Dual sampling case for corrosion protection

Abstract

An anticorrosion double-layer sampling box includes an outer box door and a box body on which the outer box door is arranged. An inner door is arranged in the box body. The box body defines an inner-layer sampling space and an outer-layer transition space with the inner door. The inner-layer sampling space is communicated with the outer-layer transition space based on opening and closing of the inner door. The outer-layer transition space is communicated with the outside of the box body based on opening and closing of the outer box door. The box body has a plurality of fluid pipeline mounting ports communicated with the inner-layer sampling space, an air curtain gas supply port, and a plurality of air curtain gas output ports communicated with the air curtain gas supply port. The air curtain gas output ports are communicated with the outer-layer transition space, and the air supply directions of the air curtain gas output ports are between the inner door and the outer box door.

Description

Technical Field

[0001] This utility model relates to a sampling box, and more particularly to a corrosion-resistant double-layer sampling box. Background Technology

[0002] In semiconductor manufacturing processes, chemical solutions are commonly used. To ensure the quality of these chemicals, they must be tested before use. To guarantee the accuracy of the test data and ensure a safe factory environment, sampling boxes are installed within the factory. Workers place sampling bottles inside the boxes, and the chemical solution is filled into the bottles from outside the boxes. Current sampling boxes include models such as TW M662704 and TW M657907.

[0003] As semiconductor manufacturing processes continue to improve, the sampling environment provided by current sampling boxes cannot adequately protect the chemical solutions being sampled. This is because the box body and related accessories of current sampling boxes are easily corroded by the chemical vapors generated by the chemical solutions, affecting the sampling environment and consequently the sampling results of the chemical solutions. Utility Model Content

[0004] The main purpose of this invention is to solve the problems of insufficient corrosion resistance and cleanliness requirements of the current sampling boxes for the sampling environment.

[0005] To achieve the above objectives, this utility model provides a corrosion-resistant double-layer sampling box, comprising an outer door and a box body on which the outer door is disposed. The box body has an inner door, which defines an inner sampling space and an outer transition space. The inner sampling space communicates with the outer transition space based on the opening and closing of the inner door, and the outer transition space communicates with the outside of the box body based on the opening and closing of the outer door. The box body has multiple fluid pipeline installation ports communicating with the inner sampling space, an air curtain gas supply port, and multiple air curtain gas output ports communicating with the air curtain gas supply port. These air curtain gas output ports communicate with the outer transition space, and the gas delivery direction of these air curtain gas output ports is located between the inner door and the outer door.

[0006] In one embodiment, the housing has a gas channel connecting the air curtain gas supply port and the air curtain gas output ports.

[0007] In one embodiment, the projected positions of the air curtain gas outlets are located between the inner door and the outer box door.

[0008] In one embodiment, the housing has a gas outlet communicating with the outer transition space.

[0009] In one embodiment, the housing has a waste liquid outlet communicating with the inner sampling space.

[0010] In one embodiment, the housing has a drain tray located in the inner sampling space, the drain tray having multiple drain holes, and the projection range of the drain tray overlapping the waste liquid discharge outlet.

[0011] In one embodiment, the housing has a guide slope located at the bottom of the inner sampling space, and the waste liquid outlet is located on the side of the guide slope with a lower horizontal height.

[0012] In one embodiment, the housing has a flow guide plate disposed within the inner sampling space.

[0013] In one embodiment, the double-layer sampling box has a door sensor disposed on the surface of the box and sensing the opening and closing of the outer door.

[0014] In one embodiment, the double-layer sampling box has a plurality of plastic hinges disposed on the box body, each of the plastic hinges connecting one of the outer box door and the inner door.

[0015] Compared with conventional technology, the present invention has the following characteristics through the aforementioned implementation of the technology: The housing of the present invention is a double-layer design, with an inner sampling space and an outer transition space separated within the housing. The outer transition space serves as a transition area between the inner sampling space and the external environment of the double-layer sampling housing, reducing contamination of the inner sampling space by the external environment. Furthermore, the housing is equipped with air curtain gas outlets that connect to the outer transition space, and the gas delivery direction is positioned between the outer door and the inner door. This reduces the entry of external dirt into the housing when the outer door is opened, thereby improving the cleanliness of the housing interior. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model.

[0017] Figure 2 for Figure 1 A schematic diagram of the cross section of line segment AA.

[0018] Figure 3 for Figure 1 A schematic diagram of the cross section of line segment BB.

[0019] Figure 4 This is a schematic diagram illustrating an embodiment of the present utility model.

[0020] In the attached figures, the following labels are used:

[0021] 20: Double-layer sampling box

[0022] 21: Outer box door

[0023] 22: Box

[0024] 221: Inner Gate

[0025] 222: Inner sampling space

[0026] 223: Outer transition space

[0027] 224: Fluid piping installation port

[0028] 225: Air curtain gas supply port

[0029] 226: Air curtain gas outlet

[0030] 227: Gas Channel

[0031] 228: Gas exhaust outlet

[0032] 229: Waste liquid discharge outlet

[0033] 230: Guide slope

[0034] 231: Draining tray

[0035] 232: Drain hole

[0036] 233: Deflector

[0037] 234: Air curtain

[0038] 25: Plastic hinges

[0039] 26: Cabinet door sensor

[0040] 50, 70: Clean gas pipeline

[0041] 60: Chemical solution pipeline

[0042] 80: Sampling bottle Detailed Implementation

[0043] The detailed description and technical content of this utility model are explained below with reference to the accompanying drawings:

[0044] Please see Figures 1 to 4 This utility model provides a corrosion-resistant double-layer sampling box 20, which provides a sampling bottle 80 for sampling operations. The double-layer sampling box 20 includes an outer door 21 and a box body 22. The outer door 21 is located on the box body 22 and is exposed on the surface of the double-layer sampling box 20. An inner door 221 is provided inside the box body 22, which is opposite to the outer door 21 but is not exposed on the surface of the double-layer sampling box 20. From the user's perspective, when the user opens the double-layer sampling box 20, the outer door 21 is the first door opened by the user, and the inner door 221 is only exposed after the outer door 21 is opened, and the inner door 221 is the second door opened by the user.

[0045] The housing 22 defines an inner sampling space 222 and an outer transition space 223 by the inner door 221. The inner sampling space 222 provides the sampling bottle 80 for sampling operations. The inner sampling space 222 is connected to the outer transition space 223 based on the opening and closing of the inner door 221. The outer transition space 223 is connected to the outside of the housing 22 based on the opening and closing of the outer door 21, and serves as a transition area between the outside of the housing 22 and the inner sampling space 222.

[0046] The housing 22 has multiple fluid line installation ports 224, a curtain gas supply port 225, and multiple curtain gas output ports 226. These fluid line installation ports 224 connect to the inner sampling space 222. One fluid line installation port 224 provides a clean gas line 50 for installation, allowing clean gas to flow into the inner sampling space 222 and providing positive pressure protection. In one embodiment, the clean gas is an inert gas, such as nitrogen. Another fluid line installation port 224 provides a chemical solution line 60 for installation, allowing a chemical solution to be injected into the sampling bottle 80 placed within the inner sampling space 222. The curtain gas supply port 225 receives another clean gas line 70 for supplying clean gas to that line. In this embodiment, the clean gas supplied by the clean gas line 70 installed at the curtain gas supply port 225 is an inert gas. In another embodiment, the clean gas supplied by the clean gas pipeline 70 installed at the air curtain gas supply port 225 is the same as the clean gas supplied by the clean gas pipeline 50 installed at one of the fluid pipeline installation ports 224; both are nitrogen. Furthermore, the air curtain gas outlets 226 connect the air curtain gas supply port 225 to the outer transition space 223, and the gas delivery direction of the air curtain gas outlets 226 is located between the inner door 221 and the outer casing door 21. The air curtain gas outlets 226 receive the clean gas from the air curtain gas supply port 225, forming an air curtain 234 between the inner door 221 and the outer casing door 21. The outer transition space 223 is then protected by positive pressure under the action of the air curtain 234.

[0047] The implementation of the double-layer sampling box 20 is now explained; please refer to [link / reference]. Figures 1 to 4Assume that initially, neither the outer door 21 nor the inner door 221 of the double-layer sampling box 20 is open. When the user intends to perform a sampling operation, both the outer transition space 223 and the inner sampling space 222 receive the clean gas. At this time, the outer transition space 223 forms an air curtain between the inner door 221 and the outer door 21. Subsequently, the outer door 21 and the inner door 221 are opened sequentially, allowing the sampling bottle 80 to pass through the air curtain 234 and be placed into the inner sampling space 222 through the outer transition space 223. Then, after closing the inner door 221 and the outer door 21, the chemical solution pipeline 60 injects the chemical solution into the sampling bottle 80 to perform chemical solution sampling. After sampling is completed, the outer door 21 and the inner door 221 are opened sequentially again, allowing the sampling bottle 80 to be removed.

[0048] In summary, this invention achieves a double-layer structure by configuring the outer transition space 223 and the inner sampling space 222 within the housing 22. The outer transition space 223 serves as a transition area between the inner sampling space 222 and the external environment of the double-layer sampling box 20, effectively reducing the impact of the external environment on the inner sampling space 222 and improving its cleanliness. Simultaneously, the outer transition space 223 also reduces the contamination of the external environment of the double-layer sampling box 20 by chemical vapors generated during sampling within the inner sampling space 222. On the other hand, in this invention, the outer transition space 223 forms an air curtain 234 between the inner door 221 and the outer box door 21, which can block the pollution of the external environment of the double-layer sampling box 20. Both the outer transition space 223 and the inner sampling space 222 are protected by the clean gas, which helps to improve the cleanliness of the internal environment of the box 22, reduce the pollution of the chemical liquid in the sampling bottle 80, and thus improve the detection accuracy of the chemical liquid in the sampling bottle 80.

[0049] Please refer to the following: Figures 1 to 4 In one embodiment, the housing 22 further includes a gas channel 227 that connects the air curtain gas supply port 225 to the air curtain gas output ports 226. In one embodiment, the air curtain gas output ports 226 are arranged at intervals along the gas channel 227. Further, the arrangement direction of the air curtain gas output ports 226 is parallel to the extending direction of the gas channel 227. In another embodiment, the air curtain gas output ports 226 are located above the outer transition space 223, and the projected positions of the air curtain gas output ports 226 are located between the inner door 221 and the outer housing door 21.

[0050] Please refer to the following: Figures 2 to 4The double-layer sampling box 20 is equipped with a waste discharge mechanism, which includes the discharge of chemical vapors and chemical waste liquids. In one embodiment, the box body 22 has a gas outlet 228, which connects to the outer transition space 223 and discharges the gas in the outer transition space 223. In another embodiment, the box body 22 has a waste liquid outlet 229, which connects to the inner sampling space 222 and is located at the bottom of the box body 22. The chemical waste liquid in the inner sampling space 222 flows towards the bottom of the box body 22 and into the waste liquid outlet 229. In another embodiment, the housing 22 has a flow guiding slope 230, which is located at the bottom of the inner sampling space 222. The waste liquid outlet 229 is located on the side with a lower horizontal height of the flow guiding slope 230. The flow guiding slope 230 guides the chemical waste liquid at the bottom of the inner sampling space 222 to concentrate and cause the chemical waste liquid to flow to the waste liquid outlet 229.

[0051] Please refer to the following: Figures 2 to 4 In one embodiment, the housing 22 has a drain tray 231 disposed within the inner sampling space 222 and has multiple drain holes 232. The drain tray 231 provides a place for the sampling bottle 80 and allows chemical waste liquid to be discharged through the drain holes 232. Furthermore, the projected area of ​​the drain tray 231 overlaps with the waste liquid outlet 229, allowing the chemical waste liquid discharged from the drain tray 231 through the drain holes 232 to flow to the waste liquid outlet 229.

[0052] In another embodiment, the housing 22 has a guide plate 233, which is disposed in the inner sampling space 222 and located on the inner door 221. The guide plate 233 is inclined toward the waste liquid outlet 229, and the guide plate 233 guides the chemical liquid splashed in the inner sampling space 222 to flow to the waste liquid outlet 229.

[0053] On the other hand, please see Figures 1 to 4 In one embodiment, the double-layer sampling box 20 of this invention has a plurality of plastic hinges 25 disposed on the box body 22. Each plastic hinge 25 connects one of the outer door 21 and the inner door 221 to provide pivoting between the outer door 21 and the inner door 221. Each plastic hinge 25 is not made of metal, which helps to improve the corrosion resistance of each plastic hinge 25 and extend its service life in environments filled with acidic or alkaline substances. In another embodiment, the double-layer sampling box 20 of this invention has a door sensor 26 disposed on the box body 22 and used to sense the opening and closing of the outer door 21. In this embodiment, the door sensor 26 is independent of the outer transition space 223 and the inner sampling space 222, reducing the chance of contact with chemical vapors, thereby extending its service life.

Claims

1. A corrosion-resistant double-layer sampling box, characterized in that, Include: One outer box door; and A housing with an outer door, an inner door inside the housing, defining an inner sampling space and an outer transition space. The inner sampling space is connected to the outer transition space based on the opening and closing of the inner door, and the outer transition space is connected to the outside of the housing based on the opening and closing of the outer door. The housing has multiple fluid pipeline installation ports connected to the inner sampling space, an air curtain gas supply port, and multiple air curtain gas output ports connected to the air curtain gas supply port. The air curtain gas output ports are connected to the outer transition space, and the gas delivery direction of the air curtain gas output ports is located between the inner door and the outer door.

2. The corrosion-resistant double-layer sampling box as described in claim 1, characterized in that, The enclosure has a gas channel connecting the gas supply port of the air curtain with the gas output port of the air curtain.

3. The corrosion-resistant double-layer sampling box as described in claim 2, characterized in that, The projected positions of these air curtain gas outlets are located between the inner door and the outer box door.

4. The corrosion-resistant double-layer sampling box as described in claim 3, characterized in that, The enclosure has a gas outlet that connects to the outer transition space.

5. The corrosion-resistant double-layer sampling box as described in any one of claims 1 to 4, characterized in that, The enclosure has a waste liquid outlet that connects to the inner sampling space.

6. The corrosion-resistant double-layer sampling box as described in claim 5, characterized in that, The enclosure has a drain tray located in the inner sampling space. The drain tray has multiple drain holes, and the projected area of ​​the drain tray overlaps with the waste liquid discharge outlet.

7. The corrosion-resistant double-layer sampling box as described in claim 6, characterized in that, The housing has a flow guide slope at the bottom of the inner sampling space, and the waste liquid outlet is located on the side of the flow guide slope with a lower horizontal height.

8. The corrosion-resistant double-layer sampling box as described in claim 7, characterized in that, The enclosure has a baffle plate located within the inner sampling space and on the inner door.

9. The corrosion-resistant double-layer sampling box as described in any one of claims 1 to 4, characterized in that, The double-layer sampling box has a door sensor located on the surface of the box and senses the opening and closing of the outer door.

10. The corrosion-resistant double-layer sampling box as described in claim 9, characterized in that, The double-layer sampling box has multiple plastic hinges on the box body, each of which connects to one of the outer door and the inner door.

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