X-ray examination apparatus

Abstract

An X-ray inspection apparatus includes a support portion that supports an object in a manner so as to be located on a reference line extending in a horizontal direction, an X-ray generating portion that irradiates the object with X-rays, an X-ray detecting portion that detects the X-rays that have passed through the object, and a drive portion that moves the X-ray generating portion along a circumference with the reference line as a center line. The X-ray generating portion has an X-ray tube, a power supply portion that is electrically connected to a portion of the X-ray tube, and a housing portion that houses the portion of the X-ray tube and the power supply portion in a manner so as to be located in insulating oil. The drive portion moves the X-ray generating portion along an arc that is a portion of the circumference that excludes a range that moves a first angle to one side from a reference point on the circumference and a range that moves a second angle to the other side from the reference point on the circumference. The reference point is located on an upper side in a vertical direction with respect to the reference line.

Description

Technical Field

[0001] This disclosure relates to X-ray inspection apparatus. Background Technology

[0002] An X-ray examination apparatus is known, comprising a support for supporting an object, an X-ray generating unit for irradiating the object with X-rays, an X-ray detecting unit for detecting X-rays transmitted through the object, and a gantry for rotating the X-ray generating unit and the X-ray detecting unit while the object is sandwiched between them and facing each other (see, for example, Japanese Patent Application Laid-Open No. 2023-107307). According to this X-ray examination apparatus, CT (Computed Tomography) images of the object can be acquired. Utility Model Content

[0003] In X-ray inspection devices like those described above, there is a concern that if a discharge occurs in the X-ray generator during the imaging of the object, the imaging of the object will be stopped.

[0004] Therefore, the object of this disclosure is to provide an X-ray inspection apparatus that can suppress discharge at the X-ray generator during the imaging of an object.

[0005] One aspect of the X-ray inspection apparatus disclosed herein is [1] "An X-ray inspection apparatus comprising: a support portion that supports an object on a reference line extending in a horizontal direction; an X-ray generating portion that irradiates the object with X-rays; an X-ray detection portion that detects the X-rays passing through the object; and a drive portion that moves the X-ray generating portion along a circumference centered on the reference line, wherein the X-ray generating portion has an X-ray tube, a power supply portion electrically connected to a portion of the X-ray tube on the opposite side of the reference line relative to the X-ray tube, and a receiving portion that houses the portion of the X-ray tube and the power supply portion in an insulating oil, the drive portion moving the X-ray generating portion along an arc, the arc being a portion of the circumference excluding a range of movement of a first angle from a reference point on the circumference to one side and a range of movement of a second angle from a reference point on the circumference to the other side, the reference point being located on the upper side in the vertical direction relative to the reference line."

[0006] In the X-ray inspection apparatus, the X-ray generating unit is moved along an arc, which is a portion of a circumference centered on a horizontally extending reference line, excluding the range of movement by a first angle to one side and a second angle to the other side from a reference point on the circumference. Here, the reference point is located vertically above the reference line. That is, the reference point is a point located on the upper half of the semicircle of the circumference centered on the reference line. Moving the X-ray generating unit along such an arc is based on the understanding that when the X-ray generating unit is moved along a circumference centered on a horizontally extending reference line, if the X-ray generating unit irradiating the X-rays is located at a point on the upper half of the semicircle, discharge is likely to occur in the X-ray generating unit. According to the X-ray inspection apparatus, by setting this point as the reference point and moving the X-ray generating unit along an arc that excludes this point, discharge in the X-ray generating unit can be suppressed during the imaging of the object.

[0007] One aspect of the X-ray inspection apparatus disclosed herein may also be, [2] "the X-ray inspection apparatus described in [1], wherein the first angle is an angle of 20 degrees or more and 135 degrees or less, and the second angle is an angle of 20 degrees or more and 135 degrees or less." According to this X-ray inspection apparatus, the X-ray generating part moves along an arc within an angle range of 90 degrees or more and 320 degrees or less. Therefore, by performing imaging of the object while moving the X-ray generating part along this arc, it is possible to suppress discharge in the X-ray generating part during the imaging of the object and to acquire CT images of the object with high precision.

[0008] One aspect of the X-ray inspection apparatus disclosed herein may also be, [3] "the X-ray inspection apparatus described in [2], wherein the first angle is an angle of 60 degrees or more and 90 degrees or less, and the second angle is an angle of 60 degrees or more and 90 degrees or less." According to this X-ray inspection apparatus, the X-ray generating unit moves along an arc within an angle range of 180 degrees or more and 240 degrees or less. Therefore, by performing imaging of the object while moving the X-ray generating unit along this arc, it is possible to suppress discharge in the X-ray generating unit during the imaging of the object and to acquire CT images of the object with higher precision.

[0009] One aspect of the X-ray inspection apparatus disclosed herein may also be, [4] "the X-ray inspection apparatus described in any of [1] to [3], wherein the reference point is located directly above the reference line. According to this X-ray inspection apparatus, for example, even if a bubble is generated in the housing of the X-ray generating unit, it is difficult for the bubble to reach the power supply unit during the imaging of the object. This is because if the X-ray generating unit is arranged at the reference point located directly above the reference line, the power supply unit is arranged directly above a part of the X-ray tube in the housing, and the bubble generated in the housing easily moves upward (i.e., toward the power supply unit) in the insulating oil by buoyancy, while the X-ray generating unit moves along this arc that excludes the reference point. Therefore, it is possible to suppress the discharge that occurs in the X-ray generating unit during the imaging of the object due to the bubble generated in the housing of the X-ray generating unit reaching the power supply unit."

[0010] One aspect of the X-ray examination apparatus disclosed herein may also be, [5] "an X-ray examination apparatus according to any one of [1] to [4], wherein, in a state where the X-ray generating unit and the X-ray detecting unit are facing each other with the reference line between them, the driving unit moves the X-ray generating unit and the X-ray detecting unit along the circumference." According to this X-ray examination apparatus, CT images of the object can be easily and accurately acquired based on the detection signal output from the X-ray detecting unit.

[0011] One aspect of the X-ray inspection apparatus disclosed herein may also be, [6] "the X-ray inspection apparatus described in any one of [1] to [5], wherein the housing includes a cylindrical member and a power supply unit, the power supply unit being disposed inside the cylindrical member, and the power supply unit being constructed by embedding a high-voltage generating unit within an insulating block." According to this X-ray inspection apparatus, there is no need for high-voltage cables or the like for supplying high voltage from the outside; therefore, movement of the X-ray generating unit via the drive unit can be easily performed. Attached Figure Description

[0012] Figure 1 This is a structural diagram of an example X-ray inspection device.

[0013] Figure 2 yes Figure 1 A partial cross-sectional view of the X-ray generating section shown.

[0014] Figure 3 This is a structural diagram of an X-ray inspection device in operation.

[0015] Figure 4 Is Figure 1 The diagram shows the structure of an X-ray inspection device in a state where the X-ray generator is prone to discharge.

[0016] Figure 5 yes Figure 1 A partial cross-sectional view of the X-ray generating section shown.

[0017] Figure 6 This is a structural diagram of a modified X-ray inspection device.

[0018] Figure 7 Is Figure 6 The diagram shows the structure of an X-ray inspection device in a state where the X-ray generator is prone to discharge. Detailed Implementation

[0019] Hereinafter, an example of this disclosure will be described in detail with reference to the accompanying drawings. Furthermore, the same or equivalent parts are labeled with the same reference numerals in the various drawings, and redundant descriptions are omitted.

[0020] like Figure 1 As shown, the X-ray inspection apparatus 1 includes a support unit 2, an X-ray generating unit 3, an X-ray detection unit 4, a drive unit 5, and a control unit 6. The support unit 2 supports the object S on a reference line RL extending in the horizontal direction. That is, the object S supported by the support unit 2 is located on the reference line RL. As an example, the support unit 2 may be a support platform for placing the object S, a holding mechanism for holding the object S, etc. As an example, the object S may be a battery, etc.

[0021] The X-ray generating unit 3 irradiates the object S supported by the supporting unit 2 with X-rays. For example Figure 2 As shown, the X-ray generating unit 3 includes an X-ray tube 7, a power supply unit 8, and a cylindrical member 9. The cylindrical member 9 has a first opening 9a and a second opening 9b. The first opening 9a and the second opening 9b face each other on the tube axis TA. The X-ray tube 7 is mounted at the end of the cylindrical member 9 on the side of the first opening 9a. The power supply unit 8 is mounted at the end of the cylindrical member 9 on the side of the second opening 9b. Furthermore, in Figure 2 The front end of the cylindrical member 9 and the socket 84, which will be described later, is shown in cross section.

[0022] The power supply unit 8 is constructed by embedding a high-voltage generator 82, a high-voltage line 83, and the base end of a socket 84 within an insulating block 81. The insulating block 81 is formed, for example, of an insulating resin such as epoxy resin. A conductive coating is applied to the outer surface of the insulating block 81 to set its potential to ground potential. The base end of the socket 84 is electrically connected to the high-voltage generator 82 via the high-voltage line 83. The front end of the socket 84 is disposed inside the cylindrical member 9 via a second opening 9b and is located on the tube shaft TA.

[0023] In the X-ray tube 7, a vacuum frame is formed by a valve 71, a head 72, and a side tube 73. The valve 71 is disposed inside the cylindrical member 9 via a first opening 9a, and the head 72 is disposed on the outer side of the cylindrical member 9 opposite to the valve 71 on the power supply section 8. In this state, the flange 72a provided on the head 72 is mounted on the end of the cylindrical member 9 on the side of the first opening 9a. The side tube 73 is connected to the side wall of the head 72 in such a way that its centerline intersects (e.g., orthogonally) the tube axis TA. A window member 74 is provided on the top wall of the head 72. The window member 74 is located on the tube axis TA. As an example, the valve 71 is formed of an insulating material such as glass, and the head 72 and the side tube 73 are formed of a conductive material such as metal.

[0024] In the X-ray tube 7, an anode member 75 extends along the tube axis TA inside the valve 71 and the head 72. The anode member 75 has a front end face 75a on the side of the window member 74 and a base end face 75b on the side opposite to the window member 74. The anode member 75 hermetically penetrates the bottom wall of the valve 71. The base end face 75b of the anode member 75 is electrically and physically connected to the front end of the socket 84 of the power supply unit 8 on the outside of the valve 71. A target 76 is provided on the front end face 75a of the anode member 75. The target 76 is formed into a film, for example, from tungsten. The front end face 75a of the anode member 75 is inclined in a manner facing the electron gun 77 and the window member 74. The electron gun 77 is housed within the side tube 73.

[0025] In the X-ray generating unit 3, a power supply unit 11 is formed using a socket 84. The power supply unit 11 is disposed inside the cylindrical member 9 and is electrically connected to a portion of the X-ray tube 7 (in this example, the base end 75b of the anode member 75). In the X-ray generating unit 3, a storage unit 12 is formed using the cylindrical member 9 and the power supply unit 8. That is, the storage unit 12 includes the cylindrical member 9 and the power supply unit 8. The storage unit 12 houses a portion of the X-ray tube 7 (in this example, the valve 71 and the base end 75b of the anode member 75) and the socket 84 in a manner located within the insulating oil 10.

[0026] In the X-ray generating unit 3 configured as described above, for example, the head 72 and side tube 73 are set to ground potential, and a positive voltage is applied to the anode member 75 and the target 76 by the power supply unit 8. In this state, when the electron beam emitted from the electron gun 77 is focused on the target 76, X-rays are emitted from the irradiation area of ​​the electron beam on the target 76. With the irradiation area as the focal point, the X-rays pass through the window member 74 and are emitted to the outside. In this way, the X-ray tube 7 is configured as a reflective X-ray tube.

[0027] like Figure 1As shown, the X-ray detection unit 4 detects X-rays emitted from the X-ray generator 3 and passing through the object S. As an example, the X-ray detection unit 4 is an indirect conversion type X-ray detector, having a scintillator and a light-receiving element array. The scintillator emits light according to the incident X-rays. The light-receiving element array is positioned opposite the scintillator on the reference line RL, detecting the light emitted in the scintillator. Alternatively, the X-ray detection unit 4 can also be a direct conversion type X-ray detector.

[0028] With the X-ray generating unit 3 and the X-ray detecting unit 4 facing each other and sandwiching the reference line RL, the drive unit 5 moves the X-ray generating unit 3 and the X-ray detecting unit 4 along a circle C centered on the reference line RL. The drive unit 5 supports the X-ray generating unit 3 such that the power supply unit 11 (in this example, socket 84) is located on the opposite side of the reference line RL relative to the X-ray tube 7, and the tube axis TA intersects (e.g., orthogonally) the reference line RL. In this example, the drive unit 5 is a gantry that mounts the X-ray generating unit 3 and the X-ray detecting unit 4 facing each other and sandwiching the reference line RL. In this example, the circle C is located on a plane perpendicular to the reference line RL. However, the circle C can also be located on a plane intersecting the reference line RL, in addition to being located on a plane perpendicular to the reference line RL.

[0029] As an example, the drive unit 5 of the gantry crane includes a rotating frame, a support frame, and a drive source. The rotating frame is an annular frame extending along a circumference C. The support frame supports the rotating frame so that it can rotate about a reference line RL as its centerline. The drive source is, for example, an electric motor, which causes the rotating frame to rotate relative to the support frame. In this case, the rotating frame, on which the X-ray generator 3 and the X-ray detector 4 are mounted, rotates relative to the support frame by the power of the drive source, thereby causing the X-ray generator 3 and the X-ray detector 4 to move integrally along the circumference C (i.e., while maintaining their positional relationship).

[0030] The drive unit 5 causes the X-ray generating unit 3 to move along a portion of the circumference C, i.e., the arc A (in... Figure 1In this example, the portion inside the two arrows in the circle C (represented by a single-dotted line) moves. Arc A is the portion of circle C excluding the range of movement by a first angle θ1 from the reference point RP on circle C and the range of movement by a second angle θ2 from the reference point RP on circle C to the other side. In this example, the reference point RP is located directly above the reference line RL. Preferably, the first angle θ1 is 20 degrees to 135 degrees, and the second angle θ2 is 20 degrees to 135 degrees. More preferably, the first angle θ1 is 60 degrees to 90 degrees, and the second angle θ2 is 60 degrees to 90 degrees. In this example, the first angle θ1 and the second angle θ2 are equal. However, the first angle θ1 and the second angle θ2 may also be different.

[0031] The control unit 6 controls the X-ray generating unit 3, the X-ray detection unit 4, and the drive unit 5. The control unit 6 controls the drive unit 5 to move the X-ray generating unit 3 along arc A. As an example, the control unit 6 controls the drive unit 5 to move the X-ray generating unit 3 from... Figure 3 The state shown in (a) moves counterclockwise along arc A to Figure 3 The state shown in (b). Alternatively, the control unit 6 controls the drive unit 5 to cause the X-ray generator 3 to... Figure 3 The state shown in (b) moves clockwise along arc A to... Figure 3 The state is shown in (a). At this time, the control unit 6 controls the X-ray generating unit 3 to irradiate the object S with X-rays, and controls the X-ray detection unit 4 to detect the X-rays that pass through the object S. Then, the control unit 6 generates a CT image of the object S based on the detection signal obtained from the X-ray detection unit 4.

[0032] As explained above, in the X-ray inspection apparatus 1, the X-ray generating unit 3 is moved along an arc A, which is the portion of a circle C centered on a horizontally extending reference line RL, excluding the range where the reference point RP on the circle C moves to one side by a first angle θ1 and to the other side by a second angle θ2. Here, the reference point RP is located on the upper side in the vertical direction relative to the reference line RL. That is, the reference point RP is a point located on the upper half of the semicircle of the circle C centered on the reference line RL. Moving the X-ray generating unit 3 along the arc A described above is based on the understanding that when the X-ray generating unit 3 is moved along the circle C centered on the horizontally extending reference line RL, if the X-ray generating unit 3 irradiating X-rays is located at a point on the upper half of the semicircle of the circle C, discharge is more likely to occur in the X-ray generating unit 3. According to the X-ray inspection apparatus 1, by setting a certain point (in this example, the point directly above the reference line RL) as the reference point RP, and moving the X-ray generator 3 along the arc A that excludes the certain point, it is possible to suppress the discharge in the X-ray generator 3 during the imaging process of the object S.

[0033] In the X-ray inspection apparatus 1, the reference point RP is located directly above the reference line RL. In this case, as... Figure 4 As shown, when the X-ray generating unit 3 is located at the reference point RP, the power supply unit 11 is located directly above the X-ray tube 7. That is, within the housing 12, the power supply unit 11 is positioned directly above a portion of the X-ray tube 7 in the vertical direction. Therefore, as... Figure 5 As shown in (a), for example, when a bubble V is generated in the insulating oil IO within the housing 12 of the X-ray generating section 3, the bubble V moves upward in the insulating oil IO by buoyancy and reaches the power supply section 11. Due to this, a discharge may occur within the housing 12 of the X-ray generating section 3. In contrast, in the X-ray inspection apparatus 1, the X-ray generating section 3 moves along an arc A that excludes the reference point RP. That is, even when the X-ray generating section 3 is closest to the reference point RP, the tube axis TA is tilted relative to the vertical direction at an angle of at least a first angle θ1 or at least a second angle θ2. Therefore, as... Figure 5 As shown in (b), for example, even if a bubble V is generated in the insulating oil IO within the housing 12 of the X-ray generating section 3, the bubble V moves upwards in the insulating oil IO due to buoyancy, making it difficult for the bubble V to reach the power supply section 11 during the imaging of the object S. Therefore, according to the X-ray inspection apparatus 1, it is possible to suppress the discharge that occurs in the X-ray generating section 3 during the imaging of the object S caused by the bubble V generated in the housing 12 of the X-ray generating section 3 reaching the power supply section 11. Furthermore, Figure 5 The state shown in (a) is equivalent to Figure 4The state shown, Figure 5 The state shown in (b) is equivalent to Figure 3 The state shown in (b).

[0034] In the X-ray inspection apparatus 1, it is preferable that the first angle θ1 is an angle of 20 degrees to 135 degrees and the second angle θ2 is an angle of 20 degrees to 135 degrees. Thus, the X-ray generating unit 3 moves along an arc A within an angle range of 90 degrees to 320 degrees. Therefore, by performing imaging of the object S while moving the X-ray generating unit 3 along this arc A, it is possible to suppress discharge in the X-ray generating unit 3 during the imaging of the object S and to acquire CT images of the object S with high precision.

[0035] In the X-ray inspection apparatus 1, it is more preferable that the first angle θ1 is an angle of 60 degrees or more and 90 degrees or less, and the second angle θ2 is an angle of 60 degrees or more and 90 degrees or less. Thus, the X-ray generating unit 3 moves along an arc A within an angle range of 180 degrees or more and 240 degrees. Therefore, by performing imaging of the object S while moving the X-ray generating unit 3 along this arc A, it is possible to suppress discharge in the X-ray generating unit 3 during the imaging of the object S, and to acquire CT images of the object S with higher precision.

[0036] In the X-ray inspection apparatus 1, with the X-ray generating unit 3 and the X-ray detecting unit 4 facing each other across a reference line RL, the driving unit 5 moves the X-ray generating unit 3 and the X-ray detecting unit 4 along a circle C. As a result, a CT image of the object S can be easily and accurately acquired based on the detection signal output from the X-ray detecting unit 4.

[0037] In the X-ray inspection apparatus 1, the housing 12 consists of a cylindrical member 9 and a power supply unit 8, which is constructed by embedding a high-voltage generator 82 within an insulating block 81. Therefore, high-voltage cables or the like are not required for supplying high voltage from the outside, and the movement of the X-ray generator 3 via the drive unit 5 can be easily achieved.

[0038] This disclosure is not limited to the example described above. For example, the reference point RP is not limited to a point located directly above the reference line RL. As described above, when the X-ray generating unit 3 is moved along a circle C centered on the reference line RL extending in the horizontal direction, if the X-ray generating unit 3 irradiating X-rays is located at a point on the upper half of the semicircle of the circle C, discharge is likely to occur in the X-ray generating unit 3. Therefore, by setting this point as the reference point and moving the X-ray generating unit 3 along an arc A that excludes this point, discharge in the X-ray generating unit 3 can be suppressed during the imaging of the object S. Therefore, the reference point RP only needs to be a point located on the upper side in the vertical direction relative to the reference line RL. That is, the reference point RP only needs to be a point located on the upper half of the semicircle of the circle C centered on the reference line RL.

[0039] As an example, such as Figure 6 As shown, although the power supply unit 11 is located on the opposite side of the reference line RL relative to the X-ray tube 7, the X-ray generating unit 3 is supported by the drive unit 5 in such a way that the tube axis TA does not intersect the reference line RL. Figure 7 As shown, when the X-ray generator 3 is located at a point directly above the reference line RL, the power supply unit 11 is located directly above the X-ray tube 7, making it easy for discharge to occur in the X-ray generator 3. Therefore, in this case, by setting the point directly above the X-ray tube 7 where the power supply unit 11 is located as the reference point RP, and moving the X-ray generator 3 along the arc A that excludes this point, it is possible to suppress discharge in the X-ray generator 3 during the imaging of the object S.

[0040] Furthermore, the X-ray tube 7 is not limited to being a reflection-type X-ray tube; it can also be a transmission-type X-ray tube. As an example, in a transmission-type X-ray tube 7, an electron gun 77 is disposed inside the valve 71, and a target 76 is disposed on the inner surface of the window member 74. In this case, the target 76 is set to ground potential, and a negative voltage is applied to the electron gun 77 using the power supply unit 8. In this state, when the electron beam emitted from the electron gun 77 is focused onto the target 76, X-rays are emitted from the irradiation area of ​​the electron beam on the target 76, and with this irradiation area as the focal point, the X-rays pass through the window member 74 and exit to the outside.

[0041] Furthermore, the drive unit 5 only needs to move the X-ray generating unit 3 at least along the circumference C. In this case, the X-ray inspection apparatus 1 may also include another drive unit, which moves the X-ray detecting unit 4 along the circumference C when the X-ray generating unit 3 and the X-ray detecting unit 4 are facing each other with the reference line RL between them. Additionally, the X-ray generating unit 3 may not have a power supply unit 8. In this case, high voltage may be supplied to the X-ray tube 7 from the outside via a high-voltage cable.

[0042] According to this disclosure, an X-ray inspection apparatus can be provided that can suppress discharge at the X-ray generator during the imaging of an object.

Claims

1. An X-ray inspection device, wherein, have: A support portion that supports the object in a manner located on a reference line extending in a horizontal direction; An X-ray generator irradiates the object with X-rays. An X-ray detection unit that detects the X-rays that pass through the object; as well as The drive unit moves the X-ray generator along a circumference centered on the reference line. The X-ray generating unit includes an X-ray tube, a power supply unit electrically connected to a portion of the X-ray tube on the opposite side of the reference line relative to the X-ray tube, and a housing unit that houses the portion of the X-ray tube and the power supply unit in an insulating oil manner. The driving unit causes the X-ray generating unit to move along an arc, the arc being the portion of the circumference excluding the range of movement by a first angle from a reference point on the circumference to one side and the range of movement by a second angle from a reference point on the circumference to the other side. The reference point is located on the upper side of the vertical direction relative to the reference line.

2. The X-ray inspection apparatus according to claim 1, wherein, The first angle is an angle between 20 degrees and 135 degrees. The second angle is an angle between 20 degrees and 135 degrees.

3. The X-ray inspection apparatus according to claim 2, wherein, The first angle is an angle between 60 degrees and 90 degrees. The second angle is an angle between 60 degrees and 90 degrees.

4. The X-ray inspection apparatus according to any one of claims 1 to 3, wherein, The reference point is located directly above the reference line.

5. The X-ray inspection apparatus according to any one of claims 1 to 3, wherein, With the X-ray generating unit and the X-ray detecting unit facing each other and sandwiching the reference line, the driving unit causes the X-ray generating unit and the X-ray detecting unit to move along the circumference.

6. The X-ray inspection apparatus according to any one of claims 1 to 3, wherein, The storage section includes a cylindrical component and a power supply section. The power supply unit is located inside the cylindrical component. The power supply unit is constructed by embedding a high-voltage generator inside an insulating block.

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