Optically coupled scanning tunneling microscope

Abstract

The utility model discloses a kind of optical coupling scanning tunnel microscopes, including mounting seat, optical lens being three-axis movably arranged on mounting seat, mounting ring being arranged on the top of mounting seat, scanning tunnel microscope body being hung below mounting ring by elastic member and suspending on mounting seat, magnetorheological damper mechanism being arranged on mounting seat and located below scanning tunnel microscope body;Scanning tunnel microscope body includes for inserting needle tip holder needle tip groove, for driving needle tip groove to move first driving mechanism, for inserting sample holder sample groove, for driving sample groove to move second driving mechanism, needle tip groove and sample groove are arranged along left and right direction interval;Needle tip holder includes scanning needle tip, optical lens is arranged in the side of scanning tunnel microscope body, optical lens is used to converge light to the tip of scanning needle tip just in front of front direction.The utility model optical coupling scanning tunnel microscope, optical coupling efficiency is higher, system stability is relatively better, and measurement efficiency is relatively higher.

Description

Technical Field

[0001] This utility model relates to the field of scanning tunneling microscope technology, and in particular to an optically coupled scanning tunneling microscope. Background Technology

[0002] Scanning tunneling microscopy (STM) is a high-resolution surface analysis tool, and its main applications include nano-optical spectroscopy, atomic-level light-matter interaction, characterization of optoelectronic materials, and light-controlled single-molecule and atomic manipulation.

[0003] Existing optically coupled scanning tunneling microscopes have the following problems:

[0004] Low optical coupling efficiency affects measurement efficiency;

[0005] Due to the influence of the external environment, the vibration of the scanning tunneling microscope body leads to relatively poor system stability, thus affecting measurement efficiency;

[0006] During optical coupling adjustment, the movement of the optical lens affects the stability of the scanning tunneling microscope, which is relatively poor due to the vibration of the microscope body, thus affecting the measurement efficiency. Utility Model Content

[0007] The purpose of this invention is to provide an optically coupled scanning tunneling microscope with high optical coupling efficiency, relatively good system stability, and relatively high measurement efficiency.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0009] An optically coupled scanning tunneling microscope includes a mounting base, an optical lens movably mounted on the mounting base in three axes, a mounting ring disposed above the mounting base, a scanning tunneling microscope body suspended from the mounting ring by an elastic element and suspended on the mounting base, and a magnetic damping mechanism disposed on the mounting base and located below the scanning tunneling microscope body.

[0010] The scanning tunneling microscope body includes a tip groove for inserting a tip holder, a first drive mechanism for driving the tip groove to move, a sample slot for inserting a sample holder, and a second drive mechanism for driving the sample slot to move. The tip groove and the sample slot are arranged at intervals in the left-right direction.

[0011] The needle tip holder includes a scanning needle tip, and the optical lens is disposed on the side of the scanning tunneling microscope body. The optical lens is used to focus light onto the tip of the scanning needle tip.

[0012] Preferably, there are multiple elastic elements, which are evenly spaced along the circumferential direction of the mounting ring.

[0013] More preferably, the optically coupled scanning tunneling microscope further includes a support column disposed on the mounting base for supporting the mounting ring, the support column being staggered from the elastic element in the circumferential direction.

[0014] Preferably, the optically coupled scanning tunneling microscope further includes a three-axis displacement stage disposed on the mounting base, and the optical lens is disposed on the top of the three-axis displacement stage.

[0015] Preferably, the tip groove is located on one side of the sample groove, and the scanning tunneling microscope body further includes a locking member located on the side of the sample groove opposite to the tip groove, for securing the sample holder against the sample groove.

[0016] More preferably, the sample holder and the locking member are both heat-conducting members.

[0017] Preferably, the magnetic damping mechanism includes a finned plate with a groove disposed in the mounting base and a magnet disposed in the groove.

[0018] More preferably, the fin plate is circular, and the groove is formed by radially indenting the outer circumferential surface of the fin plate. There are multiple grooves, and the multiple grooves are evenly spaced along the circumferential direction.

[0019] More preferably, the finned plate is made of copper.

[0020] More preferably, the optically coupled scanning tunneling microscope further includes a mounting plate disposed above the finned plate for supporting the optical lens.

[0021] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: The optically coupled scanning tunneling microscope of this utility model has the following advantages:

[0022] An optical lens that can move in three axes is set on the mounting base, which can focus light onto the front of the tip of the scanning probe, resulting in high optical coupling efficiency and relatively high measurement efficiency.

[0023] The scanning tunneling microscope body is elastically suspended below the mounting ring. The vibration of the scanning tunneling microscope body is converted into heat energy and dissipated quickly through the magnetic damping mechanism, which can improve the stability of the scanning tunneling microscope body and improve the measurement efficiency.

[0024] By placing the optical lens on the side of the scanning tunneling microscope body and elastically suspending the scanning tunneling microscope body only below the mounting ring, the vibration generated by the three-axis movement of the optical lens can be avoided from affecting the stability of the scanning tunneling microscope body, resulting in relatively better system stability and further improving measurement efficiency. Attached Figure Description

[0025] AppendixFigure 1 This is a schematic diagram of the structure of an optically coupled scanning tunneling microscope according to a specific embodiment of the present invention;

[0026] Appendix Figure 2 This is a side view of a specific embodiment of the optically coupled scanning tunneling microscope according to the present invention. Figure 1 ;

[0027] Appendix Figure 3 This is a side view of a specific embodiment of the optically coupled scanning tunneling microscope according to the present invention. Figure 2 ;

[0028] Appendix Figure 4 This is a top view of a specific embodiment of the optically coupled scanning tunneling microscope according to the present invention.

[0029] The components are as follows: 1. Mounting base; 2. Optical lens; 3. Mounting ring; 4. Elastic element; 5. Scanning tunneling microscope body; 51. Tip groove; 52. First drive mechanism; 53. Sample slot; 54. Second drive mechanism; 55. Locking element; 56. Tip holder; 57. Sample holder; 6. Magnetic damping mechanism; 61. Fin plate; 611. Groove; 62. Magnet; 7. Support column; 8. Three-axis displacement stage; 9. Mounting plate; 10. Sample. Detailed Implementation

[0030] The technical solution of this utility model will be further described below with reference to specific embodiments and accompanying drawings.

[0031] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0032] In the description of the embodiments of this utility model, it should be understood that the terms "length", "inner", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0034] In this embodiment of the invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this embodiment of the invention according to the specific circumstances.

[0035] In this embodiment of the invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0036] The following disclosure provides many different implementations or examples for different structures of the embodiments of the present invention. To simplify the disclosure of the embodiments of the present invention, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of the present invention. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of the present invention; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0037] See Figure 1-4 As shown, this embodiment provides an optically coupled scanning tunneling microscope, including a cylindrical mounting base 1, an optical lens 2 that is movably mounted on the mounting base 1 in three axes, a mounting ring 3 located above the mounting base 1, a scanning tunneling microscope body 5 suspended below the mounting ring 3 and mounted on the mounting base 1 by an elastic member 4, and a magnetic damping mechanism 6 located on the mounting base 1 and below the scanning tunneling microscope body 5.

[0038] This structure has the following advantages:

[0039] An optical lens 2 that can move along three axes is mounted on the mounting base 1, which can focus light onto the tip of the scanning stylus directly in front of it (i.e., Figure 2 (with the scanning probe tip pointing towards sample 10), the optical coupling efficiency is relatively high, resulting in relatively high measurement efficiency;

[0040] The scanning tunneling microscope body 5 is elastically suspended below the mounting ring 3. The vibration of the scanning tunneling microscope body 5 is converted into heat energy and dissipated rapidly through the magnetic damping mechanism 6, which can improve the stability of the scanning tunneling microscope body 5 and improve the measurement efficiency.

[0041] By placing the optical lens 2 on the side of the scanning tunneling microscope body 5 and elastically suspending the scanning tunneling microscope body 5 only below the mounting ring 3, the vibration generated by the three-axis movement of the optical lens 2 can be avoided from affecting the stability of the scanning tunneling microscope body 5, resulting in relatively good system stability and further improving measurement efficiency.

[0042] See Figure 1 As shown, the magnetic damping mechanism 6 includes a finned plate 61 with a groove 611 disposed in the mounting base 1, and a magnet 62 disposed in the groove 611. With this configuration, when external vibration is transmitted to the scanning tunneling microscope body 5, induced current and heat are generated by cutting magnetic field lines, which can convert the vibration of the scanning tunneling microscope body 5 into heat energy and dissipate it rapidly.

[0043] In this embodiment, the fin plate 61 is circular, and the groove 611 is formed by radially inward concavity of the outer circumferential surface of the fin plate 61. There are multiple grooves 611, and the multiple grooves 611 are evenly spaced along the circumferential direction. The fin plate 61 is made of copper material.

[0044] See Figure 4 As shown, the optically coupled scanning tunneling microscope also includes a mounting plate 9 disposed above the finned plate 61 and used to support the optical lens 2.

[0045] See Figure 2 As shown, the scanning tunneling microscope body 5 includes a tip groove 51 for inserting a tip holder 56, a first drive mechanism 52 for driving the tip groove 51 to move, a sample slot 53 for inserting a sample holder 57, and a second drive mechanism 54 for driving the sample slot 53 to move. The tip groove 51 and the sample slot 53 are arranged at intervals in the left-right direction. The first drive mechanism 52 and the second drive mechanism 54 are prior art and will not be described in detail here.

[0046] The tip holder 56 includes a scanning tip, and an optical lens 2 is located on the side of the scanning tunneling microscope body 5. The optical lens 2 is used to focus light onto the front of the tip of the scanning tip (the front refers to the front of the scanning tip along its length).

[0047] See Figure 3As shown, the optically coupled scanning tunneling microscope also includes a three-axis displacement stage 8 mounted on the mounting plate 9, and an optical lens 2 mounted on top of the three-axis displacement stage 8. The three-axis displacement stage 8 is used to adjust the optical lens 2 to move in the X, Y, and Z directions respectively, so as to focus the light to the front of the tip of the scanning needle. The sample 10 under the tunneling node is observed through the optical lens 2. The spatial resolution of the lens can reach the micrometer level, so that the scanning needle of the scanning tunneling microscope can be aligned with the tiny structure on the device, thereby scanning the electronic information on the micrometer-level spatial structure and expanding the experimental range of the scanning tunneling microscope.

[0048] In this embodiment, the elastic element 4 is a tension spring and there are multiple springs, which are evenly spaced along the circumferential direction of the mounting ring 3.

[0049] See Figure 1 As shown, the optically coupled scanning tunneling microscope also includes a support column 7 disposed on the mounting base 1 for supporting the mounting ring 3. The support column 7 and the elastic element 4 are staggered in the circumferential direction.

[0050] See Figure 2 As shown, the tip groove 51 is located on the left side of the sample groove 53. The scanning tunneling microscope body 5 also includes a locking member 55 located on the right side of the sample groove. The locking member 55 is used to press the sample holder 57 against the sample groove 53.

[0051] The sample groove 53 has open cutouts on both the left and right sides, with the left side open cutout to expose the sample 10. The locking member 55 includes a cam member (not shown in the figure) located on the right side of the sample groove 53. By rotating the locking member 55, the cam member can pass through the open cutout on the right side of the sample groove 53 to press the sample holder 57 against the left side of the sample groove 53.

[0052] In this embodiment, the sample holder 57, the locking member 55, and the cam member are all heat-conducting members. This setting can accelerate the cooling rate of the sample 10 and reduce the impact of thermal expansion on the scanning tip.

[0053] This optically coupled scanning tunneling microscope is compatible with both ultra-high vacuum and liquid helium cryogenic environments.

[0054] The working process of this embodiment is described in detail below:

[0055] During the experiment, the sample holder 57 is first inserted into the sample slot 53, and the sample slot 53 is driven to the target position by the second drive mechanism 54. Then, the locking part 55 is rotated to tighten the sample holder 57.

[0056] Next, the tip holder 56 is inserted into the tip groove 51, and the tip groove 51 is moved by the first drive mechanism 52 so that the scanning tip approaches the surface of the sample 10.

[0057] Finally, the position of the optical lens 2 is adjusted by the three-axis displacement stage 8 so that the light is focused directly in front of the tip of the scanning needle for observation.

[0058] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A light-coupled scanning tunneling microscope, characterized in that: It includes a mounting base, an optical lens that can be movably mounted on the mounting base in three axes, a mounting ring above the mounting base, a scanning tunneling microscope body suspended below the mounting ring and on the mounting base by an elastic element, and a magnetic damping mechanism on the mounting base and located below the scanning tunneling microscope body. The scanning tunneling microscope body includes a tip groove for inserting a tip holder, a first drive mechanism for driving the tip groove to move, a sample slot for inserting a sample holder, and a second drive mechanism for driving the sample slot to move. The tip groove and the sample slot are arranged at intervals in the left-right direction. The needle tip holder includes a scanning needle tip, and the optical lens is disposed on the side of the scanning tunneling microscope body. The optical lens is used to focus light onto the tip of the scanning needle tip.

2. The optically coupled scanning tunneling microscope according to claim 1, characterized in that: There are multiple elastic elements, which are evenly spaced along the circumferential direction of the mounting ring.

3. The optically coupled scanning tunneling microscope according to claim 2, characterized in that: The optically coupled scanning tunneling microscope also includes a support column disposed on the mounting base for supporting the mounting ring, the support column being staggered from the elastic element in the circumferential direction.

4. The optically coupled scanning tunneling microscope according to claim 1, characterized in that: The optically coupled scanning tunneling microscope also includes a three-axis displacement stage mounted on the mounting base, and the optical lens is located on top of the three-axis displacement stage.

5. The optically coupled scanning tunneling microscope according to claim 1, characterized in that: The tip groove is located on one side of the sample groove, and the scanning tunneling microscope body also includes a locking member located on the side of the sample groove opposite to the tip groove, which is used to press the sample holder against the sample groove.

6. The optically coupled scanning tunneling microscope according to claim 5, characterized in that: The sample holder and the locking element are both heat-conducting elements.

7. The optically coupled scanning tunneling microscope according to claim 1, characterized in that: The magnetic damping mechanism includes a finned plate with a groove disposed in the mounting base and a magnet disposed in the groove.

8. The optically coupled scanning tunneling microscope according to claim 7, characterized in that: The finned plate is circular, and the groove is formed by radial inward concavity of the outer circumferential surface of the finned plate. There are multiple grooves, and the multiple grooves are evenly spaced along the circumferential direction.

9. The optically coupled scanning tunneling microscope according to claim 7, characterized in that: The finned plate is made of copper.

10. The optically coupled scanning tunneling microscope according to claim 7, characterized in that: The optically coupled scanning tunneling microscope also includes a mounting plate disposed above the finned plate for supporting the optical lens.

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