter plate 552 and the bearing plate 55 are detachably connected.

[0050] The purpose of using the intake filter plate 552 in this utility model is to filter the intake air. Since impurities may be generated inside the pipe over a long period of time, the intake filter plate 552 is designed to filter the intake air impurities in order to prevent these impurities from entering the interior of the housing 51, thereby avoiding interference with the chamber.

[0051] Specifically, the bearing plate 55 described in this utility model has a concave annular structure in the middle, and the air intake filter plate 552 is installed in the concave structure, forming a space for storing impurities together with the concave structure.

[0052] In some embodiments, the intake filter plate 552 of the present invention has two claws 553 formed on both ends, and the end face of the bearing plate 55 has a through hole 554 that is inserted into the claws 553. That is, when installing the intake filter plate 552, it can be installed by engaging the claws 553 with the through hole 554. Conversely, when it is necessary to clean the internal intake filter plate 552, the claws 553 on both sides can be pressed to deform them and disengage them from the through hole 554, and the intake filter plate 552 can be disassembled at this time.

[0053] It should be noted that in this utility model, a tool groove 555 is provided on the front end surface of the bearing plate 55. The bearing plate 55 and the inlet end 510 are threadedly connected. Preferably, the tool groove 555 in this embodiment is set as a slotted groove. Its purpose is to allow the insertion and rotation of the tool groove 555 with a screwdriver to drive the bearing plate 55 to be threaded into or out of the inlet end 510.

[0054] In a further embodiment, a hand valve 6 is provided on both the control pipe 2 and the multiple branch pipes 3. The hand valve 6 is a manual valve. On the control pipe 2, the hand valve 6 is installed at the front end of the pressure regulating valve 4. On the branch pipes 3, the hand valve 6 is installed at the rear of the check filter mechanism 5.

[0055] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A cavity-breaking auxiliary air supply pipeline, characterized in that, include: (1) is the main pipeline used to transport air-breaking gas. A control pipe (2) is connected to the main pipe (1), and multiple branch pipes (3) are connected to the other end of the control pipe (2), which are connected to the chamber. A pressure regulating valve (4) is installed on the control pipe (2), and a backflow preventer filter (5) is installed on each of the branch pipes (3).

2. The cavity-breaking auxiliary air supply pipeline according to claim 1, characterized in that: The backflow prevention filter mechanism (5) includes: The housing (51) connected to the outside of the branch pipe (3); The housing (51) has an inlet end (510), an outlet end (511), and a mounting end (512); The mounting end (512) is obliquely connected between the inlet end (510) and the outlet end (511), and a filter assembly (52) is installed inside the mounting end (512).

3. The cavity-breaking auxiliary air supply pipeline according to claim 2, characterized in that: The filter assembly (52) includes; A cover (521) is detachably attached to the mounting end (512); A connecting sleeve (522) is fixedly installed on the upper end of the cover (521), and a filter basket (523) is installed inside the connecting sleeve (522). A support part (53) is provided inside the housing (51), and the middle part of the support part (53) has a through hole adapted to the filter basket (523).

4. The cavity cavitation auxiliary air supply pipeline according to claim 3, characterized in that: The connecting sleeve (522) and the mounting end (512) are threaded together, and a washer (54) is also fitted on the outside of the connecting sleeve (522).

5. The cavity cavitation auxiliary air supply pipeline according to claim 3, characterized in that: A stepped column (524) is fixedly installed at the bottom of the filter basket (523); A support ring (525) is fixedly installed on the inner side of the connecting sleeve (522); The bottom of the stepped column (524) is provided with clearance openings (526) on both sides, and the inner side of the support ring (525) has a limiting protrusion (527) that is inserted into the clearance opening (526).

6. The cavity cavitation auxiliary air supply pipeline according to claim 5, characterized in that: A compression spring (528) is installed on the inner bottom of the connecting sleeve (522), and a stop pad (529) is provided at the upper end of the compression spring (528), which abuts against the bottom of the step column (524).

7. The cavity cavitation auxiliary air supply pipeline according to claim 2, characterized in that: The backflow prevention filter mechanism (5) also includes; A carrier plate (55) is detachably connected to the inlet end (510); The bearing plate (55) has multiple air holes (551) on its end face. An air intake filter plate (552) is installed inside the bearing plate (55). The air intake filter plate (552) and the bearing plate (55) are detachably connected.

8. The cavity cavitation auxiliary air supply pipeline according to claim 7, characterized in that: The intake filter plate (552) has two claws (553) formed on both ends, and the end face of the bearing plate (55) has a through hole (554) that is inserted into the claws (553).

9. The cavity cavitation auxiliary air supply pipeline according to claim 7, characterized in that: The front end face of the carrier plate (55) has a tool groove (555), and the carrier plate (55) and the inlet end (510) are threadedly connected.

10. A cavity-breaking auxiliary air supply pipeline according to any one of claims 1-9, characterized in that: Hand valves (6) are provided on the control pipe (2) and multiple branch pipes (3).

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