A chip testing device and testing equipment

Abstract

The utility model provides a kind of chip's testing device and test equipment, it is related to chip testing technical field.The testing device is respectively installed with multiple sliding mechanisms on each crossbeam, and each sliding mechanism can independently slide along crossbeam.Multiple moving platforms are all installed on base, and the first drive mechanism of moving platform is used to drive detection table to move along first horizontal direction, and the second drive mechanism is used to drive detection table to move along second horizontal direction.Rotation mechanism is used to drive detection table to rotate, lifting mechanism is used to drive detection table to move along vertical, and multiple moving platforms are set to alternately move to target position, so that testing machine tests chip on detection table.Multiple moving platforms can independently do linear motion, improve motion accuracy.In addition, moving platform can be adjusted with four degrees of freedom, and each sliding mechanism can independently move, so as to cooperate with moving platform, realize accurate alignment of chip and other mechanisms.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a chip testing device and testing equipment. Background Technology

[0002] Currently, in the field of chip testing equipment, dual-station switching motion platforms are generally divided into rotary and linear types, used to carry and move chips. Rotary platforms use a single rotating axis to drive two stations to alternate positions, enabling processing and loading / unloading at different stations. Linear platforms use a single linear motion axis to drive two stations to move back and forth along a straight line for exchange.

[0003] The rotary dual-station switching motion platform has the following problems: First: Rotary mechanisms, whether gears or bearings, will produce motion following errors and poor repeatability due to the influence of backlash. Second: The transmission mechanism of the rotary dual-station is relatively complex. Each link in the transmission chain will introduce errors. Therefore, due to the existence of accumulated errors, the overall system's accuracy is difficult to reach a high level. Third: Rotation has a high moment of inertia, the system's response speed is slow, and its dynamic performance is worse than that of independent linear motion. It also has a low-level "crawling" phenomenon. Therefore, in the field of high precision, this type of dual-station structure basically cannot meet the precision requirements.

[0004] The linear dual-station switching motion platform has the following problems: First: The dual-station mechanism of the co-moving carrier can meet the production cycle requirements, but due to the presence of vibration, in high-precision motion requirements, since one side is feeding and the other side is processing, vibration error will be introduced into the processing process. Second: Because it is the same moving carrier, the dual-station design will result in a larger platform size, which will not only increase the difficulty of production, but also lead to errors such as sway and pitch during production and testing. Third: In high-load, multi-site testing, this type of dual-station motion platform will have a greater load, and will perform poorly in terms of heat generation, wear and tear, and maintenance.

[0005] In addition, although the existing motion platform can move the chip, the chip needs to be transported and aligned during the testing process. The existing motion platform has limited directional freedom and cannot accurately adjust the relative position of the chip with the transport or alignment mechanism, resulting in poor normal transport and alignment of the chip. Utility Model Content

[0006] One objective of this invention is to provide a chip testing device that solves the technical problem in the prior art of low motion accuracy of chip testing devices and the inability to achieve precise alignment between the chip and the transport mechanism or alignment mechanism.

[0007] Another objective of this invention is to provide a testing device having the aforementioned chip.

[0008] Specifically, this utility model provides a chip testing device, comprising: The base extends toward the first horizontal direction; Multiple crossbeams, each of which extends toward a second horizontal direction and is spaced apart on the base, wherein the second horizontal direction is perpendicular to the first horizontal direction; Multiple sliding mechanisms are installed on each of the crossbeams, and each sliding mechanism can slide independently along the crossbeam for mounting a vision inspection mechanism, a straightening mechanism, or a transport mechanism. Multiple mobile platforms are mounted on the base. Each mobile platform corresponds to a crossbeam and includes a first drive mechanism, a second drive mechanism, a lifting mechanism, a rotating mechanism, and a testing stage for carrying chips. The first drive mechanism drives the testing stage to move along a first horizontal direction, the second drive mechanism drives the testing stage to move along a second horizontal direction, the rotating mechanism drives the testing stage to rotate, and the lifting mechanism drives the testing stage to move vertically. The multiple mobile platforms are configured to move alternately to the target position, so that the testing machine can test the chips on the testing stage.

[0009] Optionally, the first drive mechanism includes a first slide rail mounted on the base, and the first slide rail extends in the first horizontal direction. The first support platform is slidably mounted on the first slide rail and connected to the detection platform; At least one first driving member is mounted on the base and connected to the first support platform. Under the drive of the first driving member, the first support platform slides along the first slide rail, thereby driving the detection platform to move along the first horizontal direction.

[0010] Optionally, the second drive mechanism further includes: The second slide rail is mounted on the first support platform and extends toward the second horizontal direction; The second support platform is slidably mounted on the second slide rail and connected to the detection platform; The second driving component is installed on the first support platform and connected to the second support platform. Under the drive of the second driving component, the second support platform slides along the second slide rail, thereby driving the detection platform to move along the second horizontal direction.

[0011] Optionally, the rotating mechanism includes: The third support platform is installed above the second support platform and connected to the detection platform; The rotating assembly includes a first rotating component and a second rotating component. The first rotating component is fixedly connected to the second support platform, and the second rotating component is connected to the third support platform and is capable of rotating relative to the first rotating component. The third driving component is mounted on the second support platform and connected to the third support platform, and is used to drive the third support platform to rotate relative to the second support platform, thereby driving the detection platform to rotate.

[0012] Optionally, both the first rotating member and the second rotating member are annular, with the second rotating member located inside the first rotating member.

[0013] Optionally, the lifting mechanism includes: A fourth support platform is disposed above the third support platform and connected to the detection platform; The fourth driving component is mounted on the third support platform; The lead screw passes through the third support platform and the fourth support platform, and is connected to the fourth driving component; A nut seat is sleeved on the outer circumference of the lead screw and connected to the fourth bearing platform; under the drive of the fourth driving member, the lead screw rotates, causing the nut seat to move up and down along the lead screw, thereby driving the detection platform to move vertically.

[0014] Optionally, the lifting mechanism further includes: The drive gear is sleeved on the output shaft of the fourth drive component; The driven gear is sleeved on the lead screw; A timing belt is fitted onto the driving gear and the driven gear, so that the fourth driving component is connected to the lead screw drive.

[0015] Optionally, it further includes a plurality of third slide rails, which are respectively mounted on a plurality of crossbeams; each sliding mechanism includes: The fifth driving component is mounted on the crossbeam; A slider is mounted on the third slide rail and connected to the fifth drive member. Under the drive of the fifth drive member, the slider slides along the third slide rail.

[0016] Optionally, both the crossbeam and the base are made of marble.

[0017] Specifically, this utility model also provides a chip testing device, comprising: The testing apparatus described above; Multiple alignment mechanisms, each of which is mounted on a first sliding mechanism of one of the crossbeams, are used to adjust the position of the chip on the detection stage; Multiple transport mechanisms, each of which is mounted on a second sliding mechanism of one of the crossbeams, are used to transport the chip to the testing table or remove the chip from the testing table; A testing machine is installed above the target location to test the chip on the testing platform.

[0018] In this invention, multiple crossbeams of the testing device are spaced apart and mounted on a base. Each crossbeam is equipped with multiple sliding mechanisms, each capable of sliding independently along the crossbeam for mounting a visual inspection mechanism, an alignment mechanism, or a transport mechanism. Multiple moving platforms are mounted on the base. A first drive mechanism of each moving platform moves the inspection stage along a first horizontal direction, and a second drive mechanism moves it along a second horizontal direction. A rotation mechanism rotates the inspection stage, and a lifting mechanism moves it vertically. The multiple moving platforms are arranged to move alternately to the target position, allowing the testing machine to test the chip on the inspection stage. In this technical solution, the multiple moving platforms can independently move linearly along the first horizontal direction, improving motion accuracy compared to existing mechanisms that involve simultaneous movement of two stations. Furthermore, the moving platforms are essentially adjustable with four degrees of freedom, and each sliding mechanism can move independently, thus cooperating with the moving platforms to achieve precise alignment of the chip with the visual inspection mechanism, alignment mechanism, or transport mechanism, improving the accuracy of chip transport, alignment, or testing.

[0019] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0020] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings: Figure 1 This is a schematic structural diagram of a chip testing device according to an embodiment of the present invention; Figure 2This is a schematic structural diagram of a mobile platform from one angle according to an embodiment of the present invention; Figure 3 This is a schematic structural diagram of a mobile platform according to one embodiment of the present invention from another angle; Figure 4 This is a schematic structural diagram of a lifting mechanism according to an embodiment of the present utility model; Figure 5 This is a schematic structural diagram of a sliding mechanism according to an embodiment of the present invention.

[0021] Figure label: 100-Testing device, 10-Base, 20-Crossbeam, 30-Sliding mechanism, 40-Moving platform, 50-First slide rail, 31-Third slide rail, 32-Fifth driving component, 33-Sliding component, 41-Detection table, 42-First driving mechanism, 43-Second driving mechanism, 44-Rotating mechanism, 45-Lifting mechanism, 421-First bearing platform, 422-First driving component, 431-Second slide rail, 432-Second bearing platform, 433-Second driving component, 441-Third driving component, 442-Third bearing platform, 443-First rotating component, 444-Second rotating component, 451-Fourth bearing platform, 452-Guide assembly, 453-Fourth driving component, 454-Driving gear, 455-Synchronous belt, 456-Driven gear, 457-Nut seat, 458-Lead screw. Detailed Implementation

[0022] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0023] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0025] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0027] Figure 1 This is a schematic structural diagram of a chip testing apparatus 100 according to an embodiment of the present invention. Figure 2 This is a schematic structural diagram of a mobile platform 40 according to an embodiment of the present invention, taken from one angle. Figure 1 and Figure 2As shown, in one specific embodiment, the chip testing apparatus 100 includes a base 10, multiple crossbeams 20, multiple sliding mechanisms 30, and multiple moving platforms 40. The base 10 extends toward a first horizontal direction. Each crossbeam 20 extends toward a second horizontal direction and is spaced apart on the base 10, the second horizontal direction being perpendicular to the first horizontal direction. Multiple sliding mechanisms 30 are respectively mounted on each crossbeam 20, and each sliding mechanism 30 can slide independently along the crossbeam 20 for mounting a vision inspection mechanism, an alignment mechanism, or a transport mechanism. Multiple mobile platforms 40 are mounted on the base 10. Each mobile platform 40 corresponds to a crossbeam 20 and includes a first drive mechanism 42, a second drive mechanism 43, a lifting mechanism 45, a rotating mechanism 44, and a testing stage 41 for carrying the chip. The first drive mechanism 42 drives the testing stage 41 to move along a first horizontal direction, the second drive mechanism 43 drives the testing stage 41 to move along a second horizontal direction, the rotating mechanism 44 drives the testing stage 41 to rotate, and the lifting mechanism 45 drives the testing stage 41 to move vertically. The multiple mobile platforms 40 are configured to move alternately to the target position, allowing the testing machine to test the chip on the testing stage 41. Figure 1 The X direction is the first horizontal direction, and the Y direction is the second horizontal direction.

[0028] In this embodiment, multiple moving platforms 40 can independently move linearly along a first horizontal direction, which improves motion accuracy compared to existing mechanisms where two workstations move together. Furthermore, each moving platform 40 can be adjusted with four degrees of freedom, and each sliding mechanism 30 can move independently, thus cooperating with the moving platform 40 to achieve precise alignment of the chip with the vision inspection mechanism, alignment mechanism, or transport mechanism, improving the accuracy of chip transport, alignment, or inspection.

[0029] In some embodiments, there are two moving platforms 40 and two crossbeams 20. Each crossbeam 20 is equipped with two sliding mechanisms 30, one of which is equipped with a transport mechanism and the other with a centering mechanism. In short, the testing device 100 integrates two independent moving platforms 40, enabling independent control and feedback for each platform. Each platform 40 can achieve high-precision positioning and movement at the micron or even sub-micron level. This embodiment achieves a mode of independent left and right working areas, maximizing space savings and land cost reduction. It also allows for chip processing on one moving platform 40 while chip loading and unloading are performed on the other, saving loading and unloading time and improving production efficiency. Furthermore, the combination of two crossbeams 20 and two sliding mechanisms 30, combined with the movement of the moving platforms 40, ensures high precision in chip loading, unloading, and centering. In other embodiments, the number of moving platforms 40 and crossbeams 20 can be determined according to specific design requirements.

[0030] In some embodiments, the testing device 100 includes a first slide rail 50 mounted on a base 10, extending in a first horizontal direction. The first drive mechanism 42 includes a first support platform 421 and at least one first drive member 422. The first support platform 421 is slidably mounted on the first slide rail 50 and connected to the detection platform 41. At least one first drive member 422 is mounted on the base 10 and connected to the first support platform 421. Driven by the first drive member 422, the first support platform 421 slides along the first slide rail 50, thereby moving the detection platform 41 in the first horizontal direction. It can be understood that multiple moving platforms 40 share a single first slide rail 50, but their movement along the first slide rail 50 is independently controlled. Here, the first drive member 422 is an iron-core linear motor.

[0031] In some embodiments, the second drive mechanism 43 further includes a second slide rail 431, a second support platform 432, and a second drive member 433. The second slide rail 431 is mounted on the first support platform 421 and extends in a second horizontal direction. The second support platform 432 is slidably mounted on the second slide rail 431 and connected to the detection platform 41. The second drive member 433 is mounted on the first support platform 421 and connected to the second support platform 432. Driven by the second drive member 433, the second support platform 432 slides along the second slide rail 431, thereby driving the detection platform 41 to move in the second horizontal direction. Here, the second drive member 433 is a motor.

[0032] Figure 3 This is a schematic structural diagram of a mobile platform 40 according to one embodiment of the present invention from another angle. Figure 4 This is a schematic structural diagram of a lifting mechanism 45 according to an embodiment of the present invention. Figure 3 and Figure 4As shown, in some embodiments, the rotating mechanism 44 includes a third support platform 442, a rotating assembly, and a third driving member 441. The third support platform 442 is mounted above the second support platform 432 and connected to the detection platform 41. The rotating assembly includes a first rotating member 443 and a second rotating member 444. The first rotating member 443 is fixedly connected to the second support platform 432, and the second rotating member 444 is connected to the third support platform 442 and can rotate relative to the first rotating member 443. The third driving member 441 is mounted on the second support platform 432 and connected to the third support platform 442, and is used to drive the third support platform 442 to rotate relative to the second support platform 432, thereby driving the detection platform 41 to rotate. Here, the third driving member 441 is a motor. Specifically, the rotating mechanism 44 also includes a lead screw, a slider, a connecting plate, and a clamping assembly. The lead screw is connected to the third driving member 441, the slider is sleeved on the lead screw, the clamping assembly is mounted on the slider and clamps one end of the connecting plate, and the other end of the connecting plate is connected to the third support platform 442. Driven by the third driving member 441, the lead screw rotates, causing the slider to move in a preset direction, thereby driving the connecting plate to rotate, which in turn drives the third bearing platform 442 to rotate relative to the second bearing platform 432.

[0033] In some embodiments, both the first rotating member 443 and the second rotating member 444 are annular, with the second rotating member 444 located inside the first rotating member 443. Here, the first rotating member 443 is the outer ring of a cross-roller collar, which is fixedly installed, and the second rotating member 444 is the inner ring of a cross-roller collar, which is rotatable. The first rotating member 443 and the second rotating member 444 form a cross-roller collar. This embodiment achieves the rotation of the third support platform 442 relative to the second support platform 432 through the cooperation of the first rotating member 443 and the second rotating member 444, resulting in extremely high precision when adjusting the chip's angular direction and maintaining high precision even under extremely high loads.

[0034] In some embodiments, the lifting mechanism 45 includes a fourth support platform 451, a fourth driving member 453, a lead screw 458, and a nut seat 457. The fourth support platform 451 is disposed above the third support platform 442 and connected to the detection platform 41. The fourth driving member 453 is mounted on the third support platform 442. The lead screw 458 passes through the third support platform 442 and the fourth support platform 451 and is connected to the fourth driving member 453. The nut seat 457 is sleeved on the outer periphery of the lead screw 458 and connected to the fourth support platform 451. Driven by the fourth driving member 453, the lead screw 458 rotates, causing the nut seat 457 to move up and down along the lead screw 458, thereby driving the detection platform 41 to move vertically. Here, the fourth driving member 453 is a motor.

[0035] In some embodiments, the lifting assembly further includes four guide components 452, which are distributed at the four corners of the fourth support platform 451 to ensure the consistency of the four corners during lifting. The high rigidity of the four guide components 452 ensures that the fourth support platform 451 maintains its horizontal state even under eccentric loads. Here, the fourth support platform 451 is fixedly mounted on the guide sleeve of the guide component 452 and can move up and down along the guide post of the guide component 452. The guide component 452 is a pre-loaded structure with no gaps and extremely high precision, ensuring the high-precision operation of the fourth support platform 451. This embodiment achieves precise vertical control and high load-bearing capacity through the cooperative use of the lead screw 458 and the guide components 452.

[0036] In some embodiments, the lifting mechanism 45 further includes a driving gear 454, a driven gear 456, and a timing belt 455. The driving gear 454 is sleeved on the output shaft of the fourth driving member 453. The driven gear 456 is sleeved on the lead screw 458, and the timing belt 455 is sleeved on the driving gear 454 and the driven gear 456, thereby enabling the fourth driving member 453 to be connected to the lead screw 458 in a transmission connection. When the fourth driving member 453 is driven, the output shaft sequentially drives the driving gear 454, the timing belt 455, the driven gear 456, and the lead screw 458 to rotate, thereby causing the nut seat 457 to move vertically along the lead screw 458.

[0037] In some embodiments, the testing device 100 further includes a plurality of third slide rails 31, which are respectively mounted on a plurality of crossbeams 20. Each sliding mechanism 30 includes a fifth driving member 32 and a sliding member 33. The fifth driving member 32 is mounted on the crossbeam 20, and the sliding member 33 is mounted on the third slide rail 31 and connected to the fifth driving member 32. Under the drive of the fifth driving member 32, the sliding member 33 slides along the third slide rail 31.

[0038] In some embodiments, both the crossbeam 20 and the base 10 are made of marble, which can achieve structural stability and provide a high-precision mounting surface.

[0039] In some embodiments, this embodiment also provides a chip testing apparatus, which includes a testing device 100 as described in any of the above embodiments, a plurality of alignment mechanisms, a plurality of transport mechanisms, and a testing machine. Each alignment mechanism is mounted on a first sliding mechanism 30 of a crossbeam 20 for adjusting the position of the chip on the testing stage 41. Each transport mechanism is mounted on a second sliding mechanism 30 of a crossbeam 20 for transporting the chip to or removing the chip from the testing stage 41. The testing machine is mounted above the target position for testing the chip on the testing stage 41.

[0040] This embodiment features both independent operation and multi-axis superposition. Its directional diversity and control independence can meet the needs of most semiconductor manufacturing processes, making it widely applicable.

[0041] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A chip testing device, characterized in that, include: The base extends toward the first horizontal direction; Multiple crossbeams, each of which extends toward a second horizontal direction and is spaced apart on the base, wherein the second horizontal direction is perpendicular to the first horizontal direction; Multiple sliding mechanisms are installed on each of the crossbeams, and each sliding mechanism can slide independently along the crossbeam for mounting a vision inspection mechanism, a straightening mechanism, or a transport mechanism. Multiple mobile platforms are mounted on the base. Each mobile platform corresponds to a crossbeam and includes a first drive mechanism, a second drive mechanism, a lifting mechanism, a rotating mechanism, and a testing stage for carrying chips. The first drive mechanism drives the testing stage to move along a first horizontal direction, the second drive mechanism drives the testing stage to move along a second horizontal direction, the rotating mechanism drives the testing stage to rotate, and the lifting mechanism drives the testing stage to move vertically. The multiple mobile platforms are configured to move alternately to the target position, so that the testing machine can test the chips on the testing stage.

2. The testing apparatus according to claim 1, characterized in that, The first drive mechanism includes a first slide rail mounted on the base and extending in the first horizontal direction, and comprises: The first support platform is slidably mounted on the first slide rail and connected to the detection platform; At least one first driving component is mounted on the base and connected to the first support platform. Under the drive of the first driving component, the first support platform slides along the first slide rail, thereby driving the detection platform to move along the first horizontal direction.

3. The testing apparatus according to claim 2, characterized in that, The second drive mechanism also includes: The second slide rail is mounted on the first support platform and extends toward the second horizontal direction; The second support platform is slidably mounted on the second slide rail and connected to the detection platform; The second driving component is installed on the first support platform and connected to the second support platform. Under the drive of the second driving component, the second support platform slides along the second slide rail, thereby driving the detection platform to move along the second horizontal direction.

4. The testing apparatus according to claim 3, characterized in that, The rotating mechanism includes: The third support platform is installed above the second support platform and connected to the detection platform; The rotating assembly includes a first rotating component and a second rotating component. The first rotating component is fixedly connected to the second support platform, and the second rotating component is connected to the third support platform and is capable of rotating relative to the first rotating component. The third driving component is mounted on the second support platform and connected to the third support platform, and is used to drive the third support platform to rotate relative to the second support platform, thereby driving the detection platform to rotate.

5. The testing apparatus according to claim 4, characterized in that, Both the first rotating component and the second rotating component are ring-shaped, with the second rotating component located inside the first rotating component.

6. The testing apparatus according to claim 5, characterized in that, The lifting mechanism includes: A fourth support platform is disposed above the third support platform and connected to the detection platform; The fourth driving component is mounted on the third support platform; The lead screw passes through the third support platform and the fourth support platform, and is connected to the fourth driving component; A nut seat is sleeved on the outer circumference of the lead screw and connected to the fourth bearing platform; under the drive of the fourth driving member, the lead screw rotates, causing the nut seat to move up and down along the lead screw, thereby driving the detection platform to move vertically.

7. The testing apparatus according to claim 6, characterized in that, The lifting mechanism also includes: The drive gear is sleeved on the output shaft of the fourth drive component; The driven gear is sleeved on the lead screw; A timing belt is fitted onto the driving gear and the driven gear, so that the fourth driving component is connected to the lead screw drive.

8. The testing apparatus according to any one of claims 1-7, characterized in that, It also includes multiple third slide rails, which are respectively mounted on multiple crossbeams; each sliding mechanism includes: The fifth driving component is mounted on the crossbeam; A slider is mounted on the third slide rail and connected to the fifth drive member. Under the drive of the fifth drive member, the slider slides along the third slide rail.

9. The testing apparatus according to any one of claims 1-7, characterized in that, Both the crossbeam and the base are made of marble.

10. A chip testing device, characterized in that, include: The testing apparatus as described in any one of claims 1-9; Multiple alignment mechanisms, each of which is mounted on a first sliding mechanism of one of the crossbeams, are used to adjust the position of the chip on the detection stage; Multiple transport mechanisms, each of which is mounted on a second sliding mechanism of one of the crossbeams, are used to transport the chip to the testing table or remove the chip from the testing table; A testing machine is installed above the target location to test the chip on the testing platform.

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