A device for heating regenerated dilute solution in a pure water system using environmental heat energy

Abstract

A device for heating regenerated diluent in a pure water system by using environmental heat energy, comprising a heat source, a heat energy exchange device, a regenerated diluent storage tank and a PLC, the heat source is connected with an environmental hot air output pipeline, the heat energy exchange device comprises a heat absorption unit and a heat dissipation unit, the environmental hot air output pipeline is connected with the air inlet end of the heat absorption unit, the air outlet end of the heat absorption unit is connected with the heat source through a circulating fan and a cold air input pipeline, the outlet of the regenerated diluent storage tank is connected with the inlet of the regenerated diluent storage tank through a circulating water pump and a regenerated diluent circulating pipeline, and the regenerated diluent circulating pipeline is matched with the heat dissipation part of the heat dissipation unit. The utility model discloses a heat energy exchange device is realized to the waste heat collection of workshop heat source emission to the air in, and is used for heating regenerated diluent, replaces the additional heat source of present pure water regeneration system, realizes the environmental protection goal of energy saving and emission reduction.

Description

Technical Field

[0001] This invention relates to the field of physics, and more particularly to the field of semiconductor manufacturing, specifically a device for heating a regenerated diluent in a pure water system using ambient thermal energy. Background Technology

[0002] The semiconductor manufacturing industry involves numerous and complex processes, placing extremely high demands on energy, water, and chemicals, making it a resource-intensive industry. One of the main sources of carbon emissions in the semiconductor industry is the purchase of electricity, steam, and heating and cooling equipment. Specifically, semiconductor manufacturing processes require pure water to clean impurities from chips, resulting in very high water consumption. Current technologies commonly use ultrapure water equipment to produce pure water, but the regeneration diluent in this process needs to be heated, leading to significant energy consumption. The increasing carbon emissions from equipment year by year, coupled with pressure from end customers to reduce emissions, have prompted semiconductor manufacturers to place greater emphasis on energy conservation and emission reduction.

[0003] Furthermore, the operation of ultrapure water equipment and electrical components in semiconductor plants generates heat. According to statistics, electrical components generate 3%-10% of their operating power as heat during operation, while pumps and other equipment generate 10%-40% of their heat, which dissipates into the system room, causing an increase in temperature and impacting the lifespan of electrical components and equipment. Current technologies cannot utilize this waste heat dissipated into the air, thus hindering the achievement of energy conservation and emission reduction goals. Utility Model Content

[0004] The purpose of this invention is to provide a device for heating the regenerated diluent in a pure water system using ambient thermal energy, in order to solve the technical problem of high energy consumption in heating the regenerated diluent during the pure water manufacturing process in the prior art.

[0005] This utility model provides a device for heating a regenerated diluent in a pure water system using ambient thermal energy. The device includes a heat source, a heat exchange device, a regenerated diluent storage tank, and a PLC. The heat source is connected to an ambient hot air output pipe. The heat exchange device includes a heat absorption unit and a heat dissipation unit. The ambient hot air output pipe is connected to the air inlet of the heat absorption unit. The air outlet of the heat absorption unit is connected to the heat source via a circulating fan and a cold air input pipe. The outlet of the regenerated diluent storage tank is connected to one end of a circulating water pump via a pipe. The other end of the circulating water pump is connected to one end of a regenerated diluent circulation pipe. The other end of the regenerated diluent circulation pipe is connected to the inlet of the regenerated diluent storage tank. The regenerated diluent circulation pipe cooperates with the heat dissipation part of the heat dissipation unit. The supply port of the regenerated diluent storage tank is connected to the regenerated diluent usage point via a delivery pump and a pipe.

[0006] The regenerated diluent storage tank is equipped with a first temperature sensor and a liquid level sensor. The regenerated diluent circulation pipeline is connected to a water supply source through a water supply pipeline, and a water supply valve is installed on the water supply pipeline.

[0007] The control terminals of the circulating fan, circulating water pump, transfer pump, and water supply valve, as well as the signal terminals of the first temperature sensor and liquid level sensor, are all electrically connected to the PLC.

[0008] Furthermore, the heat source includes an electrical room and a pump equipment operating room.

[0009] Furthermore, a wind pressure sensor and a proportional valve for air volume control are installed on the cold air input duct, and a second temperature sensor is installed on the hot air output duct. The signal output terminals of the wind pressure sensor, the second temperature sensor, and the control terminal of the proportional valve for air volume control are all electrically connected to the PLC.

[0010] Furthermore, the heat exchange device also includes a compressor, the heat absorption unit includes an evaporator and an expansion valve, the heat dissipation unit is a condenser, the condenser includes a heat exchanger, the heat exchanger is provided with a coolant flow channel and a regenerated diluent flow channel, the coolant flow channel and the regenerated diluent flow channel are isolated from each other by a heat exchange plate, the two ends of the coolant flow channel are respectively provided with a heat medium inlet and a heat medium outlet, the two ends of the regenerated diluent flow channel are respectively provided with a refrigerant inlet and a refrigerant outlet, the outlet of the evaporator is connected to the compressor through a pipe, the outlet of the compressor is connected to the heat medium inlet of the heat exchanger through a pipe, the heat medium outlet of the heat exchanger is connected to one end of the expansion valve through a pipe, the regenerated diluent circulation pipe includes a regenerated diluent outlet pipe and a regenerated diluent inlet pipe, the regenerated diluent outlet pipe is connected to the refrigerant inlet of the heat exchanger, and the regenerated diluent inlet pipe is connected to the refrigerant outlet of the heat exchanger.

[0011] Furthermore, a third temperature sensor is installed on the inlet pipe of the regenerated diluent, and a temperature control valve is installed on the outlet pipe of the regenerated diluent. The signal output terminal of the third temperature sensor and the control terminal of the temperature control valve are both electrically connected to the PLC.

[0012] Compared with existing technologies, the advantages of this invention are positive and significant. This invention uses a heat exchange device to collect waste heat dissipated from the factory's heat source into the air, and uses this heat to heat the regenerated diluent, replacing the additional heat source of existing pure water regeneration systems and achieving the environmental protection goals of energy conservation and emission reduction. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of a device for heating a regenerated diluent in a pure water system using ambient thermal energy, according to this utility model. Detailed Implementation

[0014] The present invention will be further described below with reference to embodiments, but the present invention is not limited to these embodiments. Any similar variations using the present invention should be included in the protection scope of the present invention. The use of directional terms such as up, down, front, back, left, right, middle, inside, and outside in the present invention is only for the convenience of clear description and is not intended to limit the technical solution of the present invention.

[0015] like Figure 1 As shown, this utility model provides a device for heating regenerated diluent in a pure water system using ambient thermal energy. The device includes a heat source 3, a heat exchange device 25, a regenerated diluent storage tank 18, and a PLC. The heat source 3 is connected to an ambient hot air output pipe 26. The heat exchange device 25 includes a heat absorption unit and a heat dissipation unit. The ambient hot air output pipe 26 is connected to the air inlet of the heat absorption unit. The air outlet of the heat absorption unit is connected to the heat source 3 via a circulating fan 11 and a cold air input pipe 27. The outlet of the regenerated diluent storage tank 18 is connected to one end of a circulating water pump 17 via a pipe. The other end of the circulating water pump 17 is connected to one end of a regenerated diluent circulation pipe 28. The other end of the regenerated diluent circulation pipe 28 is connected to the inlet of the regenerated diluent storage tank 18. The regenerated diluent circulation pipe 28 cooperates with the heat dissipation part of the heat dissipation unit. The supply port of the regenerated diluent storage tank 18 is connected to the regenerated diluent usage point 29 via a delivery pump 20 and a pipe.

[0016] The regenerated diluent storage tank 18 is equipped with a first temperature sensor 22 and a liquid level sensor 19. The regenerated diluent circulation pipe 28 is connected to a water source through a water supply pipe 30, and a water supply valve 23 is installed on the water supply pipe 30.

[0017] The control terminals of the circulating fan 11, circulating water pump 17, delivery pump 20, and water supply valve 23, as well as the signal terminals of the first temperature sensor 22 and liquid level sensor 19, are all electrically connected to the PLC.

[0018] Furthermore, the heat source 3 includes an electrical room 1 and a pump equipment operating room 2.

[0019] Furthermore, a wind pressure sensor 10 and an air volume control proportional valve 7 are installed on the cold air input duct 27, and a second temperature sensor 4 is installed on the hot air output duct. The signal output terminals of the wind pressure sensor 10 and the second temperature sensor 4, as well as the control terminal of the air volume control proportional valve 7, are all electrically connected to the PLC.

[0020] Furthermore, the heat exchange device 25 also includes a compressor 13, a heat absorption unit including an evaporator 12 and an expansion valve 24, and a heat dissipation unit being a condenser 14. The condenser 14 includes a heat exchanger, which has a refrigerant flow channel and a regenerated diluent flow channel. The refrigerant flow channel and the regenerated diluent flow channel are isolated from each other by a heat exchange plate. The two ends of the refrigerant flow channel are respectively provided with a heat medium inlet and a heat medium outlet. The two ends of the regenerated diluent flow channel are respectively provided with a cold medium inlet and a cold medium outlet. The outlet of the evaporator 12 is connected to the compressor 13 through a pipe, and the outlet of the compressor 13 is connected to the heat medium inlet of the heat exchanger through a pipe. The heat medium outlet of the heat exchanger is connected to one end of the expansion valve 24 through a pipe. The regenerated diluent circulation pipe 28 includes a regenerated diluent outlet pipe 32 and a regenerated diluent inlet pipe 33. The regenerated diluent outlet pipe 32 is connected to the cold medium inlet of the heat exchanger, and the regenerated diluent inlet pipe 33 is connected to the cold medium outlet of the heat exchanger.

[0021] Specifically, the heat exchanger can be a shell-and-tube heat exchanger or a double-tube heat exchanger, which are existing technologies.

[0022] Furthermore, a third temperature sensor 15 is installed on the inlet pipe 33 of the regenerated diluent, and a temperature control valve 16 is installed on the outlet pipe 32 of the regenerated diluent. The signal output terminal of the third temperature sensor 15 and the control terminal of the temperature control valve 16 are both electrically connected to the PLC.

[0023] Specifically, the wind pressure sensor 10, air volume control proportional valve 7, temperature sensor, compressor 13, evaporator 12, expansion valve 24, condenser 14, heat exchanger, temperature control valve 16, PLC in this utility model, as well as other parts not described in detail, all adopt known solutions in the prior art, which are understood and implemented by those skilled in the art, and will not be elaborated here.

[0024] The working principle of this utility model:

[0025] Circulating ventilation method: Heat is transferred between the evaporator 12 and the condenser 14 through the refrigerant in the pipe. The ambient hot air output pipe 26 collects the ambient hot air from the heat source 3 of the plant. The ambient hot air passes through the evaporator 12 and transfers heat to the refrigerant. The cold air return air is then sent to the heat source 3 of the plant through the circulating fan 11. The cold air return air reduces the temperature of the heat source 3 of the plant.

[0026] Temperature control of heat source 3 in the factory: The real-time ambient temperature is monitored by the second temperature sensor 4, and the signal is transmitted back to the PLC. The PLC controls the opening of the proportional valve 7 to control the airflow, thereby controlling the amount of cold air and keeping the temperature of the heat source in the factory constant. Furthermore, the signal from the wind pressure sensor 10 is transmitted to the PLC, which controls the output of the circulating fan 11 to stabilize the outlet air pressure.

[0027] Air heat recovery method: The heat collected by the evaporator 12 causes the refrigerant to evaporate and vaporize. After being pressurized by the compressor 13, the refrigerant is reformed into a liquid state and then transported to the refrigerant channel of the condenser 14. At the same time, the regenerated diluent in the regenerated diluent storage tank 18 is pumped into the regenerated diluent channel of the condenser 14 by the circulating water pump 17. The condenser 14 exchanges heat between the refrigerant and the regenerated diluent through a heat exchanger. After being heated, the regenerated diluent returns to the regenerated diluent storage tank 18. The temperature of the regenerated diluent is monitored by the third temperature sensor 15, and the signal is transmitted back to the PLC to control the opening of the temperature control valve 16 to ensure the outlet water temperature. After the refrigerant condenses and cools down, it passes through the expansion valve 24 and becomes a low-temperature and low-pressure state before returning to the evaporator 12.

[0028] When the level sensor 19 detects that the level of the regenerated diluent storage tank 18 is low, the signal is sent back to the PLC. The PLC controls the water supply valve 23 to open and replenish the regenerated diluent storage tank 18 with water through the water supply pipe 30 to the set level.

[0029] Since the regeneration of the pure water system is intermittent, the liquid in the regeneration diluent storage tank 18 will gradually cool down during the intermittent process. The temperature of the regeneration diluent is monitored by the first temperature sensor 22. When the temperature is low, the PLC controls the circulating water pump 17 to start, thereby ensuring the temperature of the regeneration diluent in the regeneration diluent storage tank 18. The regeneration diluent at a constant temperature is transported to the regeneration diluent usage point 29 by the transfer pump 20, thereby realizing the collection of waste heat dissipated from the plant heat source into the air and using it to heat the regeneration diluent, replacing the additional heat source of the existing pure water regeneration system, and achieving the environmental protection goal of energy saving and emission reduction.

Claims

1. A device for heating a regenerated diluent in a pure water system using ambient thermal energy, characterized in that, The device includes a heat source, a heat exchange device, a regenerated diluent storage tank, and a PLC. The heat source is connected to an ambient hot air output pipe. The heat exchange device includes a heat absorption unit and a heat dissipation unit. The ambient hot air output pipe is connected to the air inlet of the heat absorption unit. The air outlet of the heat absorption unit is connected to the heat source via a circulating fan and a cold air input pipe. The outlet of the regenerated diluent storage tank is connected to one end of a circulating water pump via a pipe. The other end of the circulating water pump is connected to one end of a regenerated diluent circulation pipe. The other end of the regenerated diluent circulation pipe is connected to the inlet of the regenerated diluent storage tank. The regenerated diluent circulation pipe cooperates with the heat dissipation part of the heat dissipation unit. The supply port of the regenerated diluent storage tank is connected to the regenerated diluent usage point via a delivery pump and a pipe. The regenerated diluent storage tank is equipped with a first temperature sensor and a liquid level sensor. The regenerated diluent circulation pipeline is connected to a water supply source through a water supply pipeline, and a water supply valve is installed on the water supply pipeline. The control terminals of the circulating fan, circulating water pump, transfer pump, and water supply valve, as well as the signal terminals of the first temperature sensor and liquid level sensor, are all electrically connected to the PLC.

2. The apparatus for heating a regenerated diluent in a pure water system using ambient thermal energy according to claim 1, characterized in that, The heat sources include the electrical room and the pump equipment operating room.

3. The apparatus for heating a regenerated diluent in a pure water system using ambient thermal energy according to claim 1, characterized in that, The cold air input duct is equipped with a wind pressure sensor and a proportional valve for air volume control, and the hot air output duct is equipped with a second temperature sensor. The signal output terminals of the wind pressure sensor, the second temperature sensor, and the control terminal of the proportional valve for air volume control are all electrically connected to the PLC.

4. The apparatus for heating a regenerated diluent in a pure water system using ambient thermal energy according to claim 1, characterized in that, The heat exchange device further includes a compressor, a heat absorption unit including an evaporator and an expansion valve, a heat dissipation unit being a condenser, and the condenser including a heat exchanger. The heat exchanger is provided with a coolant flow channel and a regenerated diluent flow channel, which are isolated by a heat exchange plate. The coolant flow channel has a heat medium inlet and a heat medium outlet at both ends, and the regenerated diluent flow channel has a refrigerant inlet and a refrigerant outlet at both ends. The outlet of the evaporator is connected to the compressor via a pipe, the outlet of the compressor is connected to the heat medium inlet of the heat exchanger via a pipe, and the heat medium outlet of the heat exchanger is connected to one end of the expansion valve via a pipe. The regenerated diluent circulation pipe includes a regenerated diluent outlet pipe and a regenerated diluent inlet pipe. The regenerated diluent outlet pipe is connected to the refrigerant inlet of the heat exchanger, and the regenerated diluent inlet pipe is connected to the refrigerant outlet of the heat exchanger.

5. The apparatus for heating a regenerated diluent in a pure water system using ambient thermal energy according to claim 4, characterized in that, A third temperature sensor is installed on the inlet pipe of the regenerated diluent, and a temperature control valve is installed on the outlet pipe of the regenerated diluent. The signal output terminal of the third temperature sensor and the control terminal of the temperature control valve are both electrically connected to the PLC.

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