A kind of photovoltaic semiconductor silicon wafer cleaning chemical weighing sensor

Abstract

The utility model discloses a photovoltaic semiconductor silicon wafer cleaning's chemical liquid weighing sensor relates to photovoltaic semiconductor silicon wafer cleaning technical field, including mounting seat and first protection subassembly, one end of mounting seat is connected with connecting rod, and one end of connecting rod is provided with elastomer, the both sides of elastomer are provided with strain gauge, and one end of elastomer is fixed with connecting seat. This photovoltaic semiconductor silicon wafer cleaning's chemical liquid weighing sensor is provided with first protection subassembly, when installing, only need to align the hole position on first limit post and first side plate and press with force, make first buckle hold first side plate, to its quick -witted connection, again with second limit post and second connecting ring butt joint and press with force, make second buckle hold second connecting ring, can quickly fix the protective sleeve, simultaneously improves the sealing performance of installation with first sealing washer to utilize protective sleeve and strain gauge shade protection to elastomer in the use process.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic semiconductor silicon wafer cleaning technology, specifically a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers. Background Technology

[0002] In semiconductor device manufacturing, silicon wafers must undergo rigorous cleaning. The purpose of cleaning is to remove surface contaminants and impurities, including organic and inorganic substances. Some of these impurities exist on the silicon wafer surface in atomic or ionic states, while others exist in the form of thin films or particles. Even trace amounts of contamination can lead to device failure. During the silicon wafer cleaning process, a cantilever beam load cell is needed to measure the mass of the cleaning solution.

[0003] To prevent the elastomer and strain gauge from being exposed to the outside and contaminated, existing cantilever beam load cells are equipped with protective housings. However, these housings are usually made using laser welding, which requires additional tools for assembly or internal inspection and maintenance, making it inconvenient. Utility Model Content

[0004] The purpose of this invention is to provide a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a weighing sensor for cleaning pharmaceutical solutions of photovoltaic semiconductor silicon wafers, comprising a mounting base and a first protective component. One end of the mounting base is connected to a connecting rod, and one end of the connecting rod is provided with an elastic body. Strain gauges are provided on both sides of the elastic body, and a connecting seat is fixed to one end of the elastic body. The first protective component is disposed at both ends of the elastic body, and the first protective component includes a first side plate, a first connecting ring, a first limiting post, a first buckle, a second side plate, a second connecting ring, a second limiting post, a second buckle, a lever, and a protective element. The first side plate and the first sealing ring are provided. One side of the first side plate abuts against the first connecting ring, and one side of the first connecting ring is fixed with the first limiting post. The outer end of the first connecting ring is connected with the first buckle. One end of the elastic body is fixed with the second side plate, and one side of the second side plate abuts against the second connecting ring. One side of the second side plate is provided with the second limiting post, and one side of the second side plate is fixed with the second buckle. The outer circumferential surface of the second connecting ring is provided with the lever, and one side of the second connecting ring is fixed with the protective sleeve. One side of both the first side plate and the second side plate is fitted with the first sealing ring.

[0006] Furthermore, the first side plate is slidably connected to the first limiting post, and the first side plate abuts against the first buckle.

[0007] Furthermore, the second limiting post is slidably connected to the second connecting ring, and the second connecting ring abuts against the second buckle.

[0008] Furthermore, the protective sleeve is fixedly connected to the first connecting ring, and the inner diameter of the first connecting ring is larger than the inner diameter of the second connecting ring.

[0009] Furthermore, the mounting base, connecting rod, and elastic body are all provided with through holes, and a wiring groove is provided on one side of the mounting base.

[0010] Furthermore, a second protective component is provided on one side of the mounting base, and the second protective component includes a mounting groove, a side cover and a limiting part. The mounting base has a mounting groove on one side, and a side cover is slidably connected inside the mounting groove. Limiting parts are provided on both sides of the side cover.

[0011] Furthermore, the second protective component also includes a rotating shaft, a stop block, and a protrusion. A rotating shaft is disposed on one side of the mounting base, and a stop block is rotatably connected to the outer side of the rotating shaft. A protrusion is provided on one side of the stop block.

[0012] Furthermore, the second protective component also includes a buckle plate and a second sealing ring. One side of the block abuts against the buckle plate, and the buckle plate is fixedly connected to the side cover. The second sealing ring is fitted into one side of the side cover.

[0013] This invention provides a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers, which has the following advantages:

[0014] 1. With the setting of the first protective component, during installation, the first limiting post is simply aligned with the hole on the first side plate and pressed firmly to make the first buckle lock the first side plate for quick connection. Then, the second limiting post is aligned with the second connecting ring and pressed firmly to make the second buckle lock the second connecting ring, which can quickly fix the protective sleeve. At the same time, the first sealing ring is used to improve the sealing performance during installation. Thus, during use, the protective sleeve protects the elastomer and strain gauge, improving the waterproof performance and service life of the liquid weighing sensor. Moreover, during disassembly, the first and second buckles can be pried open by force, making disassembly and maintenance very convenient.

[0015] 2. This utility model, through the setting of the second protective component, can use the side cover to shield and protect the wiring groove, and improve the sealing performance through the second sealing ring. During installation, simply insert the side cover into the mounting groove, at which time the limiting part can quickly limit its two sides. Subsequently, rotating the stop block to cover the end of the side cover, at the same time the protrusion will slide into the hole of the buckle plate, which can quickly lock it, improving the stability after assembly. Moreover, during disassembly, simply forcefully turning the stop block can quickly release the limiting operation of the side cover, thereby improving the convenience of use. Attached Figure Description

[0016] Figure 1This is a schematic diagram of the overall three-dimensional left view of the weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to the present invention.

[0017] Figure 2 This is a schematic diagram of the overall three-dimensional right view structure of the chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to this utility model;

[0018] Figure 3 This is a schematic diagram of the elastic body structure of a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to this utility model;

[0019] Figure 4 This is a three-dimensional structural diagram of the protective sleeve for a chemical weighing sensor used for cleaning photovoltaic semiconductor silicon wafers according to this utility model.

[0020] Figure 5 This is a three-dimensional structural diagram of the side cover of a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to this utility model.

[0021] In the diagram: 1. Mounting base; 2. Connecting rod; 3. Elastomer; 4. Strain gauge; 5. Connecting base; 6. First protective component; 601. First side plate; 602. First connecting ring; 603. First limiting post; 604. First buckle; 605. Second side plate; 606. Second connecting ring; 607. Second limiting post; 608. Second buckle; 609. Pulling block; 610. Protective sleeve; 611. First sealing ring; 7. Through hole; 8. Wiring groove; 9. Second protective component; 901. Mounting groove; 902. Side cover; 903. Limiting part; 904. Rotating shaft; 905. Stop block; 906. Protrusion; 907. Buckle plate; 908. Second sealing ring. Detailed Implementation

[0022] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0023] like Figures 1 to 4As shown, a liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers includes a mounting base 1 and a first protective component 6. One end of the mounting base 1 is connected to a connecting rod 2, and one end of the connecting rod 2 is provided with an elastic body 3. Strain gauges 4 are provided on both sides of the elastic body 3, and a connecting seat 5 is fixed to one end of the elastic body 3. The first protective component 6 is disposed at both ends of the elastic body 3, and the first protective component 6 includes a first side plate 601, a first connecting ring 602, a first limiting post 603, a first buckle 604, a second side plate 605, a second connecting ring 606, a second limiting post 607, a second buckle 608, a lever 609, a protective sleeve 610, and a first sealing ring 611. The first side plate 601... One side of the elastic body 601 abuts against a first connecting ring 602, and a first limiting post 603 is fixed to one side of the first connecting ring 602. A first buckle 604 is connected to the outer end of the first connecting ring 602. The first side plate 601 is slidably connected to the first limiting post 603, and the first side plate 601 abuts against the first buckle 604. Simply align the first limiting post 603 with the hole on the first side plate 601 and press firmly to make the first buckle 604 lock the first side plate 601, quickly connecting the first side plate 601 and the first connecting ring 602. A second side plate 605 is fixed to the outer side of one end of the elastic body 3, and a second connecting ring 606 abuts against one side of the second side plate 605. A second limiting post 607 is installed on one side of the second side plate 605, and a second buckle 608 is fixed on one side of the second side plate 605. The second limiting post 607 is slidably connected to the second connecting ring 606, and the second connecting ring 606 abuts against the second buckle 608. By aligning the second limiting post 607 with the second connecting ring 606 and pressing them together, the second buckle 608 locks the second connecting ring 606, thus fixing the second connecting ring 606 to the second side plate 605. This allows for quick installation of the protective sleeve 610. A lever 609 is provided on the outer circumferential surface of the second connecting ring 606, and the protective sleeve 610 is fixed on one side of the second connecting ring 606. The protective sleeve 610 is used to adjust the elasticity of the ring. The body 3 and strain gauge 4 are shielded for protection, which improves the waterproof performance and service life of the liquid weighing sensor. The protective sleeve 610 is made of soft rubber, which will not affect the deformation of the elastomer 3. The second connecting ring 606 can be easily pushed when removing it by using the lever 609. The first sealing ring 611 is embedded on one side of the first side plate 601 and the second side plate 605. The first sealing ring 611 is used to improve the sealing performance during installation. The protective sleeve 610 is fixedly connected to the first connecting ring 602, and the inner diameter of the first connecting ring 602 is larger than the inner diameter of the second connecting ring 606. During installation, the second side plate 605 can pass through the inside of the first connecting ring 602 and fit against the side of the second connecting ring 606.

[0024] like Figure 1 , Figure 3 and Figure 5As shown, the mounting base 1, connecting rod 2, and elastic body 3 all have through holes 7 inside, and a wiring groove 8 is provided on one side of the mounting base 1. The wires of the strain gauge 4 are passed through the through holes 7 and connected to the cable end at the wiring groove 8. A second protective component 9 is provided on one side of the mounting base 1. The second protective component 9 includes a mounting groove 901, a side cover 902, and a limiting part 903. The mounting groove 901 is provided on one side of the mounting base 1, and the side cover 902 is slidably connected inside the mounting groove 901. Limiting parts 903 are provided on both sides of the side cover 902. When the side cover 902 is inserted into the mounting groove 901, the limiting parts 903 can quickly limit its movement on both sides. The side cover 902 protects the wiring groove 8. The second protective component 9 also includes a rotating shaft 90. 4. A stop 905 and a protrusion 906: A rotating shaft 904 is mounted on one side of the mounting base 1, and a stop 905 is rotatably connected to the outer side of the rotating shaft 904. A protrusion 906 is provided on one side of the stop 905, which can rotate around the rotating shaft 904. The second protective component 9 also includes a buckle plate 907 and a second sealing ring 908. One side of the stop 905 abuts against the buckle plate 907, and the buckle plate 907 is fixedly connected to the side cover 902. The second sealing ring 908 is fitted on one side of the side cover 902. When the stop 905 covers the end of the side cover 902, the protrusion 906 will slide into the hole of the buckle plate 907 under elastic deformation, which can quickly lock it, improve the stability after assembly, and improve the sealing performance through the second sealing ring 908.

[0025] In summary, when using this photovoltaic semiconductor silicon wafer cleaning liquid weighing sensor, firstly during assembly, the strain gauge 4 wire is passed through the through hole 7 and connected to the cable end at the wiring groove 8. Secondly, the first limiting post 603 is aligned with the hole on the first side plate 601 and pressed firmly, which allows the first buckle 604 to lock the first side plate 601, quickly connecting the first side plate 601 and the first connecting ring 602. Next, the second limiting post 607 is aligned with the second connecting ring 606 and pressed firmly, which allows the second buckle 608 to lock the second connecting ring 606, fixing the second connecting ring 606 to the second side plate 605, thus quickly installing the protective sleeve 610. At the same time, the first sealing ring 611 improves the sealing performance during installation. Then, simply insert the side cover 902 into the mounting groove 901. At this time, the limiting part 903 can quickly limit the movement on both sides. Subsequently, the rotating shaft 90... Rotate the stop block 905 around the center to block the end of the side cover 902. At the same time, the protrusion 906 will slide into the hole of the buckle plate 907, which can quickly lock it, improve the stability after assembly, and improve the sealing performance through the second sealing ring 908. Then, when using it, one end of the liquid weighing sensor can be fixed to the base through the mounting seat 1, and the connecting seat 5 can be fixed to the container tray for normal use. At this time, the protective sleeve 610 is used to protect the elastomer 3 and the strain gauge 4, and the side cover 902 is used to protect the wiring groove 8, which improves the waterproof performance and service life of the liquid weighing sensor. Finally, when disassembling, you only need to forcefully move the stop block 905 to quickly release the limiting operation of the side cover 902, and then open the first buckle 604 and the second buckle 608 to remove the protective sleeve 610, which makes disassembly and maintenance very convenient, thereby improving the convenience of use.

[0026] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers, comprising a mounting base (1) and a first protective component (6), characterized in that, One end of the mounting base (1) is connected to a connecting rod (2), and one end of the connecting rod (2) is provided with an elastic body (3). Strain gauges (4) are provided on both sides of the elastic body (3), and a connecting seat (5) is fixed to one end of the elastic body (3). The first protective component (6) is provided at both ends of the elastic body (3), and the first protective component (6) includes a first side plate (601), a first connecting ring (602), a first limiting post (603), a first buckle (604), a second side plate (605), a second connecting ring (606), a second limiting post (607), a second buckle (608), a lever (609), a protective sleeve (610), and a first sealing ring (611). One side of the first side plate (601) abuts against the first connecting ring (602). The first connecting ring (602) is fixed with a first limiting post (603) on one side, and the outer end of the first connecting ring (602) is connected with a first buckle (604). The outer side of one end of the elastic body (3) is fixed with a second side plate (605), and one side of the second side plate (605) abuts against the second connecting ring (606). A second limiting post (607) is arranged on one side of the second side plate (605), and a second buckle (608) is fixed on one side of the second side plate (605). A lever (609) is provided on the outer circumferential surface of the second connecting ring (606), and a protective sleeve (610) is fixed on one side of the second connecting ring (606). A first sealing ring (611) is fitted on one side of both the first side plate (601) and the second side plate (605).

2. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 1, characterized in that, The first side plate (601) is slidably connected to the first limiting post (603), and the first side plate (601) abuts against the first buckle (604).

3. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 1, characterized in that, The second limiting post (607) is slidably connected to the second connecting ring (606), and the second connecting ring (606) abuts against the second buckle (608).

4. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 1, characterized in that, The protective sleeve (610) is fixedly connected to the first connecting ring (602), and the inner diameter of the first connecting ring (602) is larger than the inner diameter of the second connecting ring (606).

5. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 1, characterized in that, The mounting base (1), connecting rod (2) and elastic body (3) are all provided with through holes (7), and the mounting base (1) is provided with a wiring groove (8) on one side.

6. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 5, characterized in that, A second protective component (9) is provided on one side of the mounting base (1), and the second protective component (9) includes a mounting groove (901), a side cover (902) and a limiting part (903). The mounting base (1) has a mounting groove (901) on one side, and the side cover (902) is slidably connected inside the mounting groove (901), and the limiting parts (903) are provided on both sides of the side cover (902).

7. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 6, characterized in that, The second protective component (9) further includes a rotating shaft (904), a stop (905) and a protrusion (906). The rotating shaft (904) is disposed on one side of the mounting base (1), and the stop (905) is rotatably connected to the outer side of the rotating shaft (904). The protrusion (906) is provided on one side of the stop (905).

8. The chemical liquid weighing sensor for cleaning photovoltaic semiconductor silicon wafers according to claim 7, characterized in that, The second protective component (9) also includes a buckle plate (907) and a second sealing ring (908). One side of the stop block (905) abuts against the buckle plate (907), and the buckle plate (907) is fixedly connected to the side cover (902). The second sealing ring (908) is fitted into one side of the side cover (902).

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