In-furnace cleaning device for a single crystal furnace
Patent Information
- Application Number
- CN202522193287.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-16
- Publication Date
- 2026-09-25
- Estimated Expiration
- 2035-10-16
AI Technical Summary
[0004]现有的炉内清理设备大多是使用杆体伸入炉内进行清扫，因单晶炉长度不一，杆体的长度在面对较深的单晶炉时，炉内深层清洁较为困难，导致清洁不到位，因此，针对上述问题提出一种单晶炉的炉内清洁装置
1.本实用新型所述的一种单晶炉的炉内清洁装置，通过多组第一电推杆带动转轮同步推动，可根据炉内实际内径调整转轮的伸出长度，使转轮紧密贴合炉内壁，从多点位将支撑座整体稳定固定在炉内，为毛刷的扫动清洁提供稳定支撑，转轮转动可使得支撑座整体进入单晶炉深层，减少因单晶炉深度较深，导致的单一杆体伸入清洁不完整，进一步增加对炉内清洁的质量，与支撑盘转动配合毛刷贴合炉壁实现圆周扫动，对单晶炉内部整体进行清洁，覆盖炉内壁从炉口到炉底的区域，减少固定位置清洁导致的死角。
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Figure CN224802194U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of single crystal furnace cleaning equipment, specifically a furnace cleaning device for a single crystal furnace. Background Technology
[0002] A single-crystal furnace is the core equipment used to produce single-crystal silicon, a key raw material for manufacturing semiconductor devices such as chips and photovoltaic cells. By placing polycrystalline silicon raw materials into a quartz crucible inside the furnace, the furnace is heated to a specified temperature using devices such as graphite heaters, causing the polycrystalline silicon to melt into liquid silicon. Then, through the "Czochralski method" or "zone melting method," a seed crystal is slowly inserted into the molten silicon. At the same time, the rotation and rising speed of the seed crystal, the temperature gradient inside the furnace, and the inert gas atmosphere are controlled to make the molten silicon grow in a directional manner along the crystal structure of the seed crystal, ultimately forming a single-crystal silicon rod with a complete and uniform crystal structure.
[0003] Furnace cleaning equipment is a specialized tool designed to remove residual impurities inside a single crystal furnace. Its core purpose is to prevent impurities from contaminating the molten silicon material and affecting the purity of the single crystal silicon rod. It is usually made of a high-temperature resistant metal rod with an integrated brush at the top, which can reach into different areas inside the furnace, balancing cleaning efficiency and operational safety, and meeting the stringent clean environment requirements of single crystal furnace production.
[0004] Most existing furnace cleaning equipment uses a rod to extend into the furnace for cleaning. However, due to the varying lengths of single crystal furnaces, the rod is too long to clean the deep interior of deeper furnaces, resulting in incomplete cleaning. Therefore, a furnace cleaning device for single crystal furnaces is proposed to address these issues. Utility Model Content
[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.
[0006] The technical solution adopted by this utility model to solve its technical problem is as follows: A furnace cleaning device for a single crystal furnace, comprising a support base; multiple sets of first electric push rods are fixedly connected to the side wall of the support base; a rotating wheel is rotatably connected to the top of each first electric push rod; multiple sets of first electric push rods are arranged on the side wall of the support base; a motor is fixedly connected to the bottom end of the support base; a support plate is fixedly connected to the output end of the motor; multiple sets of second electric push rods are fixedly connected to the top of the support plate; a support plate is fixedly connected to the top of the second electric push rods; a brush is fixedly connected to the top of the support plate; the rotating wheel is driven by the multiple sets of first electric push rods. Synchronous drive allows for adjustment of the wheel's extension length based on the furnace's actual inner diameter, ensuring a tight fit between the wheel and the furnace wall. This provides stable support for the brush's sweeping cleaning, as the wheel's rotation allows the support to penetrate deep into the single-crystal furnace. This reduces incomplete cleaning caused by a single rod extending into the furnace due to its depth, further enhancing the quality of furnace cleaning. The rotation of the support plate, combined with the brush's contact with the furnace wall, enables circumferential sweeping, cleaning the entire interior of the single-crystal furnace, covering the area from the furnace opening to the bottom, and reducing dead zones caused by fixed-position cleaning.
[0007] Preferably, the bottom of the support base is provided with a fixed base; multiple sets of hydraulic rods are fixedly connected to the top of the fixed base; the hydraulic rods are inserted and connected to the top of the support base; a level plate is fixedly connected to the top of the fixed base; the level plate is located at the center of the fixed base; after the hydraulic rods are spliced with the support base, a multi-point uniform support is formed, which can balance the center of gravity of the support base when it is removed, ensuring that the brush, roller and other components maintain a safe distance from the furnace opening, so that the support base can be stably removed when it is removed from the furnace as a whole, and when the hydraulic rod pushes the support base into the furnace, the support base can also enter the furnace in a straight line.
[0008] Preferably, the bottom end of the fixed base is fixedly connected to multiple sets of support legs; the bottom end of each support leg is threadedly connected to a rotating seat; by cooperating with the support legs, the extension length of each set of rotating seats can be adjusted individually, so that the bottom of the fixed base can be parallel to the ground even on uneven surfaces, and in coordination with the calibration of the level plate, further improve the parallelism between the support base and the furnace axis when it is inserted into the furnace.
[0009] Preferably, multiple sets of dust pumps are fixedly connected to the top of the support plate; an air pipe is fixedly connected to the top of the dust pump; the air pipe is connected to the support plate; and a dust suction head is fixedly connected to the side wall of the support plate. The dust pump drives the dust suction head to simultaneously suck up pollutants when the brush sweeps, reducing the amount of pollutants swept by the brush from falling into other areas of the furnace, further reducing residual impurities after cleaning the furnace, and also reducing the diffusion of pollutants to the outside of the single crystal furnace.
[0010] Preferably, a support rod is fixed to the top of the support plate; the air tube passes through the support rod; by fixing the air tube with the support rod, the swing amplitude of the air tube when the support plate rotates can be limited, reducing the risk of the air tube falling off due to prolonged shaking.
[0011] Preferably, a fixing plate is fixedly connected to the top of the second electric push rod; a pair of spring rods are fixedly connected to the top of the fixing plate; a support plate is fixedly connected to the top of the spring rods; the spring rods can contract with elastic force after the brush contacts the furnace wall, absorbing the excess thrust of the second electric push rod, so that the pressure of the brush on the furnace wall is limited to a certain range, reducing the excessive pressure of the second electric push rod on the furnace wall caused by excessive pressure, which would result in scratches on the furnace wall surface.
[0012] The advantages of this utility model are: 1. The furnace cleaning device for a single crystal furnace described in this utility model uses multiple sets of first electric push rods to drive the rotating wheel synchronously. The extension length of the rotating wheel can be adjusted according to the actual inner diameter of the furnace, so that the rotating wheel fits tightly against the inner wall of the furnace. The support base is stably fixed in the furnace from multiple points, providing stable support for the sweeping cleaning of the brush. The rotation of the rotating wheel allows the support base to enter the deep layer of the single crystal furnace, reducing the incomplete cleaning caused by a single rod extending into the furnace due to the depth of the single crystal furnace, and further increasing the quality of furnace cleaning. The rotation of the support plate, together with the brush fitting against the furnace wall, achieves circumferential sweeping, cleaning the entire interior of the single crystal furnace, covering the area from the furnace opening to the furnace bottom, and reducing dead corners caused by fixed-position cleaning.
[0013] 2. The furnace cleaning device for a single crystal furnace described in this utility model forms a multi-point uniform support after the hydraulic rod is spliced with the support base. When it is removed, it can balance the center of gravity of the support base and ensure that the brush, roller and other components maintain a safe distance from the furnace opening. This makes the support base stable when it is removed from the furnace as a whole. When the hydraulic rod pushes the support base into the furnace, it can also make the support base enter the furnace in a straight line. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0015] Figure 1 This is a schematic diagram of the main body of this utility model; Figure 2 This is a schematic diagram of the structure of the fixing base in this utility model; Figure 3 This is a schematic diagram of the rotating seat in this utility model; Figure 4 This is a schematic diagram of the structure of the dust pump in this utility model; Figure 5 This is a schematic diagram of the structure of the brush in this utility model.
[0016] In the diagram: 1. Support base; 11. First electric actuator; 12. Rotary wheel; 13. Motor; 14. Support plate; 15. Second electric actuator; 16. Support plate; 17. Brush; 2. Fixed base; 21. Hydraulic rod; 22. Leveling plate; 3. Support leg; 31. Rotating base; 4. Dust pump; 41. Air pipe; 42. Dust suction head; 5. Support rod; 6. Fixed plate; 61. Spring rod. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.
[0018] Specific implementation examples are given below.
[0019] like Figures 1 to 5As shown in the embodiment of this utility model, a furnace cleaning device for a single crystal furnace includes a support base 1; multiple sets of first electric push rods 11 are fixedly connected to the side wall of the support base 1; a rotating wheel 12 is rotatably connected to the top of the first electric push rod 11; multiple sets of the first electric push rods 11 are arranged on the side wall of the support base 1; a motor 13 is fixedly connected to the bottom end of the support base 1; a support plate 14 is fixedly connected to the output end of the motor 13; multiple sets of second electric push rods 15 are fixedly connected to the top of the support plate 14; a support plate 16 is fixedly connected to the top of the second electric push rods 15; and a support plate 16 is fixedly connected to the top of the support plate 16. The system is equipped with brushes 17. During operation, the support base 1 is moved as a whole into the single crystal furnace that needs to be cleaned. Then, multiple sets of first electric actuators 11 are activated to drive the rotating wheel 12, making the rotating wheel 12 contact the inner wall of the single crystal furnace, thus fixing the support base 1 as a whole inside the single crystal furnace. Then, the rotating wheel 12 is activated to move the support base 1 as a whole inside the single crystal furnace. The motor 13 is started to drive the support plate 14 to rotate. When the support plate 14 rotates, the second electric actuator 15 is activated to push the support plate 16 close to the inner wall of the single crystal furnace, so that multiple sets of brushes 17 contact the inner wall of the single crystal furnace. At this time, the brushes 17... It can sweep away contaminants on the inner wall of the single crystal furnace and clean the interior. The motor 13 can be started to drive the support plate 14 to rotate reciprocally, allowing the brush 17 to continuously sweep a single point. As the rotating wheel 12 moves the support base 1 as a whole, the brush 17 can extend into the single crystal furnace to clean the interior. After the support base 1 is cleaned, it moves to the furnace inlet, and the first electric push rod 11 is retracted to remove the support base 1 from the furnace. Multiple sets of first electric push rods 11 drive the rotating wheel 12 synchronously, and the rotating wheel 12 can be adjusted according to the actual inner diameter of the furnace. The extended length of the roller 12 allows it to fit tightly against the inner wall of the furnace, securing the support base 1 to the furnace from multiple points. This provides stable support for the sweeping cleaning of the brush 17. The rotation of the roller 12 allows the support base 1 to enter the depth of the single crystal furnace, reducing the incomplete cleaning caused by a single rod extending into the furnace due to its depth. This further increases the quality of cleaning inside the furnace. In conjunction with the rotation of the support plate 14, the brush 17 adheres to the furnace wall to achieve circumferential sweeping, cleaning the entire interior of the single crystal furnace and covering the area from the furnace opening to the furnace bottom, reducing dead corners caused by cleaning in fixed positions.
[0020] like Figures 2 to 3As shown, a fixed seat 2 is provided at the bottom of the support base 1; multiple sets of hydraulic rods 21 are fixedly connected to the top of the fixed seat 2; the hydraulic rods 21 are inserted and connected to the top of the support base 1; a level plate 22 is fixedly connected to the top of the fixed seat 2; the level plate 22 is located at the center of the fixed seat 2; during operation, when the support base 1 is removed from the single crystal furnace, the fixed seat 2 can be moved as a whole to the bottom of the support base 1, and then the multiple sets of hydraulic rods 21 are aligned with the slots at the bottom of the support base 1, and the hydraulic rods 21 are pushed into the support base 1, so that the fixed seat 2 and the support base 1 are spliced together. When the first electric push rod 11 is retracted and removed from the single crystal furnace, the hydraulic rods 21... The hydraulic rod 21 can continuously support the support base 1, and then retract the hydraulic rod 21 to smoothly remove the support base 1 from the furnace. The hydraulic rod 21 can also push the support base 1 into the furnace as a whole. The level plate 22 can serve as a reference for the horizontal placement of the fixed base 2, so that the support base 1 remains parallel and reduces tilting when it enters the furnace as a whole. After the hydraulic rod 21 is spliced with the support base 1, it forms a multi-point uniform support, which can balance the center of gravity of the support base 1 when it is removed, ensuring that the brush 17, the rotating wheel 12 and other components maintain a safe distance from the furnace opening, so that the support base 1 can be removed stably when it is removed from the furnace as a whole. When the hydraulic rod 21 pushes the support base 1 into the furnace, it can also make the support base 1 enter the furnace in a straight line.
[0021] like Figures 2 to 3 As shown, the bottom end of the fixed base 2 is fixed with multiple sets of support legs 3; the bottom end of each support leg 3 is threadedly connected to a rotating seat 31; during operation, when the fixed base 2 is not placed parallel, the multiple sets of rotating seats 31 at the bottom of the fixed base 2 can be rotated. The rotating seats 31 and the support legs 3 rotate, which can adjust the height of the fixed base 2. In conjunction with the level plate 22, the fixed base 2 can be leveled as a whole; by cooperating with the rotating seats 31 and the support legs 3, the extension length of each set of rotating seats 31 can be adjusted individually, so that the bottom of the fixed base 2 can be parallel to the ground even on uneven surfaces. In conjunction with the calibration of the level plate 22, the parallelism between the support base 1 and the furnace axis is further improved when it is placed in the furnace.
[0022] like Figure 1 and Figure 4 As shown, multiple sets of dust pumps 4 are fixedly connected to the top of the support plate 14; an air pipe 41 is fixedly connected to the top of the dust pump 4; the air pipe 41 is connected to the support plate 16; a dust suction head 42 is fixedly connected to the side wall of the support plate 16; during operation, when the brush 17 sweeps the contaminants in the furnace, the contaminants will fall due to gravity. At this time, the dust pump 4 can be activated to drive the dust suction head 42 to suck in the contaminants, so that the contaminants swept by the brush 17 will not fall directly to the ground; by driving the dust suction head 42 to simultaneously suck in the contaminants when the brush 17 is sweeping, the contaminants swept by the brush 17 are reduced from falling into other areas of the furnace, further reducing the residual impurities after cleaning the furnace, and also reducing the diffusion of contaminants to the outside of the single crystal furnace.
[0023] like Figure 4As shown, a support rod 5 is fixed to the top of the support plate 14; the gas pipe 41 is installed through the support rod 5; during operation, when the support plate 14 rotates and drives the brush 17 to sweep, the gas pipe 41 will swing. At this time, the support rod 5 can fix the gas pipe 41, so that the gas pipe 41 remains stable when the brush 17 sweeps inside the furnace; by fixing the gas pipe 41 by the support rod 5, the swing amplitude of the gas pipe 41 when the support plate 14 rotates can be limited, reducing the risk of the gas pipe 41 falling off due to long-term shaking.
[0024] like Figure 5 As shown, a fixing plate 6 is fixedly connected to the top of the second electric push rod 15; a pair of spring rods 61 are fixedly connected to the top of the fixing plate 6; a support plate 16 is fixedly connected to the top of the spring rods 61; during operation, when the second electric push rod 15 pushes the brush 17 to contact the inner wall of the single crystal furnace, the spring rods 61 can contract due to the pressure after the brush 17 contacts the inner wall of the furnace, thereby reducing the thrust of the second electric push rod 15; by the spring rods 61 contracting with the elastic force after the brush 17 contacts the furnace wall, the excess thrust of the second electric push rod 15 can be absorbed, thus limiting the pressure of the brush 17 on the furnace wall within a certain range, reducing the excessive pressure of the second electric push rod 15, which would cause the brush 17 to excessively squeeze the furnace wall and cause scratches on the furnace wall surface.
[0025] Working principle: The support base 1 is moved to the interior of the single crystal furnace to be cleaned. Then, multiple sets of first electric actuators 11 are activated to drive the rotating wheel 12, making the rotating wheel 12 contact the inner wall of the single crystal furnace, thus fixing the support base 1 inside the furnace. The rotating wheel 12 is then activated to move the support base 1 inside the furnace. The motor 13 is activated to rotate the support plate 14. When the support plate 14 rotates, the second electric actuator 15 is activated to push the support plate 16 closer to the inner wall of the single crystal furnace, causing multiple sets of brushes 17 to contact the inner wall. At this time, the brushes 17 can sweep away contaminants on the inner wall of the single crystal furnace, cleaning the interior. The motor 13 can be started to drive the support plate 14 to rotate reciprocally, so that the brush 17 can continuously sweep a single point. As the rotating wheel 12 drives the support base 1 to move as a whole, the brush 17 can extend into the interior of the single crystal furnace to clean the interior of the single crystal furnace. After the support base 1 has been cleaned, it is moved to the entrance of the single crystal furnace, and the first electric push rod 11 is retracted to remove the support base 1 from the furnace. When the support base 1 is removed from the single crystal furnace, the fixing seat 2 can be moved to the bottom of the support base 1. Then, the multiple sets of hydraulic rods 21 are aligned with the slots at the bottom of the support base 1, and the hydraulic rods 21 are pushed into the interior of the support base 1, so that... The fixed base 2 is spliced with the support base 1. When the first electric push rod 11 retracts and is taken out of the single crystal furnace, the hydraulic rod 21 continuously supports the support base 1. Subsequently, the hydraulic rod 21 retracts to smoothly remove the support base 1 from the furnace. The hydraulic rod 21 can also push the support base 1 as a whole into the furnace. The level plate 22 can serve as a reference for the horizontal placement of the fixed base 2, ensuring that the support base 1 remains parallel and reduces tilting when it enters the furnace. When the fixed base 2 is not placed parallel, the multiple sets of rotating seats 31 at the bottom of the fixed base 2 can be rotated. The rotating seats 31 and the support legs 3 rotate, which can adjust the height of the fixed base 2. In conjunction with the level plate 22, the fixed base 2 can be adjusted. The mounting base 2 is leveled as a whole. When the brush 17 sweeps the contaminants in the furnace, the contaminants will fall due to gravity. At this time, the dust pump 4 can be started to drive the dust suction head 42 to suck in the contaminants, so that the contaminants swept by the brush 17 will not fall directly to the ground. When the support plate 14 rotates and drives the brush 17 to sweep, the air pipe 41 will swing. At this time, the support rod 5 can fix the air pipe 41, so that the air pipe 41 remains stable when the brush 17 sweeps in the furnace. When the second electric push rod 15 pushes the brush 17 to contact the inner wall of the single crystal furnace, the spring rod 61 can contract due to the pressure after the brush 17 contacts the inner wall of the furnace, so that the pushing force of the second electric push rod 15 is reduced.
[0026] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.
Claims
1. A furnace cleaning device for a single crystal furnace, characterized in that: Includes a support base (1); multiple sets of first electric actuators (11) are fixedly connected to the side wall of the support base (1); a rotating wheel (12) is rotatably connected to the top of the first electric actuator (11); multiple sets of the first electric actuators (11) are provided on the side wall of the support base (1); a motor (13) is fixedly connected to the bottom end of the support base (1); a support plate (14) is fixedly connected to the output end of the motor (13); multiple sets of second electric actuators (15) are fixedly connected to the top of the support plate (14); a support plate (16) is fixedly connected to the top of the second electric actuators (15); a brush (17) is fixedly connected to the top of the support plate (16).
2. The furnace cleaning device for a single crystal furnace according to claim 1, characterized in that: The support base (1) is provided with a fixed base (2) at its bottom end; multiple sets of hydraulic rods (21) are fixedly connected to the top of the fixed base (2); the hydraulic rods (21) are inserted and connected to the top of the support base (1); a level plate (22) is fixedly connected to the top of the fixed base (2); the level plate (22) is located at the center of the fixed base (2).
3. The furnace cleaning device for a single crystal furnace according to claim 2, characterized in that: The bottom end of the fixed base (2) is fixed with multiple sets of support legs (3); the bottom end of the support legs (3) is threaded with a rotating seat (31).
4. The furnace cleaning device for a single crystal furnace according to claim 3, characterized in that: Multiple sets of vacuum pumps (4) are fixedly connected to the top of the support plate (14); an air pipe (41) is fixedly connected to the top of the vacuum pump (4); the air pipe (41) is connected to the support plate (16); a vacuum head (42) is fixedly connected to the side wall of the support plate (16).
5. The furnace cleaning device for a single crystal furnace according to claim 4, characterized in that: The top of the support plate (14) is fixed with a support rod (5); the air pipe (41) is installed through the support rod (5).
6. The furnace cleaning device for a single crystal furnace according to claim 5, characterized in that: The top end of the second electric actuator (15) is fixed with a fixing plate (6); the top end of the fixing plate (6) is fixed with a pair of spring rods (61); the top end of the spring rods (61) is fixed with a support plate (16).