Portable eight-inch wafer test probe station

Abstract

The utility model relates to the field of semiconductor device detection, specifically is portable eight inch wafer test probe platform, including base, the top fixedly connected with detection platform of base, the both sides of detection platform all are provided with protective cover, the inner chamber of base is provided with adjusting assembly, the surface of protective cover is provided with support assembly, adjusting assembly includes screw rod, the utility model discloses through setting adjusting assembly, only need to rotate the hand wheel in it can drive screw rod rotation, screw rod rotation can drive two protective cover and adjust, can protect detection platform through protective cover, the convenient carrying transportation of detection platform, through setting support assembly, can adjust the height of support plate and lifting frame according to need, in this way can adjust the use height of whole detection platform, conveniently eight inch wafer test probe platform uses in different topography, also conveniently different height and operation habit personnel uses eight inch wafer test probe platform.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device testing, specifically a portable eight-inch wafer test probe station. Background Technology

[0002] With the rapid development of technology, the application of semiconductor wafers is becoming increasingly diverse, and the application of wafer test probe stations is also gradually increasing. Wafer test probe stations are one of the important testing equipment in the semiconductor industry. They are widely used for precision electrical measurements of complex, high-speed devices, aiming to ensure device quality and reliability, and reduce R&D time and device manufacturing process costs. Eight-inch wafer test probe stations are indispensable precision testing equipment in semiconductor manufacturing and R&D. They are mainly used for electrical performance testing of 8-inch wafers, covering the entire process from R&D verification to mass production quality control.

[0003] Existing 8-inch wafer test probe stations suffer from poor protective performance during use. They cannot be actively protected during transportation, making them susceptible to dust accumulation and damage from collisions with external objects. Furthermore, the height of the probe station is not easily adjustable, hindering its use on various terrains and making it inconvenient for users of different heights and operating habits. Utility Model Content

[0004] To overcome the shortcomings of existing technologies and solve the problems of poor protection performance and inconvenient height adjustment of existing 8-inch wafer test probe stations, this utility model proposes a convenient 8-inch wafer test probe station.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a portable eight-inch wafer test probe station, including a base, a test station fixedly connected to the top of the base, protective covers on both sides of the test station, an adjustment component in the inner cavity of the base, and a support component on the surface of the protective cover.

[0006] The adjustment assembly includes a screw, one end of which is rotatably connected to the inner wall of the base. A threaded sleeve is threaded onto the surface of the screw. One end of the screw passes through the base and is fixedly connected to a handwheel. Movable sleeves are fixedly connected to both sides of the threaded sleeve. A movable block is fixedly connected to one side of the movable sleeve. An adjustment rod is fixedly connected to the top and bottom of the movable block. An adjustment shell is fitted onto the surface of the adjustment rod. One side of the adjustment shell passes through the base and is fixedly connected to a protective cover.

[0007] The support assembly includes two fixed shells, which are located on both sides of the protective cover. A lifting frame is slidably connected to the inner cavity of the fixed shell, and the bottom of the lifting frame extends through to the bottom of the fixed shell. A support plate is fixedly connected between the two lifting frames.

[0008] Preferably, a limiting box is fixedly connected to one side of the fixed shell, the surface of the limiting box is fixedly connected to the protective cover, a pull plate is provided in the inner cavity of the limiting box, a plug rod is fixedly connected to one side of the pull plate, and a number of slots are opened sequentially from top to bottom on one side of the lifting frame, and one end of the plug rod passes through the limiting box and the fixed shell in sequence and extends to the inner cavity of the slot.

[0009] Preferably, a pull rod is fixedly connected to the side of the pull plate away from the insertion rod, and one end of the pull rod extends through to the outside of the limiting box and is fixedly connected to an operating rod.

[0010] Preferably, a spring is fixedly connected to one side of the pull plate and to both the top and bottom of the pull rod, and one end of the spring is fixedly connected to the inner wall of the limiting box.

[0011] Preferably, the surface of the protective cover is rotatably connected to a handle via a rotating shaft, and the surface of the screw is rotatably connected to the base via a bearing.

[0012] Preferably, the inner cavity of the movable sleeve is slidably connected to a slide rod, both ends of which extend to the outer side of the movable sleeve and are fixedly connected to the inner wall of the base, and the surface of the adjusting rod is slidably connected to the inner wall of the adjusting shell.

[0013] Preferably, the base is fixedly connected to the front and rear sides with sliding blocks, and the protective cover cavity is provided with sliding grooves on the front and rear sides for use with the sliding blocks. The surface of the sliding block is slidably connected to the inner wall of the sliding groove.

[0014] The advantages of this utility model are:

[0015] This invention features an adjustment component; simply turning the handwheel drives the screw, which in turn adjusts two protective covers. These covers protect the testing station and facilitate its transport. A support component allows for adjustment of the support plate and lifting frame, thus regulating the overall height of the testing station. This makes the 8-inch wafer test probe station suitable for use on various terrains and for users of different heights and operating habits. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the adjustment component of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the protective cover of this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the support component of this utility model;

[0021] Figure 5 This is an exploded view of the support component of this utility model;

[0022] Figure 6 This is a cross-sectional view of the limiting box of this utility model.

[0023] In the diagram: 1. Base; 2. Testing platform; 3. Protective cover; 4. Adjustment assembly; 401. Screw; 402. Screw sleeve; 403. Handwheel; 404. Moving sleeve; 405. Moving block; 406. Adjustment rod; 407. Adjustment shell; 408. Slide rod; 5. Support assembly; 501. Fixed shell; 502. Lifting frame; 503. Support plate; 504. Limit box; 505. Pull plate; 506. Insert rod; 507. Slot; 508. Pull rod; 509. Operating rod; 510. Spring; 6. Sliding block; 7. Sliding groove; 8. Handle. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0025] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0026] This application discloses a convenient 8-inch wafer test probe station. (See also...) Figures 1-6A portable 8-inch wafer test probe station includes a base 1, a test station 2 fixedly connected to the top of the base 1, protective covers 3 on both sides of the test station 2, an adjustment component 4 in the inner cavity of the base 1, and a support component 5 on the surface of the protective cover 3.

[0027] The adjusting assembly 4 includes a screw 401, one end of which is rotatably connected to the inner wall of the base 1. A screw sleeve 402 is threaded onto the surface of the screw 401. One end of the screw 401 passes through the base 1 and is fixedly connected to a handwheel 403. Movable sleeves 404 are fixedly connected to both sides of the screw sleeve 402. A movable block 405 is fixedly connected to one side of the movable sleeve 404. An adjusting rod 406 is fixedly connected to the top and bottom of the movable block 405. An adjusting shell 407 is fitted onto the surface of the adjusting rod 406. One side of the adjusting shell 407 passes through the base 1 and is fixedly connected to the protective cover 3.

[0028] The support assembly 5 includes two fixed housings 501, which are located on both sides of the protective cover 3. A lifting frame 502 is slidably connected to the inner cavity of the fixed housing 501. The bottom of the lifting frame 502 extends through to the bottom of the fixed housing 501. A support plate 503 is fixedly connected between the two lifting frames 502. By setting the adjustment assembly 4, simply turning the handwheel 403 will drive the screw 401 to rotate. The rotation of the screw 401 can drive the two protective covers 3 to be adjusted. The protective covers 3 can protect the test station 2 and facilitate the carrying and transportation of the test station 2. By setting the support assembly 5, the height of the support plate 503 and the lifting frame 502 can be adjusted as needed, thereby adjusting the overall operating height of the test station 2. This makes it convenient for the 8-inch wafer test probe station to be used in different terrains and for personnel of different heights and operating habits to use the 8-inch wafer test probe station.

[0029] Reference Figure 1 , Figure 4 , Figure 5 and Figure 6A limiting box 504 is fixedly connected to one side of the fixed shell 501. The surface of the limiting box 504 is fixedly connected to the protective cover 3. A pull plate 505 is provided in the inner cavity of the limiting box 504. A plug rod 506 is fixedly connected to one side of the pull plate 505. Several slots 507 are sequentially opened from top to bottom on one side of the lifting frame 502. One end of the plug rod 506 passes through the limiting box 504 and the fixed shell 501 and extends into the inner cavity of the slot 507. A pull rod 508 is fixedly connected to the side of the pull plate 505 away from the plug rod 506. One end of the pull rod 508 passes through the limiting box 504 and the fixed shell 501. An operating lever 509 is fixedly connected to the outside of the positioning box 504. A spring 510 is fixedly connected to one side of the pull plate 505 at the top and bottom of the pull rod 508. One end of the spring 510 is fixedly connected to the inner wall of the positioning box 504. By setting the insertion rod 506, it can be inserted into the slot 507 to fix the lifting frame 502. By setting the operating lever 509, it is easy for the user to pull the pull rod 508. By setting the spring 510, the pull plate 505 will squeeze the spring 510 when it moves, and the spring 510 can facilitate the reset of the pull plate 505.

[0030] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 The protective cover 3 has a handle 8 rotatably connected to its surface via a pivot. The screw 401 is rotatably connected to the base 1 via a bearing. The inner cavity of the movable sleeve 404 is slidably connected to a slide rod 408, both ends of which extend to the outer side of the movable sleeve 404 and are fixedly connected to the inner wall of the base 1. The surface of the adjusting rod 406 is slidably connected to the inner wall of the adjusting shell 407. Sliding blocks 6 are fixedly connected to the front and rear sides of the base 1. The front and rear sides of the inner cavity of the protective cover 3 are provided with sliding grooves 7 that cooperate with the sliding blocks 6. The surface of the sliding blocks 6 is slidably connected to the inner wall of the sliding grooves 7. By providing the handle 8, the user can easily move the entire probe station. By providing the bearing, the screw 401 can be easily rotated. By providing the slide rod 408, the range of movement of the movable sleeve 404 can be limited, preventing the movable sleeve 404 from tilting during movement. By providing the sliding grooves 7, the sliding blocks 6 can be easily used. By providing the sliding blocks 6 and the sliding grooves 7, the range of movement of the protective cover 3 can be limited, improving the stability of the movement of the protective cover 3.

[0031] Working principle: When the user needs to adjust the protective cover 3, they can turn the handwheel 403. The handwheel 403 drives the screw 401 to rotate, which in turn drives the screw sleeve 402 to move for adjustment. When the screw sleeve 402 moves forward, it drives the adjusting rod 406 forward through the cooperation of the moving sleeve 404 and the moving block 405. The adjusting rod 406 drives the two adjusting shells 407 on both sides to move towards the middle. The adjusting shells 407 can drive the two protective covers 3 on both sides to move towards the middle for adjustment, thus closing the testing table 2 and facilitating subsequent movement of the testing table 2. When the screw sleeve 402 moves backward, it drives the adjusting rod 406 backward. The adjusting rod 406 drives the two adjusting shells 407 to move away from each other, and the adjusting shells 407 drive the two protective covers 3 to move away from each other, thus releasing the closure of the testing table 2 and facilitating subsequent use of the testing table 2. This allows for the adjustment of the entire testing table 2. When the height is adjusted, the two operating levers 509 can be pulled. The operating levers 509, in conjunction with the pull rod 508, drive the pull plate 505 to move and compress the spring 510. The pull plate 505 drives the insertion rod 506 to move out of the slot 507, which can release the restriction on the lifting frame 502. At this time, due to gravity, the support plate 503 and the lifting frame 502 will move downward. After adjusting to a suitable distance, the insertion rod 506 can be inserted into the slot 507 to fix the lifting frame 502 and the support plate 503. The height of the entire testing station 2 can be adjusted by adjusting the height of the lifting frame 502 and the support plate 503. The protective cover 3 can protect the testing station 2 and facilitate the carrying and transportation of the testing station 2. By setting the support component 5, the eight-inch wafer test probe station can be used in different terrains and is also convenient for people of different heights and operating habits to use the eight-inch wafer test probe station.

[0032] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A portable 8-inch wafer test probe station, including a base (1), characterized in that: The top of the base (1) is fixedly connected to a testing platform (2), and protective covers (3) are provided on both sides of the testing platform (2). An adjustment component (4) is provided in the inner cavity of the base (1), and a support component (5) is provided on the surface of the protective cover (3). The adjustment assembly (4) includes a screw (401), one end of which is rotatably connected to the inner wall of the base (1). A screw sleeve (402) is threaded onto the surface of the screw (401). One end of the screw (401) passes through the base (1) and is fixedly connected to a handwheel (403). Movable sleeves (404) are fixedly connected to both sides of the screw sleeve (402). A movable block (405) is fixedly connected to one side of the movable sleeve (404). An adjustment rod (406) is fixedly connected to the top and bottom of the movable block (405). An adjustment shell (407) is fitted onto the surface of the adjustment rod (406). One side of the adjustment shell (407) passes through the base (1) and is fixedly connected to the protective cover (3). The support assembly (5) includes two fixed shells (501), which are located on both sides of the protective cover (3). The inner cavity of the fixed shell (501) is slidably connected to a lifting frame (502), and the bottom of the lifting frame (502) extends through to the bottom of the fixed shell (501). A support plate (503) is fixedly connected between the two lifting frames (502).

2. The portable 8-inch wafer test probe station according to claim 1, characterized in that: A limiting box (504) is fixedly connected to one side of the fixed shell (501). The surface of the limiting box (504) is fixedly connected to the protective cover (3). A pull plate (505) is provided in the inner cavity of the limiting box (504). A plug rod (506) is fixedly connected to one side of the pull plate (505). A number of slots (507) are opened sequentially from top to bottom on one side of the lifting frame (502). One end of the plug rod (506) passes through the limiting box (504) and the fixed shell (501) in sequence and extends to the inner cavity of the slot (507).

3. The portable eight-inch wafer test probe station according to claim 2, characterized in that: A pull rod (508) is fixedly connected to the side of the pull plate (505) away from the insertion rod (506). One end of the pull rod (508) extends through to the outside of the limit box (504) and is fixedly connected to an operating rod (509).

4. The portable eight-inch wafer test probe station according to claim 3, characterized in that: A spring (510) is fixedly connected to one side of the pull plate (505) and to the top and bottom of the pull rod (508), and one end of the spring (510) is fixedly connected to the inner wall of the limiting box (504).

5. The portable eight-inch wafer test probe station according to claim 1, characterized in that: The surface of the protective cover (3) is rotatably connected to the handle (8) via a rotating shaft, and the surface of the screw (401) is rotatably connected to the base (1) via a bearing.

6. The portable 8-inch wafer test probe station according to claim 1, characterized in that: The inner cavity of the movable sleeve (404) is slidably connected to a slide rod (408). Both ends of the slide rod (408) extend to the outside of the movable sleeve (404) and are fixedly connected to the inner wall of the base (1). The surface of the adjusting rod (406) is slidably connected to the inner wall of the adjusting shell (407).

7. The portable eight-inch wafer test probe station according to claim 1, characterized in that: The base (1) is fixedly connected to the front and rear sides with sliding blocks (6), and the protective cover (3) has sliding grooves (7) on the front and rear sides of the inner cavity that cooperate with the sliding blocks (6). The surface of the sliding block (6) is slidably connected to the inner wall of the sliding groove (7).

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