A semiconductor refrigeration device to which a direct-current variable frequency compressor is applied

Abstract

The utility model provides a kind of semiconductor refrigeration equipment applied direct-current frequency conversion compressor, including compressor, condenser, liquid accumulator and evaporator, the compressor uses direct-current frequency conversion compressor, it includes direct-current frequency converter, brushless DC motor and relevant compression component, the compressor is connected with condenser by pipeline, condenser is connected with liquid accumulator by pipeline, the liquid accumulator is connected with evaporator by pipeline.The utility model has the advantages that direct-current frequency converter converts fixed frequency AC into adjustable voltage and frequency DC;Brushless DC motor replaces mechanical brush by electronic commutator, realizes the accurate control of motor speed.Direct-current frequency conversion compressor has higher energy efficiency ratio, wider speed range, soft start, smaller current impact, more stable operation, lower noise, no mechanical brush, longer life, higher speed control precision, faster response speed and other advantages, more suitable for semiconductor industry refrigeration work.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor refrigeration technology, and in particular to a semiconductor refrigeration device that uses a DC inverter compressor. Background Technology

[0002] With the rapid development of the semiconductor industry, higher requirements have been placed on wafer etching processes. During the entire etching process, the wafer on the electrostatic chuck in the reaction chamber sometimes needs to be rapidly heated or cooled to maintain the etching rate. That is, sometimes it is necessary to rapidly heat up from a low temperature to a high temperature, or rapidly cool down from a high temperature to a low temperature.

[0003] In existing technologies, temperature control in the semiconductor industry typically utilizes fixed-frequency compressor refrigeration systems. However, fixed-frequency compressors suffer from problems such as direct start-up, high starting current, large temperature fluctuations, frequent start-stop cycles, significant mechanical wear, and high noise levels during start-up and shutdown. Another approach involves adding an AC inverter to a fixed-frequency compressor to achieve AC frequency conversion, effectively addressing some of the problems associated with fixed-frequency compressors. However, this system also suffers from relatively low energy efficiency, a narrow speed range, the risk of brush wear, and lower accuracy. Therefore, this paper proposes an improved semiconductor refrigeration device that utilizes a DC inverter compressor. Utility Model Content

[0004] The purpose of this invention is to at least solve one of the aforementioned technical defects.

[0005] Therefore, one objective of this utility model is to propose a semiconductor refrigeration device that uses a DC inverter compressor, so as to solve the problems mentioned in the background art and overcome the shortcomings of the prior art.

[0006] To achieve the above objectives, one embodiment of the present invention provides a semiconductor refrigeration device using a DC inverter compressor, comprising a compressor, a condenser, a liquid receiver, and an evaporator. The compressor is a DC inverter compressor, which includes a DC inverter, a brushless DC motor, and related compression components. The compressor is connected to the condenser via a pipe, the condenser is connected to the liquid receiver via a pipe, the liquid receiver is connected to the evaporator via a pipe, and the other end of the evaporator is connected to the other end of the compressor via a pipe.

[0007] Preferably, in any of the above embodiments, a filter is provided on the pipeline between the liquid receiver and the evaporator.

[0008] The above technical solution utilizes a compressor, condenser, receiver-of-liquid (RHL), and evaporator to form the basic structure of a refrigeration system, enabling temperature control. Specifically, the compressor compresses low-temperature, low-pressure refrigerant vapor, transforming it into high-temperature, high-pressure vapor. This increases the refrigerant's temperature and pressure, providing power for the subsequent condensation process. Like a "heart," it propels the refrigerant circulation. The condenser cools and condenses the high-temperature, high-pressure refrigerant vapor into a high-pressure liquid, releasing heat to the cooling medium, acting like a "radiator" to expel heat. The receiver-of-liquid is primarily used to store and regulate the refrigerant, ensuring stable and efficient system operation. The evaporator utilizes the low-temperature, low-pressure liquid refrigerant to absorb heat from the cooled space, evaporating into low-temperature, low-pressure vapor to achieve a cooling effect. Like a "heat absorber," it extracts heat from the environment.

[0009] The compressor uses a DC inverter, which converts AC power into adjustable DC power to drive a brushless DC motor, achieving stepless speed regulation. Specifically, the DC inverter converts fixed-frequency AC power into DC power with adjustable voltage and frequency; the brushless DC motor uses an electronic commutator instead of mechanical brushes to achieve precise speed control. The DC inverter compressor adjusts the motor speed by changing the input voltage and frequency, thereby controlling the compressor's displacement. The DC inverter compressor offers advantages such as higher energy efficiency ratio (20%-30% increase in COP under partial load), wider speed range (speed can be as low as 10% of the rated value), soft start, low current surge, smoother operation, lower noise, no mechanical brushes, longer lifespan, high speed control accuracy, and fast response speed, making it more suitable for refrigeration work in the semiconductor industry.

[0010] By installing a filter between the receiver and evaporator, the filter protects system components, improves operating efficiency, and extends equipment life. The filter intercepts solid particles, metal shavings, welding slag, dust, and other impurities from the refrigerant, lubricating oil, or cooling water. This ensures the cleanliness of the refrigerant and lubricating oil, preventing impurities from circulating within the system. The installation of a filter can significantly improve system performance and reduce energy consumption and failure rates.

[0011] Preferably, in any of the above embodiments, a sight glass is also provided on the pipe between the liquid reservoir and the evaporator, and the sight glass is located at the rear end of the filter.

[0012] The above technical solution involves installing a sight glass between the receiver and evaporator. This sight glass is primarily used for direct observation of the refrigerant state, providing crucial information for system operation, maintenance, and fault diagnosis. During refrigeration operation, operators can directly observe the refrigerant level through the sight glass to determine if the system is overcharged or undercharged. Specifically, under normal conditions, the refrigerant fills the sight glass in liquid form without bubbles; continuous bubbles appear in the sight glass during charging, indicating insufficient refrigerant in the system, requiring replenishment; overcharging can lead to excessively high liquid levels and potentially cause liquid slugging in the compressor. The sight glass is located at the rear end of the filter, closer to the evaporator inlet, ensuring it accurately reflects the system's true condition.

[0013] Preferably, in any of the above solutions, a regulating pipe is provided between the pipe between the compressor and the condenser and the pipe between the evaporator and the compressor.

[0014] Preferably, any of the above-mentioned solutions includes a bypass valve on the control tube.

[0015] The above technical solution utilizes a control pipe to guide the coolant flowing through the pipeline. Combined with its bypass valve, operators can adjust the fluid flow rate or path as needed to ensure stable system operation under different conditions. When the condenser pressure is too high, the bypass valve opens, directly bypassing some refrigerant to the evaporator or low-pressure side, reducing the condensing pressure. When the evaporator pressure is too low, the bypass valve closes, reducing refrigerant bypass and maintaining evaporation pressure. During system startup or sudden load changes, the bypass valve quickly adjusts the refrigerant flow rate to prevent liquid refrigerant from entering the compressor. When the evaporator load suddenly decreases, the bypass valve opens, bypassing some liquid refrigerant to the compressor suction side, preventing liquid slugging.

[0016] Preferably, as described in any of the above schemes, a pressure gauge is installed on the pipe between the evaporator and the compressor.

[0017] Preferably, in any of the above embodiments, a control valve is also provided on the pipeline between the liquid reservoir and the evaporator, and the control valve is located at the rear end of the sight glass.

[0018] By adopting the above technical solution, pressure gauges allow staff to monitor the specific pressure values ​​in the pipelines in real time, making the operation of the refrigeration system more intuitive. Control valves enable staff to control the opening and closing of the pipelines as needed, making the refrigeration system more flexible and safer.

[0019] Compared with the prior art, the advantages and beneficial effects of this utility model are as follows: 1. This semiconductor refrigeration equipment utilizes a DC inverter compressor. By incorporating a compressor, condenser, receiver, and evaporator, the DC inverter compressor compresses the refrigerant vapor from low-temperature, low-pressure to high-temperature, high-pressure vapor. The condenser then condenses this vapor into a low-temperature, high-pressure liquid. This liquid, after being regulated by the receiver, flows into the evaporator. The evaporator absorbs heat from the cooled space using the low-temperature, low-pressure liquid refrigerant, evaporating it into low-temperature, low-pressure vapor, thus achieving the refrigeration effect. The DC inverter converts fixed-frequency alternating current into adjustable-voltage and frequency direct current. The brushless DC motor uses an electronic commutator instead of mechanical brushes, enabling precise speed control. The DC inverter compressor offers advantages such as higher energy efficiency, wider speed range, soft start, lower current surge, smoother operation, lower noise, no mechanical brushes, longer lifespan, high speed control accuracy, and fast response speed, making it more suitable for refrigeration operations in the semiconductor industry.

[0020] 2. This semiconductor refrigeration equipment, utilizing a DC inverter compressor, features a sight glass between the receiver and evaporator. This sight glass is primarily used for direct observation of the refrigerant status, providing crucial information for system operation, maintenance, and fault diagnosis. During refrigeration operation, operators can directly observe the refrigerant level through the sight glass to determine if the system is overcharged or undercharged. A control pipe guides the coolant flow within the pipeline. Combined with a bypass valve, operators can adjust the fluid flow rate or path as needed to ensure stable system operation under various conditions.

[0021] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0022] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0023] In the diagram: 1-Compressor, 2-Condenser, 3-Receiver, 4-Filter, 5-Evaporator, 6-Bypass Valve, 7-Sight Glass. Detailed Implementation

[0024] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] like Figure 1 As shown, this utility model includes a compressor 1, a condenser 2, a liquid receiver 3, and an evaporator 5. The compressor 1 is a DC inverter compressor, which includes a DC inverter, a brushless DC motor, and related compression components. The compressor 1 is connected to the condenser 2 through a pipe, the condenser 2 is connected to the liquid receiver 3 through a pipe, the liquid receiver 3 is connected to the evaporator 5 through a pipe, and the other end of the evaporator 5 is connected to the other end of the compressor 1 through a pipe.

[0027] Example 1: A filter 4 is installed on the pipe between the receiver 3 and the evaporator 5. The compressor 1, condenser 2, receiver 3, and evaporator 5 form the basic structure of the refrigeration system, capable of temperature control. Specifically, the compressor 1 compresses the low-temperature, low-pressure refrigerant vapor, transforming it into a high-temperature, high-pressure vapor. This increases the temperature and pressure of the refrigerant, providing power for the subsequent condensation process. Like a "heart," it propels the refrigerant circulation. The condenser 2 cools and condenses the high-temperature, high-pressure refrigerant vapor into a high-pressure liquid. It releases heat to the cooling medium, acting like a "radiator," expelling heat from the system. The receiver 3 is mainly used to store and regulate the refrigerant, ensuring stable and efficient system operation. The evaporator 5 utilizes the low-temperature, low-pressure liquid refrigerant to absorb heat from the cooled space, evaporating it into low-temperature, low-pressure vapor to achieve a cooling effect. Like a "heat absorber," it "absorbs heat" from the environment.

[0028] Compressor 1 employs a DC inverter compressor, which converts AC power into adjustable DC power via a DC inverter to drive a brushless DC motor, achieving stepless speed regulation. Specifically, the DC inverter converts fixed-frequency AC power into DC power with adjustable voltage and frequency; the brushless DC motor uses an electronic commutator to replace mechanical brushes, enabling precise speed control. The DC inverter compressor adjusts the motor speed by changing the input voltage and frequency, thereby controlling the displacement of compressor 1. The DC inverter compressor offers advantages such as higher energy efficiency ratio (20%-30% increase in COP under partial load), wider speed range (speed can be as low as 10% of the rated value), soft start, low current surge, smoother operation, lower noise, no mechanical brushes, longer lifespan, high speed control accuracy, and fast response speed, making it more suitable for refrigeration work in the semiconductor industry.

[0029] The core principle of a DC inverter compressor: Permanent magnet synchronous drive: The rotating magnetic field generated by the stator winding is directly coupled with the magnetic field of the permanent magnet (such as neodymium iron boron) built into the rotor, eliminating the need to rely on induced current to generate a secondary magnetic field, thus improving magnetic field transmission efficiency by 10%-30%. This direct action method eliminates the electromagnetic losses of the rotor in traditional AC motors, achieving efficient energy conversion.

[0030] Variable frequency speed control mechanism: The inverter converts the input AC power into DC power, and then controls the compressor speed (800-9000rpm) by adjusting the DC voltage and commutation frequency to precisely match the cooling demand.

[0031] By installing a filter 4 between the receiver 3 and the evaporator 5, the filter 4 protects system components, improves operating efficiency, and extends equipment life. The filter 4 intercepts solid particles, metal shavings, welding slag, dust, and other impurities in the refrigerant, lubricating oil, or cooling water. This ensures the cleanliness of the refrigerant and lubricating oil, preventing impurities from circulating in the system. The installation of the filter 4 significantly improves system performance and reduces energy consumption and failure rate.

[0032] Example 2: A sight glass 7 is also installed on the pipe between the receiver 3 and the evaporator 5, and the sight glass 7 is located at the rear end of the filter 4. The sight glass 7 is installed between the receiver 3 and the evaporator 5 primarily for visually observing the refrigerant state, providing crucial information for system operation, maintenance, and fault diagnosis. During refrigeration operation, operators can directly observe the refrigerant level through the sight glass 7 to determine whether the system is overcharged or undercharged. Specifically, under normal conditions, the refrigerant fills the sight glass in liquid form without bubbles; during charging, continuous bubbles appear in the sight glass, indicating insufficient refrigerant in the system, requiring replenishment; overcharging may lead to a high liquid level and the risk of liquid slugging in the compressor. The sight glass 7 is located at the rear end of the filter 4, closer to the evaporator inlet, ensuring it reflects the true state of the system.

[0033] Example 3: A regulating pipe is installed between the pipes connecting compressor 1 and condenser 2 and the pipes connecting evaporator 5 and compressor 1. A bypass valve 6 is installed on the regulating pipe. The regulating pipe guides the coolant flowing through the pipes. With the bypass valve 6, operators can adjust the fluid flow rate or path as needed to ensure stable system operation under different operating conditions. When the condenser pressure is too high, the bypass valve 6 opens, directly bypassing some refrigerant to the evaporator or low-pressure side, reducing the condensing pressure. When the evaporator pressure is too low, the bypass valve closes, reducing refrigerant bypass and maintaining evaporating pressure. During system startup or sudden load changes, the bypass valve 6 can quickly adjust the refrigerant flow rate to prevent liquid refrigerant from entering compressor 1. When the load on evaporator 5 suddenly decreases, the bypass valve 6 opens, bypassing some liquid refrigerant to the suction side of compressor 1 to prevent liquid slugging.

[0034] A pressure gauge is installed on the pipe between evaporator 5 and compressor 1. A control valve is also installed on the pipe between receiver 3 and evaporator 5, located at the rear end of sight glass 7. The pressure gauge allows operators to monitor the pressure in the pipes in real time, making the operation of the refrigeration system more intuitive. The control valve allows operators to control the opening and closing of the pipes as needed, making the refrigeration system more flexible and safe.

[0035] The working principle of this utility model is as follows: S1. A DC inverter compressor is used to compress the refrigerant vapor, turning it from low-temperature, low-pressure vapor into high-temperature, high-pressure vapor. S2, condenser 2 further condenses the high-temperature and high-pressure vapor into a low-temperature and high-pressure liquid, and the low-temperature and high-pressure liquid flows into the evaporator 5 after being regulated by the liquid receiver 3; S3 and Evaporator 5 utilize low-temperature, low-pressure liquid refrigerant to absorb heat from the space being cooled, evaporating it into low-temperature, low-pressure vapor to achieve a cooling effect.

[0036] Compared with the prior art, the present invention has the following advantages: 1. This semiconductor refrigeration equipment utilizes a DC inverter compressor. It consists of a compressor 1 (using a DC inverter compressor), a condenser 2, a receiver 3, and an evaporator 5. The DC inverter compressor compresses the refrigerant vapor from low temperature and low pressure into high temperature and high pressure vapor. The condenser 2 then condenses this high temperature and high pressure vapor into a low temperature and high pressure liquid. This liquid, after being regulated by the receiver 3, flows into the evaporator 5. The evaporator 5 absorbs heat from the space being cooled using the low temperature and low pressure liquid refrigerant, evaporating it into low temperature and low pressure vapor, thus achieving the refrigeration effect. The DC inverter converts fixed-frequency alternating current into adjustable-voltage and-frequency direct current. The brushless DC motor uses an electronic commutator instead of mechanical brushes, achieving precise speed control. The DC inverter compressor offers advantages such as higher energy efficiency, wider speed range, soft start, lower current surge, smoother operation, lower noise, no mechanical brushes, longer lifespan, high speed control accuracy, and fast response speed, making it more suitable for refrigeration operations in the semiconductor industry.

[0037] 2. This semiconductor refrigeration equipment, utilizing a DC inverter compressor, has a sight glass 7 installed between the receiver 3 and the evaporator 5. This sight glass 7 is primarily used for direct observation of the refrigerant status, providing crucial information for system operation, maintenance, and fault diagnosis. During refrigeration operation, operators can directly observe the refrigerant level through the sight glass 7 to determine if the system is overcharged or undercharged. A control pipe guides the coolant flowing through the pipeline. Combined with the bypass valve 6 installed on it, operators can adjust the fluid flow rate or path as needed to ensure stable system operation under different operating conditions.

Claims

1. A semiconductor refrigeration device employing a DC inverter compressor, comprising a compressor (1), a condenser (2), a liquid receiver (3), and an evaporator (5); characterized in that, The compressor (1) is a DC inverter compressor, which includes a DC inverter, a brushless DC motor and related compression components. The compressor (1) is connected to the condenser (2) through a pipe. The condenser (2) is connected to the liquid receiver (3) through a pipe. The liquid receiver (3) is connected to the evaporator (5) through a pipe. The other end of the evaporator (5) is connected to the other end of the compressor (1) through a pipe.

2. A semiconductor refrigeration device using a DC inverter compressor as described in claim 1, characterized in that: A filter (4) is installed on the pipe between the liquid storage tank (3) and the evaporator (5).

3. A semiconductor refrigeration device using a DC inverter compressor as described in claim 2, characterized in that: A sight glass (7) is also installed on the pipe between the liquid reservoir (3) and the evaporator (5), and the sight glass (7) is located at the rear end of the filter (4).

4. A semiconductor refrigeration device using a DC inverter compressor as described in claim 3, characterized in that: A regulating pipe is provided between the pipe between the compressor (1) and the condenser (2) and the pipe between the evaporator (5) and the compressor (1).

5. A semiconductor refrigeration device using a DC inverter compressor as described in claim 4, characterized in that: A bypass valve (6) is provided on the control tube.

6. A semiconductor refrigeration device using a DC inverter compressor as described in claim 5, characterized in that: A pressure gauge is installed on the pipe between the evaporator (5) and the compressor (1).

7. A semiconductor refrigeration device using a DC inverter compressor as described in claim 6, characterized in that: A control valve is also provided on the pipeline between the liquid reservoir (3) and the evaporator (5), and the control valve is located at the rear end of the sight glass (7).

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